{"id":"https://openalex.org/W4310880243","doi":"https://doi.org/10.1109/sensors52175.2022.9967353","title":"Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor","display_name":"Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor","publication_year":2022,"publication_date":"2022-10-30","ids":{"openalex":"https://openalex.org/W4310880243","doi":"https://doi.org/10.1109/sensors52175.2022.9967353"},"language":"en","primary_location":{"id":"doi:10.1109/sensors52175.2022.9967353","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors52175.2022.9967353","pdf_url":null,"source":{"id":"https://openalex.org/S4363604906","display_name":"2022 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Sensors","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://hdl.handle.net/10072/420518","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036543001","display_name":"Braiden Tong","orcid":"https://orcid.org/0000-0002-7548-2521"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Braiden Tong","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077288036","display_name":"Hong-Quan Nguyen","orcid":"https://orcid.org/0000-0002-7623-3973"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Hong-Quan Nguyen","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Tuan-Hung Nguyen","orcid":null},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Tuan-Hung Nguyen","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043852771","display_name":"Tuan\u2010Khoa Nguyen","orcid":"https://orcid.org/0000-0003-1271-9576"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Tuan-Khoa Nguyen","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Viet Thanh Nguyen","orcid":null},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]},{"id":"https://openalex.org/I185523456","display_name":"University of Southern Queensland","ror":"https://ror.org/04sjbnx57","country_code":"AU","type":"education","lineage":["https://openalex.org/I185523456"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Viet Thanh Nguyen","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","School of Engineering, University of Southern Queensland, Queensland, AUSTRALIA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"School of Engineering, University of Southern Queensland, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I185523456"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040091554","display_name":"Toan Dinh","orcid":"https://orcid.org/0000-0002-7489-9640"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]},{"id":"https://openalex.org/I185523456","display_name":"University of Southern Queensland","ror":"https://ror.org/04sjbnx57","country_code":"AU","type":"education","lineage":["https://openalex.org/I185523456"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Toan Dinh","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","School of Engineering, University of Southern Queensland, Queensland, AUSTRALIA","Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"School of Engineering, University of Southern Queensland, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I185523456"]},{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068059108","display_name":"Trung-Hieu Vu","orcid":"https://orcid.org/0000-0003-4431-1874"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Trung-Hieu Vu","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066458315","display_name":"Van Thanh Dau","orcid":"https://orcid.org/0000-0002-8242-9884"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Van Thanh Dau","raw_affiliation_strings":["School of Engineering and Built Environment, Griffith University,Queensland,AUSTRALIA","School of Engineering and Built Environment, Griffith University, Queensland, AUSTRALIA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Engineering and Built Environment, Griffith University,Queensland,AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"School of Engineering and Built Environment, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064713378","display_name":"Dzung Viet Dao","orcid":"https://orcid.org/0000-0002-6348-0879"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Dzung Viet Dao","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","School of Engineering and Built Environment, Griffith University, Queensland, AUSTRALIA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University,Queensland,AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]},{"raw_affiliation_string":"School of Engineering and Built Environment, Griffith University, Queensland, AUSTRALIA","institution_ids":["https://openalex.org/I11701301"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6379,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.60258545,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7821083068847656},{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.7459104061126709},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6512337923049927},{"id":"https://openalex.org/keywords/stress","display_name":"Stress (linguistics)","score":0.6184762120246887},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.5134385824203491},{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.5083760619163513},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5037450194358826},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.4751441478729248},{"id":"https://openalex.org/keywords/heterojunction","display_name":"Heterojunction","score":0.4124298691749573},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3188595175743103},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.2034754455089569},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.1981770098209381},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.17093288898468018},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14805078506469727}],"concepts":[{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7821083068847656},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.7459104061126709},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6512337923049927},{"id":"https://openalex.org/C21036866","wikidata":"https://www.wikidata.org/wiki/Q181767","display_name":"Stress (linguistics)","level":2,"score":0.6184762120246887},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.5134385824203491},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5083760619163513},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5037450194358826},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.4751441478729248},{"id":"https://openalex.org/C79794668","wikidata":"https://www.wikidata.org/wiki/Q1616270","display_name":"Heterojunction","level":2,"score":0.4124298691749573},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3188595175743103},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.2034754455089569},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.1981770098209381},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.17093288898468018},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14805078506469727},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors52175.2022.9967353","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors52175.2022.9967353","pdf_url":null,"source":{"id":"https://openalex.org/S4363604906","display_name":"2022 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Sensors","raw_type":"proceedings-article"},{"id":"pmh:oai:research-repository.griffith.edu.au:10072/420518","is_oa":true,"landing_page_url":"http://hdl.handle.net/10072/420518","pdf_url":null,"source":{"id":"https://openalex.org/S4306402548","display_name":"Griffith Research Online (Griffith University, Queensland, Australia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I11701301","host_organization_name":"Griffith University","host_organization_lineage":["https://openalex.org/I11701301"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference output"}],"best_oa_location":{"id":"pmh:oai:research-repository.griffith.edu.au:10072/420518","is_oa":true,"landing_page_url":"http://hdl.handle.net/10072/420518","pdf_url":null,"source":{"id":"https://openalex.org/S4306402548","display_name":"Griffith Research Online (Griffith University, Queensland, Australia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I11701301","host_organization_name":"Griffith University","host_organization_lineage":["https://openalex.org/I11701301"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference output"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W1974184470","https://openalex.org/W1989491796","https://openalex.org/W2053397650","https://openalex.org/W2056363445","https://openalex.org/W2063124155","https://openalex.org/W2092875971","https://openalex.org/W2110014151","https://openalex.org/W2115489808","https://openalex.org/W2120343285","https://openalex.org/W2130208786","https://openalex.org/W2148390829","https://openalex.org/W2178269323","https://openalex.org/W2313864004","https://openalex.org/W2751004640","https://openalex.org/W2809438133","https://openalex.org/W2824924836","https://openalex.org/W2888085944","https://openalex.org/W3010476322","https://openalex.org/W3040344637","https://openalex.org/W3172673378","https://openalex.org/W3172928937","https://openalex.org/W3173721298","https://openalex.org/W4213109842","https://openalex.org/W4220969378","https://openalex.org/W4281963871"],"related_works":["https://openalex.org/W4231551819","https://openalex.org/W2089076881","https://openalex.org/W2576957273","https://openalex.org/W99992490","https://openalex.org/W2890232104","https://openalex.org/W2378386980","https://openalex.org/W2443919171","https://openalex.org/W4319718036","https://openalex.org/W2904406414","https://openalex.org/W4388609455"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"an":[3],"innovative":[4],"stress":[5],"amplification":[6],"approach":[7],"for":[8],"enhancing":[9],"the":[10,24,34,70,87],"sensitivity":[11,56,65],"of":[12,19,57],"piezoresistive":[13],"pressure":[14],"sensors.":[15],"The":[16,37,64],"structure":[17],"consists":[18],"two":[20],"pillars":[21],"raised":[22],"from":[23],"membrane":[25,94],"supporting":[26],"a":[27,43,54,92],"released":[28],"3C-SiC":[29],"micro-beam":[30],"which":[31],"acts":[32],"as":[33],"sensing":[35],"element.":[36],"proposed":[38],"design":[39],"was":[40,67],"demonstrated":[41],"using":[42],"3C-SiC/Si":[44],"heterostructure.":[45],"Experimental":[46],"results":[47],"found":[48],"our":[49,75,84],"device":[50,85],"highly":[51],"sensitive,":[52],"with":[53],"high":[55],"0.1328":[58],"kPa":[59],"<sup":[60],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[61],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">\u22121</sup>":[62],".":[63],"improvement":[66],"attributed":[68],"to":[69],"stress-amplification":[71],"phenomenon":[72],"observed":[73],"in":[74],"free-standing":[76],"structure.":[77,95],"Analytical":[78],"and":[79],"numerical":[80],"methods":[81],"confirmed":[82],"that":[83],"increases":[86],"stress/sensitivity":[88],"by":[89],"750%":[90],"over":[91],"traditional":[93]},"counts_by_year":[{"year":2024,"cited_by_count":2}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}