{"id":"https://openalex.org/W7076049953","doi":"https://doi.org/10.1109/tase.2025.3599216","title":"High-Dynamic Speed Control for High-Speed Turbo Molecular Pump Under Impact Load Disturbances","display_name":"High-Dynamic Speed Control for High-Speed Turbo Molecular Pump Under Impact Load Disturbances","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W7076049953","doi":"https://doi.org/10.1109/tase.2025.3599216"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2025.3599216","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2025.3599216","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Shiqiang Zheng","orcid":"https://orcid.org/0000-0002-2842-9699"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shiqiang Zheng","raw_affiliation_strings":["School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-2842-9699","affiliations":[{"raw_affiliation_string":"School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Gengkui Wei","orcid":"https://orcid.org/0009-0006-9763-1176"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Gengkui Wei","raw_affiliation_strings":["School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China"],"raw_orcid":"https://orcid.org/0009-0006-9763-1176","affiliations":[{"raw_affiliation_string":"School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Baodong Chen","orcid":"https://orcid.org/0000-0001-6595-1577"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Baodong Chen","raw_affiliation_strings":["School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0001-6595-1577","affiliations":[{"raw_affiliation_string":"School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]}]},{"author_position":"last","author":{"id":null,"display_name":"Haifeng Zhang","orcid":"https://orcid.org/0000-0001-6930-4000"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haifeng Zhang","raw_affiliation_strings":["School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0001-6930-4000","affiliations":[{"raw_affiliation_string":"School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I82880672"],"apc_list":null,"apc_paid":null,"fwci":4.8677,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.95316065,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":91,"max":98},"biblio":{"volume":"22","issue":null,"first_page":"19901","last_page":"19911"},"is_retracted":false,"is_paratext":false,"is_xpac":true,"primary_topic":{"id":"https://openalex.org/T13370","display_name":"Diverse Scientific and Economic Studies","score":0.04839999973773956,"subfield":{"id":"https://openalex.org/subfields/2002","display_name":"Economics and Econometrics"},"field":{"id":"https://openalex.org/fields/20","display_name":"Economics, Econometrics and Finance"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},"topics":[{"id":"https://openalex.org/T13370","display_name":"Diverse Scientific and Economic Studies","score":0.04839999973773956,"subfield":{"id":"https://openalex.org/subfields/2002","display_name":"Economics and Econometrics"},"field":{"id":"https://openalex.org/fields/20","display_name":"Economics, Econometrics and Finance"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T12773","display_name":"Water Quality and Resources Studies","score":0.03590000048279762,"subfield":{"id":"https://openalex.org/subfields/2312","display_name":"Water Science and Technology"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14111","display_name":"Diverse Research Studies Overview","score":0.022299999371170998,"subfield":{"id":"https://openalex.org/subfields/3312","display_name":"Sociology and Political Science"},"field":{"id":"https://openalex.org/fields/33","display_name":"Social Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.7432000041007996},{"id":"https://openalex.org/keywords/electronic-speed-control","display_name":"Electronic speed control","score":0.6230000257492065},{"id":"https://openalex.org/keywords/turbo","display_name":"Turbo","score":0.4925000071525574},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.48579999804496765},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.47920000553131104},{"id":"https://openalex.org/keywords/magnetic-levitation","display_name":"Magnetic levitation","score":0.4327000081539154},{"id":"https://openalex.org/keywords/torque","display_name":"Torque","score":0.4311000108718872},{"id":"https://openalex.org/keywords/adaptive-control","display_name":"Adaptive control","score":0.4043000042438507},{"id":"https://openalex.org/keywords/observer","display_name":"Observer (physics)","score":0.4016999900341034},{"id":"https://openalex.org/keywords/rotational-speed","display_name":"Rotational speed","score":0.3837999999523163}],"concepts":[{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.7432000041007996},{"id":"https://openalex.org/C45641319","wikidata":"https://www.wikidata.org/wiki/Q550768","display_name":"Electronic speed control","level":2,"score":0.6230000257492065},{"id":"https://openalex.org/C2776240298","wikidata":"https://www.wikidata.org/wiki/Q1138513","display_name":"Turbo","level":2,"score":0.4925000071525574},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.48579999804496765},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.47920000553131104},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.45329999923706055},{"id":"https://openalex.org/C206736587","wikidata":"https://www.wikidata.org/wiki/Q1061251","display_name":"Magnetic levitation","level":3,"score":0.4327000081539154},{"id":"https://openalex.org/C144171764","wikidata":"https://www.wikidata.org/wiki/Q48103","display_name":"Torque","level":2,"score":0.4311000108718872},{"id":"https://openalex.org/C107464732","wikidata":"https://www.wikidata.org/wiki/Q235781","display_name":"Adaptive control","level":3,"score":0.4043000042438507},{"id":"https://openalex.org/C2780704645","wikidata":"https://www.wikidata.org/wiki/Q9251458","display_name":"Observer (physics)","level":2,"score":0.4016999900341034},{"id":"https://openalex.org/C81063470","wikidata":"https://www.wikidata.org/wiki/Q1256787","display_name":"Rotational speed","level":2,"score":0.3837999999523163},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.34619998931884766},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.34439998865127563},{"id":"https://openalex.org/C2777718703","wikidata":"https://www.wikidata.org/wiki/Q6723706","display_name":"Machine control","level":2,"score":0.3353999853134155},{"id":"https://openalex.org/C47116090","wikidata":"https://www.wikidata.org/wiki/Q716829","display_name":"PID controller","level":3,"score":0.32249999046325684},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.3176000118255615},{"id":"https://openalex.org/C2778491610","wikidata":"https://www.wikidata.org/wiki/Q4009421","display_name":"Operating speed","level":2,"score":0.314300000667572},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.3028999865055084},{"id":"https://openalex.org/C76684090","wikidata":"https://www.wikidata.org/wiki/Q3842034","display_name":"DC motor","level":2,"score":0.2985999882221222},{"id":"https://openalex.org/C2779110517","wikidata":"https://www.wikidata.org/wiki/Q1240788","display_name":"Supervisor","level":2,"score":0.2969000041484833},{"id":"https://openalex.org/C196781063","wikidata":"https://www.wikidata.org/wiki/Q160047","display_name":"Maglev","level":2,"score":0.29429998993873596},{"id":"https://openalex.org/C30403606","wikidata":"https://www.wikidata.org/wiki/Q2981904","display_name":"Electromagnetic coil","level":2,"score":0.2930999994277954},{"id":"https://openalex.org/C2780505938","wikidata":"https://www.wikidata.org/wiki/Q17093282","display_name":"Unavailability","level":2,"score":0.2858999967575073},{"id":"https://openalex.org/C2777042071","wikidata":"https://www.wikidata.org/wiki/Q6509304","display_name":"Leakage (economics)","level":2,"score":0.27959999442100525},{"id":"https://openalex.org/C185798385","wikidata":"https://www.wikidata.org/wiki/Q1161707","display_name":"Benchmark (surveying)","level":2,"score":0.2786000072956085},{"id":"https://openalex.org/C31531917","wikidata":"https://www.wikidata.org/wiki/Q915157","display_name":"Robust control","level":3,"score":0.2768999934196472},{"id":"https://openalex.org/C3031470","wikidata":"https://www.wikidata.org/wiki/Q818544","display_name":"State observer","level":3,"score":0.2680000066757202},{"id":"https://openalex.org/C17348537","wikidata":"https://www.wikidata.org/wiki/Q7597300","display_name":"Stall torque","level":5,"score":0.2655999958515167},{"id":"https://openalex.org/C27838914","wikidata":"https://www.wikidata.org/wiki/Q740997","display_name":"Levitation","level":3,"score":0.2538999915122986},{"id":"https://openalex.org/C16389437","wikidata":"https://www.wikidata.org/wiki/Q11421","display_name":"Magnet","level":2,"score":0.2531999945640564},{"id":"https://openalex.org/C109871850","wikidata":"https://www.wikidata.org/wiki/Q1227571","display_name":"Direct torque control","level":4,"score":0.251800000667572}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2025.3599216","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2025.3599216","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8844438791275024,"id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G2371024373","display_name":null,"funder_award_id":"62225301","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5665953336","display_name":null,"funder_award_id":"62303032","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7594369328","display_name":null,"funder_award_id":"62103017","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":34,"referenced_works":["https://openalex.org/W2097696157","https://openalex.org/W2573986657","https://openalex.org/W2909287897","https://openalex.org/W2988968531","https://openalex.org/W3024893307","https://openalex.org/W3038177802","https://openalex.org/W3081953421","https://openalex.org/W3091677511","https://openalex.org/W3127726286","https://openalex.org/W3169215193","https://openalex.org/W3195726585","https://openalex.org/W3212993431","https://openalex.org/W4205629977","https://openalex.org/W4214870184","https://openalex.org/W4285223837","https://openalex.org/W4285282268","https://openalex.org/W4312774904","https://openalex.org/W4360995345","https://openalex.org/W4378965869","https://openalex.org/W4390038757","https://openalex.org/W4391092992","https://openalex.org/W4392902518","https://openalex.org/W4393029250","https://openalex.org/W4401163737","https://openalex.org/W4401567636","https://openalex.org/W4401726071","https://openalex.org/W4406170853","https://openalex.org/W4406794058","https://openalex.org/W4408235529","https://openalex.org/W4408778966","https://openalex.org/W4410124607","https://openalex.org/W4410198331","https://openalex.org/W4411576588","https://openalex.org/W4411948783"],"related_works":[],"abstract_inverted_index":{"The":[0,224],"magnetic":[1,159],"levitation":[2,160],"turbo":[3,161,314],"molecular":[4,162],"pump":[5],"(MLTMP)":[6,164],"is":[7,84,104,112,150,295],"driven":[8],"by":[9],"a":[10,18,55,68,73,115,231],"high-speed":[11,61,116,158,309],"permanent":[12],"magnet":[13],"synchronous":[14],"motor":[15,262],"to":[16,144,151,182,264],"create":[17],"high-vacuum":[19],"environment":[20],"for":[21,60,288],"semiconductor":[22,167],"manufacturing":[23],"and":[24,43,77,135,192,195,218,259,274,316],"other":[25,308],"industries.":[26],"When":[27],"gas":[28],"pressure":[29,176],"changes":[30],"abruptly,":[31],"the":[32,89,96,107,122,131,137,141,153,212],"MLTMP":[33,62,186],"experiences":[34],"significant":[35,125],"speed":[36,57,69,128,132,154,191,201,227,254],"fluctuations,":[37,129,255],"which":[38],"would":[39],"degrade":[40],"industrial":[41],"productivity":[42],"even":[44],"destabilize":[45],"sensorless":[46,197],"control.":[47],"To":[48],"address":[49,152],"this":[50,52,148],"issue,":[51],"paper":[53],"proposes":[54],"high-dynamic":[56,109,226],"control":[58,70,110,155,198,202,228,273,306],"strategy":[59,111,123,229,269,294],"under":[63],"impact":[64],"load":[65,74,187,233,291],"disturbances.":[66],"First,":[67],"method":[71,103],"incorporating":[72],"torque":[75,234],"observer":[76,235],"an":[78,99,207,237,245,298],"active":[79,238],"disturbance":[80,239],"rejection":[81,240],"controller":[82,241],"(ADRC)":[83],"designed.":[85],"Second,":[86],"based":[87],"on":[88,114,206,215,297],"adaptive":[90,100,246],"law":[91],"developed":[92],"in":[93,166,178,185,278],"conjunction":[94],"with":[95,236,244],"ADRC":[97],"process,":[98],"incremental":[101,247],"compensation":[102,248],"proposed.":[105],"Finally,":[106],"proposed":[108,225],"performed":[113],"MLTMP.":[117,142],"Experimental":[118],"results":[119],"show":[120],"that":[121],"achieves":[124],"attenuation":[126],"of":[127,140,147,157,211,307],"shortens":[130,256],"convergence":[133,257],"time,":[134,258],"improves":[136],"dynamic":[138,221,305],"performance":[139],"Note":[143],"Practitioners\u2014The":[145],"motivation":[146],"study":[149],"problem":[156],"pumps":[163],"used":[165],"manufacturing.":[168],"During":[169],"processes":[170],"such":[171,312],"as":[172,313],"chip":[173],"bonding,":[174],"sudden":[175],"surges":[177],"vacuum":[179],"chambers":[180],"lead":[181],"rapid":[183],"increases":[184],"torque,":[188],"degrading":[189],"pumping":[190],"compression":[193],"ratio,":[194],"destabilizing":[196],"systems.":[199],"Conventional":[200],"methods":[203],"often":[204],"rely":[205],"accurate":[208],"mathematical":[209],"model":[210],"motor,":[213],"focus":[214],"steady-state":[216],"performance,":[217],"have":[219],"limited":[220],"response":[222],"capability.":[223],"combines":[230],"Luenberger":[232],"(ADRC),":[242],"along":[243],"(AIC)":[249],"method.":[250],"It":[251],"effectively":[252],"suppresses":[253],"lowers":[260],"instantaneous":[261],"power":[263],"avoid":[265],"saturation":[266],"risks.":[267],"This":[268,293],"replaces":[270],"traditional":[271],"PI":[272],"can":[275],"be":[276],"implemented":[277],"real":[279],"time":[280],"via":[281],"digital":[282],"signal":[283],"processor,":[284],"making":[285],"it":[286],"suitable":[287],"high-speed,":[289],"complex":[290],"scenarios.":[292],"validated":[296],"experimental":[299],"platform.":[300],"Future":[301],"extensions":[302],"may":[303],"include":[304],"rotating":[310],"equipment":[311],"compressors":[315],"precision":[317],"centrifuges.":[318]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":1}],"updated_date":"2026-07-15T18:14:33.161393","created_date":"2025-10-10T00:00:00"}