{"id":"https://openalex.org/W2971839370","doi":"https://doi.org/10.1109/tase.2019.2935179","title":"Dynamic Support Vector Regression Control System for Overlay Error Compensation With Stochastic Metrology Delay","display_name":"Dynamic Support Vector Regression Control System for Overlay Error Compensation With Stochastic Metrology Delay","publication_year":2019,"publication_date":"2019-09-03","ids":{"openalex":"https://openalex.org/W2971839370","doi":"https://doi.org/10.1109/tase.2019.2935179","mag":"2971839370"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2019.2935179","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2019.2935179","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087163437","display_name":"Marzieh Khakifirooz","orcid":"https://orcid.org/0000-0002-1721-2646"},"institutions":[{"id":"https://openalex.org/I98461037","display_name":"Tecnol\u00f3gico de Monterrey","ror":"https://ror.org/03ayjn504","country_code":"MX","type":"education","lineage":["https://openalex.org/I98461037"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"Marzieh Khakifirooz","raw_affiliation_strings":["Department of Industrial Engineering, Tecnol\u00f3gico de Monterrey, Monterrey, Mexico"],"raw_orcid":"https://orcid.org/0000-0002-1721-2646","affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering, Tecnol\u00f3gico de Monterrey, Monterrey, Mexico","institution_ids":["https://openalex.org/I98461037"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020132059","display_name":"Chen\u2013Fu Chien","orcid":"https://orcid.org/0000-0003-3328-4946"},"institutions":[{"id":"https://openalex.org/I25846049","display_name":"National Tsing Hua University","ror":"https://ror.org/00zdnkx70","country_code":"TW","type":"education","lineage":["https://openalex.org/I25846049"]},{"id":"https://openalex.org/I4210128167","display_name":"National Science and Technology Council","ror":"https://ror.org/02kv4zf79","country_code":"TW","type":"government","lineage":["https://openalex.org/I4210128167"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chen-Fu Chien","raw_affiliation_strings":["Artificial Intelligence for Intelligent Manufacturing Systems (AIMS) Research Center, Ministry of Science and Technology, Hsinchu, Taiwan","Department of Industrial Engineering and Engineering Management, National Tsing Hua University (NTHU), Hsinchu, Taiwan"],"raw_orcid":"https://orcid.org/0000-0003-3328-4946","affiliations":[{"raw_affiliation_string":"Artificial Intelligence for Intelligent Manufacturing Systems (AIMS) Research Center, Ministry of Science and Technology, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I4210128167"]},{"raw_affiliation_string":"Department of Industrial Engineering and Engineering Management, National Tsing Hua University (NTHU), Hsinchu, Taiwan","institution_ids":["https://openalex.org/I25846049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5030107120","display_name":"Ying\u2010Jen Chen","orcid":"https://orcid.org/0000-0003-1757-4396"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ying-Jen Chen","raw_affiliation_strings":["DALab Solutions x Associates (DALabx) Ltd., Hsinchu, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"DALab Solutions x Associates (DALabx) Ltd., Hsinchu, Taiwan","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.7998,"has_fulltext":false,"cited_by_count":22,"citation_normalized_percentile":{"value":0.915141,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"17","issue":"1","first_page":"502","last_page":"512"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9907000064849854,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9907000064849854,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.988099992275238,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9833999872207642,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/support-vector-machine","display_name":"Support vector machine","score":0.5703348517417908},{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.561549186706543},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5391571521759033},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.49831700325012207},{"id":"https://openalex.org/keywords/stability","display_name":"Stability (learning theory)","score":0.49128931760787964},{"id":"https://openalex.org/keywords/kernel","display_name":"Kernel (algebra)","score":0.4585528075695038},{"id":"https://openalex.org/keywords/overlay","display_name":"Overlay","score":0.456956148147583},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.42118746042251587},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.35268041491508484},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.1809370517730713},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.14528048038482666},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.1438094973564148},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.12286865711212158}],"concepts":[{"id":"https://openalex.org/C12267149","wikidata":"https://www.wikidata.org/wiki/Q282453","display_name":"Support vector machine","level":2,"score":0.5703348517417908},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.561549186706543},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5391571521759033},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.49831700325012207},{"id":"https://openalex.org/C112972136","wikidata":"https://www.wikidata.org/wiki/Q7595718","display_name":"Stability (learning theory)","level":2,"score":0.49128931760787964},{"id":"https://openalex.org/C74193536","wikidata":"https://www.wikidata.org/wiki/Q574844","display_name":"Kernel (algebra)","level":2,"score":0.4585528075695038},{"id":"https://openalex.org/C136085584","wikidata":"https://www.wikidata.org/wiki/Q910289","display_name":"Overlay","level":2,"score":0.456956148147583},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.42118746042251587},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.35268041491508484},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.1809370517730713},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.14528048038482666},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.1438094973564148},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.12286865711212158},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C114614502","wikidata":"https://www.wikidata.org/wiki/Q76592","display_name":"Combinatorics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2019.2935179","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2019.2935179","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7400000095367432,"display_name":"Peace, Justice and strong institutions","id":"https://metadata.un.org/sdg/16"}],"awards":[{"id":"https://openalex.org/G6265373231","display_name":"Artificial Intelligence Innovation Research Center on Intelligent Manufacturing( II )","funder_award_id":"MOST108-2634-F007-008","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"},{"id":"https://openalex.org/G6396679492","display_name":"Industry 3.5 Total Solutions of Intelligent Manufacturing and Big Data Analytics( II )","funder_award_id":"MOST108-2634-F007-001","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"}],"funders":[{"id":"https://openalex.org/F4320306431","display_name":"Micron Foundation","ror":"https://ror.org/02fv52296"},{"id":"https://openalex.org/F4320322795","display_name":"Ministry of Science and Technology, Taiwan","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":51,"referenced_works":["https://openalex.org/W85072216","https://openalex.org/W200358213","https://openalex.org/W1032628850","https://openalex.org/W1521936648","https://openalex.org/W1536151505","https://openalex.org/W1855249787","https://openalex.org/W1892809886","https://openalex.org/W1937731213","https://openalex.org/W1977965454","https://openalex.org/W1985368534","https://openalex.org/W1998103843","https://openalex.org/W1998444421","https://openalex.org/W2003132325","https://openalex.org/W2035949870","https://openalex.org/W2040642276","https://openalex.org/W2052293676","https://openalex.org/W2065052779","https://openalex.org/W2066289742","https://openalex.org/W2068395870","https://openalex.org/W2072954107","https://openalex.org/W2078994778","https://openalex.org/W2083286146","https://openalex.org/W2091814046","https://openalex.org/W2094566035","https://openalex.org/W2104381478","https://openalex.org/W2105614304","https://openalex.org/W2112355406","https://openalex.org/W2135739205","https://openalex.org/W2141495055","https://openalex.org/W2156568293","https://openalex.org/W2239371728","https://openalex.org/W2291445757","https://openalex.org/W2302660042","https://openalex.org/W2320303271","https://openalex.org/W2397944585","https://openalex.org/W2412851387","https://openalex.org/W2491710580","https://openalex.org/W2537392793","https://openalex.org/W2540093921","https://openalex.org/W2764192835","https://openalex.org/W2769240689","https://openalex.org/W2773505914","https://openalex.org/W2808842906","https://openalex.org/W2911676369","https://openalex.org/W2919254770","https://openalex.org/W2984960739","https://openalex.org/W4285719527","https://openalex.org/W6608107844","https://openalex.org/W6639587505","https://openalex.org/W6752921027","https://openalex.org/W6758597602"],"related_works":["https://openalex.org/W1982225444","https://openalex.org/W1998460791","https://openalex.org/W3214270916","https://openalex.org/W2018265705","https://openalex.org/W2062004472","https://openalex.org/W2126318994","https://openalex.org/W2077142678","https://openalex.org/W2074169911","https://openalex.org/W2091450569","https://openalex.org/W2599155257"],"abstract_inverted_index":{"This":[0,127],"study":[1,57,122],"aims":[2],"to":[3,37,64],"develop":[4],"a":[5,55,120],"robust":[6],"monitoring":[7],"system":[8,33,78],"for":[9,150],"advanced":[10],"control":[11,32],"and":[12,49,105,111,145],"compensation":[13],"of":[14,51,76,94,109,134,142],"the":[15,35,47,52,66,71,77,91,95,107,132,135,139],"overlay":[16,136],"errors":[17,137],"based":[18,58,123],"on":[19,59,124],"E-insensitive":[20,30,96,143],"support":[21],"vector":[22],"regression":[23],"(SVR),":[24],"considering":[25],"metrology":[26,80,113],"delay.":[27],"The":[28,74],"proposed":[29,53,72],"SVR":[31,97,144],"has":[34],"ability":[36],"solve":[38],"quadratic":[39],"optimization":[40,98],"problems":[41],"in":[42],"real":[43],"settings.":[44],"To":[45],"investigate":[46],"consistency":[48],"reliability":[50],"algorithm,":[54],"simulation":[56,121],"empirical":[60,125],"data":[61],"was":[62,82],"conducted":[63],"validate":[65],"solution":[67],"quality":[68],"enhancement":[69],"by":[70],"approach.":[73],"stability":[75,86],"under":[79],"delay":[81],"investigated":[83],"when":[84],"Lyapunov":[85],"function":[87,93],"takes":[88],"place":[89],"as":[90],"kernel":[92],"system.":[99],"For":[100],"sensitivity":[101],"analysis,":[102],"we":[103],"compared":[104],"analyzed":[106],"effect":[108],"noise":[110],"time-varying":[112],"delay,":[114],"within":[115],"an":[116],"online":[117],"process":[118,141,151],"with":[119],"data.":[126],"approach":[128],"can":[129],"effectively":[130],"reduce":[131],"misalignment":[133],"through":[138],"self-tuning":[140],"provide":[146],"real-time":[147],"decision":[148],"aid":[149],"engineers.":[152]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":5},{"year":2019,"cited_by_count":1}],"updated_date":"2026-08-01T09:00:35.917206","created_date":"2025-10-10T00:00:00"}