{"id":"https://openalex.org/W4391467961","doi":"https://doi.org/10.1109/tcad.2024.3361400","title":"Ultrafast Source Mask Optimization via Conditional Discrete Diffusion","display_name":"Ultrafast Source Mask Optimization via Conditional Discrete Diffusion","publication_year":2024,"publication_date":"2024-02-02","ids":{"openalex":"https://openalex.org/W4391467961","doi":"https://doi.org/10.1109/tcad.2024.3361400"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.2024.3361400","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2024.3361400","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081240313","display_name":"Guojin Chen","orcid":"https://orcid.org/0000-0001-9457-9583"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":true,"raw_author_name":"Guojin Chen","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, China"],"raw_orcid":"https://orcid.org/0000-0001-9457-9583","affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, China","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032567340","display_name":"Zixiao Wang","orcid":"https://orcid.org/0009-0000-8179-0996"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Zixiao Wang","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, China"],"raw_orcid":"https://orcid.org/0009-0000-8179-0996","affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, China","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051340429","display_name":"Bei Yu","orcid":"https://orcid.org/0000-0001-6406-4810"},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"HK","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Bei Yu","raw_affiliation_strings":["Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, China"],"raw_orcid":"https://orcid.org/0000-0001-6406-4810","affiliations":[{"raw_affiliation_string":"Department of Computer Science and Engineering, The Chinese University of Hong Kong, Hong Kong, China","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011883763","display_name":"David Z. Pan","orcid":"https://orcid.org/0000-0002-5705-2501"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David Z. Pan","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX, USA"],"raw_orcid":"https://orcid.org/0000-0002-5705-2501","affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053378706","display_name":"Martin D. F. Wong","orcid":"https://orcid.org/0000-0001-8274-9688"},"institutions":[{"id":"https://openalex.org/I141568987","display_name":"Hong Kong Baptist University","ror":"https://ror.org/0145fw131","country_code":"HK","type":"education","lineage":["https://openalex.org/I141568987"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Martin D. F. Wong","raw_affiliation_strings":["Department of Computer Science, Hong Kong Baptist University, Hong Kong, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Computer Science, Hong Kong Baptist University, Hong Kong, China","institution_ids":["https://openalex.org/I141568987"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5081240313"],"corresponding_institution_ids":["https://openalex.org/I177725633"],"apc_list":null,"apc_paid":null,"fwci":1.8026,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.84457496,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":99},"biblio":{"volume":"43","issue":"7","first_page":"2140","last_page":"2150"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10358","display_name":"Advanced Radiotherapy Techniques","score":0.9577000141143799,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9496999979019165,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.48919299244880676},{"id":"https://openalex.org/keywords/diffusion","display_name":"Diffusion","score":0.4794846475124359},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.37039774656295776},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20709705352783203}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.48919299244880676},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.4794846475124359},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.37039774656295776},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20709705352783203},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcad.2024.3361400","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2024.3361400","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W1928825210","https://openalex.org/W2096861910","https://openalex.org/W2098870234","https://openalex.org/W2145868347","https://openalex.org/W2544930810","https://openalex.org/W2987619025","https://openalex.org/W3033733028","https://openalex.org/W3203959872","https://openalex.org/W4200032016","https://openalex.org/W4200483799","https://openalex.org/W4232775057","https://openalex.org/W4235262418","https://openalex.org/W4254271781","https://openalex.org/W4285292365","https://openalex.org/W4293024179","https://openalex.org/W4385245566","https://openalex.org/W4387490569","https://openalex.org/W6674472291","https://openalex.org/W6679045638","https://openalex.org/W6779823529","https://openalex.org/W6798447524","https://openalex.org/W6851178876","https://openalex.org/W6856423499"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2051487156","https://openalex.org/W2073681303","https://openalex.org/W2390279801","https://openalex.org/W2358668433","https://openalex.org/W2376932109","https://openalex.org/W2001405890","https://openalex.org/W2382290278","https://openalex.org/W2350741829","https://openalex.org/W2530322880"],"abstract_inverted_index":{"Source":[0],"mask":[1,65],"optimization":[2,58,66,82],"(SMO)":[3],"is":[4],"vital":[5],"for":[6,120],"mitigating":[7],"lithography":[8,75,99],"imaging":[9,133],"distortions":[10],"caused":[11],"by":[12,83],"shrinking":[13],"critical":[14],"dimensions":[15],"in":[16,29,102],"integrated":[17],"circuit":[18],"fabrication.":[19],"However,":[20],"the":[21,70,73,79,86,90,110,136],"computational":[22,126],"intensity":[23],"of":[24,72,81],"SMO,":[25],"involving":[26],"multiple":[27],"integrals":[28],"Abbe\u2019s":[30,103],"theory,":[31,104],"hinders":[32],"its":[33],"widespread":[34],"adoption":[35],"and":[36,47,92],"advancement.":[37],"In":[38],"this":[39],"paper,":[40],"we":[41,114],"present":[42],"Diff-SMO,":[43],"a":[44,52,97,116],"highly":[45],"efficient":[46],"accurate":[48],"SMO":[49,111,147],"framework":[50],"with":[51,138],"primary":[53],"emphasis":[54],"on":[55],"enhancing":[56],"source":[57,91],"techniques.":[59],"Previous":[60],"research":[61],"was":[62],"confined":[63],"to":[64,69,145],"acceleration":[67,108],"due":[68],"constraints":[71],"academia":[74],"model.":[76],"Diff-SMO":[77],"extends":[78],"scope":[80],"concurrently":[84],"refining":[85],"intricate":[87],"interplay":[88],"between":[89],"mask.":[93],"We":[94],"first":[95],"develop":[96],"GPU-accelerated":[98],"simulator":[100],"grounded":[101],"enabling":[105],"full":[106],"GPU":[107],"throughout":[109],"process.":[112],"Furthermore,":[113],"propose":[115],"discrete":[117],"diffusion":[118],"model":[119],"generating":[121],"quasi-optimal":[122],"sources,":[123],"significantly":[124],"improving":[125],"efficiency.":[127],"Our":[128],"experimental":[129],"results":[130],"demonstrate":[131],"exceptional":[132],"fidelity,":[134],"surpassing":[135],"state-of-the-art,":[137],"over":[139],"200":[140],"times":[141],"higher":[142],"throughput":[143],"compared":[144],"traditional":[146],"methods.":[148]},"counts_by_year":[{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}