{"id":"https://openalex.org/W2064324666","doi":"https://doi.org/10.1109/tcad.1987.1270262","title":"Computer Simulation of Impurity Diffusion in Semiconductors by the Monte Carlo Method","display_name":"Computer Simulation of Impurity Diffusion in Semiconductors by the Monte Carlo Method","publication_year":1987,"publication_date":"1987-03-01","ids":{"openalex":"https://openalex.org/W2064324666","doi":"https://doi.org/10.1109/tcad.1987.1270262","mag":"2064324666"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.1987.1270262","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.1987.1270262","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111433642","display_name":"A. Akiyama","orcid":null},"institutions":[{"id":"https://openalex.org/I4210097831","display_name":"Yamato University","ror":"https://ror.org/00wwj8r66","country_code":"JP","type":"education","lineage":["https://openalex.org/I4210097831"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"A. Akiyama","raw_affiliation_strings":["Yamato Laboratory, IBM Japan Limited, Japan","IBM Japan, Yamato Laboratory, Japan"],"affiliations":[{"raw_affiliation_string":"Yamato Laboratory, IBM Japan Limited, Japan","institution_ids":[]},{"raw_affiliation_string":"IBM Japan, Yamato Laboratory, Japan","institution_ids":["https://openalex.org/I4210097831"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111625953","display_name":"Takashi Hosoi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114283","display_name":"Kyocera (Japan)","ror":"https://ror.org/025y1g718","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210114283"]},{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["JP","US"],"is_corresponding":false,"raw_author_name":"T. Hosoi","raw_affiliation_strings":["Kyocera Corporation, Kyoto, Japan","IBM, ,"],"affiliations":[{"raw_affiliation_string":"Kyocera Corporation, Kyoto, Japan","institution_ids":["https://openalex.org/I4210114283"]},{"raw_affiliation_string":"IBM, ,","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064498068","display_name":"Ichiro Ishihara","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP","US"],"is_corresponding":false,"raw_author_name":"I. Ishihara","raw_affiliation_strings":["Toshiba Corporation, Tokyo, Japan","IBM, ,"],"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Tokyo, Japan","institution_ids":["https://openalex.org/I1292669757"]},{"raw_affiliation_string":"IBM, ,","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053587486","display_name":"Satoru Matsumoto","orcid":"https://orcid.org/0000-0002-0817-4713"},"institutions":[{"id":"https://openalex.org/I203951103","display_name":"Keio University","ror":"https://ror.org/02kn6nx58","country_code":"JP","type":"education","lineage":["https://openalex.org/I203951103"]},{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]}],"countries":["JP","US"],"is_corresponding":false,"raw_author_name":"S. Matsumoto","raw_affiliation_strings":["Department of Electrical Engineering, Keio University, Yokohama, Japan","IBM, ,"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Keio University, Yokohama, Japan","institution_ids":["https://openalex.org/I203951103"]},{"raw_affiliation_string":"IBM, ,","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109979365","display_name":"Tatsuya Niimi","orcid":null},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I1314466530","display_name":"Tokai University","ror":"https://ror.org/01p7qe739","country_code":"JP","type":"education","lineage":["https://openalex.org/I1314466530"]}],"countries":["JP","US"],"is_corresponding":false,"raw_author_name":"T. Niimi","raw_affiliation_strings":["Department of Electrical Engineering, Tokai University, Japan","IBM, ,"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Tokai University, Japan","institution_ids":["https://openalex.org/I1314466530"]},{"raw_affiliation_string":"IBM, ,","institution_ids":["https://openalex.org/I1341412227"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5111433642"],"corresponding_institution_ids":["https://openalex.org/I4210097831"],"apc_list":null,"apc_paid":null,"fwci":1.0645,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.77219922,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"6","issue":"2","first_page":"185","last_page":"189"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9962000250816345,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13645","display_name":"Thermodynamic and Structural Properties of Metals and Alloys","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/monte-carlo-method","display_name":"Monte Carlo method","score":0.7923393249511719},{"id":"https://openalex.org/keywords/diffusion","display_name":"Diffusion","score":0.6183031797409058},{"id":"https://openalex.org/keywords/impurity","display_name":"Impurity","score":0.5892543196678162},{"id":"https://openalex.org/keywords/statistical-physics","display_name":"Statistical physics","score":0.5875754356384277},{"id":"https://openalex.org/keywords/semiconductor","display_name":"Semiconductor","score":0.5026841163635254},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.3955593705177307},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3496626317501068},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.27433204650878906},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.1201576292514801},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.10097679495811462},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.09761664271354675},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.07734739780426025},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.06484413146972656}],"concepts":[{"id":"https://openalex.org/C19499675","wikidata":"https://www.wikidata.org/wiki/Q232207","display_name":"Monte Carlo method","level":2,"score":0.7923393249511719},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.6183031797409058},{"id":"https://openalex.org/C71987851","wikidata":"https://www.wikidata.org/wiki/Q7216430","display_name":"Impurity","level":2,"score":0.5892543196678162},{"id":"https://openalex.org/C121864883","wikidata":"https://www.wikidata.org/wiki/Q677916","display_name":"Statistical physics","level":1,"score":0.5875754356384277},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.5026841163635254},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.3955593705177307},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3496626317501068},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.27433204650878906},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1201576292514801},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.10097679495811462},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.09761664271354675},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.07734739780426025},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.06484413146972656}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcad.1987.1270262","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.1987.1270262","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W1977429739","https://openalex.org/W2020539635","https://openalex.org/W2052708586","https://openalex.org/W2326565381","https://openalex.org/W4254434670","https://openalex.org/W4300515082"],"related_works":["https://openalex.org/W2065425365","https://openalex.org/W2955782507","https://openalex.org/W1995614330","https://openalex.org/W2046350360","https://openalex.org/W2102378921","https://openalex.org/W2045807138","https://openalex.org/W1997850781","https://openalex.org/W2330205119","https://openalex.org/W1970319135","https://openalex.org/W1982407550"],"abstract_inverted_index":{"A":[0],"methodology":[1],"of":[2,24,37],"impurity":[3,46],"diffusion":[4,47],"in":[5,52],"semiconductors":[6],"by":[7,20],"the":[8,22,30,35],"Monte":[9],"Carlo":[10],"method":[11,42],"has":[12],"been":[13],"presented.":[14],"The":[15],"simulation":[16],"is":[17,43,60],"carried":[18],"out":[19],"repeating":[21],"motion":[23],"both":[25],"vacancies":[26],"and":[27,57],"self-interstitials":[28],"with":[29],"complementary":[31],"weighting":[32],"factor":[33],"for":[34],"jumps":[36],"respective":[38],"point":[39],"defects.":[40],"This":[41],"applied":[44],"to":[45],"from":[48],"a":[49,53],"limited":[50],"source":[51],"virtual":[54],"semiconductor":[55],"crystal":[56],"its":[58],"validity":[59],"confirmed.":[61]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-04-05T17:49:38.594831","created_date":"2025-10-10T00:00:00"}