{"id":"https://openalex.org/W4404411236","doi":"https://doi.org/10.1109/tcad.2024.3499909","title":"RuleLearner: OPC Rule Extraction From Inverse Lithography Technique Engine","display_name":"RuleLearner: OPC Rule Extraction From Inverse Lithography Technique Engine","publication_year":2024,"publication_date":"2024-11-15","ids":{"openalex":"https://openalex.org/W4404411236","doi":"https://doi.org/10.1109/tcad.2024.3499909"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.2024.3499909","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2024.3499909","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5066842835","display_name":"Ziyang Yu","orcid":"https://orcid.org/0000-0002-6656-3741"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":true,"raw_author_name":"Ziyang Yu","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong"],"raw_orcid":"https://orcid.org/0000-0002-6656-3741","affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","institution_ids":["https://openalex.org/I177725633"]},{"raw_affiliation_string":"NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112542413","display_name":"Su Zheng","orcid":"https://orcid.org/0000-0003-1159-1611"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Su Zheng","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong"],"raw_orcid":"https://orcid.org/0000-0003-1159-1611","affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","institution_ids":["https://openalex.org/I177725633"]},{"raw_affiliation_string":"NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013503446","display_name":"Wenqian Zhao","orcid":"https://orcid.org/0000-0001-9501-9254"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Wenqian Zhao","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong"],"raw_orcid":"https://orcid.org/0000-0001-9501-9254","affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","institution_ids":["https://openalex.org/I177725633"]},{"raw_affiliation_string":"NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101319284","display_name":"Shuo Yin","orcid":"https://orcid.org/0000-0003-4927-0194"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Shuo Yin","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong"],"raw_orcid":"https://orcid.org/0000-0003-4927-0194","affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","institution_ids":["https://openalex.org/I177725633"]},{"raw_affiliation_string":"NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055355549","display_name":"Xiaoxiao Liang","orcid":"https://orcid.org/0000-0003-4691-3940"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Xiaoxiao Liang","raw_affiliation_strings":["Microelectronics Thrust, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, China","Microelectronics Thrust, The Hong Kong University of Science and Technology, Guangzhou, China"],"raw_orcid":"https://orcid.org/0000-0003-4691-3940","affiliations":[{"raw_affiliation_string":"Microelectronics Thrust, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, China","institution_ids":[]},{"raw_affiliation_string":"Microelectronics Thrust, The Hong Kong University of Science and Technology, Guangzhou, China","institution_ids":["https://openalex.org/I200769079"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081240313","display_name":"Guojin Chen","orcid":"https://orcid.org/0000-0001-9457-9583"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Guojin Chen","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong"],"raw_orcid":"https://orcid.org/0000-0001-9457-9583","affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","institution_ids":["https://openalex.org/I177725633"]},{"raw_affiliation_string":"NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071995111","display_name":"Yuzhe Ma","orcid":"https://orcid.org/0000-0002-3612-4182"},"institutions":[{"id":"https://openalex.org/I200769079","display_name":"Hong Kong University of Science and Technology","ror":"https://ror.org/00q4vv597","country_code":"HK","type":"education","lineage":["https://openalex.org/I200769079"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Yuzhe Ma","raw_affiliation_strings":["Microelectronics Thrust, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, China","Microelectronics Thrust, The Hong Kong University of Science and Technology, Guangzhou, China"],"raw_orcid":"https://orcid.org/0000-0002-3612-4182","affiliations":[{"raw_affiliation_string":"Microelectronics Thrust, The Hong Kong University of Science and Technology (Guangzhou), Guangzhou, China","institution_ids":[]},{"raw_affiliation_string":"Microelectronics Thrust, The Hong Kong University of Science and Technology, Guangzhou, China","institution_ids":["https://openalex.org/I200769079"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051340429","display_name":"Bei Yu","orcid":"https://orcid.org/0000-0001-6406-4810"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Bei Yu","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong"],"raw_orcid":"https://orcid.org/0000-0001-6406-4810","affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","institution_ids":["https://openalex.org/I177725633"]},{"raw_affiliation_string":"NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053378706","display_name":"Martin D. F. Wong","orcid":"https://orcid.org/0000-0001-8274-9688"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Martin D. F. Wong","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, SAR, China","institution_ids":["https://openalex.org/I177725633"]},{"raw_affiliation_string":"NT, The Chinese University of Hong Kong, Department of Computer Science and Engineering, Hong Kong, Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5066842835"],"corresponding_institution_ids":["https://openalex.org/I177725633"],"apc_list":null,"apc_paid":null,"fwci":0.4006,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.62768885,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":"44","issue":"5","first_page":"1915","last_page":"1927"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9958000183105469,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9958000183105469,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.95660001039505,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11451","display_name":"Advanced Machining and Optimization Techniques","score":0.9419999718666077,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/inverse","display_name":"Inverse","score":0.6325045228004456},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.5460413694381714},{"id":"https://openalex.org/keywords/extraction","display_name":"Extraction (chemistry)","score":0.47389617562294006},{"id":"https://openalex.org/keywords/inverse-method","display_name":"Inverse method","score":0.4214153289794922},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.408783495426178},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.2438220977783203},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.1558452844619751},{"id":"https://openalex.org/keywords/applied-mathematics","display_name":"Applied mathematics","score":0.13300448656082153},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.12147942185401917},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.11607319116592407},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.09028056263923645}],"concepts":[{"id":"https://openalex.org/C207467116","wikidata":"https://www.wikidata.org/wiki/Q4385666","display_name":"Inverse","level":2,"score":0.6325045228004456},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.5460413694381714},{"id":"https://openalex.org/C4725764","wikidata":"https://www.wikidata.org/wiki/Q844704","display_name":"Extraction (chemistry)","level":2,"score":0.47389617562294006},{"id":"https://openalex.org/C2983319462","wikidata":"https://www.wikidata.org/wiki/Q15948129","display_name":"Inverse method","level":2,"score":0.4214153289794922},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.408783495426178},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.2438220977783203},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1558452844619751},{"id":"https://openalex.org/C28826006","wikidata":"https://www.wikidata.org/wiki/Q33521","display_name":"Applied mathematics","level":1,"score":0.13300448656082153},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.12147942185401917},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.11607319116592407},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.09028056263923645}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tcad.2024.3499909","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2024.3499909","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},{"id":"pmh:oai:repository.hkust.edu.hk:1783.1-146870","is_oa":false,"landing_page_url":"http://repository.hkust.edu.hk/ir/Record/1783.1-146870","pdf_url":null,"source":{"id":"https://openalex.org/S4306401796","display_name":"Rare & Special e-Zone (The Hong Kong University of Science and Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I200769079","host_organization_name":"Hong Kong University of Science and Technology","host_organization_lineage":["https://openalex.org/I200769079"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":35,"referenced_works":["https://openalex.org/W1533846319","https://openalex.org/W2021209310","https://openalex.org/W2034052243","https://openalex.org/W2046570864","https://openalex.org/W2112036188","https://openalex.org/W2129996279","https://openalex.org/W2136495462","https://openalex.org/W2323399649","https://openalex.org/W2443851239","https://openalex.org/W2502925949","https://openalex.org/W2540346280","https://openalex.org/W2596318424","https://openalex.org/W2602530373","https://openalex.org/W2793479912","https://openalex.org/W2910093824","https://openalex.org/W2962513243","https://openalex.org/W2971516606","https://openalex.org/W3111433944","https://openalex.org/W3133238459","https://openalex.org/W3186713366","https://openalex.org/W4200483799","https://openalex.org/W4232775057","https://openalex.org/W4234309643","https://openalex.org/W4235262418","https://openalex.org/W4285292365","https://openalex.org/W4319993468","https://openalex.org/W4386242015","https://openalex.org/W4387490569","https://openalex.org/W4392678671","https://openalex.org/W4404133788","https://openalex.org/W6674255030","https://openalex.org/W6682262322","https://openalex.org/W6802116736","https://openalex.org/W6849158121","https://openalex.org/W6851370939"],"related_works":["https://openalex.org/W2755716217","https://openalex.org/W2350579355","https://openalex.org/W782748337","https://openalex.org/W1965568359","https://openalex.org/W2079386710","https://openalex.org/W2073336319","https://openalex.org/W4237522829","https://openalex.org/W1998983097","https://openalex.org/W2761062185","https://openalex.org/W3004464143"],"abstract_inverted_index":{"Model-based":[0],"optical":[1],"proximity":[2],"correction":[3,54],"(OPC)":[4],"with":[5,168],"subresolution":[6],"assist":[7],"feature":[8],"(SRAF)":[9],"generation":[10,108],"is":[11,136],"a":[12,85,93,100,143],"critical":[13],"standard":[14],"practice":[15],"for":[16,89,106,133,142],"compensating":[17],"lithography":[18,127],"distortions":[19],"in":[20,112],"the":[21,37,53,66,69,75,121,150,153,160,176,185,203],"fabrication":[22],"of":[23,39,65,71,123,146],"integrated":[24],"circuits":[25],"at":[26],"advanced":[27],"technology":[28],"nodes.":[29],"Typical":[30],"model-based":[31,110],"OPC":[32,87,111],"and":[33,49,61,109,152,157,179,201,207],"SRAF":[34,107,174],"algorithms":[35],"involve":[36],"selection":[38],"user-controlled":[40],"rule":[41,72,162,186],"parameters.":[42],"Conventionally,":[43],"these":[44,81],"rules":[45],"are":[46,77,165,181],"heuristically":[47],"determined":[48],"applied":[50,195],"globally":[51],"throughout":[52],"regions,":[55],"which":[56],"can":[57,193],"be":[58,194],"time":[59],"consuming":[60],"require":[62],"expert":[63],"knowledge":[64],"tool.":[67],"Additionally,":[68],"correlations":[70],"parameters":[73],"to":[74,138],"objectives":[76],"highly":[78],"nonlinear.":[79],"All":[80],"factors":[82],"make":[83],"designing":[84],"high-performance":[86],"engine":[88],"complex":[90,134,198],"metal":[91],"designs":[92],"nontrivial":[94],"task.":[95],"This":[96],"article":[97],"proposes":[98],"RuleLearner,":[99],"comprehensive":[101],"mask":[102],"optimization":[103],"system":[104],"designed":[105],"real":[113],"industrial":[114],"scenarios.":[115],"The":[116,172],"proposed":[117],"framework":[118],"learns":[119],"from":[120],"guidance":[122],"an":[124],"information-augmented":[125],"inverse":[126],"technique":[128],"engine,":[129],"which,":[130],"although":[131],"expressive":[132],"designs,":[135],"expensive":[137],"generate":[139],"refined":[140],"masks":[141],"whole":[144],"set":[145],"design":[147,199],"clips.":[148],"Considering":[149],"nonlinearity":[151],"tradeoff":[154],"between":[155],"local":[156],"global":[158],"performance,":[159],"extracted":[161],"value":[163],"distributions":[164],"further":[166],"optimized":[167],"customized":[169],"natural":[170],"gradients.":[171],"sophisticated":[173],"generation,":[175],"edge":[177],"segmentation":[178],"movements":[180],"then":[182],"guided":[183],"by":[184],"parameter.":[187],"Experimental":[188],"results":[189],"show":[190],"that":[191],"RuleLearner":[192],"across":[196],"different":[197],"patterns":[200],"achieve":[202],"best":[204],"lithographic":[205],"performance":[206],"computational":[208],"efficiency.":[209]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2025-12-27T23:08:20.325037","created_date":"2025-10-10T00:00:00"}