{"id":"https://openalex.org/W2135604982","doi":"https://doi.org/10.1109/tcst.2009.2012519","title":"A Modified Moving Horizon Estimator for <i>In Situ</i> Sensing of a Chemical Vapor Deposition Process","display_name":"A Modified Moving Horizon Estimator for <i>In Situ</i> Sensing of a Chemical Vapor Deposition Process","publication_year":2009,"publication_date":"2009-06-10","ids":{"openalex":"https://openalex.org/W2135604982","doi":"https://doi.org/10.1109/tcst.2009.2012519","mag":"2135604982"},"language":"en","primary_location":{"id":"doi:10.1109/tcst.2009.2012519","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2009.2012519","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5058656153","display_name":"Martha A. Grover","orcid":"https://orcid.org/0000-0002-7036-776X"},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M.A. Grover","raw_affiliation_strings":["School of Chemical and Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA, USA","Sch. of Chem. & Biomol. Eng., Georgia Inst. of Technol., Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Chemical and Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Sch. of Chem. & Biomol. Eng., Georgia Inst. of Technol., Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5006328497","display_name":"Rentian Xiong","orcid":null},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Rentian Xiong","raw_affiliation_strings":["School of Chemical and Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA, USA","Sch. of Chem. & Biomol. Eng., Georgia Inst. of Technol., Atlanta, GA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Chemical and Biomolecular Engineering, Georgia Institute of Technology, Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Sch. of Chem. & Biomol. Eng., Georgia Inst. of Technol., Atlanta, GA, USA","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":null,"apc_paid":null,"fwci":0.5695,"has_fulltext":false,"cited_by_count":18,"citation_normalized_percentile":{"value":0.68319775,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"17","issue":"5","first_page":"1228","last_page":"1235"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9947999715805054,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9947999715805054,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12050","display_name":"Optical Polarization and Ellipsometry","score":0.9882000088691711,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9868000149726868,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/estimator","display_name":"Estimator","score":0.6760167479515076},{"id":"https://openalex.org/keywords/extended-kalman-filter","display_name":"Extended Kalman filter","score":0.591310977935791},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.42112842202186584},{"id":"https://openalex.org/keywords/kalman-filter","display_name":"Kalman filter","score":0.41492778062820435},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4128718078136444},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3554435968399048},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.333244651556015},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3196195363998413},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.3148336112499237},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.2189311981201172},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.2042994201183319},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.12012898921966553},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.1017008125782013},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.09598809480667114}],"concepts":[{"id":"https://openalex.org/C185429906","wikidata":"https://www.wikidata.org/wiki/Q1130160","display_name":"Estimator","level":2,"score":0.6760167479515076},{"id":"https://openalex.org/C206833254","wikidata":"https://www.wikidata.org/wiki/Q5421817","display_name":"Extended Kalman filter","level":3,"score":0.591310977935791},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.42112842202186584},{"id":"https://openalex.org/C157286648","wikidata":"https://www.wikidata.org/wiki/Q846780","display_name":"Kalman filter","level":2,"score":0.41492778062820435},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4128718078136444},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3554435968399048},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.333244651556015},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3196195363998413},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3148336112499237},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2189311981201172},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.2042994201183319},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.12012898921966553},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.1017008125782013},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.09598809480667114},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcst.2009.2012519","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2009.2012519","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321672","display_name":"Else Kr\u00f6ner-Fresenius-Stiftung","ror":"https://ror.org/03zcxha54"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W202526285","https://openalex.org/W1979397344","https://openalex.org/W1979415899","https://openalex.org/W1981726496","https://openalex.org/W1990436232","https://openalex.org/W2001032922","https://openalex.org/W2006644469","https://openalex.org/W2017273309","https://openalex.org/W2033498488","https://openalex.org/W2050372511","https://openalex.org/W2056234821","https://openalex.org/W2057184806","https://openalex.org/W2070537908","https://openalex.org/W2094507953","https://openalex.org/W2104289457","https://openalex.org/W2129276668","https://openalex.org/W2165243626","https://openalex.org/W2170830375"],"related_works":["https://openalex.org/W2089114113","https://openalex.org/W2389555968","https://openalex.org/W2352634297","https://openalex.org/W2320550378","https://openalex.org/W80107739","https://openalex.org/W2020144404","https://openalex.org/W4287880334","https://openalex.org/W4372347353","https://openalex.org/W2103062922","https://openalex.org/W2162299404"],"abstract_inverted_index":{"A":[0,57],"modified":[1],"moving":[2,53],"horizon":[3,54,117],"estimator":[4,46,55],"(mMHE)":[5],"was":[6,65,112,138,164,185],"developed":[7],"to":[8,70,115,131,192],"estimate":[9,184],"thin":[10,162],"film":[11,163],"thickness,":[12],"growth":[13,63],"rate,":[14],"and":[15,48,78,136,146,182,189,195],"refractive":[16],"indices":[17],"<i":[18,97,171],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[19,98,172],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">in":[20],"situ</i>":[21,174],"from":[22],"a":[23,68,159,167,179],"dual-wavelength":[24],"reflectance":[25],"measurement":[26],"during":[27],"chemical":[28,154],"vapor":[29,155],"deposition.":[30],"In":[31,125],"this":[32],"application,":[33],"mMHE":[34,88,109,127],"combines":[35],"the":[36,42,49,52,72,79,103,116,193],"advantage":[37],"of":[38,41,51,74,108,118],"high":[39],"speed":[40],"recursive":[43],"least":[44],"squares":[45],"(RLS)":[47],"accuracy":[50,107,130],"(MHE).":[56],"simulated":[58],"deposition":[59,156],"process":[60],"with":[61],"drifting":[62],"rate":[64],"used":[66,120],"as":[67],"benchmark":[69],"compare":[71],"performance":[73],"RLS,":[75,143],"MHE,":[76,144],"mMHE,":[77,145,190],"extended":[80],"Kalman":[81],"filter":[82],"(EKF).":[83],"The":[84,170],"results":[85],"indicate":[86],"that":[87,178],"yields":[89],"more":[90,180],"accurate":[91,181],"estimates":[92,101],"than":[93,141],"RLS":[94,194],"by":[95,187],"incorporating":[96],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">a":[99],"priori</i>":[100],"in":[102],"optimization":[104],"function.":[105],"Improved":[106],"over":[110],"EKF":[111,147,196],"obtained":[113,186],"due":[114],"data":[119],"at":[121],"each":[122],"time":[123],"step.":[124],"addition,":[126],"provided":[128],"similar":[129],"MHE":[132,188],"for":[133],"short":[134],"horizons,":[135],"it":[137],"much":[139],"faster":[140],"MHE.":[142],"were":[148],"also":[149],"compared":[150,191],"on":[151,166],"an":[152],"experimental":[153],"system":[157],"where":[158],"yttrium":[160],"oxide":[161],"deposited":[165],"silicon":[168],"substrate.":[169],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">ex":[173],"ellipsometry":[175],"characterization":[176],"indicated":[177],"robust":[183],"estimates.":[197]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}