{"id":"https://openalex.org/W2795908090","doi":"https://doi.org/10.1109/tcad.2018.2824255","title":"Neural Network Classifier-Based OPC With Imbalanced Training Data","display_name":"Neural Network Classifier-Based OPC With Imbalanced Training Data","publication_year":2018,"publication_date":"2018-04-06","ids":{"openalex":"https://openalex.org/W2795908090","doi":"https://doi.org/10.1109/tcad.2018.2824255","mag":"2795908090"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.2018.2824255","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2018.2824255","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081101378","display_name":"Suhyeong Choi","orcid":"https://orcid.org/0000-0002-4665-5788"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Suhyeong Choi","raw_affiliation_strings":["School of Electrical Engineering, KAIST, Daejeon, South Korea"],"raw_orcid":"https://orcid.org/0000-0002-4665-5788","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, KAIST, Daejeon, South Korea","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101738108","display_name":"Seongbo Shim","orcid":"https://orcid.org/0000-0001-5864-3111"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Seongbo Shim","raw_affiliation_strings":["School of Electrical Engineering, KAIST, Daejeon, South Korea"],"raw_orcid":"https://orcid.org/0000-0001-5864-3111","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, KAIST, Daejeon, South Korea","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5020011072","display_name":"Youngsoo Shin","orcid":"https://orcid.org/0000-0002-7474-9212"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Youngsoo Shin","raw_affiliation_strings":["School of Electrical Engineering, KAIST, Daejeon, South Korea"],"raw_orcid":"https://orcid.org/0000-0002-7474-9212","affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, KAIST, Daejeon, South Korea","institution_ids":["https://openalex.org/I157485424"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5081101378"],"corresponding_institution_ids":["https://openalex.org/I157485424"],"apc_list":null,"apc_paid":null,"fwci":0.7853,"has_fulltext":false,"cited_by_count":21,"citation_normalized_percentile":{"value":0.73423931,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"38","issue":"5","first_page":"938","last_page":"948"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6940594911575317},{"id":"https://openalex.org/keywords/artificial-neural-network","display_name":"Artificial neural network","score":0.6794075965881348},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.6569374799728394},{"id":"https://openalex.org/keywords/classifier","display_name":"Classifier (UML)","score":0.6358246207237244},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.6346640586853027},{"id":"https://openalex.org/keywords/regression","display_name":"Regression","score":0.5512890219688416},{"id":"https://openalex.org/keywords/principal-component-analysis","display_name":"Principal component analysis","score":0.5277950167655945},{"id":"https://openalex.org/keywords/dimensionality-reduction","display_name":"Dimensionality reduction","score":0.4932064414024353},{"id":"https://openalex.org/keywords/training-set","display_name":"Training set","score":0.47432491183280945},{"id":"https://openalex.org/keywords/curse-of-dimensionality","display_name":"Curse of dimensionality","score":0.43997034430503845},{"id":"https://openalex.org/keywords/optical-proximity-correction","display_name":"Optical proximity correction","score":0.4114115238189697},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.4067503809928894},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.17054548859596252},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.1433016061782837},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.08078575134277344}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6940594911575317},{"id":"https://openalex.org/C50644808","wikidata":"https://www.wikidata.org/wiki/Q192776","display_name":"Artificial neural network","level":2,"score":0.6794075965881348},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6569374799728394},{"id":"https://openalex.org/C95623464","wikidata":"https://www.wikidata.org/wiki/Q1096149","display_name":"Classifier (UML)","level":2,"score":0.6358246207237244},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.6346640586853027},{"id":"https://openalex.org/C83546350","wikidata":"https://www.wikidata.org/wiki/Q1139051","display_name":"Regression","level":2,"score":0.5512890219688416},{"id":"https://openalex.org/C27438332","wikidata":"https://www.wikidata.org/wiki/Q2873","display_name":"Principal component analysis","level":2,"score":0.5277950167655945},{"id":"https://openalex.org/C70518039","wikidata":"https://www.wikidata.org/wiki/Q16000077","display_name":"Dimensionality reduction","level":2,"score":0.4932064414024353},{"id":"https://openalex.org/C51632099","wikidata":"https://www.wikidata.org/wiki/Q3985153","display_name":"Training set","level":2,"score":0.47432491183280945},{"id":"https://openalex.org/C111030470","wikidata":"https://www.wikidata.org/wiki/Q1430460","display_name":"Curse of dimensionality","level":2,"score":0.43997034430503845},{"id":"https://openalex.org/C78371743","wikidata":"https://www.wikidata.org/wiki/Q1672829","display_name":"Optical proximity correction","level":3,"score":0.4114115238189697},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.4067503809928894},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.17054548859596252},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.1433016061782837},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.08078575134277344},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcad.2018.2824255","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2018.2824255","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G926925333","display_name":null,"funder_award_id":"2015R1A2A2A01008037","funder_id":"https://openalex.org/F4320322120","funder_display_name":"National Research Foundation of Korea"}],"funders":[{"id":"https://openalex.org/F4320322120","display_name":"National Research Foundation of Korea","ror":"https://ror.org/013aysd81"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":38,"referenced_works":["https://openalex.org/W114517082","https://openalex.org/W597852864","https://openalex.org/W1982919025","https://openalex.org/W1987478948","https://openalex.org/W1990011310","https://openalex.org/W2006071898","https://openalex.org/W2013262041","https://openalex.org/W2025155536","https://openalex.org/W2032647444","https://openalex.org/W2043406489","https://openalex.org/W2044773743","https://openalex.org/W2092792021","https://openalex.org/W2100495367","https://openalex.org/W2102773363","https://openalex.org/W2102773410","https://openalex.org/W2106049924","https://openalex.org/W2124972241","https://openalex.org/W2127251289","https://openalex.org/W2146918190","https://openalex.org/W2148143831","https://openalex.org/W2151735984","https://openalex.org/W2277442758","https://openalex.org/W2294380595","https://openalex.org/W2297117935","https://openalex.org/W2299768181","https://openalex.org/W2406273144","https://openalex.org/W2419646137","https://openalex.org/W2536062280","https://openalex.org/W2537167836","https://openalex.org/W2552336304","https://openalex.org/W2554356216","https://openalex.org/W2750396644","https://openalex.org/W4233478494","https://openalex.org/W6648036968","https://openalex.org/W6658620453","https://openalex.org/W6673850159","https://openalex.org/W6697520462","https://openalex.org/W6717743537"],"related_works":["https://openalex.org/W2579148721","https://openalex.org/W4387893611","https://openalex.org/W2347335694","https://openalex.org/W2091056927","https://openalex.org/W2067407580","https://openalex.org/W4317486777","https://openalex.org/W4389669152","https://openalex.org/W2038514069","https://openalex.org/W1967233468","https://openalex.org/W2009181529"],"abstract_inverted_index":{"Machine":[0],"learning-guided":[1],"optical":[2],"proximity":[3],"correction,":[4],"called":[5],"ML-OPC":[6,21,152],"in":[7,40],"this":[8],"paper,":[9],"has":[10,25],"recently":[11],"been":[12,26],"proposed":[13],"to":[14,57,150],"alleviate":[15],"long":[16],"runtime":[17],"of":[18,62,79,91,136],"model-based":[19],"OPC.":[20],"using":[22,65],"regression":[23,154],"methods":[24],"presented":[27],"but":[28],"with":[29,126,128,153],"limited":[30],"prediction":[31,98,134],"accuracy.":[32],"We":[33],"propose":[34],"neural":[35,43],"network":[36,44],"classifier-based":[37],"OPC":[38],"(NNC-OPC),":[39],"which":[41,94],"a":[42,48],"classifier":[45],"serves":[46],"as":[47],"mask":[49,92,137],"bias":[50,138],"model.":[51],"A":[52],"few":[53],"techniques":[54,130],"are":[55,85,142],"applied":[56,131],"enhance":[58],"basic":[59],"NNC-OPC:":[60],"parameterization":[61],"layout":[63,81],"segments":[64,84,101],"polar":[66],"Fourier":[67],"transform":[68],"signals,":[69],"dimensionality":[70],"reduction":[71],"through":[72],"weighted":[73],"principal":[74],"component":[75],"analysis,":[76],"and":[77,119,139,146],"sampling":[78],"training":[80,140],"segments.":[82],"Training":[83],"typically":[86],"imbalanced":[87],"over":[88],"the":[89],"range":[90],"biases,":[93],"may":[95],"cause":[96],"large":[97],"error":[99,135],"for":[100],"that":[102,133],"appear":[103],"less":[104],"frequently.":[105],"This":[106],"is":[107],"resolved":[108],"by":[109,144],"three":[110],"techniques:":[111],"1)":[112],"synthetic":[113],"data":[114],"generation;":[115],"2)":[116],"class":[117],"reorganization;":[118],"3)":[120],"an":[121],"adaptive":[122],"learning":[123],"rate.":[124],"Experiments":[125],"NNC-OPC":[127],"all":[129],"indicate":[132],"time":[141],"reduced":[143],"29%":[145],"80%,":[147],"respectively,":[148],"compared":[149],"state-of-the-art":[151],"methods.":[155]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}