{"id":"https://openalex.org/W7118158448","doi":"https://doi.org/10.1109/tase.2025.3650620","title":"A Digital Twin Framework With Deep Feature Extraction and Gaussian Process for Multi-Objective Optimization in Semiconductor Manufacturing","display_name":"A Digital Twin Framework With Deep Feature Extraction and Gaussian Process for Multi-Objective Optimization in Semiconductor Manufacturing","publication_year":2026,"publication_date":"2026-01-01","ids":{"openalex":"https://openalex.org/W7118158448","doi":"https://doi.org/10.1109/tase.2025.3650620"},"language":null,"primary_location":{"id":"doi:10.1109/tase.2025.3650620","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2025.3650620","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5121974128","display_name":"Chin-Yi Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I164936912","display_name":"The University of Texas at El Paso","ror":"https://ror.org/04d5vba33","country_code":"US","type":"education","lineage":["https://openalex.org/I164936912"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Chin-Yi Lin","raw_affiliation_strings":["Department of Industrial Manufacturing and Systems Engineering, The University of Texas at El Paso, El Paso, TX, USA"],"raw_orcid":"https://orcid.org/0000-0002-5308-8531","affiliations":[{"raw_affiliation_string":"Department of Industrial Manufacturing and Systems Engineering, The University of Texas at El Paso, El Paso, TX, USA","institution_ids":["https://openalex.org/I164936912"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5121924899","display_name":"Tzu-Liang Tseng","orcid":null},"institutions":[{"id":"https://openalex.org/I164936912","display_name":"The University of Texas at El Paso","ror":"https://ror.org/04d5vba33","country_code":"US","type":"education","lineage":["https://openalex.org/I164936912"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Tzu-Liang Tseng","raw_affiliation_strings":["Department of Industrial Manufacturing and Systems Engineering, The University of Texas at El Paso, El Paso, TX, USA"],"raw_orcid":"https://orcid.org/0000-0002-3903-529X","affiliations":[{"raw_affiliation_string":"Department of Industrial Manufacturing and Systems Engineering, The University of Texas at El Paso, El Paso, TX, USA","institution_ids":["https://openalex.org/I164936912"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5007543711","display_name":"Tsung-Han Tsai","orcid":"https://orcid.org/0000-0001-9745-5957"},"institutions":[{"id":"https://openalex.org/I43566213","display_name":"National Taipei University of Business","ror":"https://ror.org/029hrv109","country_code":"TW","type":"education","lineage":["https://openalex.org/I43566213"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Tsung-Han Tsai","raw_affiliation_strings":["Institute of Information and Decision Sciences, National Taipei University of Business, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0001-9745-5957","affiliations":[{"raw_affiliation_string":"Institute of Information and Decision Sciences, National Taipei University of Business, Taipei, Taiwan","institution_ids":["https://openalex.org/I43566213"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5121974128"],"corresponding_institution_ids":["https://openalex.org/I164936912"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.01885393,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"23","issue":null,"first_page":"1928","last_page":"1949"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10763","display_name":"Digital Transformation in Industry","score":0.7865999937057495,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10763","display_name":"Digital Transformation in Industry","score":0.7865999937057495,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10705","display_name":"Additive Manufacturing Materials and Processes","score":0.02290000021457672,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10848","display_name":"Advanced Multi-Objective Optimization Algorithms","score":0.017100000753998756,"subfield":{"id":"https://openalex.org/subfields/1703","display_name":"Computational Theory and Mathematics"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.6378999948501587},{"id":"https://openalex.org/keywords/gaussian-process","display_name":"Gaussian process","score":0.5802000164985657},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4553000032901764},{"id":"https://openalex.org/keywords/gaussian","display_name":"Gaussian","score":0.42579999566078186},{"id":"https://openalex.org/keywords/convergence","display_name":"Convergence (economics)","score":0.41589999198913574},{"id":"https://openalex.org/keywords/feature","display_name":"Feature (linguistics)","score":0.4009000062942505},{"id":"https://openalex.org/keywords/feature-extraction","display_name":"Feature extraction","score":0.3756999969482422},{"id":"https://openalex.org/keywords/key","display_name":"Key (lock)","score":0.3508000075817108}],"concepts":[{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.6378999948501587},{"id":"https://openalex.org/C61326573","wikidata":"https://www.wikidata.org/wiki/Q1496376","display_name":"Gaussian process","level":3,"score":0.5802000164985657},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5156000256538391},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4553000032901764},{"id":"https://openalex.org/C163716315","wikidata":"https://www.wikidata.org/wiki/Q901177","display_name":"Gaussian","level":2,"score":0.42579999566078186},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.42480000853538513},{"id":"https://openalex.org/C2777303404","wikidata":"https://www.wikidata.org/wiki/Q759757","display_name":"Convergence (economics)","level":2,"score":0.41589999198913574},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.4043000042438507},{"id":"https://openalex.org/C2776401178","wikidata":"https://www.wikidata.org/wiki/Q12050496","display_name":"Feature (linguistics)","level":2,"score":0.4009000062942505},{"id":"https://openalex.org/C52622490","wikidata":"https://www.wikidata.org/wiki/Q1026626","display_name":"Feature extraction","level":2,"score":0.3756999969482422},{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.3508000075817108},{"id":"https://openalex.org/C147764199","wikidata":"https://www.wikidata.org/wiki/Q6865248","display_name":"Minification","level":2,"score":0.34630000591278076},{"id":"https://openalex.org/C2780722187","wikidata":"https://www.wikidata.org/wiki/Q412356","display_name":"Silicon carbide","level":2,"score":0.3294000029563904},{"id":"https://openalex.org/C523214423","wikidata":"https://www.wikidata.org/wiki/Q192047","display_name":"Machining","level":2,"score":0.3231000006198883},{"id":"https://openalex.org/C65892221","wikidata":"https://www.wikidata.org/wiki/Q1113935","display_name":"Gaussian filter","level":3,"score":0.3089999854564667},{"id":"https://openalex.org/C93228742","wikidata":"https://www.wikidata.org/wiki/Q7247312","display_name":"Process variable","level":3,"score":0.2930999994277954},{"id":"https://openalex.org/C137836250","wikidata":"https://www.wikidata.org/wiki/Q984063","display_name":"Optimization problem","level":2,"score":0.289900004863739},{"id":"https://openalex.org/C155386361","wikidata":"https://www.wikidata.org/wiki/Q1649571","display_name":"Process control","level":3,"score":0.2874999940395355},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.28679999709129333},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.28679999709129333},{"id":"https://openalex.org/C157764524","wikidata":"https://www.wikidata.org/wiki/Q1383412","display_name":"Throughput","level":3,"score":0.2867000102996826},{"id":"https://openalex.org/C12302492","wikidata":"https://www.wikidata.org/wiki/Q1752097","display_name":"Setpoint","level":2,"score":0.28040000796318054},{"id":"https://openalex.org/C159694833","wikidata":"https://www.wikidata.org/wiki/Q2321565","display_name":"Iterative method","level":2,"score":0.27079999446868896},{"id":"https://openalex.org/C143587482","wikidata":"https://www.wikidata.org/wiki/Q1543216","display_name":"Iterative and incremental development","level":2,"score":0.2590000033378601},{"id":"https://openalex.org/C81692654","wikidata":"https://www.wikidata.org/wiki/Q225926","display_name":"Kriging","level":2,"score":0.2506999969482422}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2025.3650620","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2025.3650620","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5116492509841919,"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure"}],"awards":[{"id":"https://openalex.org/G277008315","display_name":null,"funder_award_id":"#P120A220044","funder_id":"https://openalex.org/F4320306106","funder_display_name":"U.S. Department of Education"},{"id":"https://openalex.org/G2893673682","display_name":null,"funder_award_id":"#P116S210004","funder_id":"https://openalex.org/F4320306106","funder_display_name":"U.S. Department of Education"},{"id":"https://openalex.org/G3885793318","display_name":null,"funder_award_id":"P116S210004","funder_id":"https://openalex.org/F4320306106","funder_display_name":"U.S. Department of Education"},{"id":"https://openalex.org/G4195747565","display_name":null,"funder_award_id":"ERC-ASPIRE-1941524","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G5065788867","display_name":null,"funder_award_id":"DUE-2216396","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G538144450","display_name":null,"funder_award_id":"P120A220044","funder_id":"https://openalex.org/F4320306106","funder_display_name":"U.S. Department of Education"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320306106","display_name":"U.S. Department of Education","ror":"https://ror.org/021adze67"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":45,"referenced_works":["https://openalex.org/W1978101697","https://openalex.org/W1991691583","https://openalex.org/W1994005439","https://openalex.org/W2046074714","https://openalex.org/W2111526171","https://openalex.org/W2295598076","https://openalex.org/W2510493362","https://openalex.org/W2566079294","https://openalex.org/W2907372919","https://openalex.org/W2950694741","https://openalex.org/W2966906878","https://openalex.org/W3082363568","https://openalex.org/W3093380613","https://openalex.org/W3203922357","https://openalex.org/W4206212643","https://openalex.org/W4206569030","https://openalex.org/W4210530766","https://openalex.org/W4212849065","https://openalex.org/W4214493728","https://openalex.org/W4280509466","https://openalex.org/W4308577424","https://openalex.org/W4313406774","https://openalex.org/W4313420002","https://openalex.org/W4360951493","https://openalex.org/W4367548604","https://openalex.org/W4372353038","https://openalex.org/W4379514256","https://openalex.org/W4385062369","https://openalex.org/W4385062407","https://openalex.org/W4386282408","https://openalex.org/W4386414649","https://openalex.org/W4390691388","https://openalex.org/W4392190476","https://openalex.org/W4394945319","https://openalex.org/W4394985543","https://openalex.org/W4396760098","https://openalex.org/W4396820723","https://openalex.org/W4396920669","https://openalex.org/W4400726485","https://openalex.org/W4402093491","https://openalex.org/W4403769923","https://openalex.org/W4404698529","https://openalex.org/W4407338158","https://openalex.org/W4408441342","https://openalex.org/W4409730779"],"related_works":[],"abstract_inverted_index":{"Achieving":[0],"optimal":[1,157],"parameter":[2,158,178],"settings":[3],"in":[4,58,93,176],"epitaxial":[5],"silicon":[6],"carbide":[7],"(Epi":[8],"SiC)":[9],"manufacturing":[10,171],"is":[11],"challenging":[12],"due":[13],"to":[14,17,63,129,156],"the":[15,42,71,89,184],"need":[16],"simultaneously":[18],"meet":[19],"conflicting":[20],"multi-objective":[21,65],"requirements,":[22],"such":[23],"as":[24],"precise":[25],"thickness":[26,135],"control":[27],"and":[28,76,100,111,136,138,180],"uniform":[29],"doping.":[30],"This":[31,151],"paper":[32],"presents":[33],"an":[34,140],"extended":[35],"Digital":[36],"Twin":[37],"(DT)":[38],"framework":[39,56,69],"that":[40],"incorporates":[41],"Multi-Objective":[43],"Optimization":[44],"with":[45,144],"Deep-Feature":[46],"Gaussian":[47,101],"Process":[48,102],"(MOODFG)":[49],"algorithm,":[50],"explicitly":[51],"extending":[52],"our":[53],"prior":[54],"DT-in-the-loop":[55],"(MRBORI)":[57],"[26]":[59,119],"from":[60],"single-objective":[61],"tuning":[62],"spec-driven":[64],"recipe":[66],"optimization.":[67],"The":[68,85],"enables":[70],"effective":[72],"optimization":[73],"of":[74,82,88,96,108],"high-dimensional":[75],"interdependent":[77],"process":[78,181],"parameters,":[79],"overcoming":[80],"limitations":[81],"traditional":[83],"methods.":[84],"key":[86],"innovation":[87],"MOODFG":[90,124],"algorithm":[91],"lies":[92],"its":[94],"integration":[95],"deep":[97],"feature":[98,109],"extraction":[99],"Regression,":[103],"which":[104],"allows":[105],"dynamic":[106],"refinement":[107],"representations":[110],"surrogate":[112],"models":[113],"through":[114],"iterative":[115],"learning.":[116],"Unlike":[117],"MRBORI":[118],"(one":[120],"objective":[121],"per":[122],"run),":[123],"minimizes":[125],"a":[126,130,145],"weighted":[127],"distance":[128],"user-specified":[131],"target":[132],"vector":[133],"(e.g.,":[134],"doping)":[137],"provides":[139],"uncertainty-aware":[141],"target-attainment":[142],"certificate":[143],"practical":[146],"stopping":[147],"rule":[148],"for":[149,188],"deployment.":[150],"approach":[152],"ensures":[153],"robust":[154],"convergence":[155],"values":[159],"while":[160],"efficiently":[161],"balancing":[162],"multiple":[163],"objectives.":[164],"Experimental":[165],"validation":[166],"using":[167],"real-world":[168],"Epi":[169],"SiC":[170],"data":[172],"demonstrates":[173],"significant":[174],"improvements":[175],"yield,":[177],"stability,":[179],"adaptability,":[182],"highlighting":[183],"framework\u2019s":[185],"transformative":[186],"potential":[187],"semiconductor":[189],"manufacturing.":[190]},"counts_by_year":[],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2026-01-05T00:00:00"}