{"id":"https://openalex.org/W4405489979","doi":"https://doi.org/10.1109/sensors60989.2024.10784615","title":"Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) for High-Resolution Distance Sensing","display_name":"Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) for High-Resolution Distance Sensing","publication_year":2024,"publication_date":"2024-10-20","ids":{"openalex":"https://openalex.org/W4405489979","doi":"https://doi.org/10.1109/sensors60989.2024.10784615"},"language":"en","primary_location":{"id":"doi:10.1109/sensors60989.2024.10784615","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10784615","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5077737277","display_name":"Monica La Mura","orcid":"https://orcid.org/0000-0001-8410-2511"},"institutions":[{"id":"https://openalex.org/I119003972","display_name":"Roma Tre University","ror":"https://ror.org/05vf0dg29","country_code":"IT","type":"education","lineage":["https://openalex.org/I119003972"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Monica La Mura","raw_affiliation_strings":["Roma Tre University,Department of Industrial, Electronic, and Mechanical Engineering,Rome,Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Roma Tre University,Department of Industrial, Electronic, and Mechanical Engineering,Rome,Italy","institution_ids":["https://openalex.org/I119003972"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073067446","display_name":"Domenico Giusti","orcid":"https://orcid.org/0000-0003-1438-4036"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Domenico Giusti","raw_affiliation_strings":["STMicroelectronics,Agrate Brianza,MB,Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Agrate Brianza,MB,Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013165475","display_name":"Carlo Prelini","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Carlo Luigi Prelini","raw_affiliation_strings":["STMicroelectronics,Agrate Brianza,MB,Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Agrate Brianza,MB,Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084367593","display_name":"Marco Ferrera","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Marco Ferrera","raw_affiliation_strings":["STMicroelectronics,Agrate Brianza,MB,Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Agrate Brianza,MB,Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5042180855","display_name":"Alessandro Stuart Savoia","orcid":"https://orcid.org/0000-0002-1111-7437"},"institutions":[{"id":"https://openalex.org/I119003972","display_name":"Roma Tre University","ror":"https://ror.org/05vf0dg29","country_code":"IT","type":"education","lineage":["https://openalex.org/I119003972"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Alessandro Stuart Savoia","raw_affiliation_strings":["Roma Tre University,Department of Industrial, Electronic, and Mechanical Engineering,Rome,Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Roma Tre University,Department of Industrial, Electronic, and Mechanical Engineering,Rome,Italy","institution_ids":["https://openalex.org/I119003972"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2351,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.51036192,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12537","display_name":"Flow Measurement and Analysis","score":0.9930999875068665,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12537","display_name":"Flow Measurement and Analysis","score":0.9930999875068665,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9810000061988831,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9779999852180481,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.7702834606170654},{"id":"https://openalex.org/keywords/pmut","display_name":"PMUT","score":0.7337166666984558},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7236626148223877},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.7116677165031433},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.7093924283981323},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.658424973487854},{"id":"https://openalex.org/keywords/capacitive-micromachined-ultrasonic-transducers","display_name":"Capacitive micromachined ultrasonic transducers","score":0.657522976398468},{"id":"https://openalex.org/keywords/high-resolution","display_name":"High resolution","score":0.43789392709732056},{"id":"https://openalex.org/keywords/remote-sensing","display_name":"Remote sensing","score":0.11344748735427856},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.0850597620010376},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.06428664922714233},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.06353023648262024}],"concepts":[{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.7702834606170654},{"id":"https://openalex.org/C57693265","wikidata":"https://www.wikidata.org/wiki/Q17105295","display_name":"PMUT","level":3,"score":0.7337166666984558},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7236626148223877},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.7116677165031433},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.7093924283981323},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.658424973487854},{"id":"https://openalex.org/C58772458","wikidata":"https://www.wikidata.org/wiki/Q5034480","display_name":"Capacitive micromachined ultrasonic transducers","level":3,"score":0.657522976398468},{"id":"https://openalex.org/C3020199158","wikidata":"https://www.wikidata.org/wiki/Q210521","display_name":"High resolution","level":2,"score":0.43789392709732056},{"id":"https://openalex.org/C62649853","wikidata":"https://www.wikidata.org/wiki/Q199687","display_name":"Remote sensing","level":1,"score":0.11344748735427856},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0850597620010376},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06428664922714233},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.06353023648262024}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors60989.2024.10784615","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10784615","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"pmh:oai:iris.uniroma3.it:11590/510619","is_oa":false,"landing_page_url":"https://hdl.handle.net/11590/510619","pdf_url":null,"source":{"id":"https://openalex.org/S4377196120","display_name":"Iris (Roma Tre University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I119003972","host_organization_name":"Roma Tre University","host_organization_lineage":["https://openalex.org/I119003972"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.699999988079071,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1993029601","https://openalex.org/W2012779095","https://openalex.org/W2092950681","https://openalex.org/W2119024786","https://openalex.org/W2144082075","https://openalex.org/W2145602502","https://openalex.org/W2256749539","https://openalex.org/W2792386646","https://openalex.org/W2802143326","https://openalex.org/W2903871499","https://openalex.org/W2942633848","https://openalex.org/W3212142301","https://openalex.org/W3212627403","https://openalex.org/W4319001064","https://openalex.org/W4385339001","https://openalex.org/W4388450365","https://openalex.org/W4388452382"],"related_works":["https://openalex.org/W2912807936","https://openalex.org/W2383309909","https://openalex.org/W3189577114","https://openalex.org/W47979711","https://openalex.org/W2102304199","https://openalex.org/W2352652589","https://openalex.org/W2766757780","https://openalex.org/W138921638","https://openalex.org/W2314521183","https://openalex.org/W2051847435"],"abstract_inverted_index":{"High-frequency":[0],"airborne":[1],"ultrasound":[2],"enables":[3],"high-resolution":[4,121],"distance":[5,38,122],"sensing":[6,39,123],"for":[7,32],"various":[8],"applications,":[9],"such":[10],"as":[11],"robotics,":[12],"industrial":[13],"automation,":[14],"gesture":[15],"control,":[16],"and":[17,35,45,76,91,97,119],"more.":[18],"This":[19],"paper":[20],"presents":[21],"a":[22,56,77,104],"1.5MHz,":[23],"12-element":[24],"2-D":[25],"Piezoelectric":[26],"micromachined":[27],"ultrasonic":[28],"transducer":[29],"(PMUT)":[30],"array":[31,54],"high":[33,89],"temporal":[34],"spatial":[36],"resolution":[37],"in":[40,112,124],"air.":[41],"Electrical":[42],"impedance":[43],"analysis":[44],"measured":[46],"electroacoustic":[47],"frequency":[48,58],"response":[49],"of":[50,62,74,82,94,117],"the":[51,115],"air-coupled":[52],"PMUT":[53,110],"showed":[55],"resonant":[57],"f<inf":[59],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[60,70,72],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">r</inf>":[61],"1.5":[63,86],"MHz,":[64,87],"an":[65],"electromechanical":[66],"coupling":[67],"factor":[68],"k<inf":[69],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">T</inf><sup":[71],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[73],"4.5%,":[75],"-3":[78],"dB":[79],"fractional":[80],"bandwidth":[81],"5%":[83],"centered":[84],"at":[85],"with":[88],"transmit":[90],"receive":[92],"sensitivities":[93],"70":[95],"Pa/V":[96],"0.16":[98],"mV/Pa,":[99],"respectively.":[100],"Distance":[101],"measurement":[102],"on":[103],"curved":[105],"surface":[106],"using":[107],"two":[108],"matched":[109],"arrays":[111],"pulse-echo":[113],"proved":[114],"feasibility":[116],"sensitive":[118],"accurate":[120],"demanding":[125],"scenarios.":[126]},"counts_by_year":[{"year":2026,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2024-12-18T00:00:00"}
