{"id":"https://openalex.org/W4405490589","doi":"https://doi.org/10.1109/sensors60989.2024.10784982","title":"A MEMS Gravimeter with Buckling-Beam Nonlinear Springs for Enhanced Sensitivity and Dynamic Range","display_name":"A MEMS Gravimeter with Buckling-Beam Nonlinear Springs for Enhanced Sensitivity and Dynamic Range","publication_year":2024,"publication_date":"2024-10-20","ids":{"openalex":"https://openalex.org/W4405490589","doi":"https://doi.org/10.1109/sensors60989.2024.10784982"},"language":"en","primary_location":{"id":"doi:10.1109/sensors60989.2024.10784982","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10784982","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5057407821","display_name":"Peyman Firoozy","orcid":"https://orcid.org/0000-0003-2589-4955"},"institutions":[{"id":"https://openalex.org/I18014758","display_name":"Simon Fraser University","ror":"https://ror.org/0213rcc28","country_code":"CA","type":"education","lineage":["https://openalex.org/I18014758"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Peyman Firoozy","raw_affiliation_strings":["Simon Fraser University,BC,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Simon Fraser University,BC,Canada","institution_ids":["https://openalex.org/I18014758"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5115513744","display_name":"Milad S. Haghighi","orcid":null},"institutions":[{"id":"https://openalex.org/I18014758","display_name":"Simon Fraser University","ror":"https://ror.org/0213rcc28","country_code":"CA","type":"education","lineage":["https://openalex.org/I18014758"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Milad S. Haghighi","raw_affiliation_strings":["Simon Fraser University,BC,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Simon Fraser University,BC,Canada","institution_ids":["https://openalex.org/I18014758"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048991930","display_name":"M. A. Kanygin","orcid":"https://orcid.org/0000-0002-2294-6804"},"institutions":[{"id":"https://openalex.org/I18014758","display_name":"Simon Fraser University","ror":"https://ror.org/0213rcc28","country_code":"CA","type":"education","lineage":["https://openalex.org/I18014758"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Mikhail Kanygin","raw_affiliation_strings":["Simon Fraser University,BC,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Simon Fraser University,BC,Canada","institution_ids":["https://openalex.org/I18014758"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030098958","display_name":"Emad Esmaeili","orcid":null},"institutions":[{"id":"https://openalex.org/I18014758","display_name":"Simon Fraser University","ror":"https://ror.org/0213rcc28","country_code":"CA","type":"education","lineage":["https://openalex.org/I18014758"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Emad Esmaeili","raw_affiliation_strings":["Simon Fraser University,BC,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Simon Fraser University,BC,Canada","institution_ids":["https://openalex.org/I18014758"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014284015","display_name":"Behraad Bahreyni","orcid":"https://orcid.org/0000-0001-6809-1445"},"institutions":[{"id":"https://openalex.org/I18014758","display_name":"Simon Fraser University","ror":"https://ror.org/0213rcc28","country_code":"CA","type":"education","lineage":["https://openalex.org/I18014758"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Behraad Bahreyni","raw_affiliation_strings":["Simon Fraser University,BC,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Simon Fraser University,BC,Canada","institution_ids":["https://openalex.org/I18014758"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I18014758"],"apc_list":null,"apc_paid":null,"fwci":0.3063,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.62380347,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9883000254631042,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9883000254631042,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9866999983787537,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11325","display_name":"Inertial Sensor and Navigation","score":0.9043999910354614,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gravimeter","display_name":"Gravimeter","score":0.9129104018211365},{"id":"https://openalex.org/keywords/buckling","display_name":"Buckling","score":0.6995958089828491},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6907699704170227},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.6783360838890076},{"id":"https://openalex.org/keywords/dynamic-range","display_name":"Dynamic range","score":0.5701277852058411},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5627413988113403},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.5504603385925293},{"id":"https://openalex.org/keywords/range","display_name":"Range (aeronautics)","score":0.4907008409500122},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.4370938539505005},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3914868235588074},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.308469295501709},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.27380624413490295},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.257828950881958},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.23998594284057617},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.17890548706054688},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.1388857364654541}],"concepts":[{"id":"https://openalex.org/C139974479","wikidata":"https://www.wikidata.org/wiki/Q499964","display_name":"Gravimeter","level":3,"score":0.9129104018211365},{"id":"https://openalex.org/C85476182","wikidata":"https://www.wikidata.org/wiki/Q693104","display_name":"Buckling","level":2,"score":0.6995958089828491},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6907699704170227},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.6783360838890076},{"id":"https://openalex.org/C87133666","wikidata":"https://www.wikidata.org/wiki/Q1161699","display_name":"Dynamic range","level":2,"score":0.5701277852058411},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5627413988113403},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.5504603385925293},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.4907008409500122},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.4370938539505005},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3914868235588074},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.308469295501709},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.27380624413490295},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.257828950881958},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.23998594284057617},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.17890548706054688},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1388857364654541},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C30399818","wikidata":"https://www.wikidata.org/wiki/Q5048830","display_name":"Casing","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors60989.2024.10784982","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10784982","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5299999713897705,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W2083853027","https://openalex.org/W2315483489","https://openalex.org/W2519117914","https://openalex.org/W2969525601","https://openalex.org/W2978417957","https://openalex.org/W3037380629","https://openalex.org/W4200433982","https://openalex.org/W4288707705"],"related_works":["https://openalex.org/W2748254977","https://openalex.org/W2180863045","https://openalex.org/W4388276001","https://openalex.org/W2522342111","https://openalex.org/W84418436","https://openalex.org/W39113732","https://openalex.org/W2517520816","https://openalex.org/W181153271","https://openalex.org/W2921065322","https://openalex.org/W4392904645"],"abstract_inverted_index":{"Accurate":[0],"measurement":[1],"of":[2,50,58,62,110,120,163,181,192,199],"variations":[3],"in":[4,54,89,96,102],"local":[5],"gravitational":[6],"acceleration":[7],"is":[8],"crucial":[9],"for":[10],"geophysical":[11],"research,":[12],"natural":[13],"hazard":[14],"forecasting,":[15],"and":[16,26,142,155,195],"resource":[17],"exploration.":[18],"However,":[19],"existing":[20],"gravimeters":[21,31],"are":[22],"expensive,":[23],"heavy,":[24],"large,":[25],"power-hungry,":[27],"motivating":[28],"research":[29],"on":[30,33],"based":[32],"micro-electromechanical":[34],"systems.":[35],"This":[36],"paper":[37],"introduces":[38],"a":[39,55,86,100,117,129,177,190,196],"buckling-based":[40],"nonlinear":[41],"spring":[42],"mechanism.":[43],"Through":[44],"proper":[45],"structural":[46],"design,":[47],"the":[48,59,63,70,80,105,108,111,124,156],"buckling":[49,109],"two":[51],"beams":[52,113],"results":[53],"significant":[56],"reduction":[57],"effective":[60],"stiffness":[61],"structure":[64],"and,":[65],"hence,":[66],"improving":[67],"sensitivity":[68,172,191],"under":[69],"desired":[71],"load.":[72],"A":[73],"prototype":[74,135],"device":[75,125,145],"was":[76,136,173],"designed":[77,134],"to":[78,94,99,126,160,166],"demonstrate":[79],"working":[81],"principle.":[82],"The":[83,133,144,169,187],"design":[84],"demonstrated":[85,189],"remarkable":[87],"drop":[88],"resonant":[90],"frequency":[91],"from":[92],"~110Hz":[93],"30Hz":[95],"simulations,":[97],"corresponding":[98],"~13\u00d7increase":[101],"sensitivity.":[103],"On":[104],"other":[106],"hand,":[107],"support":[112],"occurs":[114],"gradually":[115],"over":[116],"wide":[118],"range":[119,198],"input":[121,167],"forces,":[122],"allowing":[123],"simultaneously":[127],"achieve":[128],"high":[130],"dynamic":[131,197],"range.":[132],"fabricated":[137],"through":[138],"standard":[139],"microfabrication":[140],"processes":[141],"characterized.":[143],"utilized":[146],"an":[147,152],"on-chip":[148],"optical":[149,153,170],"interferometer":[150],"between":[151],"fiber":[154],"proof":[157],"mass":[158],"sidewall":[159],"monitor":[161],"displacements":[162],"proofmass":[164],"due":[165],"accelerations.":[168],"displacement":[171,178],"0.6":[174],"mV/nm":[175],"with":[176],"noise":[179],"floor":[180],"40":[182],"pm/\u221aHz":[183],"at":[184],"2":[185],"Hz,":[186],"gravimeter":[188],"23,4":[193],"V/g":[194],"276":[200],"mg(1g":[201],"\u2248":[202],"9,81":[203],"m/s<sup":[204],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[205],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">1</sup>).":[206]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}