{"id":"https://openalex.org/W4389077596","doi":"https://doi.org/10.1109/sensors56945.2023.10325079","title":"Design of a Novel Tridimensional Silicon MEMS ThermoElectric Generator","display_name":"Design of a Novel Tridimensional Silicon MEMS ThermoElectric Generator","publication_year":2023,"publication_date":"2023-10-29","ids":{"openalex":"https://openalex.org/W4389077596","doi":"https://doi.org/10.1109/sensors56945.2023.10325079"},"language":"en","primary_location":{"id":"doi:10.1109/sensors56945.2023.10325079","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325079","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5064890004","display_name":"Alessandro Nastro","orcid":"https://orcid.org/0000-0002-2387-0397"},"institutions":[{"id":"https://openalex.org/I79940851","display_name":"University of Brescia","ror":"https://ror.org/02q2d2610","country_code":"IT","type":"education","lineage":["https://openalex.org/I79940851"]}],"countries":["IT"],"is_corresponding":true,"raw_author_name":"A. Nastro","raw_affiliation_strings":["University of Brescia,Department of Information Engineering,Brescia,Italy,25123"],"affiliations":[{"raw_affiliation_string":"University of Brescia,Department of Information Engineering,Brescia,Italy,25123","institution_ids":["https://openalex.org/I79940851"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037493735","display_name":"Marco Ba\u00f9","orcid":"https://orcid.org/0000-0002-5696-4138"},"institutions":[{"id":"https://openalex.org/I79940851","display_name":"University of Brescia","ror":"https://ror.org/02q2d2610","country_code":"IT","type":"education","lineage":["https://openalex.org/I79940851"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"M. Ba\u00fa","raw_affiliation_strings":["University of Brescia,Department of Information Engineering,Brescia,Italy,25123"],"affiliations":[{"raw_affiliation_string":"University of Brescia,Department of Information Engineering,Brescia,Italy,25123","institution_ids":["https://openalex.org/I79940851"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100764572","display_name":"Marco Ferrari","orcid":"https://orcid.org/0000-0002-3310-7715"},"institutions":[{"id":"https://openalex.org/I79940851","display_name":"University of Brescia","ror":"https://ror.org/02q2d2610","country_code":"IT","type":"education","lineage":["https://openalex.org/I79940851"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"M. Ferrari","raw_affiliation_strings":["University of Brescia,Department of Information Engineering,Brescia,Italy,25123"],"affiliations":[{"raw_affiliation_string":"University of Brescia,Department of Information Engineering,Brescia,Italy,25123","institution_ids":["https://openalex.org/I79940851"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084632084","display_name":"F. Foncellino","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"F. Foncellino","raw_affiliation_strings":["STMicroelectronics,Milan,Italy","STMicroelectronics, Milan, Italy"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Milan,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Milan, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014648325","display_name":"Flavio Francesco Villa","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"F. F. Villa","raw_affiliation_strings":["STMicroelectronics,Milan,Italy","STMicroelectronics, Milan, Italy"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Milan,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Milan, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018816558","display_name":"Federico Cuneo","orcid":"https://orcid.org/0000-0001-8242-4533"},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"F. Cuneo","raw_affiliation_strings":["STMicroelectronics,Milan,Italy","STMicroelectronics, Milan, Italy"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Milan,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Milan, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009075381","display_name":"Fritjof Capra","orcid":null},"institutions":[{"id":"https://openalex.org/I4210154781","display_name":"STMicroelectronics (Italy)","ror":"https://ror.org/053bqv655","country_code":"IT","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210154781"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"F. Capra","raw_affiliation_strings":["STMicroelectronics,Milan,Italy","STMicroelectronics, Milan, Italy"],"affiliations":[{"raw_affiliation_string":"STMicroelectronics,Milan,Italy","institution_ids":["https://openalex.org/I4210154781"]},{"raw_affiliation_string":"STMicroelectronics, Milan, Italy","institution_ids":["https://openalex.org/I4210154781"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5003940396","display_name":"Vittorio Ferrari","orcid":"https://orcid.org/0000-0002-3949-9975"},"institutions":[{"id":"https://openalex.org/I79940851","display_name":"University of Brescia","ror":"https://ror.org/02q2d2610","country_code":"IT","type":"education","lineage":["https://openalex.org/I79940851"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"V. Ferrari","raw_affiliation_strings":["University of Brescia,Department of Information Engineering,Brescia,Italy,25123"],"affiliations":[{"raw_affiliation_string":"University of Brescia,Department of Information Engineering,Brescia,Italy,25123","institution_ids":["https://openalex.org/I79940851"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5064890004"],"corresponding_institution_ids":["https://openalex.org/I79940851"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.11231314,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"01","last_page":"04"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermoelectric-effect","display_name":"Thermoelectric effect","score":0.6843091249465942},{"id":"https://openalex.org/keywords/thermocouple","display_name":"Thermocouple","score":0.6433938145637512},{"id":"https://openalex.org/keywords/generator","display_name":"Generator (circuit theory)","score":0.6312846541404724},{"id":"https://openalex.org/keywords/thermoelectric-generator","display_name":"Thermoelectric generator","score":0.6155849099159241},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4995155334472656},{"id":"https://openalex.org/keywords/thermal-conductivity","display_name":"Thermal conductivity","score":0.4834786057472229},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.4483621120452881},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.44637051224708557},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4040919542312622},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.34665364027023315},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.335702121257782},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.29093050956726074},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.26903802156448364},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.10728776454925537},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09977662563323975}],"concepts":[{"id":"https://openalex.org/C63024428","wikidata":"https://www.wikidata.org/wiki/Q552456","display_name":"Thermoelectric effect","level":2,"score":0.6843091249465942},{"id":"https://openalex.org/C168068576","wikidata":"https://www.wikidata.org/wiki/Q190241","display_name":"Thermocouple","level":2,"score":0.6433938145637512},{"id":"https://openalex.org/C2780992000","wikidata":"https://www.wikidata.org/wiki/Q17016113","display_name":"Generator (circuit theory)","level":3,"score":0.6312846541404724},{"id":"https://openalex.org/C117127486","wikidata":"https://www.wikidata.org/wiki/Q11569191","display_name":"Thermoelectric generator","level":3,"score":0.6155849099159241},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4995155334472656},{"id":"https://openalex.org/C97346530","wikidata":"https://www.wikidata.org/wiki/Q487005","display_name":"Thermal conductivity","level":2,"score":0.4834786057472229},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.4483621120452881},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.44637051224708557},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4040919542312622},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.34665364027023315},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.335702121257782},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.29093050956726074},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.26903802156448364},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.10728776454925537},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09977662563323975},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors56945.2023.10325079","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10325079","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"pmh:oai:iris.unibs.it:11379/596970","is_oa":false,"landing_page_url":"https://hdl.handle.net/11379/596970","pdf_url":null,"source":{"id":"https://openalex.org/S4306400804","display_name":"Institutional Research Information System (Universit\u00e0 degli Studi di Brescia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I66752286","host_organization_name":"University of Milano-Bicocca","host_organization_lineage":["https://openalex.org/I66752286"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/conferenceObject"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.6700000166893005,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W63745381","https://openalex.org/W1907979007","https://openalex.org/W1996182822","https://openalex.org/W2032229565","https://openalex.org/W2051161857","https://openalex.org/W2113496317","https://openalex.org/W2128401319","https://openalex.org/W2152131785","https://openalex.org/W2239543649","https://openalex.org/W2600896115","https://openalex.org/W2897958118","https://openalex.org/W2987987341","https://openalex.org/W3010892130","https://openalex.org/W3047153595","https://openalex.org/W3127039666","https://openalex.org/W3186533840","https://openalex.org/W4206768870","https://openalex.org/W4290755546","https://openalex.org/W4327694238","https://openalex.org/W4362682603"],"related_works":["https://openalex.org/W2966484342","https://openalex.org/W1992175215","https://openalex.org/W2115481290","https://openalex.org/W2991058684","https://openalex.org/W2808223191","https://openalex.org/W2056074296","https://openalex.org/W2153807800","https://openalex.org/W2890326640","https://openalex.org/W2115585447","https://openalex.org/W2170581641"],"abstract_inverted_index":{"A":[0],"novel":[1],"design":[2],"of":[3,37,41,70,107,122],"a":[4,10,50,62,114],"MEMS":[5],"ThermoElectric":[6],"Generator":[7],"(TEG)":[8],"with":[9,14],"tridimensional":[11],"structure":[12,96],"manufactured":[13],"standard":[15],"silicon-based":[16],"processes":[17],"is":[18,142],"presented.":[19],"The":[20,83,138],"proposed":[21],"5":[22,25],"mm":[23,26],"\u00d7":[24],"TEG":[27,140],"embeds":[28],"221":[29],"cells":[30],"connected":[31],"electrically":[32],"in":[33,75,126],"parallel":[34],"each":[35],"composed":[36],"the":[38,81,153,159,163],"electrical":[39],"series":[40],"15":[42],"pn-polysilicon-based":[43],"thermocouples.":[44],"Heat":[45],"can":[46],"be":[47],"transferred":[48],"from":[49],"hot":[51],"side":[52,64],"at":[53,65],"temperature":[54,66,115,160],"<tex":[55,104,117,127],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[56,59,105,118,128],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$T$</tex>":[57],"<inf":[58],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">H</inf>":[60],"to":[61,144,152],"cold":[63],"Tc":[67],"by":[68],"means":[69],"high-thermal-conductivity":[71],"copper":[72],"paths":[73],"immersed":[74],"low-thermal-conductivity":[76],"resin":[77],"mold":[78],"that":[79],"composes":[80],"package.":[82],"working":[84],"principle":[85],"has":[86,97,110],"been":[87,98,111],"validated":[88],"through":[89],"3D":[90],"finite-element":[91],"simulations.":[92],"An":[93,101],"in-process":[94],"test":[95],"experimentally":[99],"tested.":[100],"output":[102],"voltage":[103],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$\\boldsymbol{V}_{\\mathbf{TEG}}$</tex>":[106],"-3.3":[108],"mV":[109],"measured":[112],"for":[113],"difference":[116,161],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$\\Delta":[119],"\\mathbf{T}":[120],"=T_{\\mathbf{H}}-T\\mathbf{c}$</tex>":[121],"6":[123],"\u00b0C,":[124],"resulting":[125],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">$V_{\\mathbf{TEG}}":[129],"/":[130],"\\Delta":[131],"\\mathrm{T}=-550":[132],"\\mu":[133],"\\mathbf{V}":[134],"/{":[135],"}^{\\circ}":[136],"\\mathrm{C}$</tex>":[137],"final":[139],"device":[141],"expected":[143],"have":[145],"an":[146],"enhanced":[147],"thermoelectric":[148],"conversion":[149],"efficiency":[150],"due":[151],"molding":[154],"injection":[155],"which":[156],"will":[157],"optimize":[158],"across":[162],"thermocouples":[164],"minimizing":[165],"thermal":[166],"leakage.":[167]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2023-11-29T00:00:00"}