{"id":"https://openalex.org/W4385820032","doi":"https://doi.org/10.1109/tcsii.2023.3304636","title":"High Power-Efficiency Readout Circuit for MEMS Capacitive Accelerometer","display_name":"High Power-Efficiency Readout Circuit for MEMS Capacitive Accelerometer","publication_year":2023,"publication_date":"2023-08-14","ids":{"openalex":"https://openalex.org/W4385820032","doi":"https://doi.org/10.1109/tcsii.2023.3304636"},"language":"en","primary_location":{"id":"doi:10.1109/tcsii.2023.3304636","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcsii.2023.3304636","pdf_url":null,"source":{"id":"https://openalex.org/S93916849","display_name":"IEEE Transactions on Circuits & Systems II Express Briefs","issn_l":"1549-7747","issn":["1549-7747","1558-3791"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Circuits and Systems II: Express Briefs","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065838718","display_name":"Longjie Zhong","orcid":"https://orcid.org/0000-0002-5707-5869"},"institutions":[{"id":"https://openalex.org/I149594827","display_name":"Xidian University","ror":"https://ror.org/05s92vm98","country_code":"CN","type":"education","lineage":["https://openalex.org/I149594827"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Longjie Zhong","raw_affiliation_strings":["Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I149594827"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027625592","display_name":"Leyang Xue","orcid":null},"institutions":[{"id":"https://openalex.org/I149594827","display_name":"Xidian University","ror":"https://ror.org/05s92vm98","country_code":"CN","type":"education","lineage":["https://openalex.org/I149594827"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Leyang Xue","raw_affiliation_strings":["Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I149594827"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100590661","display_name":"Xiangyi Deng","orcid":"https://orcid.org/0009-0007-9659-8586"},"institutions":[{"id":"https://openalex.org/I149594827","display_name":"Xidian University","ror":"https://ror.org/05s92vm98","country_code":"CN","type":"education","lineage":["https://openalex.org/I149594827"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiangyi Deng","raw_affiliation_strings":["Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I149594827"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100635138","display_name":"Shubin Liu","orcid":"https://orcid.org/0000-0002-9942-0069"},"institutions":[{"id":"https://openalex.org/I149594827","display_name":"Xidian University","ror":"https://ror.org/05s92vm98","country_code":"CN","type":"education","lineage":["https://openalex.org/I149594827"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shubin Liu","raw_affiliation_strings":["Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I149594827"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5039575274","display_name":"Zhangming Zhu","orcid":"https://orcid.org/0000-0002-7764-1928"},"institutions":[{"id":"https://openalex.org/I149594827","display_name":"Xidian University","ror":"https://ror.org/05s92vm98","country_code":"CN","type":"education","lineage":["https://openalex.org/I149594827"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhangming Zhu","raw_affiliation_strings":["Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"Shaanxi Key Laboratory of Integrated Circuits and Systems, School of Microelectronics, Xidian University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I149594827"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5065838718"],"corresponding_institution_ids":["https://openalex.org/I149594827"],"apc_list":null,"apc_paid":null,"fwci":1.3404,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.80643159,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"71","issue":"1","first_page":"76","last_page":"80"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7227646112442017},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6589577794075012},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6526687145233154},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.6290709972381592},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5156994462013245},{"id":"https://openalex.org/keywords/battery","display_name":"Battery (electricity)","score":0.4767604470252991},{"id":"https://openalex.org/keywords/power-consumption","display_name":"Power consumption","score":0.4685826003551483},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.46540147066116333},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.42193931341171265},{"id":"https://openalex.org/keywords/wearable-computer","display_name":"Wearable computer","score":0.41138288378715515},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.4031211733818054},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.4031016528606415},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.25656288862228394},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.10514304041862488},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.10327741503715515},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.07717716693878174}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7227646112442017},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6589577794075012},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6526687145233154},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.6290709972381592},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5156994462013245},{"id":"https://openalex.org/C555008776","wikidata":"https://www.wikidata.org/wiki/Q267298","display_name":"Battery (electricity)","level":3,"score":0.4767604470252991},{"id":"https://openalex.org/C2984118289","wikidata":"https://www.wikidata.org/wiki/Q29954","display_name":"Power consumption","level":3,"score":0.4685826003551483},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.46540147066116333},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.42193931341171265},{"id":"https://openalex.org/C150594956","wikidata":"https://www.wikidata.org/wiki/Q1334829","display_name":"Wearable computer","level":2,"score":0.41138288378715515},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.4031211733818054},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4031016528606415},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.25656288862228394},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.10514304041862488},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10327741503715515},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.07717716693878174},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcsii.2023.3304636","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcsii.2023.3304636","pdf_url":null,"source":{"id":"https://openalex.org/S93916849","display_name":"IEEE Transactions on Circuits & Systems II Express Briefs","issn_l":"1549-7747","issn":["1549-7747","1558-3791"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Circuits and Systems II: Express Briefs","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.6000000238418579}],"awards":[{"id":"https://openalex.org/G2320218852","display_name":null,"funder_award_id":"62021004","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4638878906","display_name":null,"funder_award_id":"62004035","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7198217110","display_name":null,"funder_award_id":"62022065","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7234679820","display_name":null,"funder_award_id":"92164301","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W1581627921","https://openalex.org/W1986018212","https://openalex.org/W2153265319","https://openalex.org/W2753555934","https://openalex.org/W2774028784","https://openalex.org/W2784133938","https://openalex.org/W2801648420","https://openalex.org/W2898819831","https://openalex.org/W2920855336","https://openalex.org/W2991529885","https://openalex.org/W3024162427","https://openalex.org/W3040689349","https://openalex.org/W3192454168","https://openalex.org/W4286571885","https://openalex.org/W4288059550","https://openalex.org/W4293421390","https://openalex.org/W4294691341","https://openalex.org/W4319996365"],"related_works":["https://openalex.org/W2765080098","https://openalex.org/W2385749422","https://openalex.org/W3161496874","https://openalex.org/W2160325238","https://openalex.org/W2902633157","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2502505565","https://openalex.org/W756886103","https://openalex.org/W2053577253"],"abstract_inverted_index":{"MEMS":[0],"capacitive":[1],"accelerometers":[2],"play":[3],"a":[4,8],"fundamental":[5],"role":[6],"in":[7,61,131,139],"wide":[9],"range":[10],"of":[11,17,51,126],"monitoring":[12],"systems":[13],"for":[14,111],"the":[15,44,47,100,104,112,123,136,140],"Internet":[16],"Things":[18],"(IoT)":[19],"applications.":[20],"In":[21,53],"these":[22,117,127],"applications,":[23],"sensors":[24],"are":[25,107],"powered":[26],"by":[27,79,86,93],"battery,":[28],"therefore":[29],"high":[30,40,63,90],"power-efficiency":[31,64],"is":[32,50],"required":[33,78,85,92],"to":[34,115],"extend":[35],"battery":[36],"life.":[37],"To":[38],"promote":[39],"efficiency":[41],"design":[42],"technique,":[43],"innovation":[45],"on":[46],"readout":[48,65,113,129],"circuit":[49,66,114],"significance.":[52],"recent":[54,132],"years,":[55],"there":[56],"has":[57],"been":[58],"growing":[59],"interest":[60],"developing":[62],"with":[67],"specific":[68],"performances,":[69],"such":[70],"as":[71],"low":[72,82],"power":[73],"consumption":[74],"and":[75,89,103,134],"compact":[76],"area":[77],"wearable":[80],"devices,":[81],"noise":[83],"floor":[84],"industrial":[87],"instrument":[88],"bandwidth":[91],"vibration":[94],"monitoring.":[95],"The":[96],"force":[97],"feedback":[98],"structure,":[99],"voltage-controlled":[101],"structure":[102,106],"charge-balanced":[105],"three":[108,128],"important":[109,124],"structures":[110,130],"meet":[116],"performance":[118],"requirements.":[119],"This":[120],"brief":[121],"presents":[122],"progresses":[125],"years":[133],"summarizes":[135],"development":[137],"trends":[138],"future.":[141]},"counts_by_year":[{"year":2025,"cited_by_count":7},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
