{"id":"https://openalex.org/W2565129985","doi":"https://doi.org/10.1109/tcad.2016.2638440","title":"Improved Tangent Space-Based Distance Metric for Lithographic Hotspot Classification","display_name":"Improved Tangent Space-Based Distance Metric for Lithographic Hotspot Classification","publication_year":2016,"publication_date":"2016-12-12","ids":{"openalex":"https://openalex.org/W2565129985","doi":"https://doi.org/10.1109/tcad.2016.2638440","mag":"2565129985"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.2016.2638440","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2016.2638440","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045464812","display_name":"Fan Yang","orcid":"https://orcid.org/0000-0003-2164-8175"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fan Yang","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China"],"raw_orcid":"https://orcid.org/0000-0003-2164-8175","affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4210132426","https://openalex.org/I4391767673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108545002","display_name":"Subarna Sinha","orcid":null},"institutions":[{"id":"https://openalex.org/I97018004","display_name":"Stanford University","ror":"https://ror.org/00f54p054","country_code":"US","type":"education","lineage":["https://openalex.org/I97018004"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Subarna Sinha","raw_affiliation_strings":["Stanford University, Stanford, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Stanford University, Stanford, CA, USA","institution_ids":["https://openalex.org/I97018004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109909965","display_name":"Charles Chiang","orcid":"https://orcid.org/0009-0008-6079-4355"},"institutions":[{"id":"https://openalex.org/I4210088951","display_name":"Synopsys (United States)","ror":"https://ror.org/013by2m91","country_code":"US","type":"company","lineage":["https://openalex.org/I4210088951"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Charles C. Chiang","raw_affiliation_strings":["Synopsys Inc., Mountain View, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Synopsys Inc., Mountain View, CA, USA","institution_ids":["https://openalex.org/I4210088951"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064213921","display_name":"Xuan Zeng","orcid":"https://orcid.org/0000-0002-8097-4053"},"institutions":[{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xuan Zeng","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4210132426","https://openalex.org/I4391767673"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054960059","display_name":"Dian Zhou","orcid":"https://orcid.org/0000-0002-2648-5232"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]},{"id":"https://openalex.org/I24943067","display_name":"Fudan University","ror":"https://ror.org/013q1eq08","country_code":"CN","type":"education","lineage":["https://openalex.org/I24943067"]},{"id":"https://openalex.org/I4210132426","display_name":"Shanghai Fudan Microelectronics (China)","ror":"https://ror.org/02vfj3j86","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210132426"]},{"id":"https://openalex.org/I4391767673","display_name":"State Key Laboratory of ASIC and System","ror":"https://ror.org/01mamgv83","country_code":null,"type":"facility","lineage":["https://openalex.org/I24943067","https://openalex.org/I4391767673"]}],"countries":["CN","US"],"is_corresponding":false,"raw_author_name":"Dian Zhou","raw_affiliation_strings":["State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","University of Texas at Dallas, Richardson, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China","institution_ids":["https://openalex.org/I24943067","https://openalex.org/I4210132426","https://openalex.org/I4391767673"]},{"raw_affiliation_string":"University of Texas at Dallas, Richardson, TX, USA","institution_ids":["https://openalex.org/I162577319"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":5.4862,"has_fulltext":false,"cited_by_count":30,"citation_normalized_percentile":{"value":0.95847081,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"36","issue":"9","first_page":"1545","last_page":"1556"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10637","display_name":"Advanced Clustering Algorithms Research","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10637","display_name":"Advanced Clustering Algorithms Research","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10824","display_name":"Image Retrieval and Classification Techniques","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12536","display_name":"Topological and Geometric Data Analysis","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/1703","display_name":"Computational Theory and Mathematics"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tangent-space","display_name":"Tangent space","score":0.6096971035003662},{"id":"https://openalex.org/keywords/hotspot","display_name":"Hotspot (geology)","score":0.5543625354766846},{"id":"https://openalex.org/keywords/cluster-analysis","display_name":"Cluster analysis","score":0.5507975220680237},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5147143006324768},{"id":"https://openalex.org/keywords/polygon","display_name":"Polygon (computer graphics)","score":0.4749436676502228},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.45369651913642883},{"id":"https://openalex.org/keywords/tangent","display_name":"Tangent","score":0.44255414605140686},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.4211300313472748},{"id":"https://openalex.org/keywords/hierarchical-clustering","display_name":"Hierarchical clustering","score":0.41821280121803284},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.3758429288864136},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.3667660355567932},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.3473634719848633},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.15412640571594238},{"id":"https://openalex.org/keywords/combinatorics","display_name":"Combinatorics","score":0.15155655145645142},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.10916557908058167}],"concepts":[{"id":"https://openalex.org/C157157409","wikidata":"https://www.wikidata.org/wiki/Q909601","display_name":"Tangent space","level":2,"score":0.6096971035003662},{"id":"https://openalex.org/C146481406","wikidata":"https://www.wikidata.org/wiki/Q105131","display_name":"Hotspot (geology)","level":2,"score":0.5543625354766846},{"id":"https://openalex.org/C73555534","wikidata":"https://www.wikidata.org/wiki/Q622825","display_name":"Cluster analysis","level":2,"score":0.5507975220680237},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5147143006324768},{"id":"https://openalex.org/C190694206","wikidata":"https://www.wikidata.org/wiki/Q3276654","display_name":"Polygon (computer graphics)","level":3,"score":0.4749436676502228},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.45369651913642883},{"id":"https://openalex.org/C138187205","wikidata":"https://www.wikidata.org/wiki/Q131251","display_name":"Tangent","level":2,"score":0.44255414605140686},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.4211300313472748},{"id":"https://openalex.org/C92835128","wikidata":"https://www.wikidata.org/wiki/Q1277447","display_name":"Hierarchical clustering","level":3,"score":0.41821280121803284},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.3758429288864136},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.3667660355567932},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.3473634719848633},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.15412640571594238},{"id":"https://openalex.org/C114614502","wikidata":"https://www.wikidata.org/wiki/Q76592","display_name":"Combinatorics","level":1,"score":0.15155655145645142},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10916557908058167},{"id":"https://openalex.org/C126042441","wikidata":"https://www.wikidata.org/wiki/Q1324888","display_name":"Frame (networking)","level":2,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C8058405","wikidata":"https://www.wikidata.org/wiki/Q46255","display_name":"Geophysics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcad.2016.2638440","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2016.2638440","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G3552055404","display_name":null,"funder_award_id":"61376040","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5581824960","display_name":null,"funder_award_id":"61574044","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6282195825","display_name":null,"funder_award_id":"61474026","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6863714809","display_name":null,"funder_award_id":"91330201","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7222835113","display_name":null,"funder_award_id":"61574046","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321659","display_name":"Shanghai Education Development Foundation","ror":"https://ror.org/02kq92y46"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":48,"referenced_works":["https://openalex.org/W1530595269","https://openalex.org/W1562753845","https://openalex.org/W1660133578","https://openalex.org/W1663973292","https://openalex.org/W1673310716","https://openalex.org/W1723619723","https://openalex.org/W1963678392","https://openalex.org/W1982919025","https://openalex.org/W1985138891","https://openalex.org/W1993962865","https://openalex.org/W1996187920","https://openalex.org/W1998871699","https://openalex.org/W2029229890","https://openalex.org/W2037552354","https://openalex.org/W2049814849","https://openalex.org/W2052332151","https://openalex.org/W2068961782","https://openalex.org/W2071867759","https://openalex.org/W2079361215","https://openalex.org/W2082938030","https://openalex.org/W2097571249","https://openalex.org/W2101703365","https://openalex.org/W2108961335","https://openalex.org/W2115092649","https://openalex.org/W2121359873","https://openalex.org/W2124957865","https://openalex.org/W2126626732","https://openalex.org/W2126751256","https://openalex.org/W2127218421","https://openalex.org/W2131687179","https://openalex.org/W2141585940","https://openalex.org/W2149900315","https://openalex.org/W2160642098","https://openalex.org/W2168735511","https://openalex.org/W2294849903","https://openalex.org/W2999729612","https://openalex.org/W3150329878","https://openalex.org/W4239961266","https://openalex.org/W4247105055","https://openalex.org/W4285719527","https://openalex.org/W4298882835","https://openalex.org/W6631782964","https://openalex.org/W6637052001","https://openalex.org/W6637131181","https://openalex.org/W6657587085","https://openalex.org/W6675035629","https://openalex.org/W6678914141","https://openalex.org/W6682434580"],"related_works":["https://openalex.org/W2592952084","https://openalex.org/W2903862591","https://openalex.org/W4306887032","https://openalex.org/W2384472745","https://openalex.org/W2002849566","https://openalex.org/W2033914206","https://openalex.org/W1671567673","https://openalex.org/W2364030322","https://openalex.org/W2604147920","https://openalex.org/W2159991578"],"abstract_inverted_index":{"A":[0],"distance":[1,23,33,101],"metric":[2,24,34,102,109],"of":[3,39,73,76,96],"patterns":[4,51,65],"is":[5,35,84,89,103,128],"crucial":[6],"to":[7,86],"hotspot":[8,26,111,125],"cluster":[9,27,112],"analysis":[10,28,113],"and":[11,29,88,107,114],"classification.":[12,30,115],"In":[13],"this":[14],"paper,":[15],"we":[16],"propose":[17,118],"an":[18,36],"improved":[19],"tangent":[20,42,58,79],"space":[21,43,59,80],"(ITS)-based":[22],"for":[25,110,124,131],"The":[31,99],"proposed":[32],"important":[37],"extension":[38],"the":[40,56,74,77,97],"well-developed":[41],"method":[44,60,123],"in":[45],"computer":[46],"vision.":[47],"It":[48,70,127],"can":[49,61],"handle":[50],"containing":[52],"multiple":[53],"polygons,":[54],"while":[55],"traditional":[57,78],"only":[62],"deal":[63],"with":[64,66,91],"a":[67,104,119],"single":[68],"polygon.":[69],"inherits":[71],"most":[72],"advantages":[75],"method,":[81],"e.g.,":[82],"it":[83],"easy":[85],"compute":[87],"tolerant":[90],"small":[92],"variations":[93],"or":[94],"shifts":[95],"shapes.":[98],"ITS-based":[100],"more":[105,129],"reliable":[106],"accurate":[108],"We":[116],"also":[117],"hierarchical":[120],"density-based":[121],"clustering":[122],"clustering.":[126],"suitable":[130],"arbitrary":[132],"shaped":[133],"clusters.":[134]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":5},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":6},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":7},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}