{"id":"https://openalex.org/W2050926663","doi":"https://doi.org/10.1109/tcad.1986.1270201","title":"FINDER: A CAD System-Based Electron Beam Tester for Fault Diagnosis of VLSI Circuits","display_name":"FINDER: A CAD System-Based Electron Beam Tester for Fault Diagnosis of VLSI Circuits","publication_year":1986,"publication_date":"1986-04-01","ids":{"openalex":"https://openalex.org/W2050926663","doi":"https://doi.org/10.1109/tcad.1986.1270201","mag":"2050926663"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.1986.1270201","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.1986.1270201","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054701478","display_name":"Norio Kuji","orcid":null},"institutions":[{"id":"https://openalex.org/I4210105847","display_name":"NTT Basic Research Laboratories","ror":"https://ror.org/01m2pas06","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210105847"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"N. Kuji","raw_affiliation_strings":["NTT Atsugi Electrical Communication Laboratories, Atsugi, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"NTT Atsugi Electrical Communication Laboratories, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210105847"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007536102","display_name":"T. Tamama","orcid":null},"institutions":[{"id":"https://openalex.org/I4210105847","display_name":"NTT Basic Research Laboratories","ror":"https://ror.org/01m2pas06","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210105847"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Tamama","raw_affiliation_strings":["NTT Atsugi Electrical Communication Laboratories, Atsugi, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"NTT Atsugi Electrical Communication Laboratories, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210105847"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5076171457","display_name":"Mitsuyoshi Nagatani","orcid":null},"institutions":[{"id":"https://openalex.org/I4210105847","display_name":"NTT Basic Research Laboratories","ror":"https://ror.org/01m2pas06","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4210105847"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"M. Nagatani","raw_affiliation_strings":["NTT Atsugi Electrical Communication Laboratories, Atsugi, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"NTT Atsugi Electrical Communication Laboratories, Atsugi, Kanagawa, Japan","institution_ids":["https://openalex.org/I4210105847"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5054701478"],"corresponding_institution_ids":["https://openalex.org/I4210105847"],"apc_list":null,"apc_paid":null,"fwci":5.4221,"has_fulltext":false,"cited_by_count":19,"citation_normalized_percentile":{"value":0.95523856,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":null,"biblio":{"volume":"5","issue":"2","first_page":"313","last_page":"319"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/very-large-scale-integration","display_name":"Very-large-scale integration","score":0.6049544811248779},{"id":"https://openalex.org/keywords/tracing","display_name":"Tracing","score":0.6045094728469849},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.6022610068321228},{"id":"https://openalex.org/keywords/interconnection","display_name":"Interconnection","score":0.5573747754096985},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5464769601821899},{"id":"https://openalex.org/keywords/fault","display_name":"Fault (geology)","score":0.5279568433761597},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.5121347904205322},{"id":"https://openalex.org/keywords/cad","display_name":"CAD","score":0.4657944440841675},{"id":"https://openalex.org/keywords/state","display_name":"State (computer science)","score":0.4547412395477295},{"id":"https://openalex.org/keywords/and-gate","display_name":"AND gate","score":0.4129104018211365},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3947802782058716},{"id":"https://openalex.org/keywords/computer-hardware","display_name":"Computer hardware","score":0.3388403058052063},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.31614571809768677},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2698412835597992},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.24900773167610168},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.15353405475616455},{"id":"https://openalex.org/keywords/engineering-drawing","display_name":"Engineering drawing","score":0.09072452783584595}],"concepts":[{"id":"https://openalex.org/C14580979","wikidata":"https://www.wikidata.org/wiki/Q876049","display_name":"Very-large-scale integration","level":2,"score":0.6049544811248779},{"id":"https://openalex.org/C138673069","wikidata":"https://www.wikidata.org/wiki/Q322229","display_name":"Tracing","level":2,"score":0.6045094728469849},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.6022610068321228},{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.5573747754096985},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5464769601821899},{"id":"https://openalex.org/C175551986","wikidata":"https://www.wikidata.org/wiki/Q47089","display_name":"Fault (geology)","level":2,"score":0.5279568433761597},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.5121347904205322},{"id":"https://openalex.org/C194789388","wikidata":"https://www.wikidata.org/wiki/Q17855283","display_name":"CAD","level":2,"score":0.4657944440841675},{"id":"https://openalex.org/C48103436","wikidata":"https://www.wikidata.org/wiki/Q599031","display_name":"State (computer science)","level":2,"score":0.4547412395477295},{"id":"https://openalex.org/C10418432","wikidata":"https://www.wikidata.org/wiki/Q560370","display_name":"AND gate","level":3,"score":0.4129104018211365},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3947802782058716},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.3388403058052063},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.31614571809768677},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2698412835597992},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.24900773167610168},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.15353405475616455},{"id":"https://openalex.org/C199639397","wikidata":"https://www.wikidata.org/wiki/Q1788588","display_name":"Engineering drawing","level":1,"score":0.09072452783584595},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C165205528","wikidata":"https://www.wikidata.org/wiki/Q83371","display_name":"Seismology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcad.1986.1270201","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.1986.1270201","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1980752348","https://openalex.org/W1999719559","https://openalex.org/W1999927781","https://openalex.org/W2009968310","https://openalex.org/W2013227636","https://openalex.org/W2032052272","https://openalex.org/W2112704929","https://openalex.org/W2151442492","https://openalex.org/W4235528260","https://openalex.org/W4253819735","https://openalex.org/W6645396727","https://openalex.org/W6650459215","https://openalex.org/W6682252841"],"related_works":["https://openalex.org/W2909211499","https://openalex.org/W3119688974","https://openalex.org/W2060067973","https://openalex.org/W4321519815","https://openalex.org/W2762653771","https://openalex.org/W1967469573","https://openalex.org/W2285967966","https://openalex.org/W2329911060","https://openalex.org/W2912276428","https://openalex.org/W2743857945"],"abstract_inverted_index":{"A":[0,52],"new":[1],"electron":[2],"beam":[3,17],"tester,":[4],"\"FINDER\"":[5],"(Fault":[6],"Identification":[7],"system":[8,47],"for":[9,99],"LSI":[10,43,62],"circuits":[11],"with":[12,66,75,114],"a":[13,36,49,119],"Noncontacting":[14],"Database-oriented":[15],"Electron":[16,38],"testeR),":[18],"has":[19],"been":[20],"developed.":[21],"This":[22],"tester":[23],"can":[24,108],"automatically":[25,89],"pinpoint":[26],"faulty":[27],"gates":[28,107],"in":[29,48,90],"logic":[30,77,97,116,120],"VLSI":[31],"circuits.":[32,121],"It":[33],"consists":[34],"of":[35,60],"Scanning":[37],"Microscope":[39],"(SEM)":[40],"and":[41,94],"an":[42,61],"Computer-Aided":[44],"Design":[45],"(CAD)":[46],"host":[50,92],"computer.":[51],"logic-state":[53],"image":[54],"is":[55,103],"observed":[56,96],"from":[57,81],"the":[58,67,82,91,95],"surface":[59],"circuit":[63],"being":[64],"tested":[65],"SEM.":[68],"In":[69],"addition,":[70],"corresponding":[71],"interconnection":[72,101],"patterns":[73],"superimposed":[74],"simulated":[76],"states":[78,117],"are":[79,87],"obtained":[80],"CAD":[83],"system.":[84],"Both":[85],"images":[86],"matched":[88],"computer,":[93],"state":[98],"every":[100],"pattern":[102],"then":[104],"checked.":[105],"Faulty":[106],"be":[109],"pinpointed":[110],"by":[111],"tracing":[112],"nodes":[113],"incorrect":[115],"on":[118]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}