{"id":"https://openalex.org/W2096621538","doi":"https://doi.org/10.1109/tcst.2008.2004788","title":"Control Strategy for a Low Cost Manipulator to Transport and Align IC Mask-Plates","display_name":"Control Strategy for a Low Cost Manipulator to Transport and Align IC Mask-Plates","publication_year":2009,"publication_date":"2009-04-15","ids":{"openalex":"https://openalex.org/W2096621538","doi":"https://doi.org/10.1109/tcst.2008.2004788","mag":"2096621538"},"language":"en","primary_location":{"id":"doi:10.1109/tcst.2008.2004788","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2008.2004788","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100420053","display_name":"Jianhua Wang","orcid":"https://orcid.org/0000-0003-2175-3610"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210085980","display_name":"Beijing Institute of Aeronautical Materials","ror":"https://ror.org/0099j7t54","country_code":"CN","type":"education","lineage":["https://openalex.org/I11838497","https://openalex.org/I4210085980"]},{"id":"https://openalex.org/I4210112150","display_name":"Institute of Automation","ror":"https://ror.org/022c3hy66","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210112150"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jianhua Wang","raw_affiliation_strings":["Beijing Institute of Aeronautical Engineering, Beijing, China","Chinese Academy of Sciences, Institute of Automation, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beijing Institute of Aeronautical Engineering, Beijing, China","institution_ids":["https://openalex.org/I4210085980"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Institute of Automation, Beijing, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210112150"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111554769","display_name":"De Xu","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210112150","display_name":"Institute of Automation","ror":"https://ror.org/022c3hy66","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210112150"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"De Xu","raw_affiliation_strings":["Chinese Academy of Sciences, Institute of Automation, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Institute of Automation, Beijing, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210112150"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024708104","display_name":"Min Tan","orcid":"https://orcid.org/0000-0002-1986-8438"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210112150","display_name":"Institute of Automation","ror":"https://ror.org/022c3hy66","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210112150"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Min Tan","raw_affiliation_strings":["Chinese Academy of Sciences, Institute of Automation, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Institute of Automation, Beijing, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210112150"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054200960","display_name":"Yun Liu","orcid":"https://orcid.org/0000-0002-1370-4467"},"institutions":[{"id":"https://openalex.org/I161346416","display_name":"Jimei University","ror":"https://ror.org/03hknyb50","country_code":"CN","type":"education","lineage":["https://openalex.org/I161346416"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210112150","display_name":"Institute of Automation","ror":"https://ror.org/022c3hy66","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210112150"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yun Liu","raw_affiliation_strings":["Chinese Academy of Sciences, Institute of Automation, Beijing, China","School of Marine Engineering, Jimei University, Xiamen, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chinese Academy of Sciences, Institute of Automation, Beijing, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210112150"]},{"raw_affiliation_string":"School of Marine Engineering, Jimei University, Xiamen, China","institution_ids":["https://openalex.org/I161346416"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.3921,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.65870103,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"17","issue":"5","first_page":"1018","last_page":"1027"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6473371982574463},{"id":"https://openalex.org/keywords/servomotor","display_name":"Servomotor","score":0.5655548572540283},{"id":"https://openalex.org/keywords/control-system","display_name":"Control system","score":0.5051820874214172},{"id":"https://openalex.org/keywords/rotation","display_name":"Rotation (mathematics)","score":0.49298760294914246},{"id":"https://openalex.org/keywords/loop","display_name":"Loop (graph theory)","score":0.4761072099208832},{"id":"https://openalex.org/keywords/open-loop-controller","display_name":"Open-loop controller","score":0.4710010588169098},{"id":"https://openalex.org/keywords/servo","display_name":"Servo","score":0.46763327717781067},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4641273021697998},{"id":"https://openalex.org/keywords/translation","display_name":"Translation (biology)","score":0.4333343207836151},{"id":"https://openalex.org/keywords/servomechanism","display_name":"Servomechanism","score":0.42293959856033325},{"id":"https://openalex.org/keywords/dc-motor","display_name":"DC motor","score":0.4172573387622833},{"id":"https://openalex.org/keywords/detector","display_name":"Detector","score":0.4133187532424927},{"id":"https://openalex.org/keywords/servo-control","display_name":"Servo control","score":0.4131016135215759},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.4117436408996582},{"id":"https://openalex.org/keywords/feedback-loop","display_name":"Feedback loop","score":0.4104253351688385},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.37237459421157837},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.34094300866127014},{"id":"https://openalex.org/keywords/closed-loop","display_name":"Closed loop","score":0.18129533529281616},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.1510971188545227},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.14194971323013306},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.11461392045021057},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.08046871423721313}],"concepts":[{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6473371982574463},{"id":"https://openalex.org/C109441226","wikidata":"https://www.wikidata.org/wiki/Q1137255","display_name":"Servomotor","level":2,"score":0.5655548572540283},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.5051820874214172},{"id":"https://openalex.org/C74050887","wikidata":"https://www.wikidata.org/wiki/Q848368","display_name":"Rotation (mathematics)","level":2,"score":0.49298760294914246},{"id":"https://openalex.org/C184670325","wikidata":"https://www.wikidata.org/wiki/Q512604","display_name":"Loop (graph theory)","level":2,"score":0.4761072099208832},{"id":"https://openalex.org/C161362739","wikidata":"https://www.wikidata.org/wiki/Q2301555","display_name":"Open-loop controller","level":3,"score":0.4710010588169098},{"id":"https://openalex.org/C107354338","wikidata":"https://www.wikidata.org/wiki/Q1937153","display_name":"Servo","level":2,"score":0.46763327717781067},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4641273021697998},{"id":"https://openalex.org/C149364088","wikidata":"https://www.wikidata.org/wiki/Q185917","display_name":"Translation (biology)","level":4,"score":0.4333343207836151},{"id":"https://openalex.org/C49503481","wikidata":"https://www.wikidata.org/wiki/Q640815","display_name":"Servomechanism","level":2,"score":0.42293959856033325},{"id":"https://openalex.org/C76684090","wikidata":"https://www.wikidata.org/wiki/Q3842034","display_name":"DC motor","level":2,"score":0.4172573387622833},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.4133187532424927},{"id":"https://openalex.org/C32731416","wikidata":"https://www.wikidata.org/wiki/Q7455930","display_name":"Servo control","level":3,"score":0.4131016135215759},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.4117436408996582},{"id":"https://openalex.org/C186886427","wikidata":"https://www.wikidata.org/wiki/Q5441213","display_name":"Feedback loop","level":2,"score":0.4104253351688385},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.37237459421157837},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.34094300866127014},{"id":"https://openalex.org/C3019251811","wikidata":"https://www.wikidata.org/wiki/Q5135346","display_name":"Closed loop","level":2,"score":0.18129533529281616},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.1510971188545227},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.14194971323013306},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11461392045021057},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.08046871423721313},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0},{"id":"https://openalex.org/C38652104","wikidata":"https://www.wikidata.org/wiki/Q3510521","display_name":"Computer security","level":1,"score":0.0},{"id":"https://openalex.org/C105580179","wikidata":"https://www.wikidata.org/wiki/Q188928","display_name":"Messenger RNA","level":3,"score":0.0},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C114614502","wikidata":"https://www.wikidata.org/wiki/Q76592","display_name":"Combinatorics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcst.2008.2004788","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2008.2004788","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320322392","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1927614127","https://openalex.org/W1979726617","https://openalex.org/W1993894472","https://openalex.org/W2007522931","https://openalex.org/W2025994890","https://openalex.org/W2037170576","https://openalex.org/W2038585776","https://openalex.org/W2062776271","https://openalex.org/W2099976402","https://openalex.org/W2108936710","https://openalex.org/W2131580280","https://openalex.org/W2134210583","https://openalex.org/W2152029393","https://openalex.org/W2154178223","https://openalex.org/W2156768842","https://openalex.org/W2163252428","https://openalex.org/W2170296111","https://openalex.org/W2469860497","https://openalex.org/W2532681468","https://openalex.org/W4238315022","https://openalex.org/W6659583990"],"related_works":["https://openalex.org/W2115261773","https://openalex.org/W2021648837","https://openalex.org/W2360279824","https://openalex.org/W2382504547","https://openalex.org/W2360974923","https://openalex.org/W2390932705","https://openalex.org/W2368059378","https://openalex.org/W2356583413","https://openalex.org/W2045478930","https://openalex.org/W2100370479"],"abstract_inverted_index":{"A":[0],"4-DOF":[1],"manipulator":[2,31],"is":[3,24,32,44,51,66,73,102,111],"developed":[4],"to":[5,38,117],"carry":[6],"mask-plates":[7],"of":[8,99,121],"integrated-circuit":[9],"lithography.":[10],"Its":[11],"three":[12,78],"translation":[13],"axes":[14],"are":[15,91],"driven":[16,25],"with":[17,26,34,55,77,93],"servo":[18],"motors,":[19],"and":[20,62,85,104,126],"its":[21],"rotation":[22],"axis":[23],"a":[27,35,52,74,105],"step":[28],"motor.":[29],"The":[30,88,97],"controlled":[33],"programmable":[36],"controller":[37],"execute":[39],"two":[40,56,94],"movement":[41],"categories.":[42],"One":[43],"the":[45,67,100,119,122],"transport":[46],"in":[47,69],"large":[48],"range,":[49,71],"which":[50,72],"feedback":[53,75],"system":[54,76,125],"loops":[57,79],"such":[58],"as":[59],"position":[60,83],"loop":[61],"velocity":[63,86],"loop.":[64,87],"Another":[65],"alignment":[68,110],"small":[70],"including":[80],"aligning":[81,89],"loop,":[82,84],"errors":[90],"measured":[92],"four-quadrant":[95],"photodetectors.":[96],"property":[98],"detectors":[101],"investigated,":[103],"novel":[106],"control":[107,124],"strategy":[108],"for":[109],"proposed.":[112],"Experiments":[113],"were":[114],"well":[115],"conducted":[116],"verify":[118],"effectiveness":[120],"proposed":[123],"algorithms.":[127]},"counts_by_year":[{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":3},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}