{"id":"https://openalex.org/W2156916628","doi":"https://doi.org/10.1109/tcad.2009.2035577","title":"Double Patterning Layout Decomposition for Simultaneous Conflict and Stitch Minimization","display_name":"Double Patterning Layout Decomposition for Simultaneous Conflict and Stitch Minimization","publication_year":2010,"publication_date":"2010-01-26","ids":{"openalex":"https://openalex.org/W2156916628","doi":"https://doi.org/10.1109/tcad.2009.2035577","mag":"2156916628"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.2009.2035577","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2009.2035577","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101737780","display_name":"Kun Yuan","orcid":"https://orcid.org/0000-0001-7104-2847"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kun Yuan","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Technology, Austin, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Technology, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102460504","display_name":"Jae-Seok Yang","orcid":null},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jae-Seok Yang","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Technology, Austin, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Technology, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011883763","display_name":"David Z. Pan","orcid":"https://orcid.org/0000-0002-5705-2501"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David Z. Pan","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Technology, Austin, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Technology, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I86519309"],"apc_list":null,"apc_paid":null,"fwci":6.0847,"has_fulltext":false,"cited_by_count":74,"citation_normalized_percentile":{"value":0.96645012,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":100},"biblio":{"volume":"29","issue":"2","first_page":"185","last_page":"196"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11032","display_name":"VLSI and Analog Circuit Testing","score":0.9958000183105469,"subfield":{"id":"https://openalex.org/subfields/1708","display_name":"Hardware and Architecture"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9947999715805054,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/minification","display_name":"Minification","score":0.6012346148490906},{"id":"https://openalex.org/keywords/grid","display_name":"Grid","score":0.5976977944374084},{"id":"https://openalex.org/keywords/integer-programming","display_name":"Integer programming","score":0.5732608437538147},{"id":"https://openalex.org/keywords/computation","display_name":"Computation","score":0.5631426572799683},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5594534277915955},{"id":"https://openalex.org/keywords/partition","display_name":"Partition (number theory)","score":0.5065187215805054},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.4868104159832001},{"id":"https://openalex.org/keywords/decomposition","display_name":"Decomposition","score":0.436712384223938},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.3544217348098755},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.3261442184448242},{"id":"https://openalex.org/keywords/combinatorics","display_name":"Combinatorics","score":0.11275491118431091}],"concepts":[{"id":"https://openalex.org/C147764199","wikidata":"https://www.wikidata.org/wiki/Q6865248","display_name":"Minification","level":2,"score":0.6012346148490906},{"id":"https://openalex.org/C187691185","wikidata":"https://www.wikidata.org/wiki/Q2020720","display_name":"Grid","level":2,"score":0.5976977944374084},{"id":"https://openalex.org/C56086750","wikidata":"https://www.wikidata.org/wiki/Q6042592","display_name":"Integer programming","level":2,"score":0.5732608437538147},{"id":"https://openalex.org/C45374587","wikidata":"https://www.wikidata.org/wiki/Q12525525","display_name":"Computation","level":2,"score":0.5631426572799683},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5594534277915955},{"id":"https://openalex.org/C42812","wikidata":"https://www.wikidata.org/wiki/Q1082910","display_name":"Partition (number theory)","level":2,"score":0.5065187215805054},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.4868104159832001},{"id":"https://openalex.org/C124681953","wikidata":"https://www.wikidata.org/wiki/Q339062","display_name":"Decomposition","level":2,"score":0.436712384223938},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.3544217348098755},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3261442184448242},{"id":"https://openalex.org/C114614502","wikidata":"https://www.wikidata.org/wiki/Q76592","display_name":"Combinatorics","level":1,"score":0.11275491118431091},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tcad.2009.2035577","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2009.2035577","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.618.8698","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.618.8698","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.cerc.utexas.edu/utda/publications/tcad_kun_dpl.pdf","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1937820206","https://openalex.org/W1990184359","https://openalex.org/W2009102457","https://openalex.org/W2015622761","https://openalex.org/W2017820380","https://openalex.org/W2021311077","https://openalex.org/W2032674353","https://openalex.org/W2041600236","https://openalex.org/W2094370252","https://openalex.org/W2110170996","https://openalex.org/W2152190733","https://openalex.org/W3149318025","https://openalex.org/W4229826372","https://openalex.org/W4254569978","https://openalex.org/W6640590311","https://openalex.org/W6652691047","https://openalex.org/W6654863839","https://openalex.org/W6655517115","https://openalex.org/W6660964161","https://openalex.org/W6673907574","https://openalex.org/W6810899888"],"related_works":["https://openalex.org/W3161249280","https://openalex.org/W2267059662","https://openalex.org/W4388411807","https://openalex.org/W2364268683","https://openalex.org/W1519906715","https://openalex.org/W2478803962","https://openalex.org/W3169430512","https://openalex.org/W2380059383","https://openalex.org/W2063679720","https://openalex.org/W2384804534"],"abstract_inverted_index":{"Double":[0],"patterning":[1],"lithography":[2],"(DPL)":[3],"is":[4,42,60,145],"considered":[5],"as":[6,178,187,189],"a":[7,57,86,129],"most":[8],"likely":[9],"solution":[10],"for":[11,184],"32":[12],"nm/22":[13],"nm":[14],"technology.":[15],"In":[16,83,166],"DPL,":[17],"the":[18,36,69,75,98,149],"layout":[19,116,164],"patterns":[20,67],"are":[21],"decomposed":[22],"into":[23,93],"two":[24,30,39,65,94,206],"masks":[25],"(colors),":[26],"and":[27,32,111,121,132,162,181,199],"manufactured":[28],"through":[29],"exposures":[31],"etch":[33],"steps.":[34],"If":[35],"spacing":[37],"between":[38],"features":[40],"(polygons)":[41],"less":[43],"than":[44],"certain":[45],"minimum":[46,70,182],"coloring":[47,59,120],"distance,":[48],"they":[49],"have":[50],"to":[51,79,90,96,109,173],"be":[52,73,91,171],"assigned":[53],"opposite":[54],"colors.":[55],"However,":[56],"proper":[58],"not":[61],"always":[62],"feasible":[63],"because":[64],"neighboring":[66],"within":[68],"distance":[71],"may":[72,88],"in":[74,101,124,146],"same":[76],"mask":[77],"due":[78,108],"complex":[80],"pattern":[81],"configurations.":[82],"that":[84],"case,":[85],"feature":[87],"need":[89],"split":[92],"parts":[95],"resolve":[97],"conflict,":[99],"resulting":[100],"stitch":[102,133],"insertion":[103],"which":[104],"causes":[105],"yield":[106],"loss":[107],"overlay":[110],"line-end":[112],"effect.":[113],"While":[114],"previous":[115],"decomposition":[117],"approaches":[118],"perform":[119],"splitting":[122],"separately,":[123],"this":[125],"paper,":[126],"we":[127],"propose":[128],"simultaneous":[130],"conflict":[131],"minimization":[134],"algorithm":[135,150,169],"with":[136,205],"an":[137],"integer":[138],"linear":[139],"programming":[140],"(ILP)":[141],"formulation.":[142],"Since":[143],"ILP":[144],"class":[147],"NP-hard,":[148],"includes":[151],"three":[152],"speed-up":[153],"techniques:":[154],"(1)":[155],"grid":[156],"merging;":[157],"(2)":[158],"independent":[159],"component":[160],"computation;":[161],"(3)":[163],"partition.":[165],"addition,":[167],"our":[168],"can":[170,194],"extended":[172],"handle":[174],"design":[175],"rules":[176],"such":[177],"overlap":[179],"margin":[180],"width":[183],"practical":[185],"use":[186],"well":[188],"off-grid":[190],"layout.":[191],"Our":[192],"approach":[193],"reduce":[195],"33%":[196],"of":[197],"stitches":[198],"remove":[200],"conflicts":[201],"by":[202],"87.6%":[203],"compared":[204],"phase":[207],"greedy":[208],"decomposition.":[209]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":6},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":6},{"year":2016,"cited_by_count":15},{"year":2015,"cited_by_count":10},{"year":2014,"cited_by_count":6},{"year":2013,"cited_by_count":7},{"year":2012,"cited_by_count":7}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
