{"id":"https://openalex.org/W2091673018","doi":"https://doi.org/10.1109/tase.2014.2311997","title":"Controlled Wafer Release in Clustered Photolithography Tools: Flexible Flow Line Job Release Scheduling and an LMOLP Heuristic","display_name":"Controlled Wafer Release in Clustered Photolithography Tools: Flexible Flow Line Job Release Scheduling and an LMOLP Heuristic","publication_year":2014,"publication_date":"2014-04-07","ids":{"openalex":"https://openalex.org/W2091673018","doi":"https://doi.org/10.1109/tase.2014.2311997","mag":"2091673018"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2014.2311997","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2014.2311997","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101413820","display_name":"Kyungsu Park","orcid":"https://orcid.org/0000-0002-5386-5222"},"institutions":[{"id":"https://openalex.org/I2801036362","display_name":"Agency for Defense Development","ror":"https://ror.org/05fhe0r85","country_code":"KR","type":"government","lineage":["https://openalex.org/I1327899338","https://openalex.org/I1344042128","https://openalex.org/I2801036362","https://openalex.org/I2801339556"]},{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Kyungsu Park","raw_affiliation_strings":["KAIST, Department of Industrial and Systems Engineering, Yuseong-gu, Daejeon, South Korea","Defense Agency for Technology and Quality,"],"affiliations":[{"raw_affiliation_string":"KAIST, Department of Industrial and Systems Engineering, Yuseong-gu, Daejeon, South Korea","institution_ids":["https://openalex.org/I157485424"]},{"raw_affiliation_string":"Defense Agency for Technology and Quality,","institution_ids":["https://openalex.org/I2801036362"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101619159","display_name":"James R. Morrison","orcid":"https://orcid.org/0000-0001-7773-000X"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"James R. Morrison","raw_affiliation_strings":["KAIST, Department of Industrial and Systems Engineering, Yuseong-gu, Daejeon, South Korea","Department of Industrial and Systems Engineering, KAIST, Yuseong-gu, South Korea"],"affiliations":[{"raw_affiliation_string":"KAIST, Department of Industrial and Systems Engineering, Yuseong-gu, Daejeon, South Korea","institution_ids":["https://openalex.org/I157485424"]},{"raw_affiliation_string":"Department of Industrial and Systems Engineering, KAIST, Yuseong-gu, South Korea","institution_ids":["https://openalex.org/I157485424"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5101413820"],"corresponding_institution_ids":["https://openalex.org/I157485424","https://openalex.org/I2801036362"],"apc_list":null,"apc_paid":null,"fwci":3.9169,"has_fulltext":false,"cited_by_count":26,"citation_normalized_percentile":{"value":0.9398153,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"12","issue":"2","first_page":"642","last_page":"655"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11125","display_name":"Petri Nets in System Modeling","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/1703","display_name":"Computational Theory and Mathematics"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11125","display_name":"Petri Nets in System Modeling","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/1703","display_name":"Computational Theory and Mathematics"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bottleneck","display_name":"Bottleneck","score":0.718753457069397},{"id":"https://openalex.org/keywords/petri-net","display_name":"Petri net","score":0.6866859197616577},{"id":"https://openalex.org/keywords/throughput","display_name":"Throughput","score":0.6061476469039917},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.5790331363677979},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.5741599798202515},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5695594549179077},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5487247109413147},{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.5372507572174072},{"id":"https://openalex.org/keywords/heuristic","display_name":"Heuristic","score":0.5217498540878296},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.5138455033302307},{"id":"https://openalex.org/keywords/job-shop-scheduling","display_name":"Job shop scheduling","score":0.46305084228515625},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3559701144695282},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.2796192765235901},{"id":"https://openalex.org/keywords/distributed-computing","display_name":"Distributed computing","score":0.2746738791465759},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.164046049118042},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.1286783516407013},{"id":"https://openalex.org/keywords/operations-management","display_name":"Operations management","score":0.12447139620780945},{"id":"https://openalex.org/keywords/routing","display_name":"Routing (electronic design automation)","score":0.11983218789100647},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.1052447259426117}],"concepts":[{"id":"https://openalex.org/C2780513914","wikidata":"https://www.wikidata.org/wiki/Q18210350","display_name":"Bottleneck","level":2,"score":0.718753457069397},{"id":"https://openalex.org/C38677869","wikidata":"https://www.wikidata.org/wiki/Q724168","display_name":"Petri net","level":2,"score":0.6866859197616577},{"id":"https://openalex.org/C157764524","wikidata":"https://www.wikidata.org/wiki/Q1383412","display_name":"Throughput","level":3,"score":0.6061476469039917},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.5790331363677979},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.5741599798202515},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5695594549179077},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5487247109413147},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.5372507572174072},{"id":"https://openalex.org/C173801870","wikidata":"https://www.wikidata.org/wiki/Q201413","display_name":"Heuristic","level":2,"score":0.5217498540878296},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.5138455033302307},{"id":"https://openalex.org/C55416958","wikidata":"https://www.wikidata.org/wiki/Q6206757","display_name":"Job shop scheduling","level":3,"score":0.46305084228515625},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3559701144695282},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.2796192765235901},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.2746738791465759},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.164046049118042},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.1286783516407013},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.12447139620780945},{"id":"https://openalex.org/C74172769","wikidata":"https://www.wikidata.org/wiki/Q1446839","display_name":"Routing (electronic design automation)","level":2,"score":0.11983218789100647},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1052447259426117},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C555944384","wikidata":"https://www.wikidata.org/wiki/Q249","display_name":"Wireless","level":2,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2014.2311997","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2014.2311997","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Decent work and economic growth","id":"https://metadata.un.org/sdg/8","score":0.5600000023841858}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":72,"referenced_works":["https://openalex.org/W606103426","https://openalex.org/W1486096455","https://openalex.org/W1486639976","https://openalex.org/W1804160183","https://openalex.org/W1894738766","https://openalex.org/W1963547452","https://openalex.org/W1966192486","https://openalex.org/W1973994323","https://openalex.org/W1974411737","https://openalex.org/W1981704280","https://openalex.org/W1982193504","https://openalex.org/W1991285119","https://openalex.org/W2002235729","https://openalex.org/W2011121744","https://openalex.org/W2012629892","https://openalex.org/W2012993199","https://openalex.org/W2022938367","https://openalex.org/W2025087495","https://openalex.org/W2026048895","https://openalex.org/W2041853864","https://openalex.org/W2044634403","https://openalex.org/W2045403113","https://openalex.org/W2048873858","https://openalex.org/W2050753147","https://openalex.org/W2054286590","https://openalex.org/W2055364613","https://openalex.org/W2057820268","https://openalex.org/W2064190012","https://openalex.org/W2069533734","https://openalex.org/W2073253849","https://openalex.org/W2075962708","https://openalex.org/W2089810121","https://openalex.org/W2096110679","https://openalex.org/W2097984481","https://openalex.org/W2101368096","https://openalex.org/W2103693167","https://openalex.org/W2104772533","https://openalex.org/W2106659191","https://openalex.org/W2110050374","https://openalex.org/W2113943998","https://openalex.org/W2115448177","https://openalex.org/W2115936082","https://openalex.org/W2117906302","https://openalex.org/W2118818942","https://openalex.org/W2120525247","https://openalex.org/W2125032480","https://openalex.org/W2126829622","https://openalex.org/W2131446946","https://openalex.org/W2133138380","https://openalex.org/W2137272305","https://openalex.org/W2137987710","https://openalex.org/W2138574698","https://openalex.org/W2140041096","https://openalex.org/W2143862160","https://openalex.org/W2156505862","https://openalex.org/W2156993904","https://openalex.org/W2158134789","https://openalex.org/W2163648708","https://openalex.org/W2164239387","https://openalex.org/W2168200219","https://openalex.org/W2172237049","https://openalex.org/W2266946488","https://openalex.org/W2316865521","https://openalex.org/W2610826712","https://openalex.org/W4213255380","https://openalex.org/W4229859894","https://openalex.org/W4291236916","https://openalex.org/W6638571407","https://openalex.org/W6639709881","https://openalex.org/W6668035999","https://openalex.org/W6675426199","https://openalex.org/W6677258376"],"related_works":["https://openalex.org/W2146435486","https://openalex.org/W2170726572","https://openalex.org/W2006086900","https://openalex.org/W1483119123","https://openalex.org/W2377558694","https://openalex.org/W2394172622","https://openalex.org/W1594978932","https://openalex.org/W2083418455","https://openalex.org/W2083874129","https://openalex.org/W2140718007"],"abstract_inverted_index":{"As":[0,62],"a":[1,30,70,115],"clustered":[2],"photolithography":[3],"tool":[4,43,90,129],"(CPT)":[5],"in":[6],"semiconductor":[7],"wafer":[8,138],"manufacturing":[9,60],"can":[10,44],"cost":[11],"as":[12,14,35,37,130,132],"much":[13],"US$100":[15],"million,":[16],"it":[17],"must":[18],"be":[19],"operated":[20],"efficiently.":[21],"To":[22],"maximize":[23],"throughput,":[24],"wafers":[25,96,126],"are":[26,39,86],"generally":[27],"admitted":[28],"to":[29,51,140],"CPT":[31],"opportunistically,":[32],"that":[33,55,125],"is,":[34],"soon":[36],"they":[38],"available":[40],"and":[41,134],"the":[42,74,82,89,100,112,128,137,142],"accept":[45],"them.":[46],"Here,":[47],"our":[48],"goal":[49],"is":[50,97,114],"develop":[52,69],"release":[53],"methods":[54,65],"retain":[56],"throughput":[57,91],"but":[58],"increase":[59],"agility.":[61],"Petri":[63],"net":[64],"prove":[66],"intractable,":[67],"we":[68],"heuristic":[71,113],"based":[72],"on":[73],"use":[75],"of":[76,95,111],"flexible":[77],"flow":[78],"line":[79],"models":[80,85],"for":[81,92],"CPT.":[83],"Such":[84],"appropriate":[87],"when":[88],"each":[93],"class":[94],"dictated":[98],"by":[99],"bottleneck":[101],"process":[102],"time":[103],"plus":[104],"unavoidable":[105],"robot":[106],"handling":[107],"overhead.":[108],"The":[109],"heart":[110],"lexicographic":[116],"multiple":[117],"objective":[118],"linear":[119],"program":[120],"(LMOLP).":[121],"It":[122],"first":[123],"ensures":[124],"exit":[127],"early":[131],"possible":[133],"subsequently":[135],"delays":[136],"admission":[139],"minimize":[141],"mean":[143],"residency":[144],"time.":[145]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}