{"id":"https://openalex.org/W4389101847","doi":"https://doi.org/10.1109/sensors56945.2023.10324992","title":"Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes","display_name":"Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes","publication_year":2023,"publication_date":"2023-10-29","ids":{"openalex":"https://openalex.org/W4389101847","doi":"https://doi.org/10.1109/sensors56945.2023.10324992"},"language":"en","primary_location":{"id":"doi:10.1109/sensors56945.2023.10324992","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10324992","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5054944188","display_name":"Kei Masunishi","orcid":null},"institutions":[{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kei Masunishi","raw_affiliation_strings":["Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan","institution_ids":["https://openalex.org/I1292669757"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036552024","display_name":"Etsuji Ogawa","orcid":null},"institutions":[{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Etsuji Ogawa","raw_affiliation_strings":["Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan","institution_ids":["https://openalex.org/I1292669757"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052250469","display_name":"Daiki Ono","orcid":null},"institutions":[{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Daiki Ono","raw_affiliation_strings":["Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan","institution_ids":["https://openalex.org/I1292669757"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090414347","display_name":"Fumito Miyazaki","orcid":null},"institutions":[{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Fumito Miyazaki","raw_affiliation_strings":["Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan","institution_ids":["https://openalex.org/I1292669757"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082741088","display_name":"Kengo Uchida","orcid":null},"institutions":[{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kengo Uchida","raw_affiliation_strings":["Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan","institution_ids":["https://openalex.org/I1292669757"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061140823","display_name":"Jumpei Ogawa","orcid":null},"institutions":[{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Jumpei Ogawa","raw_affiliation_strings":["Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan","institution_ids":["https://openalex.org/I1292669757"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070540906","display_name":"Hideaki Murase","orcid":null},"institutions":[{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hideaki Murase","raw_affiliation_strings":["Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan","institution_ids":["https://openalex.org/I1292669757"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058132845","display_name":"Fumitaka Ishibashi","orcid":null},"institutions":[{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Fumitaka Ishibashi","raw_affiliation_strings":["Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan","institution_ids":["https://openalex.org/I1292669757"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103631818","display_name":"Yasushi Tomizawa","orcid":null},"institutions":[{"id":"https://openalex.org/I1292669757","display_name":"Toshiba (Japan)","ror":"https://ror.org/0326v3z14","country_code":"JP","type":"company","lineage":["https://openalex.org/I1292669757"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yasushi Tomizawa","raw_affiliation_strings":["Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Toshiba Corporation, Corporate Research & Development Center,Kawasaki,Japan","institution_ids":["https://openalex.org/I1292669757"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2454,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.54721565,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7974608540534973},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.794152021408081},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.664340615272522},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.6534401178359985},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.6250811815261841},{"id":"https://openalex.org/keywords/mode","display_name":"Mode (computer interface)","score":0.5803892016410828},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.5516310334205627},{"id":"https://openalex.org/keywords/range","display_name":"Range (aeronautics)","score":0.49698665738105774},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4542369246482849},{"id":"https://openalex.org/keywords/dynamic-range","display_name":"Dynamic range","score":0.4534012973308563},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4457550048828125},{"id":"https://openalex.org/keywords/differential","display_name":"Differential (mechanical device)","score":0.44410043954849243},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.4363330602645874},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3313392400741577},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2808946371078491},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.17466530203819275},{"id":"https://openalex.org/keywords/atomic-physics","display_name":"Atomic physics","score":0.12085109949111938}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7974608540534973},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.794152021408081},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.664340615272522},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.6534401178359985},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.6250811815261841},{"id":"https://openalex.org/C48677424","wikidata":"https://www.wikidata.org/wiki/Q6888088","display_name":"Mode (computer interface)","level":2,"score":0.5803892016410828},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.5516310334205627},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.49698665738105774},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4542369246482849},{"id":"https://openalex.org/C87133666","wikidata":"https://www.wikidata.org/wiki/Q1161699","display_name":"Dynamic range","level":2,"score":0.4534012973308563},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4457550048828125},{"id":"https://openalex.org/C93226319","wikidata":"https://www.wikidata.org/wiki/Q193137","display_name":"Differential (mechanical device)","level":2,"score":0.44410043954849243},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4363330602645874},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3313392400741577},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2808946371078491},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.17466530203819275},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.12085109949111938},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors56945.2023.10324992","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors56945.2023.10324992","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6600000262260437}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W2291861740","https://openalex.org/W2319570990","https://openalex.org/W2592121206","https://openalex.org/W2936652075","https://openalex.org/W4211118736","https://openalex.org/W4211255104","https://openalex.org/W6850328038"],"related_works":["https://openalex.org/W2765080098","https://openalex.org/W2385749422","https://openalex.org/W2272290532","https://openalex.org/W4384517610","https://openalex.org/W3161496874","https://openalex.org/W4288389100","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W1902800522","https://openalex.org/W2339469482"],"abstract_inverted_index":{"This":[0,129],"paper":[1],"presents":[2],"a":[3,15,92,141],"wide-dynamic-range":[4],"(DR)":[5],"MEMS":[6,12],"differential":[7],"resonant":[8,32,42,54,72],"accelerometer":[9],"(DRA).":[10],"Conventional":[11],"DRAs":[13],"have":[14],"structure":[16,115],"in":[17,99,106,117],"which":[18],"T-shaped":[19,108,127],"electrodes":[20,109],"are":[21,74],"placed":[22],"symmetrically":[23],"at":[24],"the":[25,35,40,53,62,67,79,84,102,107,114,122,125,131,135],"positions":[26],"of":[27,30,56,70,86,104,124,144],"maximum":[28],"displacement":[29],"two":[31,41,126],"beams.":[33],"Therefore,":[34,98],"resonance":[36,68],"frequency":[37,55],"difference":[38],"between":[39],"beams":[43],"is":[44,51,110],"caused":[45],"by":[46],"manufacturing":[47],"errors.":[48],"When":[49,66],"acceleration":[50],"applied,":[52],"each":[57,71,77],"mode":[58,73,87],"fluctuates":[59,81],"according":[60],"to":[61,76,83,112,119,134,146],"scale":[63],"factor":[64],"(SF).":[65],"frequencies":[69],"close":[75],"other,":[78],"SF":[80],"due":[82],"effect":[85],"localization,":[88],"and":[89],"this":[90,100],"causes":[91],"problem":[93],"that":[94],"prevents":[95],"accurate":[96],"measurement.":[97],"study,":[101],"number":[103],"holes":[105],"changed":[111],"make":[113],"asymmetric":[116],"order":[118],"intentionally":[120],"differentiate":[121],"mass":[123],"electrodes.":[128],"widens":[130],"DR":[132,143],"compared":[133],"conventional":[136],"method,":[137],"enabling":[138],"measurements":[139],"with":[140],"wide":[142],"+40G":[145],"\u221240G.":[147]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}