{"id":"https://openalex.org/W4405303601","doi":"https://doi.org/10.1109/tase.2024.3507854","title":"Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints","display_name":"Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints","publication_year":2024,"publication_date":"2024-12-12","ids":{"openalex":"https://openalex.org/W4405303601","doi":"https://doi.org/10.1109/tase.2024.3507854"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2024.3507854","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2024.3507854","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5013254285","display_name":"Baoying Huang","orcid":"https://orcid.org/0000-0002-2742-6066"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"BaoYing Huang","raw_affiliation_strings":["Macau Institute of Systems Engineering and the Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, China"],"raw_orcid":"https://orcid.org/0000-0002-2742-6066","affiliations":[{"raw_affiliation_string":"Macau Institute of Systems Engineering and the Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, China","institution_ids":["https://openalex.org/I111950717"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090664309","display_name":"Naiqi Wu","orcid":"https://orcid.org/0000-0001-6782-458X"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"NaiQi Wu","raw_affiliation_strings":["Macau Institute of Systems Engineering and the Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, China"],"raw_orcid":"https://orcid.org/0000-0001-6782-458X","affiliations":[{"raw_affiliation_string":"Macau Institute of Systems Engineering and the Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, China","institution_ids":["https://openalex.org/I111950717"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044196048","display_name":"Yan Qiao","orcid":"https://orcid.org/0000-0001-5162-0224"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Yan Qiao","raw_affiliation_strings":["Macau Institute of Systems Engineering and the Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, China"],"raw_orcid":"https://orcid.org/0000-0001-5162-0224","affiliations":[{"raw_affiliation_string":"Macau Institute of Systems Engineering and the Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology, Macau, China","institution_ids":["https://openalex.org/I111950717"]}]},{"author_position":"last","author":{"id":null,"display_name":"WeiWen Guo","orcid":"https://orcid.org/0009-0008-9040-2279"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"WeiWen Guo","raw_affiliation_strings":["Hitachi Building Technology (Guangzhou) Company Ltd., Guangzhou, China","Hitachi Building Technology (Guangzhou) Company Ltd, Guangzhou, China"],"raw_orcid":"https://orcid.org/0009-0008-9040-2279","affiliations":[{"raw_affiliation_string":"Hitachi Building Technology (Guangzhou) Company Ltd., Guangzhou, China","institution_ids":[]},{"raw_affiliation_string":"Hitachi Building Technology (Guangzhou) Company Ltd, Guangzhou, China","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.5259,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.85187443,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":98},"biblio":{"volume":"22","issue":null,"first_page":"9544","last_page":"9558"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9962000250816345,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9861000180244446,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.6280241012573242},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5312953591346741},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.4840475916862488},{"id":"https://openalex.org/keywords/processor-scheduling","display_name":"Processor scheduling","score":0.4816538393497467},{"id":"https://openalex.org/keywords/job-shop-scheduling","display_name":"Job shop scheduling","score":0.44146984815597534},{"id":"https://openalex.org/keywords/cluster","display_name":"Cluster (spacecraft)","score":0.435717910528183},{"id":"https://openalex.org/keywords/real-time-computing","display_name":"Real-time computing","score":0.4037036895751953},{"id":"https://openalex.org/keywords/parallel-computing","display_name":"Parallel computing","score":0.33698105812072754},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.31938979029655457},{"id":"https://openalex.org/keywords/schedule","display_name":"Schedule","score":0.29381847381591797},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.29015541076660156},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.2782024145126343},{"id":"https://openalex.org/keywords/operations-management","display_name":"Operations management","score":0.24009084701538086},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1583518385887146}],"concepts":[{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.6280241012573242},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5312953591346741},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.4840475916862488},{"id":"https://openalex.org/C2984822820","wikidata":"https://www.wikidata.org/wiki/Q1123036","display_name":"Processor scheduling","level":3,"score":0.4816538393497467},{"id":"https://openalex.org/C55416958","wikidata":"https://www.wikidata.org/wiki/Q6206757","display_name":"Job shop scheduling","level":3,"score":0.44146984815597534},{"id":"https://openalex.org/C164866538","wikidata":"https://www.wikidata.org/wiki/Q367351","display_name":"Cluster (spacecraft)","level":2,"score":0.435717910528183},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.4037036895751953},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.33698105812072754},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.31938979029655457},{"id":"https://openalex.org/C68387754","wikidata":"https://www.wikidata.org/wiki/Q7271585","display_name":"Schedule","level":2,"score":0.29381847381591797},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.29015541076660156},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.2782024145126343},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.24009084701538086},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1583518385887146}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2024.3507854","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2024.3507854","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":43,"referenced_works":["https://openalex.org/W1481260476","https://openalex.org/W1984672920","https://openalex.org/W2002235729","https://openalex.org/W2014532218","https://openalex.org/W2017894321","https://openalex.org/W2051673624","https://openalex.org/W2052921269","https://openalex.org/W2053195438","https://openalex.org/W2055364613","https://openalex.org/W2077297105","https://openalex.org/W2104772533","https://openalex.org/W2109978925","https://openalex.org/W2110050374","https://openalex.org/W2597321818","https://openalex.org/W2922346524","https://openalex.org/W3002552579","https://openalex.org/W3005831635","https://openalex.org/W3008389987","https://openalex.org/W3010770769","https://openalex.org/W3034457223","https://openalex.org/W3036481609","https://openalex.org/W3092035490","https://openalex.org/W3123099104","https://openalex.org/W3133110488","https://openalex.org/W3149044243","https://openalex.org/W3150165263","https://openalex.org/W3150389572","https://openalex.org/W4205418041","https://openalex.org/W4206608432","https://openalex.org/W4234423367","https://openalex.org/W4242037947","https://openalex.org/W4295036057","https://openalex.org/W4312606920","https://openalex.org/W4319068634","https://openalex.org/W4378697259","https://openalex.org/W4385153833","https://openalex.org/W4387449129","https://openalex.org/W4394611388","https://openalex.org/W4396852949","https://openalex.org/W4400275761","https://openalex.org/W4400315082","https://openalex.org/W4400487646","https://openalex.org/W4400525468"],"related_works":["https://openalex.org/W3204654320","https://openalex.org/W1953501065","https://openalex.org/W2946551485","https://openalex.org/W1810385482","https://openalex.org/W1040886031","https://openalex.org/W2950583200","https://openalex.org/W1524286295","https://openalex.org/W2922579413","https://openalex.org/W2165418048","https://openalex.org/W2128410848"],"abstract_inverted_index":{"Semiconductor":[0],"manufacturing":[1],"widely":[2,175],"employs":[3],"cluster":[4,62,170,186,299],"tools":[5,63,171,187],"that":[6,178,307,327],"comprise":[7],"three":[8],"critical":[9],"components:":[10],"a":[11,15,31,118,123,270],"vacuum":[12],"module":[13,17,23,78],"(VM),":[14],"loadlock":[16],"(LLM),":[18],"and":[19,66,80,100,111,142,153,206,241,246],"an":[20,135,274,281],"equipment":[21],"front-end":[22],"(EFEM).":[24],"In":[25],"operating":[26,89],"such":[27,326],"tools,":[28],"LLM":[29,101,216,247],"plays":[30],"pivotal":[32],"role.":[33],"Additionally,":[34],"wafer":[35,41,67,167,202],"fabrication":[36],"in":[37,77,145,209],"VM":[38,91,205,249],"faces":[39],"strict":[40],"residency":[42,68,195,222],"time":[43,69,196,223],"constraints,":[44],"making":[45,293],"the":[46,49,56,74,87,96,115,127,140,156,180,213,232,238,242,257,287,290,312,324],"coordination":[47],"among":[48],"modules":[50],"particularly":[51],"challenging.":[52],"This":[53],"paper":[54,230],"addresses":[55],"cyclic":[57],"scheduling":[58,185,267],"problem":[59],"of":[60,98,117,147,155,182,234,244,289,320],"single-arm":[61,169],"with":[64,172,311],"EFEM":[65,99,173,183,207,245],"constraints.":[70,224],"It":[71],"focuses":[72],"on":[73,102,105,184,237,248],"tool":[75,148,239,300],"efficiency":[76,154,288],"cooperation":[79,214],"schedulability.":[81],"We":[82],"explore":[83],"cooperative":[84,235],"strategies":[85,236],"for":[86,114,126,200,296,302],"robot":[88],"within":[90],"to":[92,138,165,191,220,279,322],"access":[93],"loadlocks,":[94],"elucidating":[95],"influence":[97,243],"VM.":[103],"Based":[104],"these":[106,253],"strategies,":[107,254],"we":[108,133,255],"establish":[109],"necessary":[110],"sufficient":[112],"conditions":[113],"existence":[116],"feasible":[119,141,271],"periodic":[120],"schedule,":[121],"providing":[122],"foundational":[124],"basis":[125],"systematic":[128],"analysis.":[129],"For":[130,305],"schedulable":[131],"scenarios,":[132],"derive":[134],"efficient":[136,275,303],"algorithm":[137,158,276],"identify":[139],"optimal":[143,282],"schedule":[144,272],"terms":[146],"cycle":[149],"time.":[150],"The":[151],"performance":[152],"proposed":[157,291],"are":[159,174,188,198,308],"validated":[160],"through":[161],"experimental":[162],"verification.":[163],"Note":[164],"Practitioners\u2014In":[166],"fabs,":[168],"adopted.":[176],"Studies":[177],"neglect":[179],"impact":[181,233],"often":[189],"inapplicable":[190],"real-world":[192],"scenarios.":[193],"Wafer":[194],"constraints":[197],"essential":[199],"maintaining":[201],"quality.":[203],"As":[204],"operate":[208],"different":[210],"pressure":[211],"environments,":[212],"via":[215],"makes":[217],"it":[218,294],"challenging":[219],"meet":[221],"To":[225],"address":[226],"this":[227,229,315],"problem,":[228],"analyzes":[231],"performance,":[240],"as":[250],"well.":[251],"Under":[252],"examine":[256],"schedulability":[258],"conditions,":[259],"helping":[260],"engineers":[261],"understand":[262],"how":[263,321],"processing":[264],"parameters":[265],"affect":[266],"feasibility.":[268],"If":[269],"exists,":[273],"is":[277],"derived":[278],"find":[280],"schedule.":[283],"Experimental":[284],"results":[285,313],"show":[286],"algorithm,":[292],"suitable":[295],"embedding":[297],"into":[298],"controllers":[301],"implementation.":[304],"cases":[306],"not":[309],"schedulable,":[310],"obtained,":[314],"work":[316],"can":[317,329],"provide":[318],"guidance":[319],"redesign":[323],"process":[325],"feasibility":[328],"be":[330],"ensured.":[331]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":4}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}