{"id":"https://openalex.org/W2034635667","doi":"https://doi.org/10.1109/tcad.2013.2277975","title":"Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs","display_name":"Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs","publication_year":2013,"publication_date":"2013-11-19","ids":{"openalex":"https://openalex.org/W2034635667","doi":"https://doi.org/10.1109/tcad.2013.2277975","mag":"2034635667"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.2013.2277975","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2013.2277975","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100402262","display_name":"Liping Wang","orcid":"https://orcid.org/0000-0002-6412-266X"},"institutions":[{"id":"https://openalex.org/I7882870","display_name":"University of Glasgow","ror":"https://ror.org/00vtgdb53","country_code":"GB","type":"education","lineage":["https://openalex.org/I7882870"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Liping Wang","raw_affiliation_strings":["University of Glasgow, School of Engineering, Glasgow, U.K","[School of Engineering, University of Glasgow, Glasgow, UK]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Glasgow, School of Engineering, Glasgow, U.K","institution_ids":["https://openalex.org/I7882870"]},{"raw_affiliation_string":"[School of Engineering, University of Glasgow, Glasgow, UK]","institution_ids":["https://openalex.org/I7882870"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103539267","display_name":"A. R. Brown","orcid":null},"institutions":[{"id":"https://openalex.org/I4210118883","display_name":"Gold Standard Simulations (United Kingdom)","ror":"https://ror.org/02qaw7v88","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210118883"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Andrew R. Brown","raw_affiliation_strings":["Gold Standard Simulations, Ltd., Glasgow, U.K","Gold Stand. Simulations, Ltd., Glasgow, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Gold Standard Simulations, Ltd., Glasgow, U.K","institution_ids":["https://openalex.org/I4210118883"]},{"raw_affiliation_string":"Gold Stand. Simulations, Ltd., Glasgow, UK","institution_ids":["https://openalex.org/I4210118883"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051464758","display_name":"B. Cheng","orcid":"https://orcid.org/0000-0002-8902-1232"},"institutions":[{"id":"https://openalex.org/I4210118883","display_name":"Gold Standard Simulations (United Kingdom)","ror":"https://ror.org/02qaw7v88","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210118883"]},{"id":"https://openalex.org/I7882870","display_name":"University of Glasgow","ror":"https://ror.org/00vtgdb53","country_code":"GB","type":"education","lineage":["https://openalex.org/I7882870"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Binjie Cheng","raw_affiliation_strings":["University of Glasgow, School of Engineering, Glasgow, U.K","Gold Stand. Simulations, Ltd., Glasgow, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Glasgow, School of Engineering, Glasgow, U.K","institution_ids":["https://openalex.org/I7882870"]},{"raw_affiliation_string":"Gold Stand. Simulations, Ltd., Glasgow, UK","institution_ids":["https://openalex.org/I4210118883"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5016091223","display_name":"Asen Asenov","orcid":"https://orcid.org/0000-0002-9567-6366"},"institutions":[{"id":"https://openalex.org/I4210118883","display_name":"Gold Standard Simulations (United Kingdom)","ror":"https://ror.org/02qaw7v88","country_code":"GB","type":"company","lineage":["https://openalex.org/I4210118883"]},{"id":"https://openalex.org/I7882870","display_name":"University of Glasgow","ror":"https://ror.org/00vtgdb53","country_code":"GB","type":"education","lineage":["https://openalex.org/I7882870"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Asen Asenov","raw_affiliation_strings":["University of Glasgow, School of Engineering, Glasgow, U.K","Gold Stand. Simulations, Ltd., Glasgow, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Glasgow, School of Engineering, Glasgow, U.K","institution_ids":["https://openalex.org/I7882870"]},{"raw_affiliation_string":"Gold Stand. Simulations, Ltd., Glasgow, UK","institution_ids":["https://openalex.org/I4210118883"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.1138,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.88218548,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"32","issue":"12","first_page":"2004","last_page":"2008"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.6005887389183044},{"id":"https://openalex.org/keywords/ion","display_name":"Ion","score":0.5800702571868896},{"id":"https://openalex.org/keywords/gaussian","display_name":"Gaussian","score":0.5780408978462219},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.536956250667572},{"id":"https://openalex.org/keywords/ion-implantation","display_name":"Ion implantation","score":0.5349951982498169},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4764145612716675},{"id":"https://openalex.org/keywords/computational-physics","display_name":"Computational physics","score":0.45669466257095337},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.45577242970466614},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4401957094669342},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.43954578042030334},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.419930636882782},{"id":"https://openalex.org/keywords/function","display_name":"Function (biology)","score":0.41873544454574585},{"id":"https://openalex.org/keywords/set","display_name":"Set (abstract data type)","score":0.4102206528186798},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2245190441608429},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14808714389801025}],"concepts":[{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.6005887389183044},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.5800702571868896},{"id":"https://openalex.org/C163716315","wikidata":"https://www.wikidata.org/wiki/Q901177","display_name":"Gaussian","level":2,"score":0.5780408978462219},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.536956250667572},{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.5349951982498169},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4764145612716675},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.45669466257095337},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.45577242970466614},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4401957094669342},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.43954578042030334},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.419930636882782},{"id":"https://openalex.org/C14036430","wikidata":"https://www.wikidata.org/wiki/Q3736076","display_name":"Function (biology)","level":2,"score":0.41873544454574585},{"id":"https://openalex.org/C177264268","wikidata":"https://www.wikidata.org/wiki/Q1514741","display_name":"Set (abstract data type)","level":2,"score":0.4102206528186798},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2245190441608429},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14808714389801025},{"id":"https://openalex.org/C78458016","wikidata":"https://www.wikidata.org/wiki/Q840400","display_name":"Evolutionary biology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tcad.2013.2277975","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2013.2277975","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},{"id":"pmh:oai:eprints.gla.ac.uk:96382","is_oa":false,"landing_page_url":"http://eprints.gla.ac.uk/96382/","pdf_url":null,"source":{"id":"https://openalex.org/S4210235606","display_name":"ENLIGHTEN (Jurnal Bimbingan dan Konseling Islam)","issn_l":"2622-8912","issn":["2622-8912","2622-8920"],"is_oa":false,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Articles"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G5993706214","display_name":null,"funder_award_id":"EP/E038344/1","funder_id":"https://openalex.org/F4320334627","funder_display_name":"Engineering and Physical Sciences Research Council"}],"funders":[{"id":"https://openalex.org/F4320334627","display_name":"Engineering and Physical Sciences Research Council","ror":"https://ror.org/0439y7842"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":27,"referenced_works":["https://openalex.org/W632186333","https://openalex.org/W1590842594","https://openalex.org/W1601295132","https://openalex.org/W1879328528","https://openalex.org/W1982381330","https://openalex.org/W1992397115","https://openalex.org/W2022964941","https://openalex.org/W2026934726","https://openalex.org/W2042140291","https://openalex.org/W2048593684","https://openalex.org/W2052824980","https://openalex.org/W2056078099","https://openalex.org/W2069496511","https://openalex.org/W2071442656","https://openalex.org/W2072264243","https://openalex.org/W2084697473","https://openalex.org/W2100747775","https://openalex.org/W2122330850","https://openalex.org/W2130276957","https://openalex.org/W2131488301","https://openalex.org/W2131518998","https://openalex.org/W2161911860","https://openalex.org/W4236392555","https://openalex.org/W4253056353","https://openalex.org/W4298132033","https://openalex.org/W6635843155","https://openalex.org/W6668696211"],"related_works":["https://openalex.org/W2104300577","https://openalex.org/W4206445530","https://openalex.org/W2771786520","https://openalex.org/W2810180604","https://openalex.org/W2325281603","https://openalex.org/W2944964251","https://openalex.org/W2012754971","https://openalex.org/W44660823","https://openalex.org/W2072210675","https://openalex.org/W2467420220"],"abstract_inverted_index":{"A":[0,64],"set":[1],"of":[2,15,22,92,100],"analytical":[3,46,81],"models":[4],"based":[5,48,78],"on":[6,49,79],"the":[7,13,19,34],"Pearson":[8],"distribution":[9],"function":[10],"applied":[11],"to":[12,32,44,72],"modeling":[14],"ion":[16,62,74],"implantations":[17,75],"in":[18,37,67,76,88],"3-D":[20],"structure":[21],"FinFETs":[23,38,77],"is":[24,86],"presented.":[25],"The":[26,83],"method":[27],"provides":[28],"a":[29,93],"succinct":[30],"way":[31],"simulate":[33],"doping":[35,58],"profiles":[36],"at":[39],"low":[40],"computational":[41],"cost.":[42],"Compared":[43],"previous":[45],"methods":[47],"Gaussian":[50],"distributions,":[51],"this":[52,80],"approach":[53],"handles":[54],"more":[55],"realistic":[56],"asymmetrical":[57],"distributions":[59],"arising":[60],"from":[61],"implantation.":[63],"simulation":[65,84,91],"module":[66,85],"C++":[68],"has":[69],"been":[70],"developed":[71],"model":[73],"approach.":[82],"demonstrated":[87],"an":[89],"example":[90],"silicon-on-insulator":[94],"FinFET":[95],"with":[96],"physical":[97],"gate":[98],"length":[99],"20":[101],"nm.":[102]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}