{"id":"https://openalex.org/W4405489966","doi":"https://doi.org/10.1109/sensors60989.2024.10784469","title":"A Novel MEMS Sensor with a Floating Cover Plate for Wall-Shear Stress Measurement in the Harsh Supersonic Flow","display_name":"A Novel MEMS Sensor with a Floating Cover Plate for Wall-Shear Stress Measurement in the Harsh Supersonic Flow","publication_year":2024,"publication_date":"2024-10-20","ids":{"openalex":"https://openalex.org/W4405489966","doi":"https://doi.org/10.1109/sensors60989.2024.10784469"},"language":"en","primary_location":{"id":"doi:10.1109/sensors60989.2024.10784469","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10784469","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079473119","display_name":"Yunzhe Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yunzhe Liu","raw_affiliation_strings":["Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072249624","display_name":"Lei Shi","orcid":"https://orcid.org/0000-0002-1170-3911"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lei Shi","raw_affiliation_strings":["Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054356423","display_name":"Y.J. Chen","orcid":"https://orcid.org/0009-0003-4773-4570"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yunjian Chen","raw_affiliation_strings":["Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110002574","display_name":"Shengming Ma","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shengming Ma","raw_affiliation_strings":["Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053096325","display_name":"Kai Cheng","orcid":"https://orcid.org/0000-0003-1243-7093"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kai Cheng","raw_affiliation_strings":["Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001586341","display_name":"Chuqiao Wang","orcid":"https://orcid.org/0009-0000-2632-5899"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chuqiao Wang","raw_affiliation_strings":["Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034859277","display_name":"Xingxu Zhang","orcid":"https://orcid.org/0000-0002-9571-5708"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xingxu Zhang","raw_affiliation_strings":["Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100608965","display_name":"Jianbin Luo","orcid":"https://orcid.org/0000-0002-5132-0712"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Luo","raw_affiliation_strings":["Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100841046","display_name":"Binghe Ma","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Binghe Ma","raw_affiliation_strings":["Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northwestern Polytechnical University,Key Laboratory of MicrolNano Systems for Aerospace: Ministry of Education,Xi'an,People's Republic of China","institution_ids":["https://openalex.org/I17145004"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I17145004"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12007","display_name":"Plasma and Flow Control in Aerodynamics","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12007","display_name":"Plasma and Flow Control in Aerodynamics","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10173","display_name":"Computational Fluid Dynamics and Aerodynamics","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11012","display_name":"Gas Dynamics and Kinetic Theory","score":0.993399977684021,"subfield":{"id":"https://openalex.org/subfields/2604","display_name":"Applied Mathematics"},"field":{"id":"https://openalex.org/fields/26","display_name":"Mathematics"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/supersonic-speed","display_name":"Supersonic speed","score":0.7064788341522217},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6186411380767822},{"id":"https://openalex.org/keywords/shear-stress","display_name":"Shear stress","score":0.612176775932312},{"id":"https://openalex.org/keywords/cover","display_name":"Cover (algebra)","score":0.4699706435203552},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.465840220451355},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.42730265855789185},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.41814783215522766},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.4073387086391449},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.301324725151062},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.29879558086395264},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.25367677211761475},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.20061305165290833},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1601487696170807},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.11703240871429443}],"concepts":[{"id":"https://openalex.org/C205991772","wikidata":"https://www.wikidata.org/wiki/Q221337","display_name":"Supersonic speed","level":2,"score":0.7064788341522217},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6186411380767822},{"id":"https://openalex.org/C21141959","wikidata":"https://www.wikidata.org/wiki/Q657936","display_name":"Shear stress","level":2,"score":0.612176775932312},{"id":"https://openalex.org/C2780428219","wikidata":"https://www.wikidata.org/wiki/Q16952335","display_name":"Cover (algebra)","level":2,"score":0.4699706435203552},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.465840220451355},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.42730265855789185},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.41814783215522766},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.4073387086391449},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.301324725151062},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.29879558086395264},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.25367677211761475},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.20061305165290833},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1601487696170807},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.11703240871429443},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors60989.2024.10784469","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors60989.2024.10784469","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W193977368","https://openalex.org/W1717949432","https://openalex.org/W1988196131","https://openalex.org/W2003258049","https://openalex.org/W2009483389","https://openalex.org/W2036102423","https://openalex.org/W2074840018","https://openalex.org/W2075294946","https://openalex.org/W2077285447","https://openalex.org/W2095511113","https://openalex.org/W2121935325","https://openalex.org/W2130223942","https://openalex.org/W2134444327","https://openalex.org/W2143661747","https://openalex.org/W2159195913","https://openalex.org/W2169938482","https://openalex.org/W2568581032","https://openalex.org/W2783781390","https://openalex.org/W2887641660","https://openalex.org/W2969914754","https://openalex.org/W3110041544"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W1986240054","https://openalex.org/W4402040699","https://openalex.org/W2374073439","https://openalex.org/W2120483398","https://openalex.org/W1586182481","https://openalex.org/W1530711136","https://openalex.org/W4383069121","https://openalex.org/W2901916385","https://openalex.org/W2319192085"],"abstract_inverted_index":{"This":[0],"work":[1],"presents":[2],"a":[3,9,28,98],"novel":[4],"capacitance":[5],"MEMS":[6],"sensor":[7,73,84],"with":[8,153],"floating":[10,45],"cover":[11,46],"plate":[12,47],"for":[13,157],"robust":[14],"wall-shear":[15],"stress":[16,92,125],"measurements":[17],"in":[18,85,145],"the":[19,33,41,44,53,72,76,83,108,120,129,137,141,146,151,154],"harsh":[20],"environment":[21],"of":[22,43,79,82,107,143],"supersonic":[23,101,109],"flow":[24,110,131],"field.":[25],"Based":[26],"on":[27],"Dual":[29],"Silicon-On-Insulator":[30],"(DSOI)":[31],"wafer,":[32],"specific":[34],"microfabrication":[35],"technology":[36],"is":[37,88],"developed":[38,159],"to":[39,69,115],"achieve":[40],"combination":[42],"and":[48,58,113,149],"sensing":[49],"structure,":[50],"which":[51],"features":[52],"accurate":[54],"etching,":[55],"anodic":[56],"bonding,":[57],"backside":[59],"TGVs'":[60],"lead":[61],"wire.":[62],"A":[63],"two-dimensional":[64],"Poiseuille":[65],"channel":[66],"was":[67,117],"established":[68],"carry":[70],"out":[71],"calibration.":[74],"Moreover,":[75],"enormous":[77],"reduction":[78],"damaging":[80],"possibilities":[81],"practical":[86],"applications":[87],"experimentally":[89],"verified.":[90],"Wall-shear":[91],"measuring":[93],"experiments":[94],"were":[95,134],"performed":[96],"at":[97],"Mach":[99],"2.0":[100],"wind-tunnel":[102],"facility.":[103],"The":[104],"entire":[105],"period":[106],"from":[111],"beginning":[112],"stabilization":[114],"end":[116],"observed":[118],"by":[119,128],"proposed":[121],"sensor,":[122],"where":[123],"shear":[124],"fluctuations":[126],"caused":[127],"near-wall":[130],"field":[132],"structure":[133],"acquired.":[135],"Additionally,":[136],"experimental":[138],"results":[139],"matched":[140],"pattern":[142],"changes":[144],"wall":[147],"pressure,":[148],"indicated":[150],"agreement":[152],"model":[155],"predictions":[156],"fully":[158],"boundary":[160],"layers.":[161]},"counts_by_year":[{"year":2026,"cited_by_count":2}],"updated_date":"2026-07-16T13:24:37.021932","created_date":"2025-10-10T00:00:00"}