{"id":"https://openalex.org/W4389077289","doi":"https://doi.org/10.1109/sensors56945.2023.10325141","title":"A Wide Temperature Range Weakly Coupled Resonant Micro-pressure Sensor","display_name":"A Wide Temperature Range Weakly Coupled Resonant Micro-pressure Sensor","publication_year":2023,"publication_date":"2023-10-29","ids":{"openalex":"https://openalex.org/W4389077289","doi":"https://doi.org/10.1109/sensors56945.2023.10325141"},"language":"en","primary_location":{"id":"doi:10.1109/sensors56945.2023.10325141","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325141","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5048249544","display_name":"Jiaxin Qin","orcid":null},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jiaxin Qin","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049215297","display_name":"Deyong Chen","orcid":"https://orcid.org/0000-0001-5856-3592"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Deyong Chen","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101115987","display_name":"Bo Xie","orcid":null},"institutions":[{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bo Xie","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109218676","display_name":"Junbo Wang","orcid":"https://orcid.org/0000-0002-6032-1274"},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Junbo Wang","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050851728","display_name":"Yulan Lu","orcid":"https://orcid.org/0000-0003-3826-5998"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulan Lu","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100412555","display_name":"Bowen Wang","orcid":"https://orcid.org/0000-0003-0297-9008"},"institutions":[{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bowen Wang","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060148048","display_name":"Zhaoyang Zhai","orcid":"https://orcid.org/0000-0001-8170-3776"},"institutions":[{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhaoyang Zhai","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100326500","display_name":"Jian Chen","orcid":"https://orcid.org/0000-0003-4612-3279"},"institutions":[{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Chen","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing, China","institution_ids":["https://openalex.org/I4210165038"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100341082","display_name":"Nan Li","orcid":"https://orcid.org/0000-0002-8248-9027"},"institutions":[{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Nan Li","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5012834503","display_name":"Xiaoye Huo","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"funder","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210137199","display_name":"Aerospace Information Research Institute","ror":"https://ror.org/0419fj215","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210137199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaoye Huo","raw_affiliation_strings":["Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing,China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Chinese Academy of Sciences, Aerospace Information Research Institute, Beijing, China","institution_ids":["https://openalex.org/I4210137199","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5048249544"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210137199","https://openalex.org/I4210165038"],"apc_list":null,"apc_paid":null,"fwci":0.6694,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.69660256,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.8210935592651367},{"id":"https://openalex.org/keywords/hysteresis","display_name":"Hysteresis","score":0.6578842997550964},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6438925266265869},{"id":"https://openalex.org/keywords/amplitude","display_name":"Amplitude","score":0.5126177668571472},{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.5120065808296204},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.4955397844314575},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.49513259530067444},{"id":"https://openalex.org/keywords/atmospheric-temperature-range","display_name":"Atmospheric temperature range","score":0.48775964975357056},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.46434909105300903},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.45433101058006287},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.45321813225746155},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.45046183466911316},{"id":"https://openalex.org/keywords/pressure-measurement","display_name":"Pressure measurement","score":0.42820703983306885},{"id":"https://openalex.org/keywords/range","display_name":"Range (aeronautics)","score":0.4260501265525818},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.41563546657562256},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.34073132276535034},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2959153652191162},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2751951813697815},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.17700240015983582},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.12448155879974365},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.12017574906349182},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.10750880837440491},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.08176520466804504}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8210935592651367},{"id":"https://openalex.org/C123299182","wikidata":"https://www.wikidata.org/wiki/Q190837","display_name":"Hysteresis","level":2,"score":0.6578842997550964},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6438925266265869},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.5126177668571472},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.5120065808296204},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.4955397844314575},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.49513259530067444},{"id":"https://openalex.org/C39353612","wikidata":"https://www.wikidata.org/wiki/Q5283759","display_name":"Atmospheric temperature range","level":2,"score":0.48775964975357056},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.46434909105300903},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.45433101058006287},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.45321813225746155},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.45046183466911316},{"id":"https://openalex.org/C80264047","wikidata":"https://www.wikidata.org/wiki/Q7424019","display_name":"Pressure measurement","level":2,"score":0.42820703983306885},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.4260501265525818},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.41563546657562256},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.34073132276535034},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2959153652191162},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2751951813697815},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.17700240015983582},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.12448155879974365},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.12017574906349182},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.10750880837440491},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08176520466804504},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors56945.2023.10325141","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325141","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8199999928474426,"id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G7185300497","display_name":null,"funder_award_id":"2022YFB3204900","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1933248899","https://openalex.org/W2025582238","https://openalex.org/W2119159136","https://openalex.org/W2292123982","https://openalex.org/W2474810046","https://openalex.org/W2804871684","https://openalex.org/W2806921638","https://openalex.org/W2907998283","https://openalex.org/W2985939979","https://openalex.org/W3179995569","https://openalex.org/W3183367429","https://openalex.org/W4212984119","https://openalex.org/W4226168007","https://openalex.org/W4285143433","https://openalex.org/W6769407848"],"related_works":["https://openalex.org/W1973127455","https://openalex.org/W4242883309","https://openalex.org/W4206804491","https://openalex.org/W2984836626","https://openalex.org/W3022118013","https://openalex.org/W2534267407","https://openalex.org/W2269051159","https://openalex.org/W818971998","https://openalex.org/W178109321","https://openalex.org/W2093962749"],"abstract_inverted_index":{"This":[0],"paper":[1],"for":[2],"the":[3,7,56,62,77,86,97,105,112,122,141],"first":[4],"time":[5],"reports":[6],"wide":[8],"temperature":[9,53],"range":[10,114],"characteristics":[11],"of":[12,59,72,115],"a":[13,46,100],"two-degree-of-freedom":[14],"(2-DoF)":[15],"weakly":[16,43],"coupled":[17,44,63,87],"micro-pressure":[18],"sensor":[19,98,109],"(100~1000Pa),":[20],"and":[21,40,52,121,132],"it":[22],"was":[23],"vacuum":[24],"packaged":[25],"by":[26,45],"anodic":[27],"bonding.":[28],"Two":[29],"fixed-fixed":[30],"beam":[31],"resonator":[32,88],"gauges":[33],"are":[34,42],"designed":[35],"to":[36],"sense":[37],"pressure":[38,51],"differentially":[39],"they":[41],"slender":[47],"mechanical":[48],"beam.":[49],"Both":[50],"can":[54],"change":[55],"effective":[57],"stiffness":[58],"resonators,":[60],"thus":[61],"resonators":[64],"system":[65],"will":[66,81],"incur":[67],"mode":[68],"localization":[69],"phenomenon.":[70],"Because":[71],"temperature-induced":[73],"axial":[74],"package":[75],"stress,":[76],"sensor's":[78],"operating":[79],"point":[80],"vary":[82],"with":[83],"temperature,":[84],"so":[85],"amplitude":[89],"exhibits":[90],"turnover":[91],"points.":[92],"The":[93,117],"results":[94],"show":[95],"that":[96],"has":[99],"higher":[101],"sensitivity":[102],"(84800ppm)":[103],"than":[104],"conventional":[106],"frequency":[107],"output":[108],"(1443.9ppm)":[110],"within":[111,140],"linear":[113,142],"-20~60\u00b0C.":[116],"resolution":[118],"reaches":[119],"1Pa":[120],"hysteresis":[123],"error":[124],"is":[125],"as":[126,128],"low":[127],"5%":[129],"full":[130,135],"scale":[131,136],"even":[133],"0.2%":[134],"at":[137],"some":[138],"temperatures":[139],"range.":[143]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}