{"id":"https://openalex.org/W4405490769","doi":"https://doi.org/10.1109/sensors60989.2024.10785232","title":"Influence of Scallops in Deep Reactive Ion Etching on Vertical Comb-Based Sensors/Actuators","display_name":"Influence of Scallops in Deep Reactive Ion Etching on Vertical Comb-Based Sensors/Actuators","publication_year":2024,"publication_date":"2024-10-20","ids":{"openalex":"https://openalex.org/W4405490769","doi":"https://doi.org/10.1109/sensors60989.2024.10785232"},"language":"en","primary_location":{"id":"doi:10.1109/sensors60989.2024.10785232","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10785232","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016950225","display_name":"Yuhu Xia","orcid":"https://orcid.org/0000-0002-2943-1133"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuhu Xia","raw_affiliation_strings":["Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002901609","display_name":"Biyun Ling","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Biyun Ling","raw_affiliation_strings":["Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100427264","display_name":"Bo Chen","orcid":"https://orcid.org/0000-0001-6743-9251"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Bo Chen","raw_affiliation_strings":["East China Institute of Photo-Electron IC,Bengbu,China,233000"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"East China Institute of Photo-Electron IC,Bengbu,China,233000","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100346517","display_name":"Xiaoyue Wang","orcid":"https://orcid.org/0000-0003-2388-3638"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaoyue Wang","raw_affiliation_strings":["Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113113721","display_name":"Biqing Zhou","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Biqing Zhou","raw_affiliation_strings":["Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111428549","display_name":"Yaming Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210147322","display_name":"Shanghai Institute of Microsystem and Information Technology","ror":"https://ror.org/04nytyj38","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210147322"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yaming Wu","raw_affiliation_strings":["Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Shanghai,China,200050","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210147322"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9650999903678894,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9650999903678894,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9466000199317932,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/deep-reactive-ion-etching","display_name":"Deep reactive-ion etching","score":0.799308180809021},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.7151260375976562},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6846452951431274},{"id":"https://openalex.org/keywords/comb-drive","display_name":"Comb drive","score":0.6813349723815918},{"id":"https://openalex.org/keywords/reactive-ion-etching","display_name":"Reactive-ion etching","score":0.6189513802528381},{"id":"https://openalex.org/keywords/ion","display_name":"Ion","score":0.5633566379547119},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4791502356529236},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.46843084692955017},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.46466243267059326},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3326975405216217},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2819101810455322},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.21794697642326355},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.18039849400520325},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.08376720547676086}],"concepts":[{"id":"https://openalex.org/C124634506","wikidata":"https://www.wikidata.org/wiki/Q486936","display_name":"Deep reactive-ion etching","level":5,"score":0.799308180809021},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.7151260375976562},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6846452951431274},{"id":"https://openalex.org/C155840801","wikidata":"https://www.wikidata.org/wiki/Q5150581","display_name":"Comb drive","level":4,"score":0.6813349723815918},{"id":"https://openalex.org/C130472188","wikidata":"https://www.wikidata.org/wiki/Q1640159","display_name":"Reactive-ion etching","level":4,"score":0.6189513802528381},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.5633566379547119},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4791502356529236},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.46843084692955017},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.46466243267059326},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3326975405216217},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2819101810455322},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.21794697642326355},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.18039849400520325},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.08376720547676086},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors60989.2024.10785232","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10785232","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.5099999904632568}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1968761780","https://openalex.org/W2051629644","https://openalex.org/W2095302604","https://openalex.org/W2101952869","https://openalex.org/W2116700171","https://openalex.org/W2171798746","https://openalex.org/W2776173654","https://openalex.org/W2983655105","https://openalex.org/W3041833826","https://openalex.org/W3046936635"],"related_works":["https://openalex.org/W3094407298","https://openalex.org/W2314946316","https://openalex.org/W2738078446","https://openalex.org/W2507729704","https://openalex.org/W1987727136","https://openalex.org/W1990831804","https://openalex.org/W2026923884","https://openalex.org/W2070736010","https://openalex.org/W2292233544","https://openalex.org/W2043146957"],"abstract_inverted_index":{"The":[0],"Bosch":[1,23],"deep":[2],"reactive":[3],"ion":[4],"etching":[5],"(DRIE)":[6],"is":[7,40,51,78,113],"a":[8],"critical":[9],"bulk-silicon-micromachining":[10],"(BSM)":[11],"processing":[12],"for":[13,68],"vertical":[14],"comb-based":[15],"(VC-based)":[16],"sensor/actuator":[17],"fabrication.":[18],"However,":[19],"scallop":[20,46,112],"in":[21],"the":[22,86],"process":[24],"leads":[25],"to":[26,96,111],"undesirable":[27],"VC":[28,49,92],"gap":[29],"varying.":[30],"Herein,":[31],"influence":[32],"of":[33,37,45,56,61,91,100,105],"scallops":[34],"on":[35,48],"performance":[36],"VC-based":[38],"sensors/actuator":[39],"presented.":[41],"Firstly,":[42],"mathematical":[43],"modeling":[44,81],"distribution":[47],"sidewall":[50],"established.":[52],"From":[53],"this,":[54],"capacitance":[55,93],"VCs":[57],"and":[58,70,89,98],"electrostatic":[59],"force":[60],"VC-drive":[62],"(VCD)":[63],"actuators":[64],"are":[65,94],"derived,":[66],"including":[67],"rotating":[69],"piston":[71],"types.":[72],"Then,":[73],"finite":[74],"element":[75],"analysis":[76],"(FEA)":[77],"used":[79],"as":[80],"verification.":[82],"Results":[83],"indicate":[84],"that":[85],"varying":[87],"amplitude":[88],"period":[90,99],"attributing":[95],"depth":[97],"scallops,":[101],"respectively.":[102],"Moreover,":[103],"limitation":[104],"VCD":[106],"actuators'":[107],"positioning":[108],"accuracy":[109],"due":[110],"given.":[114]},"counts_by_year":[],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}