{"id":"https://openalex.org/W1965693364","doi":"https://doi.org/10.1109/tbme.2012.2195782","title":"MEMS Capacitive Accelerometer-Based Middle Ear Microphone","display_name":"MEMS Capacitive Accelerometer-Based Middle Ear Microphone","publication_year":2012,"publication_date":"2012-04-23","ids":{"openalex":"https://openalex.org/W1965693364","doi":"https://doi.org/10.1109/tbme.2012.2195782","mag":"1965693364","pmid":"https://pubmed.ncbi.nlm.nih.gov/22542650"},"language":"en","primary_location":{"id":"doi:10.1109/tbme.2012.2195782","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tbme.2012.2195782","pdf_url":null,"source":{"id":"https://openalex.org/S5240358","display_name":"IEEE Transactions on Biomedical Engineering","issn_l":"0018-9294","issn":["0018-9294","1558-2531"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Biomedical Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","pubmed"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5073669738","display_name":"Darrin J. Young","orcid":"https://orcid.org/0000-0001-8428-7026"},"institutions":[{"id":"https://openalex.org/I223532165","display_name":"University of Utah","ror":"https://ror.org/03r0ha626","country_code":"US","type":"education","lineage":["https://openalex.org/I223532165"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Darrin J. Young","raw_affiliation_strings":["Department of Electrical and Computer Engineering and the Department of Bioengineering, University of Utah, Salt Lake City, UT 44112, USA. darrin.young@utah.edu","Dept. of Electr. & Comput. Eng. & the Dept. of Bioeng., Univ. of Utah, Salt Lake City, UT, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering and the Department of Bioengineering, University of Utah, Salt Lake City, UT 44112, USA. darrin.young@utah.edu","institution_ids":["https://openalex.org/I223532165"]},{"raw_affiliation_string":"Dept. of Electr. & Comput. Eng. & the Dept. of Bioeng., Univ. of Utah, Salt Lake City, UT, USA","institution_ids":["https://openalex.org/I223532165"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020377877","display_name":"Mark Zurcher","orcid":null},"institutions":[{"id":"https://openalex.org/I58956616","display_name":"Case Western Reserve University","ror":"https://ror.org/051fd9666","country_code":"US","type":"education","lineage":["https://openalex.org/I58956616"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mark A. Zurcher","raw_affiliation_strings":["Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH, USA","Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH, USA","institution_ids":["https://openalex.org/I58956616"]},{"raw_affiliation_string":"Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA","institution_ids":["https://openalex.org/I58956616"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057978877","display_name":"Maroun T. Semaan","orcid":null},"institutions":[{"id":"https://openalex.org/I2799343972","display_name":"University Hospitals of Cleveland","ror":"https://ror.org/0130jk839","country_code":"US","type":"funder","lineage":["https://openalex.org/I2799343972"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Maroun Semaan","raw_affiliation_strings":["Department of Otolaryngology-Head and Neck Surgery, University Hospitals of Cleveland, Cleveland, OH, USA","Dept. of Otolaryngology-Head & Neck Surg., Univ. Hosp. of Cleveland, Cleveland, OH, USA"],"affiliations":[{"raw_affiliation_string":"Department of Otolaryngology-Head and Neck Surgery, University Hospitals of Cleveland, Cleveland, OH, USA","institution_ids":["https://openalex.org/I2799343972"]},{"raw_affiliation_string":"Dept. of Otolaryngology-Head & Neck Surg., Univ. Hosp. of Cleveland, Cleveland, OH, USA","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060155244","display_name":"Cliff A. Megerian","orcid":null},"institutions":[{"id":"https://openalex.org/I2799343972","display_name":"University Hospitals of Cleveland","ror":"https://ror.org/0130jk839","country_code":"US","type":"funder","lineage":["https://openalex.org/I2799343972"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Cliff A. Megerian","raw_affiliation_strings":["Department of Otolaryngology-Head and Neck Surgery, University Hospitals of Cleveland, Cleveland, OH, USA","Dept. of Otolaryngology-Head & Neck Surg., Univ. Hosp. of Cleveland, Cleveland, OH, USA"],"affiliations":[{"raw_affiliation_string":"Department of Otolaryngology-Head and Neck Surgery, University Hospitals of Cleveland, Cleveland, OH, USA","institution_ids":["https://openalex.org/I2799343972"]},{"raw_affiliation_string":"Dept. of Otolaryngology-Head & Neck Surg., Univ. Hosp. of Cleveland, Cleveland, OH, USA","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103438378","display_name":"Wen H. Ko","orcid":null},"institutions":[{"id":"https://openalex.org/I58956616","display_name":"Case Western Reserve University","ror":"https://ror.org/051fd9666","country_code":"US","type":"education","lineage":["https://openalex.org/I58956616"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Wen H. Ko","raw_affiliation_strings":["Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH, USA","Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH, USA","institution_ids":["https://openalex.org/I58956616"]},{"raw_affiliation_string":"Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA","institution_ids":["https://openalex.org/I58956616"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5073669738"],"corresponding_institution_ids":["https://openalex.org/I223532165"],"apc_list":null,"apc_paid":null,"fwci":2.7422,"has_fulltext":false,"cited_by_count":52,"citation_normalized_percentile":{"value":0.9039887,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"59","issue":"12","first_page":"3283","last_page":"3292"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8292922973632812},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7704492807388306},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7475214004516602},{"id":"https://openalex.org/keywords/microphone","display_name":"Microphone","score":0.7342684268951416},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.541568398475647},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5095422863960266},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.32143110036849976},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.31459587812423706},{"id":"https://openalex.org/keywords/sound-pressure","display_name":"Sound pressure","score":0.29792115092277527},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.24229368567466736},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.20731815695762634},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1211094856262207}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8292922973632812},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7704492807388306},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7475214004516602},{"id":"https://openalex.org/C2778263558","wikidata":"https://www.wikidata.org/wiki/Q46384","display_name":"Microphone","level":3,"score":0.7342684268951416},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.541568398475647},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5095422863960266},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.32143110036849976},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.31459587812423706},{"id":"https://openalex.org/C68115822","wikidata":"https://www.wikidata.org/wiki/Q1068172","display_name":"Sound pressure","level":2,"score":0.29792115092277527},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.24229368567466736},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.20731815695762634},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1211094856262207},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D001698","descriptor_name":"Biomedical Engineering","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D001698","descriptor_name":"Biomedical Engineering","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D001698","descriptor_name":"Biomedical Engineering","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D001698","descriptor_name":"Biomedical Engineering","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D001698","descriptor_name":"Biomedical Engineering","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D001698","descriptor_name":"Biomedical Engineering","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D004432","descriptor_name":"Ear, Middle","qualifier_ui":"Q000601","qualifier_name":"surgery","is_major_topic":false},{"descriptor_ui":"D004432","descriptor_name":"Ear, Middle","qualifier_ui":"Q000601","qualifier_name":"surgery","is_major_topic":false},{"descriptor_ui":"D004432","descriptor_name":"Ear, Middle","qualifier_ui":"Q000601","qualifier_name":"surgery","is_major_topic":false},{"descriptor_ui":"D004582","descriptor_name":"Electronics, Medical","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D004582","descriptor_name":"Electronics, Medical","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D004582","descriptor_name":"Electronics, Medical","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006310","descriptor_name":"Hearing Aids","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D006310","descriptor_name":"Hearing Aids","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D006310","descriptor_name":"Hearing Aids","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006801","descriptor_name":"Humans","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D020007","descriptor_name":"Implants, Experimental","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D020007","descriptor_name":"Implants, Experimental","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D020007","descriptor_name":"Implants, Experimental","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D061725","descriptor_name":"Accelerometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D061725","descriptor_name":"Accelerometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D061725","descriptor_name":"Accelerometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false}],"locations_count":2,"locations":[{"id":"doi:10.1109/tbme.2012.2195782","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tbme.2012.2195782","pdf_url":null,"source":{"id":"https://openalex.org/S5240358","display_name":"IEEE Transactions on Biomedical Engineering","issn_l":"0018-9294","issn":["0018-9294","1558-2531"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Biomedical Engineering","raw_type":"journal-article"},{"id":"pmid:22542650","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22542650","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE transactions on bio-medical engineering","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Quality Education","id":"https://metadata.un.org/sdg/4","score":0.550000011920929}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1710571444","https://openalex.org/W1836045775","https://openalex.org/W1932080144","https://openalex.org/W1974608199","https://openalex.org/W1984421695","https://openalex.org/W1993053415","https://openalex.org/W1999529591","https://openalex.org/W2003469080","https://openalex.org/W2012054203","https://openalex.org/W2017284802","https://openalex.org/W2021860263","https://openalex.org/W2027257365","https://openalex.org/W2042222147","https://openalex.org/W2044330523","https://openalex.org/W2067666347","https://openalex.org/W2071615295","https://openalex.org/W2088401128","https://openalex.org/W2089510864","https://openalex.org/W2112403092","https://openalex.org/W2112854909","https://openalex.org/W2118927835","https://openalex.org/W2128748094","https://openalex.org/W2142809565","https://openalex.org/W2165507762","https://openalex.org/W6637425495"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2160325238","https://openalex.org/W3201436172","https://openalex.org/W2740701609","https://openalex.org/W1965527644","https://openalex.org/W3015470757","https://openalex.org/W2041625964","https://openalex.org/W4366112391","https://openalex.org/W2767067586","https://openalex.org/W3039462591"],"abstract_inverted_index":{"The":[0,20,52,64,100,119],"design,":[1],"implementation,":[2],"and":[3,86,143,160],"characterization":[4,42],"of":[5,70,80,107,116,132,154,181,198],"a":[6,58,67,77,90,97,114,127],"microelectromechanical":[7],"systems":[8],"(MEMS)":[9],"capacitive":[10],"accelerometer-based":[11],"middle":[12,25],"ear":[13,26],"microphone":[14,21,193],"are":[15,44],"presented":[16],"in":[17,57,177],"this":[18],"paper.":[19],"is":[22,55,87,188],"intended":[23],"for":[24,195],"hearing":[27],"aids":[28],"as":[29,31],"well":[30],"future":[32],"fully":[33],"implantable":[34],"cochlear":[35],"prosthesis.":[36],"Human":[37],"temporal":[38],"bones":[39],"acoustic":[40],"response":[41],"results":[43,176],"used":[45],"to":[46,123,190],"derive":[47],"the":[48,192],"accelerometer":[49,54],"design":[50],"requirements.":[51],"prototype":[53],"fabricated":[56],"commercial":[59],"silicon-on-insulator":[60],"(SOI)":[61],"MEMS":[62,172],"process.":[63],"sensor":[65,102,120],"occupies":[66,104],"sensing":[68],"area":[69,79,106],"1":[71,74],"mm":[72,75,82,85,109,112],"\u00d7":[73,83,110],"with":[76,89,113],"chip":[78,95],"2":[81,141],"2.4":[84],"interfaced":[88],"custom-designed":[91],"low-noise":[92],"electronic":[93],"IC":[94],"over":[96],"flexible":[98],"substrate.":[99],"packaged":[101],"unit":[103,121],"an":[105,178],"2.5":[108],"6.2":[111],"weight":[115],"25":[117],"mg.":[118],"attached":[122],"umbo":[124],"can":[125,166],"detect":[126],"sound":[128,151],"pressure":[129],"level":[130],"(SPL)":[131],"60":[133],"dB":[134,139,145],"at":[135,140,146,157,163],"500":[136,164],"Hz,":[137],"35":[138],"kHz,":[142],"57":[144],"8":[147],"kHz.":[148],"An":[149],"improved":[150,196],"detection":[152],"limit":[153],"34-dB":[155],"SPL":[156,162],"150":[158],"Hz":[159,165],"24-dB":[161],"be":[167],"expected":[168],"by":[169],"employing":[170],"start-of-the-art":[171],"fabrication":[173],"technology,":[174],"which":[175],"articulation":[179],"index":[180],"approximately":[182],"0.76.":[183],"Further":[184],"micro/nanofabrication":[185],"technology":[186],"advancement":[187],"needed":[189],"enhance":[191],"sensitivity":[194],"understanding":[197],"normal":[199],"conversational":[200],"speech.":[201]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":6},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":5},{"year":2018,"cited_by_count":5},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":6},{"year":2014,"cited_by_count":4},{"year":2013,"cited_by_count":1}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}