{"id":"https://openalex.org/W2185169922","doi":"https://doi.org/10.1109/ssd.2015.7348248","title":"Accurate reduced-order modeling of MEMS and NEMS microactuators under dynamic electrostatic loading and large strokes","display_name":"Accurate reduced-order modeling of MEMS and NEMS microactuators under dynamic electrostatic loading and large strokes","publication_year":2015,"publication_date":"2015-03-01","ids":{"openalex":"https://openalex.org/W2185169922","doi":"https://doi.org/10.1109/ssd.2015.7348248","mag":"2185169922"},"language":"en","primary_location":{"id":"doi:10.1109/ssd.2015.7348248","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd.2015.7348248","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE 12th International Multi-Conference on Systems, Signals & Devices (SSD15)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109256371","display_name":"Sarah Ben Sassi","orcid":null},"institutions":[{"id":"https://openalex.org/I179097149","display_name":"University of Carthage","ror":"https://ror.org/057x6za15","country_code":"TN","type":"education","lineage":["https://openalex.org/I179097149"]}],"countries":["TN"],"is_corresponding":true,"raw_author_name":"Sarah Ben Sassi","raw_affiliation_strings":["La Marsa 2078, University of Carthage, La Marsa, Tunisia"],"affiliations":[{"raw_affiliation_string":"La Marsa 2078, University of Carthage, La Marsa, Tunisia","institution_ids":["https://openalex.org/I179097149"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5059465215","display_name":"Fehmi Najar","orcid":"https://orcid.org/0000-0003-3545-809X"},"institutions":[{"id":"https://openalex.org/I179097149","display_name":"University of Carthage","ror":"https://ror.org/057x6za15","country_code":"TN","type":"education","lineage":["https://openalex.org/I179097149"]}],"countries":["TN"],"is_corresponding":false,"raw_author_name":"Fehmi Najar","raw_affiliation_strings":["La Marsa 2078, University of Carthage, La Marsa, Tunisia"],"affiliations":[{"raw_affiliation_string":"La Marsa 2078, University of Carthage, La Marsa, Tunisia","institution_ids":["https://openalex.org/I179097149"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5109256371"],"corresponding_institution_ids":["https://openalex.org/I179097149"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.08478836,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"16","issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microbeam","display_name":"Microbeam","score":0.8943575620651245},{"id":"https://openalex.org/keywords/galerkin-method","display_name":"Galerkin method","score":0.7038111686706543},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.6761556267738342},{"id":"https://openalex.org/keywords/discretization","display_name":"Discretization","score":0.6678467988967896},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.5958579778671265},{"id":"https://openalex.org/keywords/floquet-theory","display_name":"Floquet theory","score":0.5834455490112305},{"id":"https://openalex.org/keywords/equations-of-motion","display_name":"Equations of motion","score":0.5359507203102112},{"id":"https://openalex.org/keywords/timoshenko-beam-theory","display_name":"Timoshenko beam theory","score":0.5175772905349731},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.47309163212776184},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.35619795322418213},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3376026749610901},{"id":"https://openalex.org/keywords/mathematical-analysis","display_name":"Mathematical analysis","score":0.326170414686203},{"id":"https://openalex.org/keywords/classical-mechanics","display_name":"Classical mechanics","score":0.29105034470558167},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.2788931131362915},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2545066475868225},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.1481415331363678},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.10712096095085144}],"concepts":[{"id":"https://openalex.org/C2777152588","wikidata":"https://www.wikidata.org/wiki/Q6839237","display_name":"Microbeam","level":2,"score":0.8943575620651245},{"id":"https://openalex.org/C186899397","wikidata":"https://www.wikidata.org/wiki/Q1491980","display_name":"Galerkin method","level":3,"score":0.7038111686706543},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.6761556267738342},{"id":"https://openalex.org/C73000952","wikidata":"https://www.wikidata.org/wiki/Q17007827","display_name":"Discretization","level":2,"score":0.6678467988967896},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.5958579778671265},{"id":"https://openalex.org/C55649039","wikidata":"https://www.wikidata.org/wiki/Q902618","display_name":"Floquet theory","level":3,"score":0.5834455490112305},{"id":"https://openalex.org/C14037181","wikidata":"https://www.wikidata.org/wiki/Q215007","display_name":"Equations of motion","level":2,"score":0.5359507203102112},{"id":"https://openalex.org/C190699663","wikidata":"https://www.wikidata.org/wiki/Q2435044","display_name":"Timoshenko beam theory","level":3,"score":0.5175772905349731},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.47309163212776184},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.35619795322418213},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3376026749610901},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.326170414686203},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.29105034470558167},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.2788931131362915},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2545066475868225},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.1481415331363678},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.10712096095085144},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ssd.2015.7348248","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd.2015.7348248","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE 12th International Multi-Conference on Systems, Signals & Devices (SSD15)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W274870236","https://openalex.org/W1966805984","https://openalex.org/W1979915700","https://openalex.org/W2015638609","https://openalex.org/W2022344696","https://openalex.org/W2043766714","https://openalex.org/W2056527965","https://openalex.org/W2140061054","https://openalex.org/W2141415194","https://openalex.org/W2499842843","https://openalex.org/W2735983375","https://openalex.org/W4301256250"],"related_works":["https://openalex.org/W1488175704","https://openalex.org/W1977901541","https://openalex.org/W233684977","https://openalex.org/W3005987994","https://openalex.org/W2591659144","https://openalex.org/W2294168078","https://openalex.org/W4375858731","https://openalex.org/W2030615608","https://openalex.org/W2389449359","https://openalex.org/W1992227257"],"abstract_inverted_index":{"This":[0],"work":[1],"investigates":[2],"the":[3,24,28,53,67,111,118,124,138,154,161],"static":[4],"and":[5,49,61,75,86,122,157],"dynamic":[6,104],"behavior":[7],"of":[8,30,55,70,106,120,131],"microbeam":[9],"when":[10],"actuated":[11],"by":[12,136,152],"a":[13],"DC":[14],"load":[15],"superimposed":[16],"to":[17,58,102,116],"an":[18],"AC":[19],"harmonic":[20],"load.":[21],"When":[22],"modeling":[23],"micro":[25],"electromechanical":[26],"system,":[27],"use":[29],"nonlinear":[31,50,76,126],"terms":[32],"like":[33],"third-order":[34,47],"nonlinearities":[35,48],"can":[36],"be":[37],"sometimes":[38],"ambiguous.":[39],"In":[40],"this":[41],"study":[42],"we":[43,109],"demonstrate":[44],"that":[45],"neglecting":[46],"inertia":[51],"in":[52,160],"equation":[54,69],"motion":[56,71,121],"leads":[57],"accurate":[59],"results":[60,150,158],"low":[62],"computational":[63],"cost.":[64],"We":[65],"derive":[66],"governing":[68],"using":[72],"both":[73],"linear":[74],"Euler":[77],"Bernoulli":[78],"beam":[79],"theory":[80],"with":[81,141],"two":[82],"possible":[83],"configurations:":[84],"cantilever":[85],"doubly-clamped.":[87],"A":[88,144],"Reduced":[89],"Order":[90],"Models":[91],"(ROMs)":[92],"based":[93],"on":[94],"Differential":[95],"Quadratic":[96],"Method":[97,114],"(DQM)":[98],"decomposition":[99,156],"is":[100,134,146],"utilized":[101],"simulate":[103],"response":[105],"microbeam.":[107],"Besides,":[108],"employ":[110],"Finite":[112],"Difference":[113],"(FDM)":[115],"discretize":[117],"orbits":[119,133],"solve":[123],"resulting":[125],"algebraic":[127],"equations.":[128],"The":[129],"stability":[130],"captured":[132],"determined":[135],"combining":[137],"FDM":[139],"discretization":[140],"Floquet":[142],"theory.":[143],"comparison":[145],"then":[147],"deduced":[148],"between":[149],"found":[151,159],"applying":[153],"DQM-FDM":[155],"literature.":[162]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}