{"id":"https://openalex.org/W7149153150","doi":"https://doi.org/10.1109/tase.2026.3680463","title":"Embedded Grating Sensing and Compensation Enabling Cross-Scale Nanopositioning","display_name":"Embedded Grating Sensing and Compensation Enabling Cross-Scale Nanopositioning","publication_year":2026,"publication_date":"2026-01-01","ids":{"openalex":"https://openalex.org/W7149153150","doi":"https://doi.org/10.1109/tase.2026.3680463"},"language":null,"primary_location":{"id":"doi:10.1109/tase.2026.3680463","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2026.3680463","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5080367440","display_name":"Siyuan Meng","orcid":null},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Siyuan Meng","raw_affiliation_strings":["State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China"],"raw_orcid":"https://orcid.org/0009-0008-5457-0734","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103434355","display_name":"Jiankang Jiang","orcid":"https://orcid.org/0009-0000-8997-7923"},"institutions":[{"id":"https://openalex.org/I4210159156","display_name":"System Equipment (China)","ror":"https://ror.org/04m2bcn74","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210159156"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiankang Jiang","raw_affiliation_strings":["JITRI Micro-Nano Automation System and Equipment Technology Research Institute, Suzhou, China"],"raw_orcid":"https://orcid.org/0009-0000-8997-7923","affiliations":[{"raw_affiliation_string":"JITRI Micro-Nano Automation System and Equipment Technology Research Institute, Suzhou, China","institution_ids":["https://openalex.org/I4210159156"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5132890260","display_name":"Fubo Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210159156","display_name":"System Equipment (China)","ror":"https://ror.org/04m2bcn74","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210159156"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fubo Wang","raw_affiliation_strings":["JITRI Micro-Nano Automation System and Equipment Technology Research Institute, Suzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"JITRI Micro-Nano Automation System and Equipment Technology Research Institute, Suzhou, China","institution_ids":["https://openalex.org/I4210159156"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5124040207","display_name":"Gang Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210159156","display_name":"System Equipment (China)","ror":"https://ror.org/04m2bcn74","country_code":"CN","type":"company","lineage":["https://openalex.org/I4210159156"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Gang Wang","raw_affiliation_strings":["JITRI Micro-Nano Automation System and Equipment Technology Research Institute, Suzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"JITRI Micro-Nano Automation System and Equipment Technology Research Institute, Suzhou, China","institution_ids":["https://openalex.org/I4210159156"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Dongmei Wu","orcid":"https://orcid.org/0000-0002-0291-5453"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dongmei Wu","raw_affiliation_strings":["State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China"],"raw_orcid":"https://orcid.org/0000-0002-0291-5453","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111721556","display_name":"W. Y. Dong","orcid":null},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Dong","raw_affiliation_strings":["State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China"],"raw_orcid":"https://orcid.org/0000-0002-1211-6444","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109226106","display_name":"Changhai Ru","orcid":null},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Changhai Ru","raw_affiliation_strings":["School of Mechanical and Electrical Engineering, Soochow University, Suzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechanical and Electrical Engineering, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.34835355,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"23","issue":null,"first_page":"8394","last_page":"8403"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.8442999720573425,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.8442999720573425,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.026100000366568565,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10295","display_name":"Plasmonic and Surface Plasmon Research","score":0.019600000232458115,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.6001999974250793},{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.531499981880188},{"id":"https://openalex.org/keywords/diffraction-grating","display_name":"Diffraction grating","score":0.31859999895095825},{"id":"https://openalex.org/keywords/signal-processing","display_name":"Signal processing","score":0.31790000200271606},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.2818000018596649}],"concepts":[{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.6001999974250793},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.531499981880188},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4896000027656555},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4431000053882599},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4242999851703644},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3366999924182892},{"id":"https://openalex.org/C126753812","wikidata":"https://www.wikidata.org/wiki/Q653294","display_name":"Diffraction grating","level":3,"score":0.31859999895095825},{"id":"https://openalex.org/C104267543","wikidata":"https://www.wikidata.org/wiki/Q208163","display_name":"Signal processing","level":3,"score":0.31790000200271606},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2928999960422516},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.2818000018596649},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.2689000070095062},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.26840001344680786},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.26260000467300415},{"id":"https://openalex.org/C131782439","wikidata":"https://www.wikidata.org/wiki/Q1455581","display_name":"Frequency compensation","level":4,"score":0.2605000138282776},{"id":"https://openalex.org/C2988922011","wikidata":"https://www.wikidata.org/wiki/Q5449244","display_name":"Filtering theory","level":2,"score":0.2526000142097473}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2026.3680463","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2026.3680463","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G3233799187","display_name":null,"funder_award_id":"62273247","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8519508272","display_name":null,"funder_award_id":"2023YFF0721400","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":[],"abstract_inverted_index":{"Grating":[0],"displacement":[1,34,132],"sensing":[2,21,60],"is":[3,71,82,102],"regarded":[4],"as":[5],"one":[6],"of":[7,30,46,53,114,139,169],"the":[8,28,31,51,68,94,115,126,129,143],"key":[9],"technologies":[10],"for":[11,106],"achieving":[12],"cross-scale":[13],"nanopositioning.":[14],"This":[15],"paper":[16],"proposes":[17],"a":[18,57,97,136,153,164],"real-time":[19,98],"grating":[20,33,59,131],"correction":[22],"and":[23,89,110,163],"compensation":[24,100],"technology":[25],"to":[26,84,104],"enhance":[27],"performance":[29],"embedded":[32,130],"sensor":[35,133,151],"in":[36,93],"Cross-scale":[37],"piezoelectric":[38],"actuators":[39],"(CSPAs),":[40],"thereby":[41],"enabling":[42],"nano-scale":[43],"motion":[44],"positioning":[45,154,167],"CSPAs.":[47],"Firstly,":[48],"based":[49,78],"on":[50,79],"principle":[52],"diffracted":[54],"image":[55],"reflection,":[56],"miniaturized":[58],"unit":[61],"that":[62],"can":[63,134],"be":[64],"monolithically":[65],"integrated":[66,148],"with":[67,125,149],"CSPA":[69,147],"structure":[70],"designed.":[72],"Secondly,":[73],"an":[74],"online":[75],"self-correction":[76],"algorithm":[77],"amplitude":[80,90],"iteration":[81],"proposed":[83,127],"dynamically":[85],"eliminate":[86],"DC":[87],"offset":[88],"imbalance":[91],"errors":[92,109,113],"signals.":[95],"Furthermore,":[96],"error":[99],"strategy":[101],"constructed":[103],"compensate":[105],"inherent":[107],"periodic":[108],"measurement":[111],"lag":[112],"system":[116],"induced":[117],"by":[118],"stick-slip":[119],"effects.":[120],"Experimental":[121],"results":[122],"demonstrate":[123],"that,":[124],"technology,":[128],"achieve":[135],"detection":[137],"resolution":[138],"0.9":[140],"nm":[141,158],"within":[142,156],"full":[144],"stroke.":[145],"The":[146],"this":[150],"achieved":[152],"accuracy":[155],"\u00b11.3":[157],"over":[159],"its":[160],"scanning":[161],"range,":[162],"full-stroke":[165],"bidirectional":[166],"consistency":[168],"3.093":[170],"\u00b1":[171],"1.358":[172],"nm.":[173]},"counts_by_year":[],"updated_date":"2026-04-28T06:04:28.489925","created_date":"2026-04-04T00:00:00"}