{"id":"https://openalex.org/W2109012883","doi":"https://doi.org/10.1109/ssd.2012.6197965","title":"MEMS design for an efficient electrostatic energy harvester combined with components of precision mechanics","display_name":"MEMS design for an efficient electrostatic energy harvester combined with components of precision mechanics","publication_year":2012,"publication_date":"2012-03-01","ids":{"openalex":"https://openalex.org/W2109012883","doi":"https://doi.org/10.1109/ssd.2012.6197965","mag":"2109012883"},"language":"en","primary_location":{"id":"doi:10.1109/ssd.2012.6197965","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd.2012.6197965","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Multi-Conference on Systems, Sygnals &amp; Devices","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5085517417","display_name":"Joerg Schaufuss","orcid":null},"institutions":[{"id":"https://openalex.org/I2610724","display_name":"Chemnitz University of Technology","ror":"https://ror.org/00a208s56","country_code":"DE","type":"education","lineage":["https://openalex.org/I2610724"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Joerg Schaufuss","raw_affiliation_strings":["Department Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany","Dept. Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany"],"affiliations":[{"raw_affiliation_string":"Department Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany","institution_ids":["https://openalex.org/I2610724"]},{"raw_affiliation_string":"Dept. Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany","institution_ids":["https://openalex.org/I2610724"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5025136246","display_name":"Jan Mehner","orcid":"https://orcid.org/0000-0002-0296-0625"},"institutions":[{"id":"https://openalex.org/I2610724","display_name":"Chemnitz University of Technology","ror":"https://ror.org/00a208s56","country_code":"DE","type":"education","lineage":["https://openalex.org/I2610724"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Jan Mehner","raw_affiliation_strings":["Department Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany","Dept. Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany"],"affiliations":[{"raw_affiliation_string":"Department Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany","institution_ids":["https://openalex.org/I2610724"]},{"raw_affiliation_string":"Dept. Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany","institution_ids":["https://openalex.org/I2610724"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5085517417"],"corresponding_institution_ids":["https://openalex.org/I2610724"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.19924317,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11392","display_name":"Energy Harvesting in Wireless Networks","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11249","display_name":"Wireless Power Transfer Systems","score":0.991100013256073,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/range","display_name":"Range (aeronautics)","score":0.6852667331695557},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6347916126251221},{"id":"https://openalex.org/keywords/energy","display_name":"Energy (signal processing)","score":0.5581188201904297},{"id":"https://openalex.org/keywords/amplitude","display_name":"Amplitude","score":0.551368236541748},{"id":"https://openalex.org/keywords/excitation","display_name":"Excitation","score":0.5382992625236511},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5030567049980164},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.494627445936203},{"id":"https://openalex.org/keywords/electric-potential-energy","display_name":"Electric potential energy","score":0.41736817359924316},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.39091241359710693},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3374069333076477},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1808040738105774},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.14942187070846558},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.13390186429023743},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.11613455414772034}],"concepts":[{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.6852667331695557},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6347916126251221},{"id":"https://openalex.org/C186370098","wikidata":"https://www.wikidata.org/wiki/Q442787","display_name":"Energy (signal processing)","level":2,"score":0.5581188201904297},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.551368236541748},{"id":"https://openalex.org/C83581075","wikidata":"https://www.wikidata.org/wiki/Q1361503","display_name":"Excitation","level":2,"score":0.5382992625236511},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5030567049980164},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.494627445936203},{"id":"https://openalex.org/C98576551","wikidata":"https://www.wikidata.org/wiki/Q841798","display_name":"Electric potential energy","level":3,"score":0.41736817359924316},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.39091241359710693},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3374069333076477},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1808040738105774},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.14942187070846558},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.13390186429023743},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.11613455414772034}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ssd.2012.6197965","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ssd.2012.6197965","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Multi-Conference on Systems, Sygnals &amp; Devices","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8999999761581421,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1535802061","https://openalex.org/W2020663348","https://openalex.org/W2051711270","https://openalex.org/W2060498421","https://openalex.org/W2064426666","https://openalex.org/W2076667857","https://openalex.org/W2112426884","https://openalex.org/W2125128176","https://openalex.org/W6669471890"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1763916368","https://openalex.org/W2319192085","https://openalex.org/W2391127530","https://openalex.org/W2045074154","https://openalex.org/W2346208161","https://openalex.org/W2974943474","https://openalex.org/W2393343784"],"abstract_inverted_index":{"In":[0],"this":[1],"document":[2],"approaches":[3],"and":[4,24,35],"results":[5],"of":[6,21,27,42,50],"design":[7],"optimizations":[8],"for":[9,44],"a":[10],"high":[11],"efficient":[12],"electrostatic":[13],"energy":[14],"harvester":[15,19],"are":[16],"presented.":[17],"The":[18],"consists":[20],"MEMS":[22],"components":[23,25],"made":[26],"precision":[28],"mechanics.":[29],"This":[30],"combination":[31],"allows":[32],"frequency":[33],"tuning":[34],"an":[36],"output":[37],"power":[38],"in":[39,47],"the":[40,48],"range":[41,49],"microwatts":[43],"excitation":[45],"amplitudes":[46],"tenths":[51],"m/s":[52],"<sup":[53],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[54],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[55],".":[56]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}