{"id":"https://openalex.org/W4311413352","doi":"https://doi.org/10.1109/sensors52175.2022.9967301","title":"Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides","display_name":"Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides","publication_year":2022,"publication_date":"2022-10-30","ids":{"openalex":"https://openalex.org/W4311413352","doi":"https://doi.org/10.1109/sensors52175.2022.9967301"},"language":"en","primary_location":{"id":"doi:10.1109/sensors52175.2022.9967301","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors52175.2022.9967301","pdf_url":null,"source":{"id":"https://openalex.org/S4363604906","display_name":"2022 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Sensors","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5021350285","display_name":"Seyedfakhreddin Nabavi","orcid":"https://orcid.org/0000-0002-5419-0829"},"institutions":[{"id":"https://openalex.org/I9736820","display_name":"\u00c9cole de Technologie Sup\u00e9rieure","ror":"https://ror.org/0020snb74","country_code":"CA","type":"education","lineage":["https://openalex.org/I49663120","https://openalex.org/I9736820"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Seyedfakhreddin Nabavi","raw_affiliation_strings":["Ecole de technologie superieure (ETS),Department of Electrical Engineering,Montréal,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ecole de technologie superieure (ETS),Department of Electrical Engineering,Montréal,Canada","institution_ids":["https://openalex.org/I9736820"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016083141","display_name":"Micha\u00ebl M\u00e9nard","orcid":"https://orcid.org/0000-0002-0947-0258"},"institutions":[{"id":"https://openalex.org/I9736820","display_name":"\u00c9cole de Technologie Sup\u00e9rieure","ror":"https://ror.org/0020snb74","country_code":"CA","type":"education","lineage":["https://openalex.org/I49663120","https://openalex.org/I9736820"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Michael Menard","raw_affiliation_strings":["Ecole de technologie superieure (ETS),Department of Electrical Engineering,Montréal,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ecole de technologie superieure (ETS),Department of Electrical Engineering,Montréal,Canada","institution_ids":["https://openalex.org/I9736820"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5058919102","display_name":"Fr\u00e9d\u00e9ric Nabki","orcid":"https://orcid.org/0000-0002-2281-7172"},"institutions":[{"id":"https://openalex.org/I9736820","display_name":"\u00c9cole de Technologie Sup\u00e9rieure","ror":"https://ror.org/0020snb74","country_code":"CA","type":"education","lineage":["https://openalex.org/I49663120","https://openalex.org/I9736820"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Frederic Nabki","raw_affiliation_strings":["Ecole de technologie superieure (ETS),Department of Electrical Engineering,Montréal,Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ecole de technologie superieure (ETS),Department of Electrical Engineering,Montréal,Canada","institution_ids":["https://openalex.org/I9736820"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I9736820"],"apc_list":null,"apc_paid":null,"fwci":1.652,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.83013953,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/waveguide","display_name":"Waveguide","score":0.6663877964019775},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"Silicon nitride","score":0.619903028011322},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.5948013663291931},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5510556697845459},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5331292152404785},{"id":"https://openalex.org/keywords/enhanced-data-rates-for-gsm-evolution","display_name":"Enhanced Data Rates for GSM Evolution","score":0.4729195237159729},{"id":"https://openalex.org/keywords/excitation","display_name":"Excitation","score":0.46360695362091064},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.42695146799087524},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4245935082435608},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.4207504391670227},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.401324599981308},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.336467981338501},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2664133906364441},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.13924986124038696}],"concepts":[{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.6663877964019775},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.619903028011322},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.5948013663291931},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5510556697845459},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5331292152404785},{"id":"https://openalex.org/C162307627","wikidata":"https://www.wikidata.org/wiki/Q204833","display_name":"Enhanced Data Rates for GSM Evolution","level":2,"score":0.4729195237159729},{"id":"https://openalex.org/C83581075","wikidata":"https://www.wikidata.org/wiki/Q1361503","display_name":"Excitation","level":2,"score":0.46360695362091064},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.42695146799087524},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4245935082435608},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.4207504391670227},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.401324599981308},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.336467981338501},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2664133906364441},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.13924986124038696},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/sensors52175.2022.9967301","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors52175.2022.9967301","pdf_url":null,"source":{"id":"https://openalex.org/S4363604906","display_name":"2022 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Sensors","raw_type":"proceedings-article"},{"id":"pmh:oai:espace2.etsmtl.ca:26089","is_oa":false,"landing_page_url":"https://espace2.etsmtl.ca/id/eprint/26089/","pdf_url":null,"source":{"id":"https://openalex.org/S4306402392","display_name":"Espace \u00c9TS (ETS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1341030882","host_organization_name":"Educational Testing Service","host_organization_lineage":["https://openalex.org/I1341030882"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Compte rendu de conf\u00e9rence"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320334593","display_name":"Natural Sciences and Engineering Research Council of Canada","ror":"https://ror.org/01h531d29"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1990200961","https://openalex.org/W2063118130","https://openalex.org/W2088291198","https://openalex.org/W2129680722","https://openalex.org/W2605844474","https://openalex.org/W2884827139","https://openalex.org/W2908168600","https://openalex.org/W2923927581","https://openalex.org/W2956148226","https://openalex.org/W2970749303","https://openalex.org/W4200227924","https://openalex.org/W4286377385"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1763916368","https://openalex.org/W2391127530","https://openalex.org/W2045074154","https://openalex.org/W2393343784","https://openalex.org/W1974353171","https://openalex.org/W2382708890","https://openalex.org/W3041936564"],"abstract_inverted_index":{"This":[0],"work":[1],"proposes":[2],"an":[3,135],"electrostatic":[4],"MEMS":[5],"aligner":[6,59,83,97],"with":[7,119],"the":[8,45,55,58,66,69,73,82,96,100,128,141],"capability":[9],"of":[10,40,57,72,81,137,144],"integrating":[11],"optical":[12,129],"waveguides":[13],"onto":[14],"its":[15],"suspended":[16],"mechanical":[17],"structure.":[18],"The":[19,79,91],"proposed":[20],"aligner,":[21],"which":[22],"has":[23],"a":[24,38,62,120,126],"structural":[25],"silicon":[26],"layer":[27],"of$59\\":[28],"\\mu":[29,104],"\\mathrm{m}$,":[30],"is":[31,84,117,132],"anchored":[32],"at":[33],"two":[34,106],"distinct":[35],"points":[36],"by":[37,86,134],"series":[39],"low":[41],"stiffness":[42],"beams":[43],"along":[44],"anchors":[46],"axis.":[47],"A":[48],"comb":[49],"drive,":[50],"upon":[51],"excitation,":[52],"can":[53,76,98],"rotate":[54],"edge":[56],"vertically":[60],"toward":[61],"point":[63],"away":[64],"from":[65],"substrate.":[67],"Therefore,":[68],"vertical":[70],"position":[71],"integrated":[74,107],"waveguide":[75],"be":[77],"changed.":[78],"behavior":[80],"studied":[85],"simulation":[87],"and":[88,112],"experimental":[89,92],"measurements.":[90],"results":[93],"indicate":[94],"that":[95],"eliminate":[99],"initial":[101],"misalignment":[102],"of$0.350\\":[103],"\\mathrm{m}$between":[105],"waveguides,":[108],"i.e.,":[109],"one":[110],"fixed":[111],"another":[113],"moveable,":[114],"when":[115],"it":[116],"excited":[118],"90":[121],"V":[122],"DC":[123],"voltage.":[124],"As":[125],"result,":[127],"insertion":[130],"loss":[131],"reduced":[133],"average":[136],"3":[138],"dB":[139],"in":[140],"wavelength":[142],"range":[143],"1575":[145],"nm":[146],"to":[147],"1605":[148],"nm.":[149]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":3}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}