{"id":"https://openalex.org/W4407937898","doi":"https://doi.org/10.1109/tcad.2025.3546195","title":"Study of 3-D Line Edge Roughness (LER) in Vertical Channel Array Transistor for DRAM","display_name":"Study of 3-D Line Edge Roughness (LER) in Vertical Channel Array Transistor for DRAM","publication_year":2025,"publication_date":"2025-02-25","ids":{"openalex":"https://openalex.org/W4407937898","doi":"https://doi.org/10.1109/tcad.2025.3546195"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.2025.3546195","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2025.3546195","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5050511621","display_name":"Jaehyuk Lim","orcid":"https://orcid.org/0000-0003-1636-8865"},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jaehyuk Lim","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea"],"raw_orcid":"https://orcid.org/0000-0003-1636-8865","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","institution_ids":["https://openalex.org/I848706"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070892078","display_name":"Seokchan Yoon","orcid":"https://orcid.org/0000-0003-4139-9778"},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Seokchan Yoon","raw_affiliation_strings":["School of Electrical Engineering, Korea University, Seoul, South Korea","School of Electrical Engineering, Korea University, Seoul, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Korea University, Seoul, South Korea","institution_ids":["https://openalex.org/I197347611"]},{"raw_affiliation_string":"School of Electrical Engineering, Korea University, Seoul, Korea","institution_ids":["https://openalex.org/I197347611"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091544725","display_name":"Juho Sung","orcid":"https://orcid.org/0009-0007-5629-5978"},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Juho Sung","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea"],"raw_orcid":"https://orcid.org/0009-0007-5629-5978","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","institution_ids":["https://openalex.org/I848706"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084231601","display_name":"Sanghyun Kang","orcid":"https://orcid.org/0009-0007-4782-863X"},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sanghyun Kang","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea"],"raw_orcid":"https://orcid.org/0009-0007-4782-863X","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","institution_ids":["https://openalex.org/I848706"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084109807","display_name":"Gwon Kim","orcid":"https://orcid.org/0000-0002-5488-9314"},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Gwon Kim","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea"],"raw_orcid":"https://orcid.org/0000-0002-5488-9314","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","institution_ids":["https://openalex.org/I848706"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010353613","display_name":"Hyoung Won Baac","orcid":"https://orcid.org/0000-0001-9295-6162"},"institutions":[{"id":"https://openalex.org/I848706","display_name":"Sungkyunkwan University","ror":"https://ror.org/04q78tk20","country_code":"KR","type":"education","lineage":["https://openalex.org/I848706"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyoung Won Baac","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea"],"raw_orcid":"https://orcid.org/0000-0001-9295-6162","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, South Korea","institution_ids":["https://openalex.org/I848706"]},{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon, Korea","institution_ids":["https://openalex.org/I848706"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5039545794","display_name":"Changhwan Shin","orcid":"https://orcid.org/0000-0001-6057-3773"},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Changhwan Shin","raw_affiliation_strings":["School of Electrical Engineering, Korea University, Seoul, South Korea","School of Electrical Engineering, Korea University, Seoul, Korea"],"raw_orcid":"https://orcid.org/0000-0001-6057-3773","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Korea University, Seoul, South Korea","institution_ids":["https://openalex.org/I197347611"]},{"raw_affiliation_string":"School of Electrical Engineering, Korea University, Seoul, Korea","institution_ids":["https://openalex.org/I197347611"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.5025,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.62254318,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":"44","issue":"9","first_page":"3571","last_page":"3580"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9929999709129333,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9923999905586243,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dram","display_name":"Dram","score":0.894761860370636},{"id":"https://openalex.org/keywords/channel","display_name":"Channel (broadcasting)","score":0.5998969674110413},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.5637140870094299},{"id":"https://openalex.org/keywords/enhanced-data-rates-for-gsm-evolution","display_name":"Enhanced Data Rates for GSM Evolution","score":0.5586258769035339},{"id":"https://openalex.org/keywords/line","display_name":"Line (geometry)","score":0.5557754635810852},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.41186216473579407},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3753736615180969},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.36735230684280396},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3125351369380951},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2159700095653534},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.1539149284362793},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.12902125716209412},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.07598909735679626},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.07424774765968323}],"concepts":[{"id":"https://openalex.org/C7366592","wikidata":"https://www.wikidata.org/wiki/Q1255620","display_name":"Dram","level":2,"score":0.894761860370636},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.5998969674110413},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.5637140870094299},{"id":"https://openalex.org/C162307627","wikidata":"https://www.wikidata.org/wiki/Q204833","display_name":"Enhanced Data Rates for GSM Evolution","level":2,"score":0.5586258769035339},{"id":"https://openalex.org/C198352243","wikidata":"https://www.wikidata.org/wiki/Q37105","display_name":"Line (geometry)","level":2,"score":0.5557754635810852},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.41186216473579407},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3753736615180969},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.36735230684280396},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3125351369380951},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2159700095653534},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.1539149284362793},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.12902125716209412},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.07598909735679626},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.07424774765968323}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcad.2025.3546195","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2025.3546195","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320322120","display_name":"National Research Foundation of Korea","ror":"https://ror.org/013aysd81"},{"id":"https://openalex.org/F4320322202","display_name":"IC Design Education Center","ror":"https://ror.org/005v57z85"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":37,"referenced_works":["https://openalex.org/W1625170149","https://openalex.org/W1976315218","https://openalex.org/W2001894083","https://openalex.org/W2001986306","https://openalex.org/W2004028061","https://openalex.org/W2017525960","https://openalex.org/W2067472597","https://openalex.org/W2109153216","https://openalex.org/W2117068879","https://openalex.org/W2122541469","https://openalex.org/W2156696223","https://openalex.org/W2162517322","https://openalex.org/W2164422767","https://openalex.org/W2536017107","https://openalex.org/W2766857132","https://openalex.org/W2779183054","https://openalex.org/W2913404074","https://openalex.org/W2982710590","https://openalex.org/W3019163333","https://openalex.org/W3030986227","https://openalex.org/W3082043105","https://openalex.org/W3137516003","https://openalex.org/W3158648003","https://openalex.org/W3167822684","https://openalex.org/W3172099631","https://openalex.org/W3192582805","https://openalex.org/W4226113960","https://openalex.org/W4281717358","https://openalex.org/W4285139222","https://openalex.org/W4292396175","https://openalex.org/W4310520571","https://openalex.org/W4380302467","https://openalex.org/W4388483591","https://openalex.org/W4391430050","https://openalex.org/W4399528213","https://openalex.org/W4400111926","https://openalex.org/W4403445951"],"related_works":["https://openalex.org/W3120961607","https://openalex.org/W4401568740","https://openalex.org/W3148568549","https://openalex.org/W2098207691","https://openalex.org/W1648516568","https://openalex.org/W361036515","https://openalex.org/W2161286015","https://openalex.org/W2269474412","https://openalex.org/W1518256384","https://openalex.org/W2065616796"],"abstract_inverted_index":{"Line":[0],"edge":[1],"roughness":[2],"(LER)":[3],"is":[4,161],"an":[5,44],"undesirable":[6],"phenomenon":[7],"that":[8,142],"arises":[9],"during":[10],"semiconductor":[11,20,79],"fabrication":[12],"processes,":[13],"causing":[14],"fluctuations":[15,147],"in":[16,51,77,148],"the":[17,84,91,97,102,143,153,159],"characteristics":[18],"of":[19,104],"devices":[21],"and":[22,48,124,134],"potentially":[23],"leading":[24],"to":[25,86],"significant":[26],"yield":[27],"degradation.":[28],"Consequently,":[29],"LER":[30,50,76,105],"must":[31],"be":[32],"meticulously":[33],"considered":[34],"before":[35],"fabricating":[36],"integrated":[37],"circuits.":[38],"In":[39],"this":[40],"study,":[41],"we":[42,69,82,100,127],"present":[43],"approach":[45],"for":[46,62,73],"implementing":[47,75],"analyzing":[49],"vertical":[52],"channel":[53],"array":[54],"transistors":[55],"(VCATs)":[56],"with":[57],"a":[58,71],"gate-all-around":[59],"(GAA)":[60],"structure":[61],"dynamic":[63],"random":[64],"access":[65],"memory":[66],"applications.":[67],"Initially,":[68],"propose":[70],"method":[72,85],"reliably":[74],"GAA":[78,94],"devices.":[80],"Next,":[81],"extend":[83],"more":[87],"complex":[88],"structures":[89],"beyond":[90],"basic":[92],"cylindrical":[93],"structure.":[95],"Utilizing":[96],"proposed":[98],"method,":[99],"investigate":[101],"impact":[103],"on":[106,152,163],"various":[107],"VCAT":[108],"device":[109],"configurations":[110],"by":[111],"examining":[112],"DC":[113],"performance":[114,130],"metrics":[115,131],"such":[116],"as":[117],"IOFF,":[118],"IDS,LIN,":[119],"IDS,SAT,":[120],"VT,LIN,":[121],"VT,SAT,":[122],"IOV,LIN,":[123],"IOV,SAT.":[125],"Additionally,":[126],"explore":[128],"AC":[129],"(THOLD,":[132],"TREAD,":[133],"TWRITE)":[135],"through":[136],"mixed-mode":[137],"simulations.":[138],"The":[139],"results":[140],"show":[141],"parameters":[144],"influencing":[145],"LER-induced":[146],"VCATs":[149],"vary":[150],"depending":[151],"transistor\u2019s":[154],"operating":[155],"region":[156],"(i.e.,":[157],"whether":[158],"transistor":[160],"turned":[162],"or":[164],"not).":[165]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-06-28T08:01:55.173337","created_date":"2025-10-10T00:00:00"}