{"id":"https://openalex.org/W2983765117","doi":"https://doi.org/10.1109/ssd.2019.8893246","title":"Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis Piezoresistive MEMS Accelerometer","display_name":"Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis Piezoresistive MEMS Accelerometer","publication_year":2019,"publication_date":"2019-03-01","ids":{"openalex":"https://openalex.org/W2983765117","doi":"https://doi.org/10.1109/ssd.2019.8893246","mag":"2983765117"},"language":"en","primary_location":{"id":"doi:10.1109/ssd.2019.8893246","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd.2019.8893246","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 16th International Multi-Conference on Systems, Signals & Devices (SSD)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001232852","display_name":"Aftab Ahmed","orcid":"https://orcid.org/0000-0001-8346-377X"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Aftab Ahmed","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110646705","display_name":"S. Pandit","orcid":null},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Shardul Pandit","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009126115","display_name":"Rajul Patkar","orcid":"https://orcid.org/0000-0001-8111-4541"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Rajul Patkar","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066912549","display_name":"Pradeep Dixit","orcid":"https://orcid.org/0000-0001-6706-1877"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Pradeep Dixit","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029767607","display_name":"Maryam Shojaei Baghini","orcid":"https://orcid.org/0000-0001-6568-3736"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Maryam Shojaei Baghini","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091567467","display_name":"Awatef Khlifi","orcid":"https://orcid.org/0000-0002-3180-4891"},"institutions":[{"id":"https://openalex.org/I142899784","display_name":"University of Sfax","ror":"https://ror.org/04d4sd432","country_code":"TN","type":"education","lineage":["https://openalex.org/I142899784"]}],"countries":["TN"],"is_corresponding":false,"raw_author_name":"Awatef Khlifi","raw_affiliation_strings":["METS research Unit, Universit\u00e9 de Sfax, Ecole Nationale d'Ing\u00e9nieurs de Sfax, Tunisia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"METS research Unit, Universit\u00e9 de Sfax, Ecole Nationale d'Ing\u00e9nieurs de Sfax, Tunisia","institution_ids":["https://openalex.org/I142899784"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025205082","display_name":"Far\u00e8s Tounsi","orcid":"https://orcid.org/0000-0002-7130-4007"},"institutions":[{"id":"https://openalex.org/I166928557","display_name":"University of Monastir","ror":"https://ror.org/00nhtcg76","country_code":"TN","type":"education","lineage":["https://openalex.org/I166928557"]}],"countries":["TN"],"is_corresponding":false,"raw_author_name":"Fares Tounsi","raw_affiliation_strings":["Universit\u00e9 de Monastir, ISIMM, Tunisia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Universit\u00e9 de Monastir, ISIMM, Tunisia","institution_ids":["https://openalex.org/I166928557"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5041691169","display_name":"Brahim Mezghani","orcid":"https://orcid.org/0000-0002-6626-9817"},"institutions":[{"id":"https://openalex.org/I142899784","display_name":"University of Sfax","ror":"https://ror.org/04d4sd432","country_code":"TN","type":"education","lineage":["https://openalex.org/I142899784"]}],"countries":["TN"],"is_corresponding":false,"raw_author_name":"Brahim Mezghani","raw_affiliation_strings":["METS research Unit, Universit\u00e9 de Sfax, Ecole Nationale d'Ing\u00e9nieurs de Sfax, Tunisia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"METS research Unit, Universit\u00e9 de Sfax, Ecole Nationale d'Ing\u00e9nieurs de Sfax, Tunisia","institution_ids":["https://openalex.org/I142899784"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.1947,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.7600235,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"15","issue":null,"first_page":"131","last_page":"136"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8996514081954956},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8935760855674744},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8124110698699951},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5962919592857361},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.5761749744415283},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.41906023025512695},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.39337727427482605},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3366289436817169},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.33202821016311646},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.29928719997406006},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.268355131149292},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23889023065567017}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8996514081954956},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8935760855674744},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8124110698699951},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5962919592857361},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.5761749744415283},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.41906023025512695},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.39337727427482605},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3366289436817169},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.33202821016311646},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.29928719997406006},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.268355131149292},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23889023065567017},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/ssd.2019.8893246","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd.2019.8893246","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 16th International Multi-Conference on Systems, Signals & Devices (SSD)","raw_type":"proceedings-article"},{"id":"pmh:oai:dsapce.library.iitb.ac.in:100/27944","is_oa":false,"landing_page_url":"http://dspace.library.iitb.ac.in/xmlui/handle/100/27944","pdf_url":null,"source":{"id":"https://openalex.org/S4306400899","display_name":"DSpace (IIT Bombay)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I162827531","host_organization_name":"Indian Institute of Technology Bombay","host_organization_lineage":["https://openalex.org/I162827531"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference Paper"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W1990217629","https://openalex.org/W1990646655","https://openalex.org/W2006300501","https://openalex.org/W2019568909","https://openalex.org/W2023252780","https://openalex.org/W2056344292","https://openalex.org/W2059452607","https://openalex.org/W2104511362","https://openalex.org/W2113883939","https://openalex.org/W2137786814","https://openalex.org/W2182461886","https://openalex.org/W2268438807","https://openalex.org/W2321516567","https://openalex.org/W2323516091","https://openalex.org/W2463228956","https://openalex.org/W2523044730","https://openalex.org/W2547537790","https://openalex.org/W2562419505","https://openalex.org/W2734784761","https://openalex.org/W2773722138","https://openalex.org/W2778064795","https://openalex.org/W2798652863","https://openalex.org/W2904778308","https://openalex.org/W6700308850","https://openalex.org/W6729435682","https://openalex.org/W6756876205"],"related_works":["https://openalex.org/W2276816319","https://openalex.org/W45665305","https://openalex.org/W2122708814","https://openalex.org/W2367743327","https://openalex.org/W2520125024","https://openalex.org/W2049900425","https://openalex.org/W3161496874","https://openalex.org/W2586631215","https://openalex.org/W2026330382","https://openalex.org/W2915680872"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"the":[3,59,70,77,89,103,110,114,118,122,130],"induced-stress":[4],"analysis":[5],"of":[6,37,69,88,97],"an":[7],"SU-8":[8],"polymer":[9],"based":[10],"3-axis":[11],"piezoresistive":[12,51,140],"MEMS":[13],"accelerometer":[14],"having":[15],"a":[16,54],"single":[17],"proof":[18],"mass":[19],"along":[20],"with":[21,124,138],"proposed":[22,104,133],"fabrication":[23,134],"process":[24,135],"flow.":[25],"Polymer":[26],"accelerometers":[27],"are":[28,93],"simple":[29],"to":[30,46,56,75],"fabricate":[31],"and":[32,66,72,100,116,147],"have":[33,80],"better":[34],"sensitivity":[35],"because":[36],"their":[38],"lower":[39],"Young's":[40],"modulus.":[41],"It":[42],"is":[43,136],"also":[44],"easy":[45],"integrate":[47],"any":[48],"highly":[49],"sensitive":[50],"material":[52],"as":[53,143],"layer":[55],"further":[57],"enhance":[58],"performance.":[60],"In":[61],"this":[62],"work,":[63],"structural":[64,85],"design":[65,105,127],"push-pull":[67],"mechanism":[68],"beam":[71],"its":[73],"use":[74],"achieve":[76],"desired":[78],"results":[79],"been":[81,107],"explained.":[82],"Using":[83],"basic":[84],"analysis,":[86],"locations":[87],"maximum":[90],"induced":[91],"stress":[92,111],"identified.":[94],"For":[95],"acceleration":[96],"100":[98],"g":[99],"1":[101],"g,":[102],"has":[106],"investigated":[108],"for":[109],"field":[112],"in":[113,129],"structure":[115],"shown":[117],"improvement":[119],"by":[120],"comparing":[121],"performance":[123],"two":[125],"published":[126],"presented":[128],"paper.":[131],"The":[132],"compatible":[137],"several":[139],"materials":[141],"such":[142],"ZnO":[144],"nanorods,":[145],"graphene":[146],"carbon":[148],"nanotubes":[149],"(CNTs).":[150]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}