{"id":"https://openalex.org/W2345301122","doi":"https://doi.org/10.1109/tcad.2015.2512908","title":"Model-Based Initial Bias (MIB): Toward a Single-Iteration Optical Proximity Correction","display_name":"Model-Based Initial Bias (MIB): Toward a Single-Iteration Optical Proximity Correction","publication_year":2015,"publication_date":"2015-12-29","ids":{"openalex":"https://openalex.org/W2345301122","doi":"https://doi.org/10.1109/tcad.2015.2512908","mag":"2345301122"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.2015.2512908","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2015.2512908","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5067555739","display_name":"Ayman Hamouda","orcid":null},"institutions":[{"id":"https://openalex.org/I151746483","display_name":"University of Waterloo","ror":"https://ror.org/01aff2v68","country_code":"CA","type":"education","lineage":["https://openalex.org/I151746483"]},{"id":"https://openalex.org/I35662394","display_name":"GlobalFoundries (United States)","ror":"https://ror.org/02h0ps145","country_code":"US","type":"company","lineage":["https://openalex.org/I35662394"]}],"countries":["CA","US"],"is_corresponding":false,"raw_author_name":"Ayman Hamouda","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, Canada","GlobalFoundries, Hopewell Junction, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, Canada","institution_ids":["https://openalex.org/I151746483"]},{"raw_affiliation_string":"GlobalFoundries, Hopewell Junction, NY, USA","institution_ids":["https://openalex.org/I35662394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112829693","display_name":"Mohab Anis","orcid":null},"institutions":[{"id":"https://openalex.org/I80693520","display_name":"American University in Cairo","ror":"https://ror.org/0176yqn58","country_code":"EG","type":"education","lineage":["https://openalex.org/I80693520"]}],"countries":["EG"],"is_corresponding":false,"raw_author_name":"Mohab Anis","raw_affiliation_strings":["Department of Electronics and Communication Engineering, American University in Cairo, Cairo, Egypt"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronics and Communication Engineering, American University in Cairo, Cairo, Egypt","institution_ids":["https://openalex.org/I80693520"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5041808628","display_name":"Karim S. Karim","orcid":"https://orcid.org/0000-0001-9094-6833"},"institutions":[{"id":"https://openalex.org/I151746483","display_name":"University of Waterloo","ror":"https://ror.org/01aff2v68","country_code":"CA","type":"education","lineage":["https://openalex.org/I151746483"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Karim S. Karim","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, ON, Canada","institution_ids":["https://openalex.org/I151746483"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2008,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.62549145,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"35","issue":"10","first_page":"1630","last_page":"1639"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optical-proximity-correction","display_name":"Optical proximity correction","score":0.875618577003479},{"id":"https://openalex.org/keywords/convergence","display_name":"Convergence (economics)","score":0.6324102878570557},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5883408784866333},{"id":"https://openalex.org/keywords/node","display_name":"Node (physics)","score":0.5552941560745239},{"id":"https://openalex.org/keywords/fidelity","display_name":"Fidelity","score":0.5412139892578125},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.5110102891921997},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5068233609199524},{"id":"https://openalex.org/keywords/quality","display_name":"Quality (philosophy)","score":0.45690715312957764},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13185399770736694},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.09481382369995117}],"concepts":[{"id":"https://openalex.org/C78371743","wikidata":"https://www.wikidata.org/wiki/Q1672829","display_name":"Optical proximity correction","level":3,"score":0.875618577003479},{"id":"https://openalex.org/C2777303404","wikidata":"https://www.wikidata.org/wiki/Q759757","display_name":"Convergence (economics)","level":2,"score":0.6324102878570557},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5883408784866333},{"id":"https://openalex.org/C62611344","wikidata":"https://www.wikidata.org/wiki/Q1062658","display_name":"Node (physics)","level":2,"score":0.5552941560745239},{"id":"https://openalex.org/C2776459999","wikidata":"https://www.wikidata.org/wiki/Q2119376","display_name":"Fidelity","level":2,"score":0.5412139892578125},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.5110102891921997},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5068233609199524},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.45690715312957764},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13185399770736694},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.09481382369995117},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C50522688","wikidata":"https://www.wikidata.org/wiki/Q189833","display_name":"Economic growth","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcad.2015.2512908","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2015.2512908","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/8","display_name":"Decent work and economic growth","score":0.41999998688697815}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":33,"referenced_works":["https://openalex.org/W1489776784","https://openalex.org/W1594489858","https://openalex.org/W1686183427","https://openalex.org/W1839775469","https://openalex.org/W1931821121","https://openalex.org/W1931823040","https://openalex.org/W1971361040","https://openalex.org/W1973340533","https://openalex.org/W1988938636","https://openalex.org/W1989702494","https://openalex.org/W1993181199","https://openalex.org/W2000336578","https://openalex.org/W2000832136","https://openalex.org/W2009296772","https://openalex.org/W2013118852","https://openalex.org/W2025524114","https://openalex.org/W2034992862","https://openalex.org/W2037378117","https://openalex.org/W2053195890","https://openalex.org/W2054868356","https://openalex.org/W2057922124","https://openalex.org/W2063231338","https://openalex.org/W2073832123","https://openalex.org/W2082706261","https://openalex.org/W2086520392","https://openalex.org/W2088876343","https://openalex.org/W2089059919","https://openalex.org/W2099658147","https://openalex.org/W2124007645","https://openalex.org/W2128751559","https://openalex.org/W2135674775","https://openalex.org/W3149977808","https://openalex.org/W6671128129"],"related_works":["https://openalex.org/W2381850946","https://openalex.org/W4380449851","https://openalex.org/W2068691156","https://openalex.org/W1975154580","https://openalex.org/W3125091513","https://openalex.org/W4318832338","https://openalex.org/W1990011310","https://openalex.org/W2037048986","https://openalex.org/W4248383205","https://openalex.org/W1919390113"],"abstract_inverted_index":{"In":[0,60,135],"deep":[1],"submicron":[2],"nodes,":[3],"the":[4,12,47,71,94,103,110,118,126,140,169],"final":[5,95,119],"design":[6],"patterning":[7],"quality":[8],"depends":[9],"profoundly":[10],"on":[11,86,159],"optical":[13,104],"proximity":[14],"correction":[15],"(OPC)":[16],"quality.":[17],"The":[18],"required":[19],"pattern":[20],"fidelity":[21],"and":[22,54,121,145],"CD":[23],"uniformity":[24],"can":[25,92,129],"never":[26],"be":[27,130,173],"achieved":[28],"without":[29],"good":[30,100],"OPC.":[31],"However,":[32],"OPC":[33,48,72,96,111,127,170],"runtime-resource":[34],"factor":[35],"has":[36],"been":[37],"exponentially":[38],"increasing":[39],"every":[40],"technology":[41],"node":[42],"reaching":[43],"alarming":[44],"levels,":[45],"where":[46,165],"cost":[49],"in":[50],"terms":[51],"of":[52,125,142,168],"resources":[53],"turn-around-time":[55],"is":[56,84,114],"becoming":[57],"very":[58],"expensive.":[59],"this":[61,136],"paper,":[62,137],"we":[63,138,150,176],"present":[64,139,155],"a":[65,99,108,133,160],"novel":[66],"approach":[67],"for":[68],"speeding":[69],"up":[70],"convergence":[73],"process":[74],"using":[75,102],"our":[76,143,146,156,178],"model-based":[77],"initial":[78,112],"bias":[79],"methodology.":[80,179],"Our":[81],"proposed":[82],"methodology":[83,144],"based":[85],"building":[87],"generic":[88],"compact":[89,147],"bias-models":[90],"that":[91],"predict":[93],"shapes":[97],"with":[98],"accuracy":[101],"simulation":[105],"parameters.":[106],"As":[107],"result,":[109],"condition":[113],"much":[115],"closer":[116],"to":[117],"solution":[120],"more":[122],"than":[123],"half":[124],"iterations":[128,171],"saved":[131,174],"as":[132],"result.":[134],"details":[141],"initial-bias":[148],"model":[149],"are":[151],"proposing.":[152],"We":[153],"also":[154],"testing":[157],"results":[158],"10":[161],"nm":[162],"metal":[163],"level,":[164],"almost":[166],"50%":[167],"could":[172],"when":[175],"apply":[177]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}