{"id":"https://openalex.org/W2137819216","doi":"https://doi.org/10.1109/tcst.2013.2284923","title":"Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing","display_name":"Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing","publication_year":2013,"publication_date":"2013-11-19","ids":{"openalex":"https://openalex.org/W2137819216","doi":"https://doi.org/10.1109/tcst.2013.2284923","mag":"2137819216"},"language":"en","primary_location":{"id":"doi:10.1109/tcst.2013.2284923","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2013.2284923","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hal.science/hal-01303499","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019160451","display_name":"Micky Rakotondrabe","orcid":"https://orcid.org/0000-0002-6413-7271"},"institutions":[{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4407990293","https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Micky Rakotondrabe","raw_affiliation_strings":["Automatic Control and Micro-Mechatronic Systems Department, FEMTO-ST Institute, Besançon, France"],"affiliations":[{"raw_affiliation_string":"Automatic Control and Micro-Mechatronic Systems Department, FEMTO-ST Institute, Besançon, France","institution_ids":["https://openalex.org/I2802759292"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102830676","display_name":"Anthony G. Fowler","orcid":"https://orcid.org/0000-0002-5219-5781"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Anthony G. Fowler","raw_affiliation_strings":["Laboratory for Dynamics and Control of Nanosystems, School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, Australia"],"affiliations":[{"raw_affiliation_string":"Laboratory for Dynamics and Control of Nanosystems, School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, Australia","institution_ids":["https://openalex.org/I78757542"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061619957","display_name":"S. O. Reza Moheimani","orcid":"https://orcid.org/0000-0002-1225-4126"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"S. O. Reza Moheimani","raw_affiliation_strings":["Laboratory for Dynamics and Control of Nanosystems, School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, Australia"],"affiliations":[{"raw_affiliation_string":"Laboratory for Dynamics and Control of Nanosystems, School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, Australia","institution_ids":["https://openalex.org/I78757542"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5019160451"],"corresponding_institution_ids":["https://openalex.org/I2802759292"],"apc_list":null,"apc_paid":null,"fwci":3.5468,"has_fulltext":false,"cited_by_count":36,"citation_normalized_percentile":{"value":0.93415089,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"22","issue":"4","first_page":"1486","last_page":"1497"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8489633798599243},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.7502290606498718},{"id":"https://openalex.org/keywords/resistor","display_name":"Resistor","score":0.7156181335449219},{"id":"https://openalex.org/keywords/joule-heating","display_name":"Joule heating","score":0.648192822933197},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.578354001045227},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.5738390684127808},{"id":"https://openalex.org/keywords/coupling","display_name":"Coupling (piping)","score":0.5060290694236755},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.47732147574424744},{"id":"https://openalex.org/keywords/response-time","display_name":"Response time","score":0.47127196192741394},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.4602161645889282},{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.44686853885650635},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.42662274837493896},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3604435324668884},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3400123119354248},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2897132635116577},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.24563735723495483},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.2363339066505432},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.22497814893722534},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2229156494140625},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.17752981185913086},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16010475158691406},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.1208333671092987}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8489633798599243},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.7502290606498718},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.7156181335449219},{"id":"https://openalex.org/C117926987","wikidata":"https://www.wikidata.org/wiki/Q210009","display_name":"Joule heating","level":2,"score":0.648192822933197},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.578354001045227},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5738390684127808},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.5060290694236755},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.47732147574424744},{"id":"https://openalex.org/C19012869","wikidata":"https://www.wikidata.org/wiki/Q578372","display_name":"Response time","level":2,"score":0.47127196192741394},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.4602161645889282},{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.44686853885650635},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.42662274837493896},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3604435324668884},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3400123119354248},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2897132635116577},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.24563735723495483},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.2363339066505432},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.22497814893722534},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2229156494140625},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.17752981185913086},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16010475158691406},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.1208333671092987},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tcst.2013.2284923","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2013.2284923","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-01303499v1","is_oa":true,"landing_page_url":"https://hal.science/hal-01303499","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Transactions on Control Systems Technology, 2014, 22 (4), pp.1486-1497. ⟨10.1109/TCST.2013.2284923⟩","raw_type":"Journal articles"}],"best_oa_location":{"id":"pmh:oai:HAL:hal-01303499v1","is_oa":true,"landing_page_url":"https://hal.science/hal-01303499","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Transactions on Control Systems Technology, 2014, 22 (4), pp.1486-1497. ⟨10.1109/TCST.2013.2284923⟩","raw_type":"Journal articles"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320334704","display_name":"Australian Research Council","ror":"https://ror.org/05mmh0f86"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":31,"referenced_works":["https://openalex.org/W51527486","https://openalex.org/W201077724","https://openalex.org/W1980741479","https://openalex.org/W1996191407","https://openalex.org/W2021669167","https://openalex.org/W2027318685","https://openalex.org/W2034767287","https://openalex.org/W2041321145","https://openalex.org/W2041784070","https://openalex.org/W2043708915","https://openalex.org/W2049361014","https://openalex.org/W2056652050","https://openalex.org/W2066652629","https://openalex.org/W2084788745","https://openalex.org/W2090667824","https://openalex.org/W2091474803","https://openalex.org/W2096029551","https://openalex.org/W2100162433","https://openalex.org/W2102530718","https://openalex.org/W2103620228","https://openalex.org/W2108590820","https://openalex.org/W2120320989","https://openalex.org/W2125141152","https://openalex.org/W2141798972","https://openalex.org/W2143399365","https://openalex.org/W2152233205","https://openalex.org/W2155273325","https://openalex.org/W2158279816","https://openalex.org/W2162158227","https://openalex.org/W4234163810","https://openalex.org/W4255399105"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W3200817179","https://openalex.org/W1960166976","https://openalex.org/W2380067098","https://openalex.org/W1992708211","https://openalex.org/W2543503210","https://openalex.org/W1548152478","https://openalex.org/W2137172615","https://openalex.org/W2286391053","https://openalex.org/W2112564789"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"the":[3,28,34,92,95,104,121,139,151,155,163,166,172,175,182,185,190,193],"full":[4],"characterization,":[5],"modeling,":[6],"and":[7,21,39,48,53,123,143,158,169,174,188],"control":[8,135],"of":[9,94,111,115,120,141,154,184,192],"a":[10,109,127],"2-degrees-of-freedom":[11],"microelectromechanical":[12],"systems":[13],"(MEMS)":[14],"nanopositioner":[15,106],"with":[16,126],"fully":[17],"integrated":[18,56],"electrothermal":[19,46,57],"actuators":[20,29],"sensors.":[22],"Made":[23],"from":[24],"nickel":[25],"Z-shaped":[26],"beams,":[27],"are":[30,59,65],"able":[31],"to":[32,43,71,149,161,170],"move":[33],"device's":[35],"stage":[36,78],"in":[37,85,113,159],"positive":[38],"negative":[40],"directions":[41],"(contrary":[42],"classical":[44],"V-shaped":[45],"actuators)":[47],"along":[49],"two":[50,167],"axes":[51,168],"(x":[52],"y).":[54],"The":[55,77,97,178],"sensors":[58],"based":[60,137],"on":[61,91,138],"polysilicon":[62],"resistors,":[63],"which":[64,88],"heated":[66],"via":[67],"Joule":[68],"heating":[69],"due":[70],"an":[72],"applied":[73],"electrical":[74],"bias":[75],"voltage.":[76],"displacement":[79,112],"is":[80,89,147],"effectively":[81],"measured":[82],"by":[83],"variations":[84],"their":[86],"resistance,":[87],"dependent":[90],"position":[93],"stage.":[96],"characterization":[98],"tests":[99],"carried":[100],"out":[101],"show":[102],"that":[103],"MEMS":[105,156],"can":[107],"achieve":[108],"range":[110],"excess":[114],"\u00b15":[116],"\u03bcm":[117],"for":[118,196],"each":[119],"x":[122],"y":[124],"axes,":[125],"response":[128,176],"time":[129],"better":[130],"than":[131],"300":[132],"ms.":[133],"A":[134],"scheme":[136,187],"combination":[140],"feedforward":[142],"internal":[144],"model":[145],"control-feedback":[146],"constructed":[148],"enhance":[150,171],"general":[152],"performance":[153],"device,":[157],"particular":[160],"reject":[162],"cross-coupling":[164],"between":[165],"accuracy":[173],"time.":[177],"experimental":[179],"results":[180],"demonstrate":[181,189],"efficiency":[183],"proposed":[186],"suitability":[191],"designed":[194],"device":[195],"nanopositioning":[197],"applications.":[198]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":8},{"year":2014,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}