{"id":"https://openalex.org/W2153334892","doi":"https://doi.org/10.1109/tase.2009.2023673","title":"Process Parameters Optimization: A Design Study for TiO&lt;formula formulatype=\"inline\"&gt;&lt;tex Notation=\"TeX\"&gt;$_{2}$&lt;/tex&gt;&lt;/formula&gt; Thin Film of Vacuum Sputtering Process","display_name":"Process Parameters Optimization: A Design Study for TiO&lt;formula formulatype=\"inline\"&gt;&lt;tex Notation=\"TeX\"&gt;$_{2}$&lt;/tex&gt;&lt;/formula&gt; Thin Film of Vacuum Sputtering Process","publication_year":2009,"publication_date":"2009-07-28","ids":{"openalex":"https://openalex.org/W2153334892","doi":"https://doi.org/10.1109/tase.2009.2023673","mag":"2153334892"},"language":"en","primary_location":{"id":"doi:10.1109/tase.2009.2023673","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2009.2023673","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5069961953","display_name":"Wen\u2010Hsien Ho","orcid":"https://orcid.org/0000-0001-6194-0563"},"institutions":[{"id":"https://openalex.org/I152743029","display_name":"Kaohsiung Medical University","ror":"https://ror.org/03gk81f96","country_code":"TW","type":"education","lineage":["https://openalex.org/I152743029"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Wen-Hsien Ho","raw_affiliation_strings":["Department of Medical Information Management, Kaohsiung Medical University, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Medical Information Management, Kaohsiung Medical University, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I152743029"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057953757","display_name":"Jinn\u2010Tsong Tsai","orcid":"https://orcid.org/0000-0002-1531-5027"},"institutions":[{"id":"https://openalex.org/I1309796872","display_name":"National Pingtung University","ror":"https://ror.org/03z698x91","country_code":"TW","type":"education","lineage":["https://openalex.org/I1309796872"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Jinn-Tsong Tsai","raw_affiliation_strings":["Department of Computer Science, National Ping Tung University of Education, Ping Tung, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Computer Science, National Ping Tung University of Education, Ping Tung, Taiwan","institution_ids":["https://openalex.org/I1309796872"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033004704","display_name":"Gong-Ming Hsu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210148968","display_name":"Metal Industries Research & Development Centre","ror":"https://ror.org/0584sxj05","country_code":"TW","type":"nonprofit","lineage":["https://openalex.org/I4210148968"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Gong-Ming Hsu","raw_affiliation_strings":["Metal Industries Research and Development Centre, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"Metal Industries Research and Development Centre, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I4210148968"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054686089","display_name":"Jyh\u2010Horng Chou","orcid":"https://orcid.org/0000-0001-8096-0586"},"institutions":[{"id":"https://openalex.org/I109289231","display_name":"National Kaohsiung First University of Science and Technology","ror":"https://ror.org/03858r716","country_code":"TW","type":"education","lineage":["https://openalex.org/I109289231"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Jyh-Horng Chou","raw_affiliation_strings":["Institute of System Information and Control, National Kaohsiung First University of Science and Technology, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"Institute of System Information and Control, National Kaohsiung First University of Science and Technology, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I109289231"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5069961953"],"corresponding_institution_ids":["https://openalex.org/I152743029"],"apc_list":null,"apc_paid":null,"fwci":1.1117,"has_fulltext":false,"cited_by_count":30,"citation_normalized_percentile":{"value":0.79142824,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"7","issue":"1","first_page":"143","last_page":"146"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9965000152587891,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9965000152587891,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11451","display_name":"Advanced Machining and Optimization Techniques","score":0.98580002784729,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10188","display_name":"Advanced machining processes and optimization","score":0.973800003528595,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/taguchi-methods","display_name":"Taguchi methods","score":0.7306029200553894},{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.49735668301582336},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4689580500125885},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.4687903821468353},{"id":"https://openalex.org/keywords/design-of-experiments","display_name":"Design of experiments","score":0.467757910490036},{"id":"https://openalex.org/keywords/artificial-neural-network","display_name":"Artificial neural network","score":0.4445697069168091},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.42861825227737427},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.42441990971565247},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3739253878593445},{"id":"https://openalex.org/keywords/engineering-drawing","display_name":"Engineering drawing","score":0.3737695813179016},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.33558598160743713},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.33348754048347473},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.33021342754364014},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.3054688572883606},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.21985772252082825},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.1624038815498352},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.10516950488090515}],"concepts":[{"id":"https://openalex.org/C83469408","wikidata":"https://www.wikidata.org/wiki/Q2036525","display_name":"Taguchi methods","level":2,"score":0.7306029200553894},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.49735668301582336},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4689580500125885},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.4687903821468353},{"id":"https://openalex.org/C34559072","wikidata":"https://www.wikidata.org/wiki/Q2334061","display_name":"Design of experiments","level":2,"score":0.467757910490036},{"id":"https://openalex.org/C50644808","wikidata":"https://www.wikidata.org/wiki/Q192776","display_name":"Artificial neural network","level":2,"score":0.4445697069168091},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.42861825227737427},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.42441990971565247},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3739253878593445},{"id":"https://openalex.org/C199639397","wikidata":"https://www.wikidata.org/wiki/Q1788588","display_name":"Engineering drawing","level":1,"score":0.3737695813179016},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.33558598160743713},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.33348754048347473},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.33021342754364014},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3054688572883606},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.21985772252082825},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.1624038815498352},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.10516950488090515},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tase.2009.2023673","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tase.2009.2023673","pdf_url":null,"source":{"id":"https://openalex.org/S34881539","display_name":"IEEE Transactions on Automation Science and Engineering","issn_l":"1545-5955","issn":["1545-5955","1558-3783"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Automation Science and Engineering","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W409509505","https://openalex.org/W652169801","https://openalex.org/W1500661657","https://openalex.org/W1639032689","https://openalex.org/W1965203572","https://openalex.org/W1983467230","https://openalex.org/W2026272203","https://openalex.org/W2110779880","https://openalex.org/W2114053544","https://openalex.org/W2116034833","https://openalex.org/W2124484847","https://openalex.org/W2138405719","https://openalex.org/W2139055047","https://openalex.org/W2141758575","https://openalex.org/W2143482492","https://openalex.org/W2152705191","https://openalex.org/W2168918360","https://openalex.org/W2328371280","https://openalex.org/W2364689707","https://openalex.org/W3023540311"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W1991196910","https://openalex.org/W1967109380","https://openalex.org/W4250223375","https://openalex.org/W2125414332","https://openalex.org/W2098044400","https://openalex.org/W2186621212","https://openalex.org/W2033927753","https://openalex.org/W1619946729","https://openalex.org/W2090087736"],"abstract_inverted_index":{"This":[0],"paper":[1],"proposes":[2],"a":[3,53,62,91,117,214],"procedure":[4,18,152,202,212],"for":[5,81,90,164],"process":[6,84,87,105,146,163,224],"parameters":[7,88,147,225],"design":[8,89],"by":[9],"combining":[10],"both":[11],"modeling":[12],"and":[13,28,43,190],"optimization":[14],"methods.":[15],"The":[16,111,130,145,172,183,192],"proposed":[17,143,151,201,211],"integrates":[19],"the":[20,23,29,34,49,56,67,70,75,82,102,123,138,142,150,157,160,165,178,196,200,210,220,223],"Taguchi":[21,35,71],"method,":[22],"artificial":[24],"neural":[25],"network":[26],"(ANN),":[27],"genetic":[30],"algorithm":[31],"(GA).":[32],"First,":[33],"method":[36],"is":[37,58,77,106,114,134,181,186,203,213],"applied":[38],"to":[39,44,60,79,115,155],"minimize":[40],"experimental":[41,46,72],"numbers":[42],"collect":[45],"data":[47,68],"representing":[48],"quality":[50,112],"performances":[51],"of":[52,141,199,222],"system.":[54],"Next,":[55],"ANN":[57],"used":[59,154],"build":[61],"system":[63,139,197],"model":[64,140,198],"based":[65],"on":[66,122],"from":[69,137,149,177,195],"method.":[73],"Then,":[74],"GA":[76],"employed":[78],"search":[80],"optimal":[83],"parameters.":[85],"A":[86],"titanium":[92],"dioxide":[93],"(TiO":[94],"<sub":[95,125,167],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[96,126,168],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[97,127,169],")":[98],"thin":[99,170],"film":[100],"in":[101,108,159,218],"vacuum":[103,161],"sputtering":[104,162],"studied":[107],"this":[109],"paper.":[110],"objective":[113],"form":[116],"smaller":[118],"water":[119,131,173],"contact":[120,132,174],"angle":[121,133,175],"TiO":[124,166],"thin-film":[128],"surface.":[129],"4\u00b0":[135,189],"obtained":[136,148,194],"procedure.":[144],"were":[153],"conduct":[156],"experiment":[158,180],"film.":[171],"given":[176],"practical":[179],"3.93\u00b0.":[182,191],"difference":[184],"percent":[185],"1.75%":[187],"between":[188],"result":[193],"promising.":[204],"Hence,":[205],"we":[206],"can":[207],"conclude":[208],"that":[209],"very":[215],"good":[216],"approach":[217],"solving":[219],"problem":[221],"design.":[226]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":9},{"year":2014,"cited_by_count":1},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}