{"id":"https://openalex.org/W4310880275","doi":"https://doi.org/10.1109/sensors52175.2022.9967063","title":"Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor","display_name":"Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor","publication_year":2022,"publication_date":"2022-10-30","ids":{"openalex":"https://openalex.org/W4310880275","doi":"https://doi.org/10.1109/sensors52175.2022.9967063"},"language":"en","primary_location":{"id":"doi:10.1109/sensors52175.2022.9967063","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors52175.2022.9967063","pdf_url":null,"source":{"id":"https://openalex.org/S4363604906","display_name":"2022 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Sensors","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5059664718","display_name":"Yul Koh","orcid":"https://orcid.org/0000-0002-1669-5068"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":true,"raw_author_name":"Yul Koh","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070863857","display_name":"Duan Jian Goh","orcid":null},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Duan Jian Goh","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030230432","display_name":"Sagnik Ghosh","orcid":"https://orcid.org/0000-0002-5540-7823"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Sagnik Ghosh","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027130779","display_name":"Han Xuan Wong","orcid":"https://orcid.org/0000-0003-2065-8435"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Han Xuan Wong","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082231812","display_name":"Jaibir Sharma","orcid":"https://orcid.org/0000-0001-5166-0015"},"institutions":[{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Jaibir Sharma","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047533805","display_name":"Amit Lal","orcid":"https://orcid.org/0000-0002-1805-9831"},"institutions":[{"id":"https://openalex.org/I205783295","display_name":"Cornell University","ror":"https://ror.org/05bnh6r87","country_code":"US","type":"education","lineage":["https://openalex.org/I205783295"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]},{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]}],"countries":["SG","US"],"is_corresponding":false,"raw_author_name":"Amit Lal","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore","School of Electrical and Computer Engineering, Cornell University, Ithaca, New York, USA"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"School of Electrical and Computer Engineering, Cornell University, Ithaca, New York, USA","institution_ids":["https://openalex.org/I205783295"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011946331","display_name":"Eldwin J. Ng","orcid":"https://orcid.org/0000-0001-5652-6085"},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Eldwin J. Ng","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100604069","display_name":"Joshua E.-Y. Lee","orcid":"https://orcid.org/0000-0002-1741-1485"},"institutions":[{"id":"https://openalex.org/I4210090209","display_name":"Institute of Microelectronics","ror":"https://ror.org/009rw8n36","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210090209","https://openalex.org/I91275662"]},{"id":"https://openalex.org/I115228651","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09","country_code":"SG","type":"government","lineage":["https://openalex.org/I115228651"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Joshua En-Yuan Lee","raw_affiliation_strings":["Institute of Microelectronics, A*STAR,Singapore","Institute of Microelectronics, A*STAR, Singapore"],"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, A*STAR,Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]},{"raw_affiliation_string":"Institute of Microelectronics, A*STAR, Singapore","institution_ids":["https://openalex.org/I4210090209","https://openalex.org/I115228651"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5059664718"],"corresponding_institution_ids":["https://openalex.org/I115228651","https://openalex.org/I4210090209"],"apc_list":null,"apc_paid":null,"fwci":0.6438,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.6047814,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":96},"biblio":{"volume":"2","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.9079898595809937},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6449476480484009},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.500002384185791},{"id":"https://openalex.org/keywords/wake","display_name":"Wake","score":0.461703360080719},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.46081608533859253},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.4363982677459717},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.4009600877761841},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.35930728912353516},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.33193767070770264},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.32600104808807373},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.27400654554367065},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.20803594589233398},{"id":"https://openalex.org/keywords/classical-mechanics","display_name":"Classical mechanics","score":0.06386053562164307}],"concepts":[{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.9079898595809937},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6449476480484009},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.500002384185791},{"id":"https://openalex.org/C48939323","wikidata":"https://www.wikidata.org/wiki/Q294879","display_name":"Wake","level":2,"score":0.461703360080719},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.46081608533859253},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.4363982677459717},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4009600877761841},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.35930728912353516},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.33193767070770264},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.32600104808807373},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.27400654554367065},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.20803594589233398},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.06386053562164307},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/sensors52175.2022.9967063","is_oa":false,"landing_page_url":"https://doi.org/10.1109/sensors52175.2022.9967063","pdf_url":null,"source":{"id":"https://openalex.org/S4363604906","display_name":"2022 IEEE Sensors","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE Sensors","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8799999952316284}],"awards":[{"id":"https://openalex.org/G8891572067","display_name":null,"funder_award_id":"A18A4b0055","funder_id":"https://openalex.org/F4320320696","funder_display_name":"Agency for Science, Technology and Research"}],"funders":[{"id":"https://openalex.org/F4320320696","display_name":"Agency for Science, Technology and Research","ror":"https://ror.org/036wvzt09"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W1988443983","https://openalex.org/W2049756870","https://openalex.org/W2097036133","https://openalex.org/W2104317052","https://openalex.org/W2591585737","https://openalex.org/W2731357910","https://openalex.org/W2763473407","https://openalex.org/W2890772379","https://openalex.org/W2993035344","https://openalex.org/W3005060379"],"related_works":["https://openalex.org/W2757285599","https://openalex.org/W2376025146","https://openalex.org/W161151693","https://openalex.org/W2272290532","https://openalex.org/W2955635855","https://openalex.org/W3195741387","https://openalex.org/W2883444180","https://openalex.org/W4381570180","https://openalex.org/W4324257240","https://openalex.org/W2982339817"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"a":[3,26,31,34,47,59,64,82],"MEMS":[4],"torsional":[5,21],"mode":[6,22],"acceleration":[7,36,56,61,76],"switch":[8,32,49,57,77],"is":[9,68],"proposed":[10,75],"for":[11,25,85],"the":[12,55],"detection":[13],"of":[14,18,54],"moderately":[15],"low":[16],"levels":[17],"acceleration.":[19],"The":[20,74],"structure":[23],"provides":[24],"large":[27],"displacement":[28],"to":[29,45,70],"close":[30],"with":[33,63],"lower":[35],"threshold.":[37],"A":[38],"nano-gap":[39],"vertical":[40],"TiN":[41],"contact":[42,65],"was":[43],"introduced":[44],"implement":[46],"stable":[48],"contact.":[50],"We":[51],"demonstrate":[52],"activation":[53],"by":[58],"15g":[60],"input":[62],"time":[66],"that":[67],"sufficient":[69],"trigger":[71],"electric":[72],"circuitry.":[73],"can":[78],"be":[79],"used":[80],"as":[81],"wake-up":[83],"sensor":[84],"zero-power":[86],"Internet-of-Things":[87],"nodes.":[88]},"counts_by_year":[{"year":2023,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}