{"id":"https://openalex.org/W3133880923","doi":"https://doi.org/10.1109/ssd49366.2020.9364140","title":"Frequency Analysis and Resonance Evaluation of Polymer 1-axis Piezoresistive Microaccelerometers","display_name":"Frequency Analysis and Resonance Evaluation of Polymer 1-axis Piezoresistive Microaccelerometers","publication_year":2020,"publication_date":"2020-07-20","ids":{"openalex":"https://openalex.org/W3133880923","doi":"https://doi.org/10.1109/ssd49366.2020.9364140","mag":"3133880923"},"language":"en","primary_location":{"id":"doi:10.1109/ssd49366.2020.9364140","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd49366.2020.9364140","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 17th International Multi-Conference on Systems, Signals & Devices (SSD)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5091567467","display_name":"Awatef Khlifi","orcid":"https://orcid.org/0000-0002-3180-4891"},"institutions":[{"id":"https://openalex.org/I142899784","display_name":"University of Sfax","ror":"https://ror.org/04d4sd432","country_code":"TN","type":"education","lineage":["https://openalex.org/I142899784"]}],"countries":["TN"],"is_corresponding":true,"raw_author_name":"Awatef Khlifi","raw_affiliation_strings":["Universit\u00e9 de Sfax, Ecole Nationale d'Ing\u00e9nieurs de Sfax, ENIS, METS Research Unit, Sfax, Tunisia"],"affiliations":[{"raw_affiliation_string":"Universit\u00e9 de Sfax, Ecole Nationale d'Ing\u00e9nieurs de Sfax, ENIS, METS Research Unit, Sfax, Tunisia","institution_ids":["https://openalex.org/I142899784"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041691169","display_name":"Brahim Mezghani","orcid":"https://orcid.org/0000-0002-6626-9817"},"institutions":[{"id":"https://openalex.org/I142899784","display_name":"University of Sfax","ror":"https://ror.org/04d4sd432","country_code":"TN","type":"education","lineage":["https://openalex.org/I142899784"]}],"countries":["TN"],"is_corresponding":false,"raw_author_name":"Brahim Mezghani","raw_affiliation_strings":["Universit\u00e9 de Sfax, Ecole Nationale d'Ing\u00e9nieurs de Sfax, ENIS, METS Research Unit, Sfax, Tunisia"],"affiliations":[{"raw_affiliation_string":"Universit\u00e9 de Sfax, Ecole Nationale d'Ing\u00e9nieurs de Sfax, ENIS, METS Research Unit, Sfax, Tunisia","institution_ids":["https://openalex.org/I142899784"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110646705","display_name":"S. Pandit","orcid":null},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Shardul Pandit","raw_affiliation_strings":["Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001232852","display_name":"Aftab Ahmed","orcid":"https://orcid.org/0000-0001-8346-377X"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Aftab Ahmed","raw_affiliation_strings":["Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009126115","display_name":"Rajul Patkar","orcid":"https://orcid.org/0000-0001-8111-4541"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Rajul Patkar","raw_affiliation_strings":["Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066912549","display_name":"Pradeep Dixit","orcid":"https://orcid.org/0000-0001-6706-1877"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Pradeep Dixit","raw_affiliation_strings":["Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029767607","display_name":"Maryam Shojaei Baghini","orcid":"https://orcid.org/0000-0001-6568-3736"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Maryam Shojaei Baghini","raw_affiliation_strings":["Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Center of Excellence in Nanoelectronics, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5091567467"],"corresponding_institution_ids":["https://openalex.org/I142899784"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16665379,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"c","issue":null,"first_page":"1139","last_page":"1143"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8846821188926697},{"id":"https://openalex.org/keywords/laser-doppler-vibrometer","display_name":"Laser Doppler vibrometer","score":0.7970681190490723},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7514576315879822},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7372202277183533},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.7075321674346924},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5351885557174683},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.5129994750022888},{"id":"https://openalex.org/keywords/frequency-response","display_name":"Frequency response","score":0.5101409554481506},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4953373968601227},{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.46584925055503845},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2639738917350769},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2507769465446472},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.2040197253227234},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.16927817463874817},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.154484361410141},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1522456705570221},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1489570438861847},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.08618783950805664}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8846821188926697},{"id":"https://openalex.org/C96199931","wikidata":"https://www.wikidata.org/wiki/Q1724132","display_name":"Laser Doppler vibrometer","level":4,"score":0.7970681190490723},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7514576315879822},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7372202277183533},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.7075321674346924},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5351885557174683},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.5129994750022888},{"id":"https://openalex.org/C8590192","wikidata":"https://www.wikidata.org/wiki/Q1054694","display_name":"Frequency response","level":2,"score":0.5101409554481506},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4953373968601227},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.46584925055503845},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2639738917350769},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2507769465446472},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.2040197253227234},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.16927817463874817},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.154484361410141},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1522456705570221},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1489570438861847},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.08618783950805664},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C927094","wikidata":"https://www.wikidata.org/wiki/Q285877","display_name":"Distributed feedback laser","level":3,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ssd49366.2020.9364140","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd49366.2020.9364140","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 17th International Multi-Conference on Systems, Signals & Devices (SSD)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.47999998927116394}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1989713521","https://openalex.org/W1990646655","https://openalex.org/W2006101684","https://openalex.org/W2006300501","https://openalex.org/W2040667928","https://openalex.org/W2042553348","https://openalex.org/W2056344292","https://openalex.org/W2087085105","https://openalex.org/W2132724580","https://openalex.org/W2137786814","https://openalex.org/W2171450230","https://openalex.org/W2268438807","https://openalex.org/W2323516091","https://openalex.org/W2463228956","https://openalex.org/W2562419505","https://openalex.org/W2734784761"],"related_works":["https://openalex.org/W2765080098","https://openalex.org/W2385749422","https://openalex.org/W2276816319","https://openalex.org/W45665305","https://openalex.org/W2122708814","https://openalex.org/W2367743327","https://openalex.org/W2520125024","https://openalex.org/W2049900425","https://openalex.org/W2586631215","https://openalex.org/W2002313591"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"we":[3],"present":[4],"the":[5,53,70,82,86,112],"fabrication,":[6],"testing":[7],"and":[8,14,27,37,109,114],"numerical":[9],"frequency":[10,60,83,89],"analysis":[11,77],"of":[12,52,69,85,107],"2-beam":[13,113],"4-beam":[15,115],"SU-8":[16],"single":[17],"axis":[18],"accelerometer":[19,31],"with":[20,98,103],"two":[21],"different":[22],"beam":[23],"thicknesses:":[24],"4.475":[25],"\u03bcm":[26],"8.216":[28],"\u03bcm.":[29],"Polymer":[30],"structures":[32],"are":[33,94],"simple":[34],"to":[35,57,80],"fabricate":[36],"highly":[38],"sensitive":[39],"piezoresistive":[40],"material":[41],"can":[42],"be":[43],"easily":[44],"implemented":[45],"for":[46,111],"performance":[47],"improvement.":[48],"The":[49],"dynamic":[50,75],"characterization":[51],"devices":[54],"was":[55],"performed":[56,79],"measure":[58],"resonant":[59],"using":[61],"Lazer":[62],"Doppler":[63],"Vibrometer":[64],"(LDV).":[65],"Using":[66],"extracted":[67],"dimensions":[68],"prototypes":[71],"from":[72,91,101],"experimental":[73,92],"characterization,":[74],"FEM":[76],"is":[78],"investigate":[81],"response":[84],"devices.":[87],"Resonant":[88],"values":[90],"study":[93],"in":[95],"good":[96],"agreement":[97],"those":[99],"obtained":[100],"simulation":[102],"a":[104],"maximum":[105],"error":[106],"18%":[108],"9%":[110],"structures,":[116],"respectively.":[117]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}