{"id":"https://openalex.org/W2012186358","doi":"https://doi.org/10.1109/tcad.1985.1270137","title":"A Boundary Integral Equation Approach to Oxidation Modeling","display_name":"A Boundary Integral Equation Approach to Oxidation Modeling","publication_year":1985,"publication_date":"1985-10-01","ids":{"openalex":"https://openalex.org/W2012186358","doi":"https://doi.org/10.1109/tcad.1985.1270137","mag":"2012186358"},"language":"en","primary_location":{"id":"doi:10.1109/tcad.1985.1270137","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.1985.1270137","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Thye-Lai Tung","orcid":null},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Thye-Lai Tung","raw_affiliation_strings":["Massachusetts Institute of Technology, Cambridge, MA, USA","Massachusetts Institute of Technology; ,; Cambridge MA USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Massachusetts Institute of Technology; ,; Cambridge MA USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5056314310","display_name":"D.A. Antoniadis","orcid":"https://orcid.org/0000-0002-4836-6525"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"D.A. Antoniadis","raw_affiliation_strings":["Massachusetts Institute of Technology, Cambridge, MA, USA","Massachusetts Institute of Technology; ,; Cambridge MA USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Massachusetts Institute of Technology; ,; Cambridge MA USA","institution_ids":["https://openalex.org/I63966007"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I63966007"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.1754189,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"4","issue":"4","first_page":"398","last_page":"403"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10514","display_name":"Numerical methods in engineering","score":0.9939000010490417,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10514","display_name":"Numerical methods in engineering","score":0.9939000010490417,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11263","display_name":"Electromagnetic Simulation and Numerical Methods","score":0.9894999861717224,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10339","display_name":"Advanced Numerical Methods in Computational Mathematics","score":0.9889000058174133,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/biharmonic-equation","display_name":"Biharmonic equation","score":0.7708330750465393},{"id":"https://openalex.org/keywords/boundary","display_name":"Boundary (topology)","score":0.5945682525634766},{"id":"https://openalex.org/keywords/boundary-value-problem","display_name":"Boundary value problem","score":0.5573002099990845},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.5474626421928406},{"id":"https://openalex.org/keywords/simplicity","display_name":"Simplicity","score":0.5349428057670593},{"id":"https://openalex.org/keywords/integral-equation","display_name":"Integral equation","score":0.5323852300643921},{"id":"https://openalex.org/keywords/harmonic","display_name":"Harmonic","score":0.49374279379844666},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.45641520619392395},{"id":"https://openalex.org/keywords/mathematical-analysis","display_name":"Mathematical analysis","score":0.4347479045391083},{"id":"https://openalex.org/keywords/thermal-oxidation","display_name":"Thermal oxidation","score":0.4278934597969055},{"id":"https://openalex.org/keywords/variety","display_name":"Variety (cybernetics)","score":0.42768779397010803},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.40510833263397217},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.3837660253047943},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.33595120906829834},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2662225663661957},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.09486463665962219},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.0752842128276825}],"concepts":[{"id":"https://openalex.org/C145784156","wikidata":"https://www.wikidata.org/wiki/Q859808","display_name":"Biharmonic equation","level":3,"score":0.7708330750465393},{"id":"https://openalex.org/C62354387","wikidata":"https://www.wikidata.org/wiki/Q875399","display_name":"Boundary (topology)","level":2,"score":0.5945682525634766},{"id":"https://openalex.org/C182310444","wikidata":"https://www.wikidata.org/wiki/Q1332643","display_name":"Boundary value problem","level":2,"score":0.5573002099990845},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.5474626421928406},{"id":"https://openalex.org/C2776372474","wikidata":"https://www.wikidata.org/wiki/Q508291","display_name":"Simplicity","level":2,"score":0.5349428057670593},{"id":"https://openalex.org/C27016315","wikidata":"https://www.wikidata.org/wiki/Q580101","display_name":"Integral equation","level":2,"score":0.5323852300643921},{"id":"https://openalex.org/C127934551","wikidata":"https://www.wikidata.org/wiki/Q1148098","display_name":"Harmonic","level":2,"score":0.49374279379844666},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.45641520619392395},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.4347479045391083},{"id":"https://openalex.org/C2779281663","wikidata":"https://www.wikidata.org/wiki/Q1549368","display_name":"Thermal oxidation","level":3,"score":0.4278934597969055},{"id":"https://openalex.org/C136197465","wikidata":"https://www.wikidata.org/wiki/Q1729295","display_name":"Variety (cybernetics)","level":2,"score":0.42768779397010803},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.40510833263397217},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3837660253047943},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.33595120906829834},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2662225663661957},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.09486463665962219},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0752842128276825},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tcad.1985.1270137","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcad.1985.1270137","pdf_url":null,"source":{"id":"https://openalex.org/S100835903","display_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","issn_l":"0278-0070","issn":["0278-0070","1937-4151"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W13130175","https://openalex.org/W2005331166","https://openalex.org/W2036586785","https://openalex.org/W2050906147","https://openalex.org/W2093914900","https://openalex.org/W2110942830","https://openalex.org/W2131027609","https://openalex.org/W2138751008","https://openalex.org/W2568618671","https://openalex.org/W3000032219"],"related_works":["https://openalex.org/W2503543076","https://openalex.org/W2738351852","https://openalex.org/W1131942522","https://openalex.org/W3139424580","https://openalex.org/W1986396960","https://openalex.org/W2105227268","https://openalex.org/W4307213029","https://openalex.org/W1989880152","https://openalex.org/W1977275827","https://openalex.org/W2384325909"],"abstract_inverted_index":{"Thermal":[0],"oxidation":[1],"of":[2,7,21,42,82,91,95],"silicon":[3],"involves":[4],"the":[5,11,15,19,27,78],"diffusion":[6],"oxidant":[8],"molecules":[9],"from":[10,26],"gas-oxide":[12],"interface":[13],"to":[14,38],"oxide-silicon":[16],"interface,":[17],"and":[18,44,67],"transport":[20],"newly":[22],"formed":[23],"oxide":[24],"away":[25],"latter.":[28],"Under":[29],"suitable":[30],"formulations":[31],"these":[32,49],"two":[33],"processes":[34],"can":[35],"be":[36,39],"shown":[37],"boundary-value":[40],"problems":[41],"harmonic":[43],"biharmonic":[45],"nature.":[46],"Based":[47],"on":[48,77],"properties,":[50],"a":[51,71,92],"boundary":[52,96],"integral":[53],"equation":[54],"method":[55,64],"(BIEM)":[56],"has":[57],"been":[58],"developed":[59],"for":[60],"modeling":[61],"oxidation.":[62],"This":[63],"achieves":[65],"simplicity":[66],"efficiency":[68],"by":[69],"solving":[70],"two-dimensional":[72],"problem":[73],"using":[74],"line":[75],"integrals":[76],"boundaries.":[79],"The":[80],"use":[81],"source":[83],"distributions":[84],"as":[85],"intermediary":[86],"solutions":[87],"facilitates":[88],"direct":[89],"calculations":[90],"wide":[93],"variety":[94],"parameters.":[97]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}