{"id":"https://openalex.org/W2904778308","doi":"https://doi.org/10.1109/ssd.2018.8570360","title":"Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive MEMS Accelerometer","display_name":"Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive MEMS Accelerometer","publication_year":2018,"publication_date":"2018-03-01","ids":{"openalex":"https://openalex.org/W2904778308","doi":"https://doi.org/10.1109/ssd.2018.8570360","mag":"2904778308"},"language":"en","primary_location":{"id":"doi:10.1109/ssd.2018.8570360","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd.2018.8570360","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 15th International Multi-Conference on Systems, Signals & Devices (SSD)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027904630","display_name":"Maroua Said","orcid":null},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"M. Hadi Said","raw_affiliation_strings":["METS research group Route Soukra, National Engineering School of Sfax, Sfax, Tunisia"],"affiliations":[{"raw_affiliation_string":"METS research group Route Soukra, National Engineering School of Sfax, Sfax, Tunisia","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025205082","display_name":"Far\u00e8s Tounsi","orcid":"https://orcid.org/0000-0002-7130-4007"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"F. Tounsi","raw_affiliation_strings":["METS research group Route Soukra, National Engineering School of Sfax, Sfax, Tunisia"],"affiliations":[{"raw_affiliation_string":"METS research group Route Soukra, National Engineering School of Sfax, Sfax, Tunisia","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041691169","display_name":"Brahim Mezghani","orcid":"https://orcid.org/0000-0002-6626-9817"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"B. Mezghani","raw_affiliation_strings":["METS research group Route Soukra, National Engineering School of Sfax, Sfax, Tunisia"],"affiliations":[{"raw_affiliation_string":"METS research group Route Soukra, National Engineering School of Sfax, Sfax, Tunisia","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001232852","display_name":"Aftab Ahmed","orcid":"https://orcid.org/0000-0001-8346-377X"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"A. Ahmed","raw_affiliation_strings":["Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110646705","display_name":"S. Pandit","orcid":null},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"S. Pandit","raw_affiliation_strings":["Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009126115","display_name":"Rajul Patkar","orcid":"https://orcid.org/0000-0001-8111-4541"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"R. Patkar","raw_affiliation_strings":["Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066912549","display_name":"Pradeep Dixit","orcid":"https://orcid.org/0000-0001-6706-1877"},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"P. Dixit","raw_affiliation_strings":["Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036486740","display_name":"M.S. Baghin","orcid":null},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"M.S. Baghin","raw_affiliation_strings":["Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India"],"affiliations":[{"raw_affiliation_string":"Indian Institute of Technology, IIT-Bombay, Powai, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5065019619","display_name":"V. Ramgopal Rao","orcid":"https://orcid.org/0000-0001-9157-957X"},"institutions":[{"id":"https://openalex.org/I68891433","display_name":"Indian Institute of Technology Delhi","ror":"https://ror.org/049tgcd06","country_code":"IN","type":"education","lineage":["https://openalex.org/I68891433"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"V.R. Rao","raw_affiliation_strings":["IIT-Delhi, New Delhi, India"],"affiliations":[{"raw_affiliation_string":"IIT-Delhi, New Delhi, India","institution_ids":["https://openalex.org/I68891433"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5027904630"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.515,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.6870554,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"86","issue":null,"first_page":"1481","last_page":"1486"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.922666072845459},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8651102781295776},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8110167980194092},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.7329906821250916},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.7287840843200684},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6558764576911926},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.557612419128418},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.5015323162078857},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4810776710510254},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3575335741043091},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.33074092864990234},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.2549856901168823},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2547897398471832},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.20101553201675415},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.18488535284996033},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.12523213028907776},{"id":"https://openalex.org/keywords/classical-mechanics","display_name":"Classical mechanics","score":0.07803595066070557}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.922666072845459},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8651102781295776},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8110167980194092},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.7329906821250916},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.7287840843200684},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6558764576911926},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.557612419128418},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.5015323162078857},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4810776710510254},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3575335741043091},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.33074092864990234},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2549856901168823},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2547897398471832},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.20101553201675415},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.18488535284996033},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.12523213028907776},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.07803595066070557},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ssd.2018.8570360","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd.2018.8570360","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 15th International Multi-Conference on Systems, Signals & Devices (SSD)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320322727","display_name":"Minist\u00e8re de l'Education Nationale, de l'Enseignement Superieur et de la Recherche","ror":"https://ror.org/03sjk9a61"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W32157221","https://openalex.org/W2006300501","https://openalex.org/W2019568909","https://openalex.org/W2023252780","https://openalex.org/W2031245046","https://openalex.org/W2034732232","https://openalex.org/W2087085105","https://openalex.org/W2097036133","https://openalex.org/W2104511362","https://openalex.org/W2113883939","https://openalex.org/W2115380597","https://openalex.org/W2148600917","https://openalex.org/W2149128480","https://openalex.org/W2182461886","https://openalex.org/W2321516567","https://openalex.org/W2523044730","https://openalex.org/W2538399524","https://openalex.org/W2543054378","https://openalex.org/W2552148320","https://openalex.org/W6729253058"],"related_works":["https://openalex.org/W2276816319","https://openalex.org/W45665305","https://openalex.org/W2367743327","https://openalex.org/W4384517610","https://openalex.org/W2520125024","https://openalex.org/W2049900425","https://openalex.org/W3161496874","https://openalex.org/W2122708814","https://openalex.org/W4288389100","https://openalex.org/W1902800522"],"abstract_inverted_index":{"This":[0,26,107],"paper":[1],"presents":[2],"a":[3,12,21,30,52,69],"demonstration":[4],"of":[5,11,20,33,51,86,131],"the":[6,18,44,57,79,92,104,117,123,138,147],"superiority":[7],"in":[8,17,38,43,73,91,103,122,153],"overall":[9],"sensitivity":[10],"V-shaped":[13,66,80,139],"attachment":[14],"structure":[15,63,81,155],"used":[16,102,121],"design":[19],"3-axis":[22],"piezoresistive":[23],"micromachined":[24],"accelerometer.":[25],"is":[27,111,142],"accomplished":[28],"through":[29],"detailed":[31],"comparison":[32,105,124],"generated":[34],"maximum":[35,84,127,160],"stress":[36,88,108,129,161],"values":[37,85,109,130],"different":[39,157],"similar":[40],"designs":[41],"reported":[42],"literature.":[45],"All":[46],"these":[47],"structures":[48,101,120],"are":[49,94],"composed":[50],"seismic":[53],"mass":[54],"attached":[55],"to":[56],"substrate":[58],"with":[59,68],"four":[60,65],"arms.":[61],"The":[62,76],"uses":[64],"arms":[67],"short":[70],"fragment":[71],"located":[72],"their":[74],"middle.":[75],"analysis":[77],"on":[78,116],"shows":[82],"that":[83],"induced":[87],"under":[89],"acceleration":[90],"axes":[93],"higher":[95],"than":[96],"those":[97],"given":[98],"by":[99],"other":[100],"study.":[106],"enhancement":[110],"more":[112],"pronounced":[113],"for":[114,159],"accelerations":[115,151],"z-axis.":[118],"Simulated":[119],"study":[125],"give":[126],"z-axis":[128],"0.5":[132],"MPa":[133,136],"and":[134,149],"0.09":[135],"while":[137],"structure's":[140],"value":[141],"4.25":[143],"MPa.":[144],"In":[145],"addition,":[146],"Ax":[148],"Ay":[150],"induce":[152],"our":[154],"two":[156],"paths":[158],"offering":[162],"added":[163],"sensitivity.":[164]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":3}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}