{"id":"https://openalex.org/W3213747853","doi":"https://doi.org/10.1109/tase.2021.3124157","title":"Product-to-Product Virtual Metrology of Color Filter Processes in Panel Industry","display_name":"Product-to-Product Virtual Metrology of Color Filter Processes in Panel Industry","publication_year":2021,"publication_date":"2021-11-08","ids":{"openalex":"https://openalex.org/W3213747853","doi":"https://doi.org/10.1109/tase.2021.3124157","mag":"3213747853"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2021.3124157","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2021.3124157","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064302424","display_name":"Shu\u2010Kai S. Fan","orcid":"https://orcid.org/0000-0003-3068-504X"},"institutions":[{"id":"https://openalex.org/I118292597","display_name":"National Taipei University of Technology","ror":"https://ror.org/00cn92c09","country_code":"TW","type":"education","lineage":["https://openalex.org/I118292597"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Shu-Kai S. Fan","raw_affiliation_strings":["Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0003-3068-504X","affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan","institution_ids":["https://openalex.org/I118292597"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062087251","display_name":"Xiao-Wen Chang","orcid":"https://orcid.org/0000-0001-9251-2959"},"institutions":[{"id":"https://openalex.org/I118292597","display_name":"National Taipei University of Technology","ror":"https://ror.org/00cn92c09","country_code":"TW","type":"education","lineage":["https://openalex.org/I118292597"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Xiao-Wen Chang","raw_affiliation_strings":["Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan","institution_ids":["https://openalex.org/I118292597"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5049424328","display_name":"Yu-Yu Lin","orcid":"https://orcid.org/0000-0002-6864-9119"},"institutions":[{"id":"https://openalex.org/I118292597","display_name":"National Taipei University of Technology","ror":"https://ror.org/00cn92c09","country_code":"TW","type":"education","lineage":["https://openalex.org/I118292597"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yu-Yu Lin","raw_affiliation_strings":["Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan","institution_ids":["https://openalex.org/I118292597"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5064302424"],"corresponding_institution_ids":["https://openalex.org/I118292597"],"apc_list":null,"apc_paid":null,"fwci":1.2078,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.82977951,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":"19","issue":"4","first_page":"3496","last_page":"3507"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10640","display_name":"Spectroscopy and Chemometric Analyses","score":0.9401999711990356,"subfield":{"id":"https://openalex.org/subfields/1602","display_name":"Analytical Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11666","display_name":"Color Science and Applications","score":0.9344000220298767,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.6781308650970459},{"id":"https://openalex.org/keywords/quality-assurance","display_name":"Quality assurance","score":0.5790610313415527},{"id":"https://openalex.org/keywords/filter","display_name":"Filter (signal processing)","score":0.5684412717819214},{"id":"https://openalex.org/keywords/product","display_name":"Product (mathematics)","score":0.48859459161758423},{"id":"https://openalex.org/keywords/liquid-crystal-display","display_name":"Liquid-crystal display","score":0.4779805541038513},{"id":"https://openalex.org/keywords/production","display_name":"Production (economics)","score":0.42521989345550537},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.40421342849731445},{"id":"https://openalex.org/keywords/industrial-engineering","display_name":"Industrial engineering","score":0.40345853567123413},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.36339932680130005},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.34302467107772827},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.11094442009925842}],"concepts":[{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.6781308650970459},{"id":"https://openalex.org/C106436119","wikidata":"https://www.wikidata.org/wiki/Q836575","display_name":"Quality assurance","level":3,"score":0.5790610313415527},{"id":"https://openalex.org/C106131492","wikidata":"https://www.wikidata.org/wiki/Q3072260","display_name":"Filter (signal processing)","level":2,"score":0.5684412717819214},{"id":"https://openalex.org/C90673727","wikidata":"https://www.wikidata.org/wiki/Q901718","display_name":"Product (mathematics)","level":2,"score":0.48859459161758423},{"id":"https://openalex.org/C128019096","wikidata":"https://www.wikidata.org/wiki/Q83341","display_name":"Liquid-crystal display","level":2,"score":0.4779805541038513},{"id":"https://openalex.org/C2778348673","wikidata":"https://www.wikidata.org/wiki/Q739302","display_name":"Production (economics)","level":2,"score":0.42521989345550537},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.40421342849731445},{"id":"https://openalex.org/C13736549","wikidata":"https://www.wikidata.org/wiki/Q4489420","display_name":"Industrial engineering","level":1,"score":0.40345853567123413},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.36339932680130005},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.34302467107772827},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.11094442009925842},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C139719470","wikidata":"https://www.wikidata.org/wiki/Q39680","display_name":"Macroeconomics","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C2778618615","wikidata":"https://www.wikidata.org/wiki/Q4008393","display_name":"External quality assessment","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2021.3124157","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2021.3124157","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G758016999","display_name":null,"funder_award_id":"MOST110-2221-E-027-112-MY3","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"}],"funders":[{"id":"https://openalex.org/F4320322795","display_name":"Ministry of Science and Technology, Taiwan","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":34,"referenced_works":["https://openalex.org/W258630265","https://openalex.org/W1972844536","https://openalex.org/W1986614398","https://openalex.org/W1997545142","https://openalex.org/W2037202266","https://openalex.org/W2080494052","https://openalex.org/W2082879727","https://openalex.org/W2159109921","https://openalex.org/W2165698076","https://openalex.org/W2189149359","https://openalex.org/W2503140580","https://openalex.org/W2507856496","https://openalex.org/W2563566737","https://openalex.org/W2765318358","https://openalex.org/W2770908349","https://openalex.org/W2777729492","https://openalex.org/W2784063001","https://openalex.org/W2796968508","https://openalex.org/W2808993481","https://openalex.org/W2902317995","https://openalex.org/W2919568442","https://openalex.org/W2919932305","https://openalex.org/W2945658292","https://openalex.org/W2952910930","https://openalex.org/W2964833413","https://openalex.org/W2965261380","https://openalex.org/W2974765567","https://openalex.org/W2978187484","https://openalex.org/W2985793995","https://openalex.org/W3015850748","https://openalex.org/W3017264588","https://openalex.org/W3100782605","https://openalex.org/W3133468499","https://openalex.org/W6688269647"],"related_works":["https://openalex.org/W1998546186","https://openalex.org/W2061967405","https://openalex.org/W2923974939","https://openalex.org/W2110528520","https://openalex.org/W2174860717","https://openalex.org/W2392646414","https://openalex.org/W2590542424","https://openalex.org/W2755767658","https://openalex.org/W2021243286","https://openalex.org/W2734799811"],"abstract_inverted_index":{"The":[0,127,197],"current":[1],"thin":[2],"film":[3],"transistor":[4],"liquid":[5],"crystal":[6],"display":[7],"(TFT-LCD)":[8],"panel":[9],"industry":[10],"evolves":[11],"in":[12,68,149,170,192,201,209,224,256,287],"transition":[13],"from":[14],"volume":[15],"production":[16,19,31,159,260,315],"to":[17,27,63,116,139,154,162,165,168,180,245,265,274,304],"customized":[18],"service":[20],"as":[21],"a":[22,57,80,100,189,233,281],"major":[23],"competition":[24,157],"strategy.":[25],"Owing":[26],"the":[28,69,74,88,96,107,124,141,144,150,171,182,202,210,217,225,247,252,257,269],"highly":[29,258],"mixed":[30,259],"type":[32],"of":[33,73,110,130,143,206,220,251,283,294],"small":[34,111],"batch":[35,112],"sizes":[36],"and":[37,99,173,186,194,227,242,249],"high":[38],"varieties,":[39],"metrology":[40,51,231,278,297,308],"data":[41,270],"are":[42,137],"usually":[43],"collected":[44],"too":[45],"infrequently":[46],"for":[47,87,106,134,240,280,310],"building":[48],"accurate":[49,276],"virtual":[50,277,296,307],"(VM)":[52],"models.":[53],"In":[54],"this":[55],"paper,":[56],"new":[58,108,145,292,311],"product-to-product":[59,295],"(P2P)":[60],"VM":[61,119,147],"model":[62,84,94,98,105],"predict":[64],"photoresist":[65,131],"spacer":[66,132],"heights":[67,133],"color":[70,198,253,288],"filter":[71,199,254,289],"process":[72,200,255],"array":[75,203],"sector":[76,204],"is":[77,85,114,205,232,272,298],"developed.":[78],"First,":[79],"position-based":[81],"random":[82,103],"forests":[83,104],"proposed":[86,115],"base":[89,97],"product.":[90],"Second,":[91],"an":[92],"ensemble":[93],"combining":[95],"biased":[101],"estimation":[102],"product":[109,284],"size":[113],"perform":[117],"P2P":[118,146],"between":[120,301],"different":[121,135],"products":[122,136,312],"on":[123],"same":[125],"tool.":[126],"real":[128],"datasets":[129],"used":[138,239],"illustrate":[140],"accuracy":[142],"framework":[148],"experimental":[151],"study.":[152],"Note":[153],"Practitioners\u2014As":[155],"global":[156],"intensifies,":[158],"management":[160],"needs":[161],"be":[163,238,266],"adjusted":[164],"adapt":[166],"swiftly":[167],"changes":[169],"time-varying":[172],"competitive":[174],"market.":[175],"For":[176],"manufacturing":[177,183],"firms,":[178],"how":[179,273],"operate":[181],"system":[184],"effectively":[185],"efficiently":[187],"plays":[188],"crucial":[190],"role":[191],"quality":[193,218],"yield":[195,248],"improvements.":[196],"critical":[207],"importance":[208],"TFT-LCD":[211],"practice":[212],"since":[213],"it":[214],"essentially":[215],"dictates":[216],"level":[219],"subsequent":[221],"processing":[222],"steps":[223],"cell":[226],"assembly":[228],"sectors.":[229],"Virtual":[230],"state-of-the-art":[234],"measure":[235],"that":[236],"can":[237],"monitoring":[241],"controlling":[243],"purposes":[244],"maintain":[246],"productivity":[250],"environment.":[261],"An":[262],"immediate":[263],"challenge":[264],"faced":[267],"by":[268],"scientists":[271],"build":[275,305],"models":[279,309],"variety":[282],"lines":[285],"separately":[286],"manufacturing.":[290],"A":[291],"proposal":[293],"first":[299],"addressed":[300],"products,":[302],"enabling":[303],"appropriate":[306],"with":[313],"small-sized":[314],"batches.":[316]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":4}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}