{"id":"https://openalex.org/W4405492017","doi":"https://doi.org/10.1109/sensors60989.2024.10785146","title":"Thin Film Strain Sensors with Significantly Improved Piezoresistive Stability at High Temperatures by Introducing Insulating Phase","display_name":"Thin Film Strain Sensors with Significantly Improved Piezoresistive Stability at High Temperatures by Introducing Insulating Phase","publication_year":2024,"publication_date":"2024-10-20","ids":{"openalex":"https://openalex.org/W4405492017","doi":"https://doi.org/10.1109/sensors60989.2024.10785146"},"language":"en","primary_location":{"id":"doi:10.1109/sensors60989.2024.10785146","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10785146","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5055444956","display_name":"Tao Zhang","orcid":"https://orcid.org/0000-0001-9886-8411"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Tao Zhang","raw_affiliation_strings":["Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China"],"affiliations":[{"raw_affiliation_string":"Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039368187","display_name":"Yilin Fan","orcid":"https://orcid.org/0000-0002-9642-8428"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yilin Fan","raw_affiliation_strings":["Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China"],"affiliations":[{"raw_affiliation_string":"Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100743047","display_name":"Lei Yu","orcid":"https://orcid.org/0000-0003-3134-3746"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu Lei","raw_affiliation_strings":["Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China"],"affiliations":[{"raw_affiliation_string":"Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034859277","display_name":"Xingxu Zhang","orcid":"https://orcid.org/0000-0002-9571-5708"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xingxu Zhang","raw_affiliation_strings":["Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China"],"affiliations":[{"raw_affiliation_string":"Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110960993","display_name":"Jian Luo","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Luo","raw_affiliation_strings":["Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China"],"affiliations":[{"raw_affiliation_string":"Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101782631","display_name":"Junbo Deng","orcid":"https://orcid.org/0000-0002-7625-6649"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinju Deng","raw_affiliation_strings":["Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China"],"affiliations":[{"raw_affiliation_string":"Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054683731","display_name":"Tao Ye","orcid":"https://orcid.org/0000-0001-9381-8781"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tao Ye","raw_affiliation_strings":["Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China"],"affiliations":[{"raw_affiliation_string":"Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113232942","display_name":"Binghe Ma","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Binghe Ma","raw_affiliation_strings":["Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China"],"affiliations":[{"raw_affiliation_string":"Ministry of Education, Northwestern Polytechnical University,Key Laboratory of Micro/Nano System for Aerospace,Xi&#x0027;an,China","institution_ids":["https://openalex.org/I17145004"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5055444956"],"corresponding_institution_ids":["https://openalex.org/I17145004"],"apc_list":null,"apc_paid":null,"fwci":0.3919,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.59582952,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9743000268936157,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9743000268936157,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.951200008392334,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13251","display_name":"Electrical and Thermal Properties of Materials","score":0.9222000241279602,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8585757613182068},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7839755415916443},{"id":"https://openalex.org/keywords/phase","display_name":"Phase (matter)","score":0.5701464414596558},{"id":"https://openalex.org/keywords/strain","display_name":"Strain (injury)","score":0.5525901317596436},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.5196103453636169},{"id":"https://openalex.org/keywords/stability","display_name":"Stability (learning theory)","score":0.4712755084037781},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.44824135303497314},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3780854344367981},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.34633833169937134},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.22321298718452454},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.13703390955924988},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08464816212654114}],"concepts":[{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8585757613182068},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7839755415916443},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.5701464414596558},{"id":"https://openalex.org/C2778022156","wikidata":"https://www.wikidata.org/wiki/Q576145","display_name":"Strain (injury)","level":2,"score":0.5525901317596436},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.5196103453636169},{"id":"https://openalex.org/C112972136","wikidata":"https://www.wikidata.org/wiki/Q7595718","display_name":"Stability (learning theory)","level":2,"score":0.4712755084037781},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.44824135303497314},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3780854344367981},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34633833169937134},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.22321298718452454},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.13703390955924988},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08464816212654114},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C126322002","wikidata":"https://www.wikidata.org/wiki/Q11180","display_name":"Internal medicine","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors60989.2024.10785146","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10785146","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.7599999904632568,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W299489389","https://openalex.org/W2106353571","https://openalex.org/W2322078680","https://openalex.org/W2404114931","https://openalex.org/W2803600669","https://openalex.org/W2913251631","https://openalex.org/W2921611549","https://openalex.org/W3021455473","https://openalex.org/W3044934849","https://openalex.org/W3141902253","https://openalex.org/W3194821210","https://openalex.org/W3205110479","https://openalex.org/W4288036707","https://openalex.org/W4308655639","https://openalex.org/W4311973956","https://openalex.org/W4379933067","https://openalex.org/W4387036134"],"related_works":["https://openalex.org/W2084250491","https://openalex.org/W2375562665","https://openalex.org/W2184008233","https://openalex.org/W3130958947","https://openalex.org/W1985482365","https://openalex.org/W2025294681","https://openalex.org/W3013155306","https://openalex.org/W2550172429","https://openalex.org/W2540685717","https://openalex.org/W2162820097"],"abstract_inverted_index":{"In":[0],"this":[1,116],"work,":[2],"we":[3],"propose":[4],"a":[5,101],"strategy":[6],"to":[7,45,100],"significantly":[8],"enhance":[9],"the":[10,55,74,123],"piezoresistive":[11,63,105,130],"stability":[12,36,64,106],"of":[13,51,65,76,110,119,128],"indium":[14],"tin":[15],"oxide":[16],"(ITO)":[17],"thin":[18],"film":[19],"strain":[20],"sensors":[21,131],"(TFSSs)":[22],"at":[23,95],"high":[24,96],"temperatures.":[25],"Al<inf":[26,77],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[27,29,78,80],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</inf>O<inf":[28,79],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</inf>,":[30],"known":[31],"for":[32,122],"its":[33],"excellent":[34],"thermal":[35],"in":[37,85,92,104,115,134],"harsh":[38,135],"environments,":[39],"was":[40],"introduced":[41],"into":[42],"ITO":[43,66,93],"matrices":[44],"form":[46],"composite":[47],"films.":[48],"The":[49,112],"effect":[50],"doping":[52],"concentration":[53],"on":[54],"crystal":[56],"structure,":[57],"surface":[58],"morphology,":[59],"electrical":[60],"stability,":[61],"and":[62,88,126],"TFSSs":[67],"were":[68],"systematically":[69],"investigated.":[70],"Results":[71],"reveal":[72],"that":[73,132],"addition":[75],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</inf>plays":[81],"an":[82],"important":[83],"role":[84],"restraining":[86],"recrystallization":[87],"reducing":[89],"growth":[90],"defects":[91],"films":[94],"temperatures,":[97],"which":[98],"leads":[99],"remarkable":[102],"improvement":[103],"by":[107],"one":[108],"order":[109],"magnitude.":[111],"idea":[113],"disclosed":[114],"work":[117],"is":[118],"great":[120],"significance":[121],"design,":[124],"fabrication,":[125],"enhancement":[127],"micro/nano":[129],"operate":[133],"environments.":[136]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1}],"updated_date":"2025-12-27T23:08:20.325037","created_date":"2025-10-10T00:00:00"}