{"id":"https://openalex.org/W4389077777","doi":"https://doi.org/10.1109/sensors56945.2023.10325255","title":"An Electrostatic Micropositioner with 3 Degrees-of-Freedom","display_name":"An Electrostatic Micropositioner with 3 Degrees-of-Freedom","publication_year":2023,"publication_date":"2023-10-29","ids":{"openalex":"https://openalex.org/W4389077777","doi":"https://doi.org/10.1109/sensors56945.2023.10325255"},"language":"en","primary_location":{"id":"doi:10.1109/sensors56945.2023.10325255","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325255","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5104204245","display_name":"Seyedfakhreddin Koorosh Nabavi","orcid":null},"institutions":[{"id":"https://openalex.org/I9736820","display_name":"\u00c9cole de Technologie Sup\u00e9rieure","ror":"https://ror.org/0020snb74","country_code":"CA","type":"education","lineage":["https://openalex.org/I49663120","https://openalex.org/I9736820"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Seyedfakhreddin Koorosh Nabavi","raw_affiliation_strings":["Ecole de Technologie Supérieure (ETS),Department of Electrical Engineering,Montreal,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ecole de Technologie Supérieure (ETS),Department of Electrical Engineering,Montreal,Canada","institution_ids":["https://openalex.org/I9736820"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016083141","display_name":"Micha\u00ebl M\u00e9nard","orcid":"https://orcid.org/0000-0002-0947-0258"},"institutions":[{"id":"https://openalex.org/I9736820","display_name":"\u00c9cole de Technologie Sup\u00e9rieure","ror":"https://ror.org/0020snb74","country_code":"CA","type":"education","lineage":["https://openalex.org/I49663120","https://openalex.org/I9736820"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Micha\u00ebl M\u00e9nard","raw_affiliation_strings":["Ecole de Technologie Supérieure (ETS),Department of Electrical Engineering,Montreal,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ecole de Technologie Supérieure (ETS),Department of Electrical Engineering,Montreal,Canada","institution_ids":["https://openalex.org/I9736820"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5058919102","display_name":"Fr\u00e9d\u00e9ric Nabki","orcid":"https://orcid.org/0000-0002-2281-7172"},"institutions":[{"id":"https://openalex.org/I9736820","display_name":"\u00c9cole de Technologie Sup\u00e9rieure","ror":"https://ror.org/0020snb74","country_code":"CA","type":"education","lineage":["https://openalex.org/I49663120","https://openalex.org/I9736820"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Frederic Nabki","raw_affiliation_strings":["Ecole de Technologie Supérieure (ETS),Department of Electrical Engineering,Montreal,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ecole de Technologie Supérieure (ETS),Department of Electrical Engineering,Montreal,Canada","institution_ids":["https://openalex.org/I9736820"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I9736820"],"apc_list":null,"apc_paid":null,"fwci":1.0817,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.74554563,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/degrees-of-freedom","display_name":"Degrees of freedom (physics and chemistry)","score":0.8145053386688232},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"Silicon nitride","score":0.6535236835479736},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.6264544725418091},{"id":"https://openalex.org/keywords/work","display_name":"Work (physics)","score":0.5697121620178223},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5024058818817139},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.47927162051200867},{"id":"https://openalex.org/keywords/electrostatics","display_name":"Electrostatics","score":0.4729565978050232},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3909977972507477},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3470062017440796},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.331243097782135},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.24491584300994873},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16276639699935913},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.07260316610336304}],"concepts":[{"id":"https://openalex.org/C208081375","wikidata":"https://www.wikidata.org/wiki/Q274502","display_name":"Degrees of freedom (physics and chemistry)","level":2,"score":0.8145053386688232},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.6535236835479736},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.6264544725418091},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.5697121620178223},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5024058818817139},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.47927162051200867},{"id":"https://openalex.org/C117626034","wikidata":"https://www.wikidata.org/wiki/Q26336","display_name":"Electrostatics","level":2,"score":0.4729565978050232},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3909977972507477},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3470062017440796},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.331243097782135},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.24491584300994873},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16276639699935913},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.07260316610336304}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors56945.2023.10325255","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325255","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"pmh:oai:espace2.etsmtl.ca:28231","is_oa":false,"landing_page_url":"https://espace2.etsmtl.ca/id/eprint/28231/","pdf_url":null,"source":{"id":"https://openalex.org/S4306402392","display_name":"Espace \u00c9TS (ETS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1341030882","host_organization_name":"Educational Testing Service","host_organization_lineage":["https://openalex.org/I1341030882"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Compte rendu de conf\u00e9rence"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/16","display_name":"Peace, Justice and strong institutions","score":0.6600000262260437}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W2043787481","https://openalex.org/W2890083647","https://openalex.org/W2908168600","https://openalex.org/W2974977284","https://openalex.org/W3094912402","https://openalex.org/W3119534853","https://openalex.org/W3194796118","https://openalex.org/W4200227924","https://openalex.org/W4250912386","https://openalex.org/W4286377385","https://openalex.org/W4307353394","https://openalex.org/W4311413352"],"related_works":["https://openalex.org/W2951020105","https://openalex.org/W1995243476","https://openalex.org/W4300013288","https://openalex.org/W2105507641","https://openalex.org/W2164198674","https://openalex.org/W2115734485","https://openalex.org/W3011831393","https://openalex.org/W2518845051","https://openalex.org/W3011339974","https://openalex.org/W4386282660"],"abstract_inverted_index":{"This":[0],"work":[1],"presents":[2],"a":[3,27,50,97],"novel":[4],"micropositioner":[5,17,37,74,105],"with":[6,49],"3":[7],"degrees-of-freedom":[8],"(DOF)":[9],"based":[10],"on":[11],"attractive":[12],"electrostatic":[13],"forces.":[14],"The":[15,33,68],"proposed":[16],"is":[18,38,47],"anchored":[19],"at":[20],"two":[21],"distinct":[22],"points":[23],"and":[24,43,56,83,90],"suspended":[25,66],"through":[26,40],"pair":[28],"of":[29,35,53,78,100],"curved":[30],"shaped":[31],"beams.":[32],"behavior":[34],"the":[36,73,87],"studied":[39],"numerical":[41],"simulations":[42],"experimental":[44,69],"measurements.":[45],"It":[46],"fabricated":[48],"device":[51],"layer":[52],"59":[54],"\u03bcm":[55,85],"Silicon":[57],"Nitride":[58],"(SiN)":[59],"optical":[60],"waveguides":[61],"are":[62],"integrated":[63],"onto":[64],"its":[65],"structure.":[67],"results":[70],"indicate":[71],"that":[72],"can":[75],"provide":[76],"displacements":[77],"\u00b11":[79],"\u03bcm,":[80,82],"1.2":[81],"0.65":[84],"along":[86],"x,":[88],"y,":[89],"z":[91],"axes,":[92],"respectively,":[93],"when":[94],"activated":[95],"by":[96],"DC":[98],"voltage":[99],"70":[101],"V.":[102],"Therefore,":[103],"this":[104],"holds":[106],"great":[107],"promise":[108],"for":[109],"applications":[110],"requiring":[111],"versatile":[112],"positioning":[113],"capability.":[114]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}