{"id":"https://openalex.org/W1978348125","doi":"https://doi.org/10.1109/tase.2013.2292572","title":"Petri Net Decomposition Approach to Deadlock-Free and Non-Cyclic Scheduling of Dual-Armed Cluster Tools","display_name":"Petri Net Decomposition Approach to Deadlock-Free and Non-Cyclic Scheduling of Dual-Armed Cluster Tools","publication_year":2014,"publication_date":"2014-01-31","ids":{"openalex":"https://openalex.org/W1978348125","doi":"https://doi.org/10.1109/tase.2013.2292572","mag":"1978348125"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2013.2292572","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2013.2292572","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5033193171","display_name":"Tatsushi Nishi","orcid":"https://orcid.org/0000-0003-1354-3939"},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"Osaka University","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Tatsushi Nishi","raw_affiliation_strings":["Mathematical Science for Social Systems at the Department of Systems Innovation, Graduate School of Engineering Science, Toyonaka, Osaka, Japan","Mathematical Science for Social Systems at the Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, Toyonaka, Japan"],"affiliations":[{"raw_affiliation_string":"Mathematical Science for Social Systems at the Department of Systems Innovation, Graduate School of Engineering Science, Toyonaka, Osaka, Japan","institution_ids":[]},{"raw_affiliation_string":"Mathematical Science for Social Systems at the Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, Toyonaka, Japan","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5044249380","display_name":"Izuru Matsumoto","orcid":null},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"Osaka University","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Izuru Matsumoto","raw_affiliation_strings":["Mathematical Science for Social Systems at the Department of Systems Innovation, Graduate School of Engineering Science, Toyonaka, Osaka, Japan","Mathematical Science for Social Systems at the Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, Toyonaka, Japan"],"affiliations":[{"raw_affiliation_string":"Mathematical Science for Social Systems at the Department of Systems Innovation, Graduate School of Engineering Science, Toyonaka, Osaka, Japan","institution_ids":[]},{"raw_affiliation_string":"Mathematical Science for Social Systems at the Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, Toyonaka, Japan","institution_ids":["https://openalex.org/I98285908"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5033193171"],"corresponding_institution_ids":["https://openalex.org/I98285908"],"apc_list":null,"apc_paid":null,"fwci":7.1216,"has_fulltext":false,"cited_by_count":53,"citation_normalized_percentile":{"value":0.97395455,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":93,"max":99},"biblio":{"volume":"12","issue":"1","first_page":"281","last_page":"294"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11125","display_name":"Petri Nets in System Modeling","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/1703","display_name":"Computational Theory and Mathematics"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11125","display_name":"Petri Nets in System Modeling","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/1703","display_name":"Computational Theory and Mathematics"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/petri-net","display_name":"Petri net","score":0.8552402257919312},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.6712788939476013},{"id":"https://openalex.org/keywords/distributed-computing","display_name":"Distributed computing","score":0.6666101813316345},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6549845933914185},{"id":"https://openalex.org/keywords/job-shop-scheduling","display_name":"Job shop scheduling","score":0.5059594511985779},{"id":"https://openalex.org/keywords/two-level-scheduling","display_name":"Two-level scheduling","score":0.504341721534729},{"id":"https://openalex.org/keywords/fair-share-scheduling","display_name":"Fair-share scheduling","score":0.48890557885169983},{"id":"https://openalex.org/keywords/dynamic-priority-scheduling","display_name":"Dynamic priority scheduling","score":0.48116764426231384},{"id":"https://openalex.org/keywords/parallel-computing","display_name":"Parallel computing","score":0.4177318811416626},{"id":"https://openalex.org/keywords/schedule","display_name":"Schedule","score":0.3278502821922302},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.2538306713104248},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.1535293161869049},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.08388158679008484},{"id":"https://openalex.org/keywords/routing","display_name":"Routing (electronic design automation)","score":0.0756758451461792}],"concepts":[{"id":"https://openalex.org/C38677869","wikidata":"https://www.wikidata.org/wiki/Q724168","display_name":"Petri net","level":2,"score":0.8552402257919312},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.6712788939476013},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.6666101813316345},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6549845933914185},{"id":"https://openalex.org/C55416958","wikidata":"https://www.wikidata.org/wiki/Q6206757","display_name":"Job shop scheduling","level":3,"score":0.5059594511985779},{"id":"https://openalex.org/C119948110","wikidata":"https://www.wikidata.org/wiki/Q7858726","display_name":"Two-level scheduling","level":4,"score":0.504341721534729},{"id":"https://openalex.org/C31689143","wikidata":"https://www.wikidata.org/wiki/Q733809","display_name":"Fair-share scheduling","level":3,"score":0.48890557885169983},{"id":"https://openalex.org/C107568181","wikidata":"https://www.wikidata.org/wiki/Q5319000","display_name":"Dynamic priority scheduling","level":3,"score":0.48116764426231384},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.4177318811416626},{"id":"https://openalex.org/C68387754","wikidata":"https://www.wikidata.org/wiki/Q7271585","display_name":"Schedule","level":2,"score":0.3278502821922302},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.2538306713104248},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.1535293161869049},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.08388158679008484},{"id":"https://openalex.org/C74172769","wikidata":"https://www.wikidata.org/wiki/Q1446839","display_name":"Routing (electronic design automation)","level":2,"score":0.0756758451461792},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2013.2292572","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2013.2292572","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":55,"referenced_works":["https://openalex.org/W1546456762","https://openalex.org/W1972477976","https://openalex.org/W1980233554","https://openalex.org/W1981704280","https://openalex.org/W1988796610","https://openalex.org/W1996109622","https://openalex.org/W2002235729","https://openalex.org/W2005570037","https://openalex.org/W2006400249","https://openalex.org/W2009441467","https://openalex.org/W2011121744","https://openalex.org/W2012629892","https://openalex.org/W2014130234","https://openalex.org/W2021709881","https://openalex.org/W2023962548","https://openalex.org/W2038723597","https://openalex.org/W2041795078","https://openalex.org/W2044456402","https://openalex.org/W2046652007","https://openalex.org/W2053369452","https://openalex.org/W2086414784","https://openalex.org/W2091774446","https://openalex.org/W2098899007","https://openalex.org/W2099550549","https://openalex.org/W2099584921","https://openalex.org/W2103693167","https://openalex.org/W2104772533","https://openalex.org/W2105435021","https://openalex.org/W2106659191","https://openalex.org/W2108569958","https://openalex.org/W2108678912","https://openalex.org/W2109787297","https://openalex.org/W2110050374","https://openalex.org/W2112002478","https://openalex.org/W2114356561","https://openalex.org/W2115448177","https://openalex.org/W2117906302","https://openalex.org/W2124225983","https://openalex.org/W2132893088","https://openalex.org/W2134790798","https://openalex.org/W2137987710","https://openalex.org/W2140872435","https://openalex.org/W2143862160","https://openalex.org/W2145493994","https://openalex.org/W2146738006","https://openalex.org/W2149273136","https://openalex.org/W2161081508","https://openalex.org/W2164163287","https://openalex.org/W2164448196","https://openalex.org/W2165594843","https://openalex.org/W2332059828","https://openalex.org/W2584118703","https://openalex.org/W4242037947","https://openalex.org/W6675195673","https://openalex.org/W6679883049"],"related_works":["https://openalex.org/W2184166483","https://openalex.org/W2106332846","https://openalex.org/W2372008037","https://openalex.org/W2397293317","https://openalex.org/W2978148977","https://openalex.org/W3036719625","https://openalex.org/W2545511463","https://openalex.org/W1545991362","https://openalex.org/W2225350526","https://openalex.org/W2134269501"],"abstract_inverted_index":{"Semiconductor":[0],"cluster":[1,21,46,74,111,133,165],"tools":[2,47,75,112,166],"are":[3],"the":[4,15,52,58,115,154,163,170,179,184,192,199,202,208],"integrated":[5],"equipment":[6,87],"to":[7,69,99,113,125,137,156],"process":[8],"a":[9,94,101,127,139,147],"variety":[10],"of":[11,17,25,54,57,73,79,86,104,109,172,178,191,201],"silicon":[12],"wafers":[13,38],"for":[14,36,44,76,131,162,212],"fabrication":[16],"microelectronic":[18],"components.":[19],"The":[20,176],"tool":[22],"system":[23],"consists":[24],"several":[26],"loadlock":[27],"modules,":[28],"processing":[29],"chambers,":[30],"and":[31,63,83,106,141],"material":[32],"handling":[33],"armed":[34],"robots":[35],"transferring":[37],"between":[39],"them.":[40],"Most":[41],"scheduling":[42,50,65,108,129,181,194,204,210],"problems":[43],"dual-armed":[45,110,132,164],"adopt":[48],"cyclic":[49,193,209],"with":[51,189,207],"assumption":[53],"swap":[55],"sequence":[56],"robot":[59],"arm.":[60],"A":[61,118],"deadlock-free":[62,105,140],"non-cyclic":[64,107,128,142,180,203],"is":[66,123,167,187],"highly":[67],"required":[68],"improve":[70],"total":[71],"throughput":[72],"various":[77,84],"types":[78],"wafer":[80,214],"flow":[81,215],"patterns":[82],"changes":[85],"configurations.":[88],"In":[89,135],"this":[90],"paper,":[91],"we":[92,145],"propose":[93,146],"Petri":[95,120,173],"net":[96,121,174],"decomposition":[97],"approach":[98],"derive":[100],"near-optimal":[102],"solution":[103],"reduce":[114],"computational":[116],"complexity.":[117],"timed":[119],"model":[122,130,182,205,211],"introduced":[124],"represent":[126],"tools.":[134],"order":[136],"obtain":[138],"schedule":[143],"efficiently,":[144],"deadlock":[148],"avoidance":[149],"control":[150],"policy":[151],"that":[152,190],"restricts":[153],"markings":[155],"prevent":[157],"unmarked":[158],"siphons.":[159],"Deadlock":[160],"condition":[161],"characterized":[168],"by":[169,183],"structure":[171],"model.":[175,195],"performance":[177],"proposed":[185],"method":[186],"compared":[188,206],"Computational":[196],"results":[197],"show":[198],"effectiveness":[200],"multiple":[213],"patterns.":[216]},"counts_by_year":[{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":5},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":7},{"year":2017,"cited_by_count":6},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":6},{"year":2014,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}