{"id":"https://openalex.org/W2175246050","doi":"https://doi.org/10.1109/tcad.2008.2006148","title":"Metal-Density-Driven Placement for CMP Variation and Routability","display_name":"Metal-Density-Driven Placement for CMP Variation and Routability","publication_year":2008,"publication_date":"2008-11-25","ids":{"openalex":"https://openalex.org/W2175246050","doi":"https://doi.org/10.1109/tcad.2008.2006148","mag":"2175246050"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.2008.2006148","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2008.2006148","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5089860877","display_name":"Tung-Chieh Chen","orcid":"https://orcid.org/0009-0000-3163-3634"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Tung-Chieh Chen","raw_affiliation_strings":["SpringSoft, Inc., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"SpringSoft, Inc., Hsinchu, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080091586","display_name":"Minsik Cho","orcid":"https://orcid.org/0000-0002-9307-8549"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Minsik Cho","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Texas, Austin, Austin, TX, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Texas, Austin, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011883763","display_name":"David Z. Pan","orcid":"https://orcid.org/0000-0002-5705-2501"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David Z. Pan","raw_affiliation_strings":["Department of Electrical and Computer Engineering, University of Technology, Austin, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, University of Technology, Austin, USA","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018371636","display_name":"Yao\u2010Wen Chang","orcid":"https://orcid.org/0000-0002-0564-5719"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yao-Wen Chang","raw_affiliation_strings":["Department of Electrical Engineering, Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5089860877"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.7266,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.74821579,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"27","issue":"12","first_page":"2145","last_page":"2155"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11522","display_name":"VLSI and FPGA Design Techniques","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/chemical-mechanical-planarization","display_name":"Chemical-mechanical planarization","score":0.9013018608093262},{"id":"https://openalex.org/keywords/variation","display_name":"Variation (astronomy)","score":0.5605096817016602},{"id":"https://openalex.org/keywords/probabilistic-logic","display_name":"Probabilistic logic","score":0.5381067991256714},{"id":"https://openalex.org/keywords/routing","display_name":"Routing (electronic design automation)","score":0.5308101177215576},{"id":"https://openalex.org/keywords/placement","display_name":"Placement","score":0.5076617002487183},{"id":"https://openalex.org/keywords/polishing","display_name":"Polishing","score":0.4469604790210724},{"id":"https://openalex.org/keywords/parallel-computing","display_name":"Parallel computing","score":0.43178611993789673},{"id":"https://openalex.org/keywords/metal","display_name":"Metal","score":0.4300980269908905},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.41435837745666504},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.399723082780838},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.35788238048553467},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.2248421311378479},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.16598787903785706},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.12658900022506714},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.0995732843875885},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.09344923496246338},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.06896942853927612}],"concepts":[{"id":"https://openalex.org/C180088628","wikidata":"https://www.wikidata.org/wiki/Q1069404","display_name":"Chemical-mechanical planarization","level":3,"score":0.9013018608093262},{"id":"https://openalex.org/C2778334786","wikidata":"https://www.wikidata.org/wiki/Q1586270","display_name":"Variation (astronomy)","level":2,"score":0.5605096817016602},{"id":"https://openalex.org/C49937458","wikidata":"https://www.wikidata.org/wiki/Q2599292","display_name":"Probabilistic logic","level":2,"score":0.5381067991256714},{"id":"https://openalex.org/C74172769","wikidata":"https://www.wikidata.org/wiki/Q1446839","display_name":"Routing (electronic design automation)","level":2,"score":0.5308101177215576},{"id":"https://openalex.org/C117690923","wikidata":"https://www.wikidata.org/wiki/Q1484784","display_name":"Placement","level":4,"score":0.5076617002487183},{"id":"https://openalex.org/C138113353","wikidata":"https://www.wikidata.org/wiki/Q611639","display_name":"Polishing","level":2,"score":0.4469604790210724},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.43178611993789673},{"id":"https://openalex.org/C544153396","wikidata":"https://www.wikidata.org/wiki/Q11426","display_name":"Metal","level":2,"score":0.4300980269908905},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.41435837745666504},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.399723082780838},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.35788238048553467},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.2248421311378479},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.16598787903785706},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.12658900022506714},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0995732843875885},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.09344923496246338},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.06896942853927612},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C44870925","wikidata":"https://www.wikidata.org/wiki/Q37547","display_name":"Astrophysics","level":1,"score":0.0},{"id":"https://openalex.org/C188817802","wikidata":"https://www.wikidata.org/wiki/Q13426855","display_name":"Physical design","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcad.2008.2006148","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.2008.2006148","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":35,"referenced_works":["https://openalex.org/W1534047177","https://openalex.org/W1560543304","https://openalex.org/W1603813963","https://openalex.org/W1972047514","https://openalex.org/W1976505060","https://openalex.org/W1984954427","https://openalex.org/W1996746141","https://openalex.org/W2002525234","https://openalex.org/W2016999260","https://openalex.org/W2022749924","https://openalex.org/W2025082082","https://openalex.org/W2041941568","https://openalex.org/W2048796234","https://openalex.org/W2067035452","https://openalex.org/W2103833707","https://openalex.org/W2105616993","https://openalex.org/W2110827694","https://openalex.org/W2114871550","https://openalex.org/W2125555539","https://openalex.org/W2132823746","https://openalex.org/W2133367791","https://openalex.org/W2147899388","https://openalex.org/W2155462145","https://openalex.org/W2158548623","https://openalex.org/W2162354220","https://openalex.org/W2165616866","https://openalex.org/W2171815793","https://openalex.org/W2173598676","https://openalex.org/W2173896496","https://openalex.org/W2178255440","https://openalex.org/W2307743311","https://openalex.org/W4231946008","https://openalex.org/W6679604499","https://openalex.org/W6683300795","https://openalex.org/W6698088404"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2378882722","https://openalex.org/W2498038632","https://openalex.org/W2139482847","https://openalex.org/W4289526958","https://openalex.org/W4318224792","https://openalex.org/W630553074","https://openalex.org/W9906941","https://openalex.org/W582091924","https://openalex.org/W2074773632"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"we":[3,28,51],"propose":[4],"the":[5,43,48,78,88,100],"first":[6,29],"metal-density-driven":[7],"(MDD)":[8],"placement":[9,55,125],"algorithm":[10],"to":[11,41,57,60,96,110,129],"reduce":[12,61,77],"chemical-mechanical":[13],"planarization/polishing":[14],"(CMP)":[15],"variation":[16,90],"and":[17,26,35,69,99],"achieve":[18],"higher":[19],"routability.":[20,131],"To":[21],"efficiently":[22],"estimate":[23],"metal":[24],"density":[25],"thickness,":[27],"apply":[30],"a":[31,37],"probabilistic":[32],"routing":[33],"model":[34,40],"then":[36],"predictive":[38],"CMP":[39,79],"obtain":[42],"metal-density":[44,49,62],"map.":[45],"Based":[46],"on":[47,67],"map,":[50],"use":[52],"an":[53],"analytical":[54],"framework":[56],"spread":[58],"blocks":[59],"variation.":[63,80],"Experimental":[64],"results":[65,121],"based":[66],"BoxRouter":[68],"NTUgr":[70],"show":[71],"that":[72],"our":[73,83,123],"method":[74],"can":[75,91,105,126],"effectively":[76],"By":[81],"using":[82,116],"MDD":[84,124],"placement,":[85],"for":[86],"example,":[87],"topography":[89],"be":[92,106],"reduced":[93,107],"by":[94,108],"up":[95,109],"38%":[97],"(23%)":[98],"number":[101],"of":[102,122],"dummy":[103],"fills":[104],"14%":[111],"(8%),":[112],"compared":[113],"with":[114],"those":[115],"wirelength-driven":[117],"(cell-density-driven)":[118],"placement.":[119],"The":[120],"also":[127],"lead":[128],"better":[130]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}