{"id":"https://openalex.org/W4389101761","doi":"https://doi.org/10.1109/sensors56945.2023.10325133","title":"High-Density Integration of Multiple Independent Temperature-Controlled Micro Hotplates for MEMS Gas Sensors","display_name":"High-Density Integration of Multiple Independent Temperature-Controlled Micro Hotplates for MEMS Gas Sensors","publication_year":2023,"publication_date":"2023-10-29","ids":{"openalex":"https://openalex.org/W4389101761","doi":"https://doi.org/10.1109/sensors56945.2023.10325133"},"language":"en","primary_location":{"id":"doi:10.1109/sensors56945.2023.10325133","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325133","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100459127","display_name":"Zheng Zhang","orcid":"https://orcid.org/0000-0002-5561-7601"},"institutions":[{"id":"https://openalex.org/I4210166468","display_name":"Beijing Aerospace Flight Control Center","ror":"https://ror.org/007a14354","country_code":"CN","type":"other","lineage":["https://openalex.org/I4210166468"]},{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zheng Zhang","raw_affiliation_strings":["Beijing Institute of Aerospace Control Devices,Beijing,China","Huazhong University of Science and Technology,School of Integrated Circuits,Wuhan,China","School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beijing Institute of Aerospace Control Devices,Beijing,China","institution_ids":["https://openalex.org/I4210166468"]},{"raw_affiliation_string":"Huazhong University of Science and Technology,School of Integrated Circuits,Wuhan,China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043641639","display_name":"Liyang Luo","orcid":"https://orcid.org/0000-0002-8202-2179"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liyang Luo","raw_affiliation_strings":["Huazhong University of Science and Technology,School of Integrated Circuits,Wuhan,China","School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Huazhong University of Science and Technology,School of Integrated Circuits,Wuhan,China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101469124","display_name":"Yuanyuan Luo","orcid":"https://orcid.org/0000-0003-4253-3596"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210154057","display_name":"Institute of Solid State Physics","ror":"https://ror.org/04j3eks61","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I2802624667","https://openalex.org/I4210154057"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuanyuan Luo","raw_affiliation_strings":["Institute of Solid State Physics, HFIPS, Chinese Academy of Sciences,Key Laboratory of Materials Physics,Hefei,China","Key Laboratory of Materials Physics, Institute of Solid State Physics, HFIPS, Chinese Academy of Sciences, Hefei, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Solid State Physics, HFIPS, Chinese Academy of Sciences,Key Laboratory of Materials Physics,Hefei,China","institution_ids":["https://openalex.org/I4210154057","https://openalex.org/I19820366"]},{"raw_affiliation_string":"Key Laboratory of Materials Physics, Institute of Solid State Physics, HFIPS, Chinese Academy of Sciences, Hefei, China","institution_ids":["https://openalex.org/I4210154057","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056332750","display_name":"Zhaohua Zhang","orcid":"https://orcid.org/0000-0002-3141-3268"},"institutions":[{"id":"https://openalex.org/I4210166468","display_name":"Beijing Aerospace Flight Control Center","ror":"https://ror.org/007a14354","country_code":"CN","type":"other","lineage":["https://openalex.org/I4210166468"]},{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhaohua Zhang","raw_affiliation_strings":["Beijing Institute of Aerospace Control Devices,Beijing,China","Huazhong University of Science and Technology,School of Integrated Circuits,Wuhan,China","Beijing Institute of Aerospace Control Devices, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beijing Institute of Aerospace Control Devices,Beijing,China","institution_ids":["https://openalex.org/I4210166468"]},{"raw_affiliation_string":"Huazhong University of Science and Technology,School of Integrated Circuits,Wuhan,China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"Beijing Institute of Aerospace Control Devices, Beijing, China","institution_ids":["https://openalex.org/I4210166468"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079694966","display_name":"Chaoyang Xing","orcid":"https://orcid.org/0000-0002-7113-671X"},"institutions":[{"id":"https://openalex.org/I4210166468","display_name":"Beijing Aerospace Flight Control Center","ror":"https://ror.org/007a14354","country_code":"CN","type":"other","lineage":["https://openalex.org/I4210166468"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chaoyang Xing","raw_affiliation_strings":["Beijing Institute of Aerospace Control Devices,Beijing,China","Beijing Institute of Aerospace Control Devices, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Beijing Institute of Aerospace Control Devices,Beijing,China","institution_ids":["https://openalex.org/I4210166468"]},{"raw_affiliation_string":"Beijing Institute of Aerospace Control Devices, Beijing, China","institution_ids":["https://openalex.org/I4210166468"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5073428812","display_name":"Guotao Duan","orcid":"https://orcid.org/0000-0001-7845-1643"},"institutions":[{"id":"https://openalex.org/I4210138186","display_name":"Wuhan National Laboratory for Optoelectronics","ror":"https://ror.org/03c9ncn37","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210138186"]},{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guotao Duan","raw_affiliation_strings":["Huazhong University of Science and Technology,School of Integrated Circuits,Wuhan,China","School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, China","Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Huazhong University of Science and Technology,School of Integrated Circuits,Wuhan,China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I4210138186","https://openalex.org/I47720641"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2454,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.54718721,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8428704738616943},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7199615836143494},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.6755810976028442},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.6548147201538086},{"id":"https://openalex.org/keywords/crosstalk","display_name":"Crosstalk","score":0.5279974937438965},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.52422034740448},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5234443545341492},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.4745907485485077},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4581983685493469},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3293558955192566},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1645829677581787},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.15794754028320312},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.076474130153656}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8428704738616943},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7199615836143494},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.6755810976028442},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.6548147201538086},{"id":"https://openalex.org/C169822122","wikidata":"https://www.wikidata.org/wiki/Q230187","display_name":"Crosstalk","level":2,"score":0.5279974937438965},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.52422034740448},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5234443545341492},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.4745907485485077},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4581983685493469},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3293558955192566},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1645829677581787},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.15794754028320312},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.076474130153656},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors56945.2023.10325133","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325133","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.7799999713897705}],"awards":[{"id":"https://openalex.org/G6873756577","display_name":null,"funder_award_id":"2020YFB2008700","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W2067428324","https://openalex.org/W2165702317","https://openalex.org/W2915106696","https://openalex.org/W2964813318","https://openalex.org/W2966472763","https://openalex.org/W3111391551","https://openalex.org/W3136101292","https://openalex.org/W3156920854","https://openalex.org/W4207039192"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W2167472940","https://openalex.org/W1763916368","https://openalex.org/W2391127530","https://openalex.org/W2622826586","https://openalex.org/W2393343784","https://openalex.org/W1974353171","https://openalex.org/W2223459904","https://openalex.org/W2002592603"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"a":[3,16,28,70],"novel":[4],"micro":[5,13,43,104],"hotplate":[6],"array":[7],"(MHA)":[8],"structure":[9,96],"that":[10,51],"integrates":[11],"three":[12],"hotplates":[14,105],"within":[15],"single":[17],"suspension":[18],"area":[19],"was":[20,33,45,73,86],"designed":[21],"and":[22,47,60,79,106],"fabricated.":[23],"To":[24],"optimize":[25],"the":[26,42,48,77,80,83,98,120],"performance,":[27],"finite":[29],"element":[30],"analysis":[31],"model":[32,52,72],"built":[34],"to":[35,75,88,115],"perform":[36],"thermal-electro-mechanical":[37],"simulation.":[38],"The":[39,93],"thickness":[40,56],"of":[41,82,101],"heaters":[44],"regulated,":[46],"results":[49],"showed":[50],"with":[53],"thinner":[54,63],"electrode":[55,64,85],"had":[57],"lower":[58],"displacement":[59],"stress.":[61],"However,":[62],"introduces":[65],"prominent":[66],"electrical":[67],"crosstalk,":[68],"so":[69],"circuit":[71],"established":[74],"analyze":[76],"cause":[78],"width":[81],"ground":[84],"regulated":[87],"mitigate":[89],"potential":[90],"crosstalk":[91],"issues.":[92],"optimized":[94],"MHA":[95],"triples":[97],"integration":[99],"density":[100],"existing":[102],"silicon-based":[103],"enables":[107],"multiple":[108],"independent":[109],"temperature":[110],"controls,":[111],"which":[112],"is":[113],"expected":[114],"be":[116],"widely":[117],"used":[118],"in":[119,123],"future,":[121],"especially":[122],"micro-electro-mechanical":[124],"systems":[125],"(MEMS)":[126],"gas":[127],"sensor":[128],"arrays.":[129]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}