{"id":"https://openalex.org/W3017264588","doi":"https://doi.org/10.1109/tase.2020.2983061","title":"Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing","display_name":"Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing","publication_year":2020,"publication_date":"2020-04-14","ids":{"openalex":"https://openalex.org/W3017264588","doi":"https://doi.org/10.1109/tase.2020.2983061","mag":"3017264588"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2020.2983061","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2020.2983061","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064302424","display_name":"Shu\u2010Kai S. Fan","orcid":"https://orcid.org/0000-0003-3068-504X"},"institutions":[{"id":"https://openalex.org/I118292597","display_name":"National Taipei University of Technology","ror":"https://ror.org/00cn92c09","country_code":"TW","type":"education","lineage":["https://openalex.org/I118292597"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Shu-Kai S. Fan","raw_affiliation_strings":["Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0003-3068-504X","affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan","institution_ids":["https://openalex.org/I118292597"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047554774","display_name":"Chia-Yu Hsu","orcid":"https://orcid.org/0000-0002-2939-4387"},"institutions":[{"id":"https://openalex.org/I118292597","display_name":"National Taipei University of Technology","ror":"https://ror.org/00cn92c09","country_code":"TW","type":"education","lineage":["https://openalex.org/I118292597"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chia-Yu Hsu","raw_affiliation_strings":["Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0002-2939-4387","affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan","institution_ids":["https://openalex.org/I118292597"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033678008","display_name":"Du\u2010Ming Tsai","orcid":"https://orcid.org/0000-0001-8783-7994"},"institutions":[{"id":"https://openalex.org/I99908691","display_name":"Yuan Ze University","ror":"https://ror.org/01fv1ds98","country_code":"TW","type":"education","lineage":["https://openalex.org/I99908691"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Du-Ming Tsai","raw_affiliation_strings":["Department of Industrial Engineering and Management, Yuan Ze University, Taoyuan, Taiwan"],"raw_orcid":"https://orcid.org/0000-0001-8783-7994","affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, Yuan Ze University, Taoyuan, Taiwan","institution_ids":["https://openalex.org/I99908691"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053708853","display_name":"Fei He","orcid":"https://orcid.org/0000-0002-1739-5649"},"institutions":[{"id":"https://openalex.org/I92403157","display_name":"University of Science and Technology Beijing","ror":"https://ror.org/02egmk993","country_code":"CN","type":"education","lineage":["https://openalex.org/I92403157"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fei He","raw_affiliation_strings":["Collaborative Innovation Center of Steel Technology, University of Science and Technology Beijing, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-1739-5649","affiliations":[{"raw_affiliation_string":"Collaborative Innovation Center of Steel Technology, University of Science and Technology Beijing, Beijing, China","institution_ids":["https://openalex.org/I92403157"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5069858025","display_name":"Chun-Chung Cheng","orcid":null},"institutions":[{"id":"https://openalex.org/I118292597","display_name":"National Taipei University of Technology","ror":"https://ror.org/00cn92c09","country_code":"TW","type":"education","lineage":["https://openalex.org/I118292597"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chun-Chung Cheng","raw_affiliation_strings":["Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan","institution_ids":["https://openalex.org/I118292597"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":9.8967,"has_fulltext":false,"cited_by_count":188,"citation_normalized_percentile":{"value":0.98910675,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":100},"biblio":{"volume":"17","issue":"4","first_page":"1925","last_page":"1936"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9901999831199646,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/key","display_name":"Key (lock)","score":0.7856214642524719},{"id":"https://openalex.org/keywords/fault-detection-and-isolation","display_name":"Fault detection and isolation","score":0.6522238850593567},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.6440674662590027},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5668715238571167},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5099414587020874},{"id":"https://openalex.org/keywords/fault","display_name":"Fault (geology)","score":0.49476832151412964},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.4908321499824524},{"id":"https://openalex.org/keywords/naive-bayes-classifier","display_name":"Naive Bayes classifier","score":0.49050062894821167},{"id":"https://openalex.org/keywords/visualization","display_name":"Visualization","score":0.48355671763420105},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.40451252460479736},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3978726267814636},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.3970547318458557},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.36987370252609253},{"id":"https://openalex.org/keywords/support-vector-machine","display_name":"Support vector machine","score":0.2135898470878601}],"concepts":[{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.7856214642524719},{"id":"https://openalex.org/C152745839","wikidata":"https://www.wikidata.org/wiki/Q5438153","display_name":"Fault detection and isolation","level":3,"score":0.6522238850593567},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.6440674662590027},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5668715238571167},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5099414587020874},{"id":"https://openalex.org/C175551986","wikidata":"https://www.wikidata.org/wiki/Q47089","display_name":"Fault (geology)","level":2,"score":0.49476832151412964},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.4908321499824524},{"id":"https://openalex.org/C52001869","wikidata":"https://www.wikidata.org/wiki/Q812530","display_name":"Naive Bayes classifier","level":3,"score":0.49050062894821167},{"id":"https://openalex.org/C36464697","wikidata":"https://www.wikidata.org/wiki/Q451553","display_name":"Visualization","level":2,"score":0.48355671763420105},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.40451252460479736},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3978726267814636},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.3970547318458557},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.36987370252609253},{"id":"https://openalex.org/C12267149","wikidata":"https://www.wikidata.org/wiki/Q282453","display_name":"Support vector machine","level":2,"score":0.2135898470878601},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C165205528","wikidata":"https://www.wikidata.org/wiki/Q83371","display_name":"Seismology","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.0},{"id":"https://openalex.org/C38652104","wikidata":"https://www.wikidata.org/wiki/Q3510521","display_name":"Computer security","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2020.2983061","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2020.2983061","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G7376531182","display_name":null,"funder_award_id":"MOST 108-2221-E-027-028-MY3","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"}],"funders":[{"id":"https://openalex.org/F4320322795","display_name":"Ministry of Science and Technology, Taiwan","ror":"https://ror.org/02kv4zf79"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":65,"referenced_works":["https://openalex.org/W1534477342","https://openalex.org/W1594031697","https://openalex.org/W1965833531","https://openalex.org/W1965875070","https://openalex.org/W1966863755","https://openalex.org/W1979336685","https://openalex.org/W1980846021","https://openalex.org/W1997527287","https://openalex.org/W2006132502","https://openalex.org/W2015579857","https://openalex.org/W2023883274","https://openalex.org/W2027330308","https://openalex.org/W2029200918","https://openalex.org/W2039839604","https://openalex.org/W2049757356","https://openalex.org/W2055019723","https://openalex.org/W2068568515","https://openalex.org/W2071909685","https://openalex.org/W2072857564","https://openalex.org/W2096697795","https://openalex.org/W2096976414","https://openalex.org/W2101260915","https://openalex.org/W2107074288","https://openalex.org/W2112595162","https://openalex.org/W2122111042","https://openalex.org/W2124525180","https://openalex.org/W2127218421","https://openalex.org/W2127800670","https://openalex.org/W2128258856","https://openalex.org/W2132733568","https://openalex.org/W2137559939","https://openalex.org/W2137922462","https://openalex.org/W2139833307","https://openalex.org/W2142704389","https://openalex.org/W2147069407","https://openalex.org/W2155261478","https://openalex.org/W2157444450","https://openalex.org/W2169178923","https://openalex.org/W2172972438","https://openalex.org/W2186937468","https://openalex.org/W2187089797","https://openalex.org/W2270675063","https://openalex.org/W2292751661","https://openalex.org/W2302877473","https://openalex.org/W2329413540","https://openalex.org/W2330820318","https://openalex.org/W2403687144","https://openalex.org/W2411921399","https://openalex.org/W2512338826","https://openalex.org/W2528942084","https://openalex.org/W2563823863","https://openalex.org/W2594332903","https://openalex.org/W2739031780","https://openalex.org/W2766420784","https://openalex.org/W2770190353","https://openalex.org/W2790967054","https://openalex.org/W2883342032","https://openalex.org/W2964003344","https://openalex.org/W2964245146","https://openalex.org/W3083113686","https://openalex.org/W3147280420","https://openalex.org/W6678914141","https://openalex.org/W6683161245","https://openalex.org/W6684773713","https://openalex.org/W6715097780"],"related_works":["https://openalex.org/W1998662473","https://openalex.org/W2095182624","https://openalex.org/W2075391483","https://openalex.org/W2068608913","https://openalex.org/W1988252515","https://openalex.org/W2129617696","https://openalex.org/W2742348144","https://openalex.org/W2121416564","https://openalex.org/W2992897358","https://openalex.org/W1969801928"],"abstract_inverted_index":{"Fault":[0],"detection":[1,189],"and":[2,14,60,67,96,107,112,124,137,190,208,217,222],"classification":[3],"(FDC)":[4],"is":[5,29,156,179],"important":[6],"for":[7,54,143,172,187],"semiconductor":[8,26],"manufacturing":[9,27],"to":[10,56,79,102,165,181],"monitor":[11,57],"equipment's":[12],"condition":[13],"examine":[15],"the":[16,20,25,46,58,62,65,75,81,90,104,115,120,173,183,197,214],"potential":[17],"cause":[18],"of":[19,36,64,83,85,152],"fault.":[21],"Each":[22],"equipment":[23,86],"in":[24,170],"process":[28,59,66,174],"often":[30],"accompanied":[31],"by":[32,93,158],"a":[33,167],"large":[34],"amount":[35],"sensor":[37],"readings,":[38],"also":[39,209],"called":[40],"status":[41],"variable":[42],"identification":[43],"(SVID).":[44],"Identifying":[45],"key":[47,91,105,109,116,121,154,215,219],"SVIDs":[48,84,106,155,216],"accurately":[49],"can":[50,200],"make":[51],"it":[52],"easier":[53],"engineers":[55],"maintain":[61],"stability":[63],"wafer":[68],"productive":[69],"yields.":[70],"This":[71],"article":[72],"proposes":[73],"using":[74,94,159],"random":[76],"forests":[77],"algorithm":[78],"analyze":[80],"importance":[82],"sensors,":[87],"automatically":[88],"filters":[89],"SVID":[92],"k-means,":[95],"integrates":[97],"various":[98],"machine":[99],"learning":[100],"methods":[101],"verify":[103],"identify":[108],"processing":[110,122,220],"time":[111,123,221],"steps.":[113,223],"Upon":[114],"parameters":[117],"are":[118,126,141],"identified,":[119],"steps":[125],"investigated":[127],"subsequently.":[128],"The":[129,192],"ensemble":[130],"models":[131],"constructed":[132],"on":[133],"k-nearest":[134],"neighbors":[135],"(kNNs)":[136],"na\u00efve":[138],"Bayes":[139],"classifiers":[140],"presented":[142],"classifying":[144],"wafers":[145],"as":[146],"normal":[147],"or":[148],"abnormal.":[149],"Data":[150],"visualization":[151],"multidimensional":[153],"performed":[157],"t-distributed":[160],"stochastic":[161],"neighbor":[162],"embedding":[163],"(t-SNE)":[164],"create":[166],"graphical":[168],"aid":[169],"FDC":[171],"engineer.":[175],"An":[176],"empirical":[177],"study":[178],"conducted":[180],"validate":[182],"proposed":[184,198],"data-driven":[185],"framework":[186,199],"fault":[188],"diagnostic.":[191],"experimental":[193],"results":[194],"demonstrate":[195],"that":[196],"detect":[201],"abnormality":[202],"effectively":[203],"with":[204],"highly":[205],"imbalanced":[206],"classes":[207],"gain":[210],"insightful":[211],"information":[212],"about":[213],"corresponding":[218]},"counts_by_year":[{"year":2026,"cited_by_count":14},{"year":2025,"cited_by_count":47},{"year":2024,"cited_by_count":42},{"year":2023,"cited_by_count":34},{"year":2022,"cited_by_count":21},{"year":2021,"cited_by_count":24},{"year":2020,"cited_by_count":5},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-17T09:13:05.818461","created_date":"2025-10-10T00:00:00"}