{"id":"https://openalex.org/W2104381478","doi":"https://doi.org/10.1109/tase.2010.2089451","title":"Selection Schemes of Dual Virtual-Metrology Outputs for Enhancing Prediction Accuracy","display_name":"Selection Schemes of Dual Virtual-Metrology Outputs for Enhancing Prediction Accuracy","publication_year":2010,"publication_date":"2010-11-23","ids":{"openalex":"https://openalex.org/W2104381478","doi":"https://doi.org/10.1109/tase.2010.2089451","mag":"2104381478"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2010.2089451","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2010.2089451","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5114626552","display_name":"Weiming Wu","orcid":"https://orcid.org/0000-0003-1016-0051"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Wei-Ming Wu","raw_affiliation_strings":["Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan County, Taiwan","Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan County, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037509897","display_name":"Fan\u2010Tien Cheng","orcid":"https://orcid.org/0000-0001-8201-223X"},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Fan-Tien Cheng","raw_affiliation_strings":["Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan County, Taiwan","Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan County, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056206266","display_name":"Tung-Ho Lin","orcid":null},"institutions":[{"id":"https://openalex.org/I189290911","display_name":"National Chung Shan Institute of Science and Technology","ror":"https://ror.org/034ezwg26","country_code":"TW","type":"government","lineage":["https://openalex.org/I189290911"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Tung-Ho Lin","raw_affiliation_strings":["Chung Shang Institute of Science and Technology, Taoyuan, Taiwan","Chung Shan Institute of Science and Technology, Taoyuan, Taiwan#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Chung Shang Institute of Science and Technology, Taoyuan, Taiwan","institution_ids":["https://openalex.org/I189290911"]},{"raw_affiliation_string":"Chung Shan Institute of Science and Technology, Taoyuan, Taiwan#TAB#","institution_ids":["https://openalex.org/I189290911"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087899180","display_name":"Deng-Lin Zeng","orcid":null},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Deng-Lin Zeng","raw_affiliation_strings":["Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan County, Taiwan","Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan County, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5060155546","display_name":"Jyun-Fang Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I91807558","display_name":"National Cheng Kung University","ror":"https://ror.org/01b8kcc49","country_code":"TW","type":"education","lineage":["https://openalex.org/I91807558"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Jyun-Fang Chen","raw_affiliation_strings":["Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan County, Taiwan","Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan County, Taiwan","institution_ids":["https://openalex.org/I91807558"]},{"raw_affiliation_string":"Inst. of Manuf. Inf. & Syst., Nat. Cheng Kung Univ., Tainan, Taiwan","institution_ids":["https://openalex.org/I91807558"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":5.6467,"has_fulltext":false,"cited_by_count":27,"citation_normalized_percentile":{"value":0.95311061,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"8","issue":"2","first_page":"311","last_page":"318"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9883999824523926,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9842000007629395,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scheme","display_name":"Scheme (mathematics)","score":0.705127477645874},{"id":"https://openalex.org/keywords/artificial-neural-network","display_name":"Artificial neural network","score":0.6505953669548035},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.5291752219200134},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5246322751045227},{"id":"https://openalex.org/keywords/selection","display_name":"Selection (genetic algorithm)","score":0.5011415481567383},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4994990825653076},{"id":"https://openalex.org/keywords/mahalanobis-distance","display_name":"Mahalanobis distance","score":0.47530922293663025},{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.47009965777397156},{"id":"https://openalex.org/keywords/conjecture","display_name":"Conjecture","score":0.42680495977401733},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.38826191425323486},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.30785423517227173},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.10899564623832703}],"concepts":[{"id":"https://openalex.org/C77618280","wikidata":"https://www.wikidata.org/wiki/Q1155772","display_name":"Scheme (mathematics)","level":2,"score":0.705127477645874},{"id":"https://openalex.org/C50644808","wikidata":"https://www.wikidata.org/wiki/Q192776","display_name":"Artificial neural network","level":2,"score":0.6505953669548035},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.5291752219200134},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5246322751045227},{"id":"https://openalex.org/C81917197","wikidata":"https://www.wikidata.org/wiki/Q628760","display_name":"Selection (genetic algorithm)","level":2,"score":0.5011415481567383},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4994990825653076},{"id":"https://openalex.org/C1921717","wikidata":"https://www.wikidata.org/wiki/Q1334846","display_name":"Mahalanobis distance","level":2,"score":0.47530922293663025},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.47009965777397156},{"id":"https://openalex.org/C2780990831","wikidata":"https://www.wikidata.org/wiki/Q319141","display_name":"Conjecture","level":2,"score":0.42680495977401733},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.38826191425323486},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.30785423517227173},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.10899564623832703},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2010.2089451","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2010.2089451","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1549818157","https://openalex.org/W1961163223","https://openalex.org/W2034712902","https://openalex.org/W2070963892","https://openalex.org/W2075852334","https://openalex.org/W2104018023","https://openalex.org/W2106485576","https://openalex.org/W2115571336","https://openalex.org/W2129319600","https://openalex.org/W2135739205","https://openalex.org/W2137577253","https://openalex.org/W2139430280","https://openalex.org/W2147572077","https://openalex.org/W2154829656","https://openalex.org/W2541070902","https://openalex.org/W2791654535","https://openalex.org/W6681522733"],"related_works":["https://openalex.org/W4382795578","https://openalex.org/W2355463328","https://openalex.org/W2402648945","https://openalex.org/W2053213469","https://openalex.org/W939486154","https://openalex.org/W1431147547","https://openalex.org/W2771741613","https://openalex.org/W2055761197","https://openalex.org/W2057608111","https://openalex.org/W2389192348"],"abstract_inverted_index":{"Selection":[0],"schemes":[1],"between":[2,97,140],"neural-network":[3],"(NN)":[4],"and":[5,22,66,103,126,143,149,164,174,208],"multiple-regression":[6],"(MR)":[7],"outputs":[8],"of":[9,63,124,152,197],"a":[10,42,46,111,121,135,153],"virtual":[11],"metrology":[12],"system":[13,137],"(VMS)":[14],"are":[15,24,157],"studied":[16],"in":[17,159],"this":[18,160],"paper.":[19],"Both":[20,146],"NN":[21,47,67,87,125,142,187],"MR":[23,34,65,89,127,144],"applicable":[25],"algorithms":[26],"for":[27],"implementing":[28],"virtual-metrology":[29],"(VM)":[30],"conjecture":[31,80,167,188,195],"models.":[32],"A":[33],"algorithm":[35,48],"may":[36,49],"achieve":[37],"better":[38],"accuracy":[39,52,168,196],"only":[40],"with":[41,120,138],"stable":[43],"process,":[44],"whereas":[45],"have":[50],"superior":[51],"when":[53],"equipment":[54],"property":[55],"drift":[56],"or":[57,88],"shift":[58],"occurs.":[59],"To":[60],"take":[61],"advantage":[62],"both":[64],"algorithms,":[68],"the":[69,78,93,98,104,117,141,147,166,170,186,194,198,201],"simple-selection":[70],"scheme":[71,113],"(SS-scheme)":[72],"is":[73,129,182,200],"first":[74],"proposed":[75],"to":[76,92,162,184],"enhance":[77],"VM":[79,118],"accuracy.":[81],"This":[82,132],"SS-scheme":[83],"simply":[84],"selects":[85],"either":[86],"output":[90,119],"according":[91],"smaller":[94],"Mahalanobis":[95],"distance":[96],"input":[99],"process":[100,107],"data":[101,108],"set":[102],"NN/MR-group":[105],"historical":[106],"sets.":[109],"Furthermore,":[110],"weighted-selection":[112],"(WS-scheme),":[114],"which":[115],"computes":[116],"weighted":[122],"sum":[123],"results,":[128],"also":[130],"developed.":[131],"WS-scheme":[133,175,199,209],"generates":[134],"well-behaved":[136],"continuity":[139],"outputs.":[145],"CVD":[148],"photo":[150],"processes":[151],"fifth-generation":[154],"TFT-LCD":[155],"factory":[156],"adopted":[158],"paper":[161],"test":[163],"compare":[165],"among":[169,203],"solo-NN,":[171,205],"solo-MR,":[172,206],"SS-scheme,":[173,207],"algorithms.":[176,210],"One-hidden-layered":[177],"back-propagation":[178],"neural":[179],"network":[180],"(BPNN-I)":[181],"applied":[183],"establish":[185],"model.":[189],"Test":[190],"results":[191],"show":[192],"that":[193],"best":[202],"those":[204]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2016,"cited_by_count":2},{"year":2014,"cited_by_count":3},{"year":2013,"cited_by_count":3},{"year":2012,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}