{"id":"https://openalex.org/W2098429162","doi":"https://doi.org/10.1109/tase.2010.2077675","title":"A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation","display_name":"A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation","publication_year":2010,"publication_date":"2010-10-11","ids":{"openalex":"https://openalex.org/W2098429162","doi":"https://doi.org/10.1109/tase.2010.2077675","mag":"2098429162"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2010.2077675","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2010.2077675","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027712402","display_name":"Yangmin Li","orcid":"https://orcid.org/0000-0002-4448-3310"},"institutions":[{"id":"https://openalex.org/I204512498","display_name":"University of Macau","ror":"https://ror.org/01r4q9n85","country_code":"MO","type":"education","lineage":["https://openalex.org/I204512498"]}],"countries":["MO"],"is_corresponding":true,"raw_author_name":"Yangmin Li","raw_affiliation_strings":["Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macao, China","Dept. of Electromech. Eng., Univ. of Macau, Taipa, China"],"affiliations":[{"raw_affiliation_string":"Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macao, China","institution_ids":["https://openalex.org/I204512498"]},{"raw_affiliation_string":"Dept. of Electromech. Eng., Univ. of Macau, Taipa, China","institution_ids":["https://openalex.org/I204512498"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100763750","display_name":"Qingsong Xu","orcid":"https://orcid.org/0000-0002-1700-322X"},"institutions":[{"id":"https://openalex.org/I204512498","display_name":"University of Macau","ror":"https://ror.org/01r4q9n85","country_code":"MO","type":"education","lineage":["https://openalex.org/I204512498"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Qingsong Xu","raw_affiliation_strings":["Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macao, China","Dept. of Electromech. Eng., Univ. of Macau, Taipa, China"],"affiliations":[{"raw_affiliation_string":"Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macao, China","institution_ids":["https://openalex.org/I204512498"]},{"raw_affiliation_string":"Dept. of Electromech. Eng., Univ. of Macau, Taipa, China","institution_ids":["https://openalex.org/I204512498"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5027712402"],"corresponding_institution_ids":["https://openalex.org/I204512498"],"apc_list":null,"apc_paid":null,"fwci":31.3381,"has_fulltext":false,"cited_by_count":221,"citation_normalized_percentile":{"value":0.99714185,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":96,"max":100},"biblio":{"volume":"8","issue":"2","first_page":"265","last_page":"279"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9894999861717224,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/parallelogram","display_name":"Parallelogram","score":0.7294076085090637},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6755359172821045},{"id":"https://openalex.org/keywords/decoupling","display_name":"Decoupling (probability)","score":0.6240586042404175},{"id":"https://openalex.org/keywords/workspace","display_name":"Workspace","score":0.5426178574562073},{"id":"https://openalex.org/keywords/statics","display_name":"Statics","score":0.5272428393363953},{"id":"https://openalex.org/keywords/kinematics","display_name":"Kinematics","score":0.5229021906852722},{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.5103697180747986},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.5068264603614807},{"id":"https://openalex.org/keywords/micromanipulator","display_name":"Micromanipulator","score":0.48798102140426636},{"id":"https://openalex.org/keywords/particle-swarm-optimization","display_name":"Particle swarm optimization","score":0.4454176425933838},{"id":"https://openalex.org/keywords/inverse-kinematics","display_name":"Inverse kinematics","score":0.4272601902484894},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.42117840051651},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.3501203656196594},{"id":"https://openalex.org/keywords/hinge","display_name":"Hinge","score":0.3257915675640106},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2913814187049866},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.26315778493881226},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16296976804733276},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.16138193011283875}],"concepts":[{"id":"https://openalex.org/C53118041","wikidata":"https://www.wikidata.org/wiki/Q45867","display_name":"Parallelogram","level":3,"score":0.7294076085090637},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6755359172821045},{"id":"https://openalex.org/C205606062","wikidata":"https://www.wikidata.org/wiki/Q5249645","display_name":"Decoupling (probability)","level":2,"score":0.6240586042404175},{"id":"https://openalex.org/C58581272","wikidata":"https://www.wikidata.org/wiki/Q12741163","display_name":"Workspace","level":3,"score":0.5426178574562073},{"id":"https://openalex.org/C35441770","wikidata":"https://www.wikidata.org/wiki/Q169019","display_name":"Statics","level":2,"score":0.5272428393363953},{"id":"https://openalex.org/C39920418","wikidata":"https://www.wikidata.org/wiki/Q11476","display_name":"Kinematics","level":2,"score":0.5229021906852722},{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.5103697180747986},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.5068264603614807},{"id":"https://openalex.org/C2776470464","wikidata":"https://www.wikidata.org/wiki/Q1933900","display_name":"Micromanipulator","level":2,"score":0.48798102140426636},{"id":"https://openalex.org/C85617194","wikidata":"https://www.wikidata.org/wiki/Q2072794","display_name":"Particle swarm optimization","level":2,"score":0.4454176425933838},{"id":"https://openalex.org/C17816587","wikidata":"https://www.wikidata.org/wiki/Q1501872","display_name":"Inverse kinematics","level":3,"score":0.4272601902484894},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.42117840051651},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.3501203656196594},{"id":"https://openalex.org/C44000306","wikidata":"https://www.wikidata.org/wiki/Q244330","display_name":"Hinge","level":2,"score":0.3257915675640106},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2913814187049866},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.26315778493881226},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16296976804733276},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.16138193011283875},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tase.2010.2077675","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2010.2077675","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.719.9248","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.719.9248","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.cis.umac.mo/%7Eyangmin/journalpdf/J11-2-Li-Xu-TASE.pdf","raw_type":"text"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/16","display_name":"Peace, Justice and strong institutions","score":0.4399999976158142}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":41,"referenced_works":["https://openalex.org/W88103376","https://openalex.org/W607045505","https://openalex.org/W1970217210","https://openalex.org/W1979698798","https://openalex.org/W1981760310","https://openalex.org/W1986789340","https://openalex.org/W2020457804","https://openalex.org/W2023312013","https://openalex.org/W2023641796","https://openalex.org/W2026264131","https://openalex.org/W2032987252","https://openalex.org/W2033639161","https://openalex.org/W2041955778","https://openalex.org/W2057006382","https://openalex.org/W2063214469","https://openalex.org/W2067040819","https://openalex.org/W2072411062","https://openalex.org/W2088000317","https://openalex.org/W2091759666","https://openalex.org/W2098008157","https://openalex.org/W2100280167","https://openalex.org/W2102023741","https://openalex.org/W2106158036","https://openalex.org/W2108382976","https://openalex.org/W2109095767","https://openalex.org/W2112118472","https://openalex.org/W2123172242","https://openalex.org/W2125056679","https://openalex.org/W2134840524","https://openalex.org/W2137144825","https://openalex.org/W2139449190","https://openalex.org/W2142339020","https://openalex.org/W2143011730","https://openalex.org/W2152453785","https://openalex.org/W2163444133","https://openalex.org/W2164554460","https://openalex.org/W2166632579","https://openalex.org/W2169245194","https://openalex.org/W2170178666","https://openalex.org/W2171695274","https://openalex.org/W4240961869"],"related_works":["https://openalex.org/W2002405096","https://openalex.org/W1988546293","https://openalex.org/W2074075868","https://openalex.org/W2142339020","https://openalex.org/W3042825281","https://openalex.org/W2153184823","https://openalex.org/W2885220575","https://openalex.org/W2393798004","https://openalex.org/W142454383","https://openalex.org/W2260488022"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"the":[3,23,60,91,113,136,141,151,162,182,186,189],"design":[4,111,194],"and":[5,34,59,88,96,120,146,165,175,192],"development":[6],"processes":[7],"of":[8,22,85,90,112,123,135,188],"a":[9,78,121,147,171],"totally":[10],"decoupled":[11],"flexure-based":[12],"XYZ":[13,25,92,124],"parallel-kinematics":[14],"micropositioning":[15],"stage":[16,26,93,114,125],"with":[17,38,55,99,140,155],"piezoelectric":[18],"actuation.":[19],"The":[20,42,103,131],"uniqueness":[21],"proposed":[24,190],"lies":[27],"in":[28],"that":[29,170],"it":[30],"possesses":[31],"both":[32],"input":[33,43],"output":[35,61],"decoupling":[36,44,62],"properties":[37],"integrated":[39],"displacement":[40],"amplifiers.":[41],"is":[45,63,126,138,158],"realized":[46],"by":[47,65,181],"actuation":[48],"isolation":[49],"using":[50],"double":[51],"compound":[52,69],"parallelogram":[53,70],"flexures":[54],"large":[56],"transverse":[57],"stiffness,":[58],"implemented":[64],"employing":[66],"two-dimensional":[67],"(2-D)":[68],"flexures.":[71],"By":[72],"simplifying":[73],"each":[74],"flexure":[75],"hinge":[76],"as":[77,195],"two-degree-of-freedom":[79],"(2-DOF)":[80],"compliant":[81],"joint,":[82],"analytical":[83],"models":[84,105],"kinematics,":[86],"statics,":[87],"dynamics":[89],"are":[94,106],"established":[95],"then":[97],"validated":[98],"finite-element":[100],"analysis":[101],"(FEA).":[102],"derived":[104],"further":[107],"adopted":[108],"for":[109,128],"optimal":[110],"through":[115],"particle":[116],"swarm":[117],"optimization":[118],"(PSO),":[119],"prototype":[122],"fabricated":[127],"performance":[129],"tests.":[130],"nonsymmetric":[132],"hysteresis":[133],"behavior":[134],"piezo-stage":[137],"identified":[139],"modified":[142],"Prandtl-Ishlinskii":[143],"(MPI)":[144],"model,":[145],"control":[148,157],"scheme":[149],"combining":[150],"inverse":[152],"model-based":[153],"feedforward":[154],"feedback":[156],"constructed":[159],"to":[160],"compensate":[161],"plant":[163],"nonlinearity":[164],"uncertainty.":[166],"Experimental":[167],"results":[168],"reveal":[169],"submicron":[172],"accuracy":[173],"1-D":[174],"3-D":[176],"positioning":[177],"can":[178],"be":[179],"achieved":[180],"system,":[183],"which":[184],"confirms":[185],"effectiveness":[187],"mechanism":[191],"controller":[193],"well.":[196]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":7},{"year":2024,"cited_by_count":8},{"year":2023,"cited_by_count":13},{"year":2022,"cited_by_count":18},{"year":2021,"cited_by_count":22},{"year":2020,"cited_by_count":17},{"year":2019,"cited_by_count":19},{"year":2018,"cited_by_count":18},{"year":2017,"cited_by_count":14},{"year":2016,"cited_by_count":16},{"year":2015,"cited_by_count":11},{"year":2014,"cited_by_count":14},{"year":2013,"cited_by_count":18},{"year":2012,"cited_by_count":16}],"updated_date":"2026-04-05T17:49:38.594831","created_date":"2025-10-10T00:00:00"}