{"id":"https://openalex.org/W4389101809","doi":"https://doi.org/10.1109/sensors56945.2023.10325160","title":"DC Bias Effects on Optimizing ScAlN Air-Coupled pMUT Performance Parameters","display_name":"DC Bias Effects on Optimizing ScAlN Air-Coupled pMUT Performance Parameters","publication_year":2023,"publication_date":"2023-10-29","ids":{"openalex":"https://openalex.org/W4389101809","doi":"https://doi.org/10.1109/sensors56945.2023.10325160"},"language":"en","primary_location":{"id":"doi:10.1109/sensors56945.2023.10325160","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325160","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5067792183","display_name":"David Sze Wai Choong","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":true,"raw_author_name":"D. S. W. Choong","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070863857","display_name":"Duan Jian Goh","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"D. J. Goh","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016339528","display_name":"J. Liu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"J. Liu","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081235915","display_name":"Mantalena Sarafianou","orcid":"https://orcid.org/0000-0003-2463-4991"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"M. Sarafianou","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5104194439","display_name":"Srinivas Merugu","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"S. Merugu","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045742288","display_name":"Q. X. Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Q. X. Zhang","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051090571","display_name":"Peter H. K. Chang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"P. Chang","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010515748","display_name":"Alberto Leotti","orcid":null},"institutions":[{"id":"https://openalex.org/I4210133433","display_name":"STMicroelectronics (Singapore)","ror":"https://ror.org/030c4gr60","country_code":"SG","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210133433"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"A. Leotti","raw_affiliation_strings":["STMicroelectronics,Singapore","STMicroelectronics, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Singapore","institution_ids":["https://openalex.org/I4210133433"]},{"raw_affiliation_string":"STMicroelectronics, Singapore","institution_ids":["https://openalex.org/I4210133433"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5093363767","display_name":"Goutham Koppisetti","orcid":null},"institutions":[{"id":"https://openalex.org/I4210133433","display_name":"STMicroelectronics (Singapore)","ror":"https://ror.org/030c4gr60","country_code":"SG","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210133433"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"G. Koppisetti","raw_affiliation_strings":["STMicroelectronics,Singapore","STMicroelectronics, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Singapore","institution_ids":["https://openalex.org/I4210133433"]},{"raw_affiliation_string":"STMicroelectronics, Singapore","institution_ids":["https://openalex.org/I4210133433"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033311281","display_name":"Naadaa Zakiyyan","orcid":"https://orcid.org/0000-0003-0291-8424"},"institutions":[{"id":"https://openalex.org/I4210133433","display_name":"STMicroelectronics (Singapore)","ror":"https://ror.org/030c4gr60","country_code":"SG","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210133433"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"N. Zakiyyan","raw_affiliation_strings":["STMicroelectronics,Singapore","STMicroelectronics, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Singapore","institution_ids":["https://openalex.org/I4210133433"]},{"raw_affiliation_string":"STMicroelectronics, Singapore","institution_ids":["https://openalex.org/I4210133433"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042363758","display_name":"Huamao Lin","orcid":"https://orcid.org/0000-0002-4968-3872"},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"H. Lin","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5093363766","display_name":"C. Bhasetti","orcid":null},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"C. Bhasetti","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030230432","display_name":"Sagnik Ghosh","orcid":"https://orcid.org/0000-0002-5540-7823"},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"S. Ghosh","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036970193","display_name":"P. C. Ramegowda","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"P. C. Ramegowda","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080137851","display_name":"Daniel Ssu-Han Chen","orcid":"https://orcid.org/0000-0003-0806-9638"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"D. S.-H. Chen","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100604069","display_name":"Joshua E.-Y. Lee","orcid":"https://orcid.org/0000-0002-1741-1485"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"J. E.-Y. Lee","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013165475","display_name":"Carlo Prelini","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"C. Prelini","raw_affiliation_strings":["STMicroelectronics,Italy","STMicroelectronics, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109010505","display_name":"D. Giusti","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"D. Giusti","raw_affiliation_strings":["STMicroelectronics,Italy","STMicroelectronics, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042180855","display_name":"Alessandro Stuart Savoia","orcid":"https://orcid.org/0000-0002-1111-7437"},"institutions":[{"id":"https://openalex.org/I119003972","display_name":"Roma Tre University","ror":"https://ror.org/05vf0dg29","country_code":"IT","type":"education","lineage":["https://openalex.org/I119003972"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"A. Savoia","raw_affiliation_strings":["Roma Tre University,Rome,Italy","Roma Tre University, Rome, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Roma Tre University,Rome,Italy","institution_ids":["https://openalex.org/I119003972"]},{"raw_affiliation_string":"Roma Tre University, Rome, Italy","institution_ids":["https://openalex.org/I119003972"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101190408","display_name":"Yul Koh","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Yul. K","raw_affiliation_strings":["Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","Institute of Microelectronics, Agency for Science, Technology and Research, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research,Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]},{"raw_affiliation_string":"Institute of Microelectronics, Agency for Science, Technology and Research, Singapore","institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":20,"corresponding_author_ids":["https://openalex.org/A5067792183"],"corresponding_institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"],"apc_list":null,"apc_paid":null,"fwci":0.8475,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.70237385,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8045388460159302},{"id":"https://openalex.org/keywords/dc-bias","display_name":"DC bias","score":0.7698873281478882},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.5198495984077454},{"id":"https://openalex.org/keywords/biasing","display_name":"Biasing","score":0.5106402039527893},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4934729337692261},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.48539862036705017},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.433045357465744},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.37007156014442444},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3329434096813202},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.22956505417823792},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.14338213205337524},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.11866095662117004},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.09319409728050232},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.08098304271697998}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8045388460159302},{"id":"https://openalex.org/C88682704","wikidata":"https://www.wikidata.org/wiki/Q2907415","display_name":"DC bias","level":3,"score":0.7698873281478882},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5198495984077454},{"id":"https://openalex.org/C20254490","wikidata":"https://www.wikidata.org/wiki/Q719550","display_name":"Biasing","level":3,"score":0.5106402039527893},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4934729337692261},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.48539862036705017},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.433045357465744},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.37007156014442444},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3329434096813202},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.22956505417823792},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.14338213205337524},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11866095662117004},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.09319409728050232},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.08098304271697998},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors56945.2023.10325160","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325160","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"pmh:oai:iris.uniroma3.it:11590/471168","is_oa":false,"landing_page_url":"https://hdl.handle.net/11590/471168","pdf_url":null,"source":{"id":"https://openalex.org/S4377196120","display_name":"Iris (Roma Tre University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I119003972","host_organization_name":"Roma Tre University","host_organization_lineage":["https://openalex.org/I119003972"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8100000023841858,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1987427413","https://openalex.org/W2069119903","https://openalex.org/W2952448251","https://openalex.org/W3110294026","https://openalex.org/W4206005552","https://openalex.org/W4310584539","https://openalex.org/W4310584719","https://openalex.org/W4310585018"],"related_works":["https://openalex.org/W2091320580","https://openalex.org/W2370519257","https://openalex.org/W2347426432","https://openalex.org/W1991908432","https://openalex.org/W2023995735","https://openalex.org/W2004562145","https://openalex.org/W2093429501","https://openalex.org/W2055725026","https://openalex.org/W2073624260","https://openalex.org/W2077986462"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"we":[3],"demonstrate":[4],"that":[5],"the":[6,52,60,96],"performance":[7],"of":[8,63],"ScAIN":[9,26],"pMUTs":[10,27],"can":[11],"be":[12],"enhanced":[13],"by":[14,79],"adjusting":[15],"DC":[16,19,53],"bias":[17,87],"voltages.":[18],"biases":[20],"up":[21],"to":[22,29,43,51,58,89],"80":[23],"V":[24],"on":[25],"contribute":[28],"film":[30],"stress":[31],"alleviation":[32],"and":[33,74,82],"enhance":[34],"pMUT":[35],"performance.":[36],"Laser":[37],"Doppler":[38],"Vibrometry":[39],"characterization":[40],"was":[41],"performed":[42],"evaluate":[44],"an":[45],"improvement":[46],"in":[47,95],"displacement":[48],"transfer":[49],"according":[50],"bias,":[54],"as":[55,57],"well":[56],"investigate":[59],"ferroelectric":[61],"effect":[62],"15%":[64],"scandium-doped":[65],"AIN":[66],"film.":[67],"As":[68],"a":[69,92],"result,":[70],"both":[71],"transmission":[72],"sensitivity":[73,76],"receive":[75],"are":[77],"improved":[78],"11":[80],"%":[81],"50%,":[83],"respectively,":[84],"at":[85],"80V":[86],"compared":[88],"0V.":[90],"Additionally,":[91],"55%":[93],"enlargement":[94],"-3dB":[97],"bandwidth":[98],"(BW)":[99],"has":[100],"been":[101],"achieved.":[102]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":3}],"updated_date":"2026-05-08T15:41:06.802602","created_date":"2023-11-29T00:00:00"}