{"id":"https://openalex.org/W4389077633","doi":"https://doi.org/10.1109/sensors56945.2023.10325115","title":"A 36% Scandium Aluminum Nitride pMUT - FBAR Dual Mode Pressure Sensor for IoT Applications","display_name":"A 36% Scandium Aluminum Nitride pMUT - FBAR Dual Mode Pressure Sensor for IoT Applications","publication_year":2023,"publication_date":"2023-10-29","ids":{"openalex":"https://openalex.org/W4389077633","doi":"https://doi.org/10.1109/sensors56945.2023.10325115"},"language":"en","primary_location":{"id":"doi:10.1109/sensors56945.2023.10325115","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325115","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5093357969","display_name":"Walter Gubinelli","orcid":null},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]},{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT","US"],"is_corresponding":false,"raw_author_name":"Walter Gubinelli","raw_affiliation_strings":["Northeastern University,SMART Center,Boston,MA,USA","Politecnico di Milano, Milan, Italy","SMART Center, Northeastern University, Boston, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University,SMART Center,Boston,MA,USA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"Politecnico di Milano, Milan, Italy","institution_ids":["https://openalex.org/I93860229"]},{"raw_affiliation_string":"SMART Center, Northeastern University, Boston, MA, USA","institution_ids":["https://openalex.org/I12912129"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037886187","display_name":"Luca Colombo","orcid":"https://orcid.org/0000-0002-2069-4949"},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Luca Colombo","raw_affiliation_strings":["Northeastern University,SMART Center,Boston,MA,USA","SMART Center, Northeastern University, Boston, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University,SMART Center,Boston,MA,USA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"SMART Center, Northeastern University, Boston, MA, USA","institution_ids":["https://openalex.org/I12912129"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034514092","display_name":"Bernard Herrera Soukup","orcid":null},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]},{"id":"https://openalex.org/I4210087596","display_name":"Qualcomm (United States)","ror":"https://ror.org/002zrf773","country_code":"US","type":"company","lineage":["https://openalex.org/I4210087596"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Bernard Herrera Soukup","raw_affiliation_strings":["Northeastern University,SMART Center,Boston,MA,USA","SMART Center, Northeastern University, Boston, MA, USA","Qualcomm Technologies Inc., Santa Clara, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University,SMART Center,Boston,MA,USA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"SMART Center, Northeastern University, Boston, MA, USA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"Qualcomm Technologies Inc., Santa Clara, CA, USA","institution_ids":["https://openalex.org/I4210087596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019580613","display_name":"Pietro Simeoni","orcid":"https://orcid.org/0000-0003-3612-3646"},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Pietro Simeoni","raw_affiliation_strings":["Northeastern University,SMART Center,Boston,MA,USA","SMART Center, Northeastern University, Boston, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University,SMART Center,Boston,MA,USA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"SMART Center, Northeastern University, Boston, MA, USA","institution_ids":["https://openalex.org/I12912129"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110241974","display_name":"B.A. Kopp","orcid":null},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Blair Kopp","raw_affiliation_strings":["Northeastern University,SMART Center,Boston,MA,USA","SMART Center, Northeastern University, Boston, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University,SMART Center,Boston,MA,USA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"SMART Center, Northeastern University, Boston, MA, USA","institution_ids":["https://openalex.org/I12912129"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078762562","display_name":"Alberto Corigliano","orcid":"https://orcid.org/0000-0002-1285-2724"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Alberto Corigliano","raw_affiliation_strings":["Politecnico di Milano,Milan,Italy","Politecnico di Milano, Milan, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Politecnico di Milano,Milan,Italy","institution_ids":["https://openalex.org/I93860229"]},{"raw_affiliation_string":"Politecnico di Milano, Milan, Italy","institution_ids":["https://openalex.org/I93860229"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046866028","display_name":"Cristian Cassella","orcid":"https://orcid.org/0000-0001-6966-7338"},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Cristian Cassella","raw_affiliation_strings":["Northeastern University,SMART Center,Boston,MA,USA","SMART Center, Northeastern University, Boston, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University,SMART Center,Boston,MA,USA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"SMART Center, Northeastern University, Boston, MA, USA","institution_ids":["https://openalex.org/I12912129"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5077133118","display_name":"Matteo Rinaldi","orcid":"https://orcid.org/0000-0003-0858-0786"},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Matteo Rinaldi","raw_affiliation_strings":["Northeastern University,SMART Center,Boston,MA,USA","SMART Center, Northeastern University, Boston, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University,SMART Center,Boston,MA,USA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"SMART Center, Northeastern University, Boston, MA, USA","institution_ids":["https://openalex.org/I12912129"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"01","last_page":"04"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.629515528678894},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.5991883277893066},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4678279757499695},{"id":"https://openalex.org/keywords/dual-mode","display_name":"Dual mode","score":0.4398307800292969},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.43891459703445435},{"id":"https://openalex.org/keywords/bar","display_name":"Bar (unit)","score":0.43351536989212036},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.4331570565700531},{"id":"https://openalex.org/keywords/scandium","display_name":"Scandium","score":0.4209935665130615},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.4185534715652466},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.36839616298675537},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.26264214515686035},{"id":"https://openalex.org/keywords/atomic-physics","display_name":"Atomic physics","score":0.18600726127624512},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.1808038353919983},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.15114066004753113},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.10973480343818665}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.629515528678894},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.5991883277893066},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4678279757499695},{"id":"https://openalex.org/C3019325349","wikidata":"https://www.wikidata.org/wiki/Q3874753","display_name":"Dual mode","level":2,"score":0.4398307800292969},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.43891459703445435},{"id":"https://openalex.org/C188721877","wikidata":"https://www.wikidata.org/wiki/Q103510","display_name":"Bar (unit)","level":2,"score":0.43351536989212036},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.4331570565700531},{"id":"https://openalex.org/C551831248","wikidata":"https://www.wikidata.org/wiki/Q713","display_name":"Scandium","level":2,"score":0.4209935665130615},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.4185534715652466},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.36839616298675537},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.26264214515686035},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.18600726127624512},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.1808038353919983},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.15114066004753113},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.10973480343818665},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors56945.2023.10325115","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325115","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8299999833106995,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W410782996","https://openalex.org/W1481967161","https://openalex.org/W1987427413","https://openalex.org/W2048346465","https://openalex.org/W2123033018","https://openalex.org/W2743764621","https://openalex.org/W2769314031","https://openalex.org/W2945477047","https://openalex.org/W3005042732","https://openalex.org/W3082169442","https://openalex.org/W3110294026","https://openalex.org/W3134274385","https://openalex.org/W3188156395","https://openalex.org/W4308556063","https://openalex.org/W4312601914","https://openalex.org/W4317794272","https://openalex.org/W4321598782","https://openalex.org/W4322731823","https://openalex.org/W4376602881","https://openalex.org/W4385067568"],"related_works":["https://openalex.org/W2084461308","https://openalex.org/W2386048195","https://openalex.org/W2889893127","https://openalex.org/W2012835907","https://openalex.org/W3191325955","https://openalex.org/W589878063","https://openalex.org/W2010624896","https://openalex.org/W3044936148","https://openalex.org/W2257896819","https://openalex.org/W2038488330"],"abstract_inverted_index":{"This":[0,122],"work":[1],"presents":[2],"a":[3,11,52,82,105,127],"novel":[4],"dual-mode":[5],"frequency-based":[6],"pressure":[7,66,128],"sensor,":[8],"which":[9],"implements":[10],"Piezoelectric":[12],"Mi-cromachined":[13],"Ultrasonic":[14],"Transducer":[15],"(pMUT)":[16],"operating":[17],"in":[18,27,84,93,158],"the":[19,28,70,76,85,89,94,97,139,148,151,159,162],"fundamental":[20],"flexural":[21,90],"mode":[22,34,91,154],"around":[23,35],"1.4":[24,111],"MHz":[25,112,116],"and":[26,65,92,114,164,175],"S":[29,98],"<inf":[30,99],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[31,100,179],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">1</inf>":[32,101],"bulk":[33,102,153],"4.2":[36],"GHz.":[37],"The":[38,57,79],"sensor's":[39],"active":[40],"layer":[41],"is":[42,60,124,142,155],"fabricated":[43],"with":[44,51,104],"Scandium-doped":[45],"Aluminum":[46],"Nitride":[47],"(ScAIN)":[48],"thin":[49],"film,":[50],"doping":[53],"level":[54],"of":[55,88,96,107,150,161,169],"36%.":[56],"device's":[58],"behavior":[59],"monitored":[61],"under":[62],"different":[63],"temperature":[64,140,167],"conditions":[67],"by":[68],"observing":[69],"resonance":[71,86],"positions":[72],"when":[73,138],"excited":[74],"at":[75,110,117],"respective":[77],"modes.":[78],"sensor":[80],"displays":[81],"change":[83],"frequency":[87,170],"anti-resonance":[95,149],"mode,":[103],"shift":[106,123],"3.5":[108],"kHz":[109],"(0.25%)":[113],"8":[115],"3.6":[118],"GHz":[119],"(0.22%),":[120],"respectively.":[121,182],"observed":[125],"over":[126],"range":[129,141],"spanning":[130],"from":[131,144],"1":[132,135],"mbar":[133],"to":[134,146],"bar.":[136],"Furthermore,":[137],"varied":[143],"20\u00b0C":[145],"200\u00b0C,":[147],"S1":[152],"monitored,":[156],"resulting":[157],"estimation":[160],"first":[163],"second":[165],"order":[166],"coefficients":[168],"(TCFs)":[171],"as":[172],"-40":[173],"ppm/K":[174],"-110":[176],"ppb/K":[177],"<sup":[178],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[180],",":[181]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2026-07-25T09:21:30.201066","created_date":"2025-10-10T00:00:00"}