{"id":"https://openalex.org/W3170617568","doi":"https://doi.org/10.1109/tase.2021.3085481","title":"Development and Testing of a Large-Stroke Nanopositioning Stage With Linear Active Disturbance Rejection Controller","display_name":"Development and Testing of a Large-Stroke Nanopositioning Stage With Linear Active Disturbance Rejection Controller","publication_year":2021,"publication_date":"2021-06-14","ids":{"openalex":"https://openalex.org/W3170617568","doi":"https://doi.org/10.1109/tase.2021.3085481","mag":"3170617568"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2021.3085481","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2021.3085481","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5009718960","display_name":"Hui Tang","orcid":"https://orcid.org/0000-0003-2155-5235"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Hui Tang","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","Guangdong Key Laboratory of Micro/Nano Machining Technology and Equipment, Guangdong University of Technology, Guangzhou, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]},{"raw_affiliation_string":"Guangdong Key Laboratory of Micro/Nano Machining Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063756735","display_name":"Jiedong Li","orcid":"https://orcid.org/0000-0001-9016-9042"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiedong Li","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","Guangdong Key Laboratory of Micro/Nano Machining Technology and Equipment, Guangdong University of Technology, Guangzhou, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]},{"raw_affiliation_string":"Guangdong Key Laboratory of Micro/Nano Machining Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101529682","display_name":"Yingjie Jia","orcid":"https://orcid.org/0000-0002-1102-7490"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yingjie Jia","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","Guangdong Key Laboratory of Micro/Nano Machining Technology and Equipment, Guangdong University of Technology, Guangzhou, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]},{"raw_affiliation_string":"Guangdong Key Laboratory of Micro/Nano Machining Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028795816","display_name":"Jian Gao","orcid":"https://orcid.org/0000-0001-5625-7751"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Gao","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","Guangdong Key Laboratory of Micro/Nano Machining Technology and Equipment, Guangdong University of Technology, Guangzhou, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]},{"raw_affiliation_string":"Guangdong Key Laboratory of Micro/Nano Machining Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5027712402","display_name":"Yangmin Li","orcid":"https://orcid.org/0000-0002-4448-3310"},"institutions":[{"id":"https://openalex.org/I14243506","display_name":"Hong Kong Polytechnic University","ror":"https://ror.org/0030zas98","country_code":"HK","type":"education","lineage":["https://openalex.org/I14243506"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Yangmin Li","raw_affiliation_strings":["Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong SAR, China"],"affiliations":[{"raw_affiliation_string":"Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong SAR, China","institution_ids":["https://openalex.org/I14243506"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5009718960"],"corresponding_institution_ids":["https://openalex.org/I139024713"],"apc_list":null,"apc_paid":null,"fwci":2.7465,"has_fulltext":false,"cited_by_count":29,"citation_normalized_percentile":{"value":0.90221286,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"19","issue":"3","first_page":"2461","last_page":"2470"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.53034907579422},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.45010656118392944},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.39694446325302124},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3306695818901062},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.32307928800582886},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.12133157253265381},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.08082762360572815}],"concepts":[{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.53034907579422},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.45010656118392944},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.39694446325302124},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3306695818901062},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.32307928800582886},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.12133157253265381},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.08082762360572815},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2021.3085481","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2021.3085481","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G2304302389","display_name":null,"funder_award_id":"U20A6004","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6322251078","display_name":null,"funder_award_id":"51975132","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W1630819030","https://openalex.org/W1702316033","https://openalex.org/W1907298927","https://openalex.org/W1929524336","https://openalex.org/W1995911701","https://openalex.org/W2015128267","https://openalex.org/W2026855453","https://openalex.org/W2042473022","https://openalex.org/W2049518054","https://openalex.org/W2055931169","https://openalex.org/W2071244795","https://openalex.org/W2074586010","https://openalex.org/W2075916174","https://openalex.org/W2087232315","https://openalex.org/W2097696157","https://openalex.org/W2118600801","https://openalex.org/W2128403295","https://openalex.org/W2132765672","https://openalex.org/W2135493101","https://openalex.org/W2166996998","https://openalex.org/W2537178283","https://openalex.org/W2763162181","https://openalex.org/W2770490993","https://openalex.org/W2797128247","https://openalex.org/W2891092840","https://openalex.org/W2899143003","https://openalex.org/W2899645896","https://openalex.org/W2921132220","https://openalex.org/W3080541089","https://openalex.org/W3100974693"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2390279801","https://openalex.org/W2358668433","https://openalex.org/W2376932109","https://openalex.org/W2001405890","https://openalex.org/W2382290278","https://openalex.org/W2350741829","https://openalex.org/W2530322880","https://openalex.org/W1596801655","https://openalex.org/W2359140296"],"abstract_inverted_index":{"Flexure-based":[0],"scanning":[1,257],"stages":[2],"driven":[3],"by":[4,90,103],"piezoelectric":[5,255],"(PZT)":[6],"actuator":[7],"with":[8,70,264,278],"large":[9,43],"stroke,":[10,44,199,249,302],"nanoscale":[11,48,74],"precision,":[12],"and":[13,47,56,73,176,223,251,270,334],"high":[14,45],"bandwidth":[15,226,337],"are":[16],"quite":[17],"appealing":[18],"for":[19,149,253,352],"developing":[20],"an":[21,64],"advanced":[22,354],"multiphoton":[23,356],"polymerization":[24,357],"3-D":[25,358],"nanolithography":[26,359],"system.":[27],"The":[28,183],"motivation":[29],"of":[30,84,137,157,164,178,248,284,321,325,370],"this":[31],"article":[32],"is":[33,77,88,101,115,159,218,227,268,286,329,338],"to":[34,50,92,122,144,172,196,230,236,241,299,341],"develop":[35],"a":[36,104,123,128,152,162,259,279],"nanopositioning":[37,68,86,140,150,181,191,262,294,327,347,374],"system,":[38,258],"which":[39,100,132,200,303],"can":[40,119],"simultaneously":[41],"achieve":[42,197,300],"bandwidth,":[46],"precision":[49],"ensure":[51],"its":[52],"machining":[53],"size,":[54],"efficiency,":[55],"accuracy":[57,76,252],"without":[58,361],"traditional":[59],"step-by-step":[60,362],"splicing":[61,363],"operations.":[62,364],"First,":[63],"<italic":[65,233],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[66,206,234,309],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">XY</i>":[67],"stage":[69,87,263,328],"millimeter-scale":[71,265],"workspace":[72],"positioning":[75],"designed.":[78],"Besides,":[79],"the":[80,85,97,135,139,174,179,188,194,214,224,239,244,254,292,297,317,326,335,345,367,371],"natural":[81],"frequency":[82],"modeling":[83],"conducted":[89],"resorting":[91],"compliance":[93],"analysis":[94,106],"based":[95],"on":[96],"matrix":[98],"method,":[99],"validated":[102],"finite-element":[105],"(FEA).":[107],"Moreover,":[108],"linear":[109,271],"active":[110,272],"disturbance":[111,273],"rejection":[112,274],"controller":[113,125,275],"(LADRC)":[114,276],"demonstrated":[116],"that":[117,187,291],"it":[118],"be":[120,377],"equivalent":[121],"PID":[124],"filtered":[126],"using":[127],"second-order":[129],"low-pass":[130],"filter,":[131],"theoretically":[133],"verifies":[134],"effectiveness":[136,175],"controlling":[138],"stage.":[141,182],"In":[142,365],"order":[143],"complete":[145],"LADRC\u2019s":[146],"successful":[147],"implementation":[148],"stage,":[151],"novel":[153,280],"quantitative":[154,281],"one-parameter-tuning":[155,282],"method":[156,283],"LADRC":[158],"proposed.":[160,287],"Finally,":[161],"series":[163],"trajectory":[165],"tracking":[166,216,319,323],"experiments":[167],"has":[168,193,201,296,304,349],"been":[169],"carried":[170],"out":[171],"verify":[173,186],"superiority":[177],"proposed":[180,372],"experimental":[184],"results":[185,289],"large-stroke":[189,373],"compliant":[190,293],"system":[192,295,348],"capability":[195,298],"millimeter":[198,301],"reached":[202,305],"1.035":[203,306],"mm":[204,307],"<inline-formula":[205,308],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">":[207,310],"<tex-math":[208,311],"notation=\"LaTeX\">$\\times":[209,312],"\\,\\,1.035$":[210,313],"</tex-math></inline-formula>":[211,314],"mm,":[212,315],"while":[213,316],"average":[215,318],"error":[217,320],"kept":[219,330],"within":[220,331],"\u00b1100":[221,332],"nm,":[222,333],"closed-loop":[225,336],"achieved":[228,339],"up":[229,340],"32":[231,342],"Hz.":[232,343],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">Note":[235],"Practitioners</i>":[237],"\u2014With":[238],"purpose":[240],"effectively":[242],"improve":[243],"performance":[245,351],"in":[246],"terms":[247],"speed,":[250],"(PZT)-actuated":[256],"completely":[260],"decoupled":[261],"travel":[266],"range":[267],"developed":[269,346],"strategy":[277,285,375],"Experimental":[288],"indicate":[290],"dynamic":[322],"control":[324],"Therefore,":[344],"satisfactory":[350],"fulfilling":[353],"large-size":[355],"task":[360],"summary,":[366],"potential":[368],"applications":[369],"will":[376],"promising.":[378]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":8},{"year":2024,"cited_by_count":10},{"year":2023,"cited_by_count":6},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}